JPH1076491A - Plate delivery system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To positively deliver plates to a vertical type plate stage having a vertical plate-storage surface without dropping or damaging the plates. SOLUTION: The plate delivery system is composed of a robot hand 50 capable of transporting a plate in a state where it is held in nearly vertical position, and a plate stage 70 provided with a means which softly touches the plate 10 vertically supported on a plate-storage surface 71 to suck it on the plate-storage surface. The robot hand supports the lower end face of the plate and holds the side edge parts of the plate to support the plate in nearly vertical position. The plate stage is provided with plate supporting members 73a to 73d which are projected in the direction perpendicular to the plate-storage surface to contact the end faces of the plate to support it, and a sucking member 84 having the springy property capable of sucking the back of the plate to move the plate in the direction perpendicular to the plate-storage surface.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system for transferring a sample such as a plate, and more particularly to a system for transferring a plate in a liquid crystal substrate manufacturing apparatus.

[0002]

2. Description of the Related Art An apparatus for manufacturing a semiconductor device or a liquid crystal display device, for example, a pattern exposure apparatus used in a lithography process has a transport system for transporting a thin substrate (hereinafter, referred to as a plate) such as a semiconductor wafer or a glass plate. Plates are transferred between apparatuses or at various parts within the apparatus via the transport system. Conventionally, the plate mounting surface of an exposure apparatus, an inspection apparatus, and the like is horizontal, and the plate transport system also mainly transports the plate in a horizontal posture and transfers the plate to the plate mounting surface of the apparatus in the horizontal posture. .

FIG. 6 shows an operation of transferring a plate to a horizontal stage of an exposure apparatus or an inspection apparatus by a conventional plate transfer system in order to perform a surface treatment on the plate by an exposure process or a microscope. I have. As shown in FIG. 6, a conventional plate delivery system includes a horizontal stage 100 having a horizontal plate mounting surface 101, a robot hand 110 capable of slidably moving uniaxially, and a plate mounting surface built in the horizontal stage 100. Support pin 103 that can move up and down with respect to 101
a to 103d.

The plate mounting surface 10 of the horizontal stage 100
When the plate 120 is to be delivered to the first stage, the plate 120 is first placed on the robot hand 110 which can slide horizontally and uniaxially, and is positioned above the horizontal stage 100. Next, the support pins 103a to 103d are raised to receive the plate 120 from the robot hand 110 onto the support pins 103a to 103d. Thereafter, the robot hand 110 is retracted from above the horizontal stage 100, and the support pins 103a to 103d are lowered to receive the plate 120 on the plate mounting surface 101 of the horizontal stage 100.

When transferring the plate 120 on the horizontal stage 100 to the robot hand 110, the above operation is repeated in reverse. That is, first, the support pins 103a to 103a to
The plate 1 is lifted above the plate mounting surface 101 by raising 3d. Then, the plate 1 and the plate mounting surface 1
01, the support pins 103a to 103d are lowered, and the robot hand 11
Hand plate 1 over 0.

[0006]

As the size of a liquid crystal display device increases, the size of a mask and a plate for manufacturing the liquid crystal display device also increase. When a large mask is held horizontally, the mask bends under its own weight. Therefore, in the exposure apparatus using the horizontal stage, there is a problem that the pattern transfer accuracy is deteriorated due to the bending. Therefore, a vertical stage has been devised in which the mask and the plate mounting surface are vertical so that the mask and the plate can be held vertically.

When a stage to which a plate is to be delivered is rigid, a delivery system using a conventional slidable robot and a vertically movable support pin is simply applied to a vertical stage. The plate drops during the transfer operation. Although a stopper can be provided to prevent the plate from falling, there is a problem that particles are generated due to friction between the stopper and the edge of the plate.

The plate mounted on the plate mounting surface of the plate stage is fixed by vacuum suction to the mounting surface. In order to vacuum-adsorb the plate to the plate mounting surface, the plate mounting surface and the plate need to be in close contact to some extent. In the case of the conventional horizontal holding, even if a certain amount of warpage occurs in the plate due to a process treatment or the like, the plate follows the upper surface of the stage by its own weight, so that it is possible to hold the plate by vacuum suction. However, when the plate is held vertically on a vertical stage, the plate plane is not corrected by its own weight and is transferred onto the plate mounting surface of the stage with relatively large warpage. There is a high possibility that vacuum suction cannot be performed.

The present invention has been made in view of such problems, and when a plate is transferred to a vertical plate stage having a vertical plate mounting surface, the plate is dropped or damaged. It is an object of the present invention to realize a plate delivery system capable of preventing generation of particles due to rubbing as much as possible without causing rubbing. Another object of the present invention is to provide a plate delivery system that can reliably vacuum-suck a delivered plate.

[0010]

According to the present invention, there is provided a robot hand capable of holding and transporting a plate in a substantially vertical state, and a plate mounting by soft touching a plate vertically supported on a plate mounting surface. The above object is achieved by configuring a plate delivery system including a plate stage having a suction unit on a placement surface.

That is, the present invention includes a plate stage (70) having a substantially vertical plate mounting surface (71) and a plate transfer means, and the plate mounting surface (71) of the plate stage (70) and the plate transfer device. In a plate delivery system for delivering a plate (10) to and from a means, the transport means supports a lower end surface of the plate, sandwiches a side edge of the plate, and holds the plate in a substantially vertical state. 50) and the robot hand (5
0) to the plate mounting surface (7) of the plate stage (70).
Driving means (30, 30) for driving to a delivery position adjacent to 1)
40), and the plate stage (70) projects in a direction perpendicular to the plate mounting surface (71), and comes into contact with an end surface of the plate to support the plate.
a to 73d), and a suction member (84) having a spring property capable of adsorbing the back surface of the plate and moving in a direction perpendicular to the plate mounting surface.

The spring property of the suction member (84) can be imparted by connecting the suction member (84) and a driving section (82) for driving the suction member by an elastic member (87) such as a bellows or a spring. . Plate support members (73a-7
3d) is slidable in a direction perpendicular to the plate mounting surface (71) while being in contact with the lower end surface of the plate (10).

The robot hand (50) has a plate (1).
1) (52a, 5)
2b, 62a, 62b) and a second member (51a, 51b, 61a, 61) for contacting and holding the surface edge of the plate.
b), and a driving unit (53) for driving the second member in a direction away from or approaching the first member, wherein the second member has a lower part in a direction parallel to the moving direction of the driving unit. A slidable plate support member may be provided.

More specifically, referring to the drawings,
As shown in FIG. 1, the robot hand 50 that transports the plate 10 includes an X-axis drive unit 30 that can move a long stroke in the X direction and a Y-axis drive unit 4 that can move a long stroke in the Y direction.
With 0, movement in two axes in the X direction and the Y direction is possible.

The robot hand 50 has four arms 51
a, 51b, 52a, and 52b, of which two arms 51a and 51b can move in a short stroke in the Z direction. As shown in FIG. 2, the plate 10 has four corners made of pads 61a, 61b,... Made of a material having good slip properties such as Teflon provided on four arms 51a, 51b, 52a, 52b. 62c and 62d.

At the lower part of the arms 51a and 51b, there are provided cylindrical movable rollers 55a and 55b slidable in the Z direction. The lower end of the plate 10 is supported on the cylindrical surfaces of the movable rollers 55a and 55b. The movable roller 55a,
55b is movable in the Z direction while being in contact with the plate 10.

On the other hand, around the plate mounting surface 71 of the stage 70 on the side where the plate 10 is transferred, movable rollers 73a, 73 for preventing the plate 1 from dropping when receiving the plate 1 from the robot hand 2. 73b, 73c,
73d is provided. These movable rollers 73a, 73
b, 73c, and 73d each have a short-stroke drive unit capable of pressing three sides except the upper side of the plate 10 toward the center of the plate mounting surface 71, and the plate 10 has moved a short stroke in the Z direction. Even if the plate 10
And can be slid while being in contact with the end surface of the.

In the stage 70, there are movable rollers 73a, 73b, 73c, 7 in the robot hand 50.
The plate 10 supported by 3d is placed on a plate stage 70
A center-up mechanism 80 that draws the plate to the plate mounting surface 71 is provided. This center-up mechanism 80
As shown in FIG. 3, it is slidable in the Z direction, and as shown in FIG. The ball bush 83 can be used.

The plate delivery system according to the present invention comprises:
The holding method of the plate 10 by the robot hand 50
Since the corners are sandwiched and the lower ends are supported, reliable transport can be performed. In addition, since the members 55a, 55b, 73a to 73d that are in contact with the end face of the plate 10 are all slidable while being in contact with the plate 10, rubbing during the transfer operation is suppressed as much as possible, and the possibility of particle generation is reduced. can do.

The tip of a center-up mechanism 80 that draws the plate 10 from the robot hand 50 to the plate mounting surface 71 of the stage 70 is attached to the bellows 8 having spring properties.
7 and the like, so that the suction pad 84 can be in soft contact with the back surface of the plate 10 even when the plate 10 is coated with a photosensitive material or the like and the warpage is increased. Since the plate 10 can be drawn to the plate mounting surface 71, vacuum suction can be reliably performed. The plate delivery system of the present invention can be used for an exposure apparatus that transfers a pattern to a plate coated with a photosensitive agent.

[0021]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an overall view showing an example of a plate delivery system according to the present invention.
1 schematically illustrates an erecting mechanism 20 for erecting the plate 10 from a horizontal state to a vertical state, a robot hand 50 for transporting the plate 10, and a plate stage 70 for holding the plate 10 on the plate mounting surface 71.

The robot hand 50 is capable of biaxial movement in the X and Y directions by an X-axis drive unit 30 that can move a long stroke in the X direction and a Y-axis drive unit 40 that can move a long stroke in the Y direction. It is possible. X-axis drive unit 30
Can be constituted by, for example, a lead screw rotated by a motor, and the robot hand 50 moves in the X-axis direction by rotating the lead screw. Y axis drive unit 40
Moves the arm support portion 53 of the robot hand 50 in the Y direction by a lead screw (not shown) or the like.

The arm support 53 has four arms 51.
a, 51b, 52a, and 52b are attached, and the arms 51a and 51b suction-hold the surface of the plate 10 by suction pads 61a, 61b,. , 52b hold the back surface of the plate 10 by suction using suction pads 62a, 62b, 62c, 62d. Also, the arms 51a, 5
1b is movable in the Z direction by an air cylinder or the like provided on the arm support portion 53. Pads 61a, 61,
{62a, 62b,} are made of a slippery material such as Teflon, and all pads may be suction pads capable of vacuum suction, or pads 61a, 61b,. Even if only ‥ is used as the suction pad, the pads 62a and 62
Only b and ‥‥ may be used as suction pads.

For example, after the surface of the plate 1 is coated with a resist by a resist coater, the plate 1 is loaded in a horizontal state.
0 is carried onto the upright mechanism 20. The erecting mechanism 20
It has pins 23a and 23b for plate positioning and a vacuum suction hole 24, and is rotatable around a shaft 22. The plate 10 conveyed onto the erecting mechanism 20 at the horizontal position is positioned by bringing the ends thereof into contact with the pins 23a and 23b, and then held by vacuum suction by a vacuum exhaust device (not shown) communicating with the vacuum suction hole 24. Is done. Thereafter, the plate 10 is erected by rotating the erecting mechanism 20 around the shaft 22 by 90 °, and stands by in a vertical state.

Thereafter, the robot hand 50 is moved by the X-axis drive unit 30 to the upright mechanism 20 side. At this time, the arms 51a and 51b of the robot hand 50 are moved in the + Z direction from the arm support 53, and the robot hand 50 is in an open state.

The robot hand 50 that has reached the position above the erecting mechanism 20 is moved downward by the Y-axis drive unit 40 and moves to a height at which the plate 10 can be received. At this time, the arms 52a, 52b are located on the back side of the plate 10, and the arms 51a, 51b are located on the front side of the plate 10, and the arms 51a, 51b and the arms 52a, 52b
Thus, the plate 10 is sandwiched from both sides. However, in this state, the lower end of the plate 10 is not yet supported on the movable rollers 55a and 55b of the arms 51a and 51b.

Next, the arms 51a and 51b are moved in the -Z direction to close the robot hand 50, and the plate 10 and the pads 61a, 61b,..., 62c and 62d on the arms 51a, 51b, 52a and 52b. With the small gap of several millimeters between them, the plate 10 is once raised by the drive of the Y-axis drive unit 40, and the plate 10 is moved from the erecting mechanism 20 to the movable rollers 55a, 55b below the arms 51a, 51b.
Receive on top. Further, the robot hand 50 is raised in the Y direction by the Y-axis driving unit 40, and the arms 51a and 51b are further moved in the -Z direction at the height completely retracted from the erecting mechanism 20 to close the robot hand. As shown, the plate 10 is connected to the pads 61 of the arms 51a and 51b.
a, 61b,... and the pads 62 of the arms 52a, 52b.
a, 62b,.

Robot hand 5 holding plate 10
0 moves to the plate stage 70 side by the X-axis drive unit 30. Next, the position in the Y direction is adjusted by the Y-axis driving unit 40, and the robot hand 50 reaches the delivery position adjacent to the plate mounting surface 71 of the plate stage 70, that is, the plate 10 held by the robot hand 50. Reaches a position adjacent to the plate mounting surface 71 of the plate stage 70, the arms 51a, 51b
To the plate 10 and the pads 61a, 61b,.
The opening operation is performed until a minute gap is left between the first and the second a.

Next, the movable rollers 73a, 73b, 73c and 73d on the plate stage 70 perform a pressing operation on three sides excluding the upper side of the plate 10, and the plate 10 on the robot arm 50 is moved to the movable rollers 73a and 73d.
b, 73c and 73d. Movable rollers 73a-
73d is movable in the Z direction while keeping the plate 10 in contact.

Next, as shown in FIG. 3, a center-up mechanism 80 projecting from the plate mounting surface 71 of the plate stage 70 is slid in the + Z direction by a center-up driving device 81. Then, when the four suction pads 84 provided at the end of the center-up mechanism 80 come into contact with the plate 10, the suction pad is evacuated by the vacuum exhaust device 76, and the plate 10 is suction-held on the suction pad 84. .

FIG. 4 is a sectional view of the center-up mechanism 80. The suction pad 84 provided at the end of the center-up mechanism 80 is connected to a vacuum exhaust device 76 via a metal pipe 85 and a tube 86. The drive arm 82 of the center-up drive device 81 has a ball bush 8
The ball bush 83 is attached to the pipe 8
5 so as to be slidable in the Z direction. The suction pad 84 is fixed to the ball bush 83 via a member 87 having a spring property, for example, a bellows or a spring.

Therefore, when the drive arm 82 is driven in the Z direction by the center-up drive device 81, this drive force is transmitted to the suction pad 84 via the member 87 having a spring property. At this time, since the four suction pads 84 are in soft contact with the plate 10 by the action of the member 87 having a spring property, the plate 10 is not pressed too hard at the time of contact and is damaged.

When the plate 10 is suction-held at the tip of the center-up mechanism 80 by the suction pad 84, the plate shown in FIG.
As shown in (a), the arm 51 of the robot hand 50
a and 51b perform a full stroke opening operation. Subsequently, as shown in FIG. 5B, the robot hand 50
The shaft drive unit 40 is driven to move up in the + Y direction, and the X-axis drive unit 30 is driven to retreat from the plate stage 70.

The robot hand 50 moves the plate stage 7
When the evacuation from 0 is completed, the center-up drive 81
Slides the center-up mechanism 80 in the -Z direction, draws the plate 10 held by suction on the suction pad 84 to the plate stage 70 and makes it contact the plate mounting surface 71. After that, the vacuum pumping device 76 is driven to evacuate the vacuum suction holes 75 provided on the plate mounting surface 71, so that the plate 10 is placed on the plate mounting surface 71 as shown in FIG. Hold by vacuum suction. Plate 1
When 0 is held by vacuum suction on the plate mounting surface 71, the vacuum of the suction pad 84 of the center-up mechanism 80 is released, the suction head 84 is separated from the plate 10, and the center-up drive unit 81 further drives the head in the -Z direction. And move to the standby position.

Plate mounting surface 7 of plate stage 70
The unloading of the plate 10 held by vacuum suction on 1
This is performed by performing the above operations in reverse. That is, the center-up mechanism 80 at the standby position is moved in the + Z direction, and the suction pad 84 at the tip is brought into contact with the back surface of the plate 10 to suction-hold the plate 10 to the center-up mechanism 80. After that, the vacuum suction holes 7 in the plate mounting surface 71
5 is released, and the center-up mechanism 80 is driven in the + Z direction to slightly separate the plate 10 from the plate mounting surface 71.

The robot hand 50 is lowered to the plate transfer position by driving the Y-axis driving unit 40 such that the arms 52a and 52b are inserted into the gap between the back surface of the plate 10 and the plate mounting surface 71. . Subsequently, pads 61a provided on the arms 51a and 51b,
The arms 51a and 51b are closed until a small gap is formed between the plates 61b and 61 and the plate 10. Next, the vacuum suction of the suction pad 84 of the center-up mechanism 80 is released, the center-up mechanism 80 is moved in the −Z direction and retracted, and the movable rollers 73a, 73b, 73c, and 73d move away from three sides of the plate 10. Perform the operation and plate 1
0 to the movable rollers 73a, 73b, 73 of the stage 70.
The movable roller 55 of the robot hand 50 is obtained from c and 73d.
a, 55b.

The movable rollers 73a, 73b, 73c, 73
After the retraction of d is completed, the arms 51a and 51b are closed again, and the plate 10 is moved between the pads 61a and 61b of the arms 51a and 51b and the pads 62a and 62b of the arms 52a and 52b. The robot hand 50 is raised in the + Y direction by holding and holding and driving the Y-axis drive unit 40.

Subsequently, the robot hand 50 is moved to the upright mechanism 20 by the X-axis drive unit 30. Above the erecting mechanism 20 in the upright position, the robot hand 50 arm 5
1a and 51b perform an opening operation of a very small amount, and then lower by driving the Y-axis driving unit 40, and the erecting mechanism 2
Deliver the plate 10 on 0. When the plate 10 is sucked and held on the erecting mechanism 20 by evacuating the vacuum suction holes 24 of the erecting mechanism 20, the arm 51 of the robot hand 50
a and 51b perform a full stroke opening operation. Next, the robot hand 50 is raised and retracted by the Y-axis drive unit 40, and a series of delivery operations is completed. In the present embodiment, the transport of the plate 10 has been described as an example. However, the present invention is not limited to this, and the present system can be used for transporting a sample such as a mask or a reticle on which a pattern is formed.

[0039]

According to the present invention, since a robot hand having a structure in which the four corners of the plate are sandwiched and the lower end is supported is used, the plate can be reliably transported even in a vertical posture. In addition, the plate stage, which receives the plate from the robot hand, has a guide mechanism capable of linearly reciprocating movement and a center-up mechanism that has a vacuum suction mechanism composed of a spring and can hold the plate by suction. Even a large amount of plate can be reliably held by suction on the plate stage.

[Brief description of the drawings]

FIG. 1 is a perspective view of an example of a plate delivery system according to the present invention.

FIG. 2 is a side view of the robot hand.

FIG. 3 is a side view illustrating a state of delivery between a robot hand and a plate stage.

FIG. 4 is a cross-sectional view of a tip of a center-up mechanism.

FIG. 5 is a diagram illustrating the delivery of a plate to a plate stage.

FIG. 6 is a perspective view illustrating a conventional technique.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Plate, 20 ... Standing-up mechanism, 23a, 23b ... Positioning pin, 24 ... Vacuum suction hole, 30 ... X-axis drive part,
40: Y-axis drive unit, 50: Robot hand, 51a, 5
1b, 52a, 52b: arm, 55a, 55b: movable roller, 61a, 61b: pad, 62a to 62d: pad, 70: plate stage, 71: plate mounting surface, 73a to 73d: movable roller, 75: vacuum suction Hole,
76: Vacuum exhaust device, 80: Center-up mechanism, 81:
Center-up drive device, 82: drive arm, 83: ball bush, 84: suction pad, 85: metal pipe, 8
6 ... tube, 87 ... member having spring properties

Claims (5)

[Claims] 1. A plate delivery system, comprising: a plate stage having a substantially vertical plate placement surface; and a plate transfer means, wherein a plate is transferred between the plate placement surface of the plate stage and the plate transfer means. A transfer unit configured to support a lower end surface of the plate, hold a side edge of the plate, hold the plate in a substantially vertical state, and mount the robot hand on a plate mounting surface of the plate stage. A driving means for driving to a delivery position adjacent to the plate, the plate stage protruding in a direction perpendicular to the plate mounting surface, and contacting an end surface of the plate to support the plate; and a plate support member; Suction member capable of adsorbing the back surface of the plate and moving in the direction perpendicular to the plate mounting surface Plate transfer system comprising: a. 2. The plate delivery system according to claim 1, wherein the spring property is provided by connecting the suction member and a driving unit that drives the suction member with an elastic member. 3. The plate delivery system according to claim 2, wherein said elastic member is a bellows or a spring. 4. The plate according to claim 1, wherein the plate support member is slidable in a direction perpendicular to the plate mounting surface while being in contact with a lower end surface of the plate. Delivery system. 5. The robot hand according to claim 1, wherein the first member is configured to contact and hold a rear edge of the plate, the second member is configured to contact and hold a front edge of the plate, and the second member is formed of the second member. A driving unit for driving the member in a direction away from or in proximity to the first member, and the second member includes a plate supporting member slidable in a direction parallel to a moving direction of the driving unit at a lower portion. The plate delivery system according to any one of claims 1 to 4, wherein