CN219457553U - Conveying device and feeding machine for plate-type PECVD (plasma enhanced chemical vapor deposition) equipment - Google Patents

Abstract

The utility model discloses a carrying device and a loading machine for plate-type PECVD equipment. The handling device is used for transferring the positioned sheet into a carrier, and comprises: a gantry part having a first driving part driven in a first direction; an acquisition section provided on the gantry section and driven by the first driving section to acquire the sheet or transfer the sheet into the carrier, the acquisition section having: the device comprises an adjusting platform and a plurality of adsorption assemblies, wherein the adsorption assemblies are respectively mounted on the adjusting platform, one adsorption assembly can independently adsorb and hold one sheet of sheet, and the adjusting platform can simultaneously adjust the positions of the adsorption assemblies based on the positions of the carriers. The carrying device can be used in a loading machine for a plate PECVD device, and can reduce the cost.

Description

Conveying device and feeding machine for plate-type PECVD (plasma enhanced chemical vapor deposition) equipment

Technical Field

The utility model relates to the technical field of handling equipment, in particular to a handling device and a loading machine for plate-type PECVD equipment.

Background

When transferring a sheet from one station to another, it is sometimes necessary to make a secondary adjustment to the sheet. Thereby accurately transferring the sheet.

Taking a plate-type PECVD (plasma enhanced chemical vapor deposition) loading and unloading machine as an example of photovoltaic manufacturing equipment, the plate-type PECVD loading and unloading machine is used for transferring silicon wafers into a carrier plate or transferring the silicon wafers in the carrier plate into a wafer basket before and after a PECVD process. In the prior art, a plate type PECVD loading and unloading machine usually unloads silicon wafers from a material basket, then places the silicon wafers on a belt line for transfer, and then transfers the silicon wafers on the belt line to a carrying disc. However, since the belt line has a certain flexibility, the handling accuracy is not high, and when the silicon wafer is transferred from the belt line to the carrier plate, the situation that the silicon wafer cannot be accurately transferred to the carrier plate due to the fact that the silicon wafer deflects on the belt line may occur.

For this reason, there are improvements to a transporting device for transporting silicon wafers. For example, in the handling device, an independent deviation correcting device is arranged for each handled silicon wafer, and the silicon wafer is corrected, so that the silicon wafer feeding precision is improved. However, an independent deviation correcting device is arranged for each silicon wafer, and the technical problem of high cost is also brought.

Disclosure of Invention

In addition, along with the improvement of the plate type PECVD feeding and discharging machine, the positioning precision of each link is also improved. For example, in the known art, there is a technical solution that is improved for a front end apparatus of a handling device, such as a belt line for transferring silicon wafers. Specifically, a wafer pickup device having a jig for positioning a silicon wafer mounted on a motor-driven slide table module is used to achieve more accurate wafer pickup and placement. That is, the silicon wafer is positioned with higher accuracy before being carried by the carrier, and on the premise that the carrier having high positioning accuracy but high cost in the prior art does not need to be used continuously.

The present utility model is directed to this, and therefore proposes a transport device that can be used in a loader for a plate-type PECVD apparatus and that can reduce costs. In addition, the utility model also provides a loading machine for the plate-type PECVD equipment with the carrying device.

The carrying device according to the first aspect of the present utility model for transferring a sheet that has been positioned into a carrier includes: a gantry part having a first driving part driven in a first direction; an acquisition section provided on the gantry section and driven by the first driving section to acquire the sheet or transfer the sheet into the carrier, the acquisition section having: the device comprises an adjusting platform and a plurality of adsorption assemblies, wherein the adsorption assemblies are respectively mounted on the adjusting platform, one adsorption assembly can independently adsorb and hold one sheet of sheet, and the adjusting platform can simultaneously adjust the positions of the adsorption assemblies based on the positions of the carriers.

The carrying device according to the first aspect of the utility model has the following beneficial effects: can be used in a feeder for a plate PECVD device and can reduce the cost.

In some embodiments, the gantry portion is provided with a base on which a plurality of the acquisition portions are provided, the acquisition portions being arranged in a second direction orthogonal to the first direction in a horizontal direction.

In some embodiments, the acquisition portion further includes a second driving portion that drives in a third direction perpendicular to a surface of the sheet and orthogonal to the first direction; the second driving part is mounted on the adjustment platform and can drive the plurality of adsorption assemblies along the third direction.

In some embodiments, the second driving part includes: the screw rod transmission mechanism is arranged in the middle of the adjustment platform; the two linear guide parts are respectively arranged at two sides of the adjusting platform.

In some embodiments, the acquisition portion further includes a second driving portion that drives in a third direction perpendicular to a surface of the sheet and orthogonal to the first direction; the adjustment platform is mounted on the second driving unit.

In some embodiments, the adjustment platform adjusts the plurality of the adsorption assemblies based on the position of the carrier detected by the peripheral detection device.

In some embodiments, the plurality of adsorbent assemblies are divided into a plurality of groups along the first direction.

In some embodiments, the acquisition portion further has a displacement portion that adjusts a distance between at least two sets of adjacent suction assemblies along the first direction.

In some embodiments, the plurality of adsorbent assemblies are divided into a plurality of groups along the second direction.

According to a second aspect of the present utility model, a loader for a plate-type PECVD apparatus for transporting a sheet of a basket to a carrier for the plate-type PECVD apparatus, comprises: a sheet taking device and a conveying device according to any one of the above. Wherein:

the sheet taking device is used for obtaining the sheet from the material basket, and the sheet taking device comprises: a sheet taking section having a third driving section and a first placement section driven by the third driving section, the first placement section having a first support and a first positioning member, the first support positioning the sheet, a plurality of buffer sections each having a fourth driving section and a second placement section driven by the fourth driving section, the second placement section having a second support and a second positioning member, the second support supporting the sheet, the second positioning member positioning the sheet, the first placement section being driven by the third driving section to shift between the basket and the buffer section, the first placement section being capable of placing the sheet from the basket when the first placement section is in the position of the basket, and being capable of being driven by the fourth placement section to abut against the sheet when the first placement section is in the position of the basket.

The acquisition section may be driven by the gantry section to transfer between the carrier and the buffer section to adsorb the sheet placed on the buffer section by each of the adsorption assemblies or to transfer the sheet held by the adsorption assembly to the carrier.

The feeding machine for the plate PECVD equipment has the following beneficial effects: the cost of the conveying device used by the conveying device can be reduced.

Drawings

Fig. 1 is a schematic view of an embodiment of the handling device of the present utility model.

Fig. 2 is a schematic diagram of the capturing section in fig. 1 in a plan view.

Fig. 3 is a schematic view of the acquisition unit in fig. 1 in a bottom view.

Fig. 4 is a schematic diagram of a main part (omitting the adjustment stage) of the acquisition part in fig. 2.

FIG. 5 is a schematic view of one embodiment of a loader for a platen PECVD apparatus having the handling device of FIG. 1.

Fig. 6 is a schematic view of the sheet taking device in fig. 5.

Fig. 7 is a schematic view of the second placement unit in fig. 6.

Detailed Description

Examples of the present embodiment are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The examples described below by referring to the drawings are illustrative only for the explanation of the present embodiment and are not to be construed as limiting the present embodiment.

In the description of the present embodiment, it should be understood that the direction or positional relationship indicated with respect to the direction description, such as up, down, front, rear, left, right, etc., is based on the direction or positional relationship shown in the drawings, is merely for convenience of describing the present embodiment and simplifying the description, and does not indicate or imply that the device or element to be referred to must have a specific direction, be configured and operated in the specific direction, and thus should not be construed as limiting the present embodiment.

In the description of the present embodiment, the meaning of a plurality is one or more, the meaning of a plurality is two or more, and greater than, less than, exceeding, etc. are understood to exclude the present number, and the meaning of above, below, within, etc. are understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present embodiment, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly, and those skilled in the art may reasonably determine the specific meaning of the above terms in the present embodiment in combination with the specific contents of the technical solution.

Referring to fig. 1 to 4, a conveying apparatus 400 according to embodiment 1 is used to transfer a sheet 201 that has been positioned into a carrier 202. The carrying device 400 includes: gantry 401 and acquisition unit 402. The gantry portion 401 has a first driving portion 403 that drives in a first direction (left-right direction in the drawing). The acquisition section 402 is erected on the gantry section 401 and driven by the first driving section 403 to acquire the sheet 201 or transfer the sheet 201 into the carrier 202. The acquisition unit 402 includes: the plurality of suction units 405 are mounted on the adjustment table 404, and one suction unit 405 can independently suck and hold one sheet 201, and the adjustment table 404 can adjust the positions of the plurality of suction units 405 based on the positions of the carriers 202.

According to the carrying device 400 of the present embodiment, the carrying device can be used in the loader 500 for the platen PECVD apparatus, and the cost can be reduced. Specifically, when the sheet 201 (e.g., silicon wafer) is transferred from the basket 200 into the carrier 202, it is necessary to accurately adjust the position of the sheet 201 and then place the sheet 201 into the carrier 202. In the prior art, a belt line is generally used to acquire a sheet 201 from a basket 200, and then the belt line sheet 201 is transferred to a carrier 202 by a carrying device. Because of the characteristics of the belt line itself, it is difficult to accurately position the sheet 201, conventionally, a plurality of detection devices (e.g., CCDs) are mounted on a conveying device to detect the position of the sheet 201, and the positional accuracy of each sheet 201 is independently adjusted by an adjustment stage such as a UVW alignment stage. However, in the feeder for the platen PECVD apparatus, the timing of actually adjusting the positional accuracy of the sheet 201 is not particularly limited, and for example, the sheet 201 may be positioned in advance by, for example, a mechanical positioning mechanism (a later-described sheet taking device 100) before the sheet 201 is conveyed by the conveying device. When the sheet 201 is positioned, the sheet 201 can be directly carried to the carrier 202 without repositioning the position of the sheet 201 again.

For the above reasons, in the conveying apparatus 400 of the present embodiment, the position of each sheet 201 is not individually adjusted. Further, since there may be a deviation in the stopped positions of the different carriers 202, by providing one adjustment table 404, the plurality of sheets 201 acquired at one time by the acquisition unit 402 are finely adjusted according to the specific positions of the carriers 202, thereby ensuring that the plurality of sheets are accurately carried into the carriers 202. In other words, the conveying apparatus 400 according to the present embodiment can accurately transfer the plurality of sheets 201 that have been positioned before being conveyed to the carrier 202 by using the loading machine 500 for the plate-type PECVD apparatus, while omitting the structure for individually positioning each sheet 201 (for example, the detection CCD and each UVW adjustment stage) and only retaining one adjustment stage 404 that is finely adjusted according to the position of the different carrier 202. This can reduce the structural cost of the conveying device 400.

With continued reference to fig. 1 and with additional reference to fig. 5, the first drive portion 403 includes, for example, a motor-driven linear ramp module (not numbered). The first driving portions 403 may be provided in two, and may be arranged in parallel at intervals in a second direction (front-rear direction in the drawing) orthogonal to the left-right direction in the horizontal direction. Further, the gantry portion 401 is provided with a base 406, for example, and the base 406 is provided on a slider (not numbered) of a slide table module of the two first driving portions 403. The gantry 401 may include a first driving unit 403 and an auxiliary supporting unit 407 parallel to the first driving unit 403, and one end of the base 406 may be mounted on the first driving unit 403 and the other end may be mounted on the auxiliary supporting unit 407. The auxiliary supporting portion 407 may use a linear slide rail.

The acquisition unit 402 is mounted on the base 406. The acquisition portion 402 may have one or more according to the number of sheets 201. In the case of having a plurality of acquisition sections 402, the plurality of acquisition sections 402 are arranged in the front-rear direction. The front-rear direction is a direction in which the plurality of sheets 201 that have been positioned are aligned. For example, the sheet taking device 100 (described later) obtains the sheets 201 from the basket 200, and then aligns the sheets 201 in the front-rear direction. The acquisition unit 402 acquires a plurality of sheets 201 aligned in the front-rear direction from the sheet taking device 100 at a time. Even when the number of sheets 201 aligned in the front-rear direction is excessive, by providing a plurality of acquisition portions 402, it is possible to achieve independent fine adjustment of the positions of the respective acquisition portions 402 with respect to the carrier 202.

With continued reference to fig. 2 and 3 and with additional reference to fig. 1, the adjustment platform 404 of the acquisition unit 402 may be, for example, a UVW platform adjustable in both the left-right direction, the front-back direction, and a third direction (up-down direction in the drawing) orthogonal to the left-right direction and the front-back direction, respectively. The adjustment platform 404 of the acquisition section 402 may be mounted directly to the base 406 of the gantry section 401. A mounting bracket 408 is mounted at the lower end of the adjustment platform 404, and a plurality of suction assemblies 405 are respectively disposed on the mounting bracket 408. An adsorption assembly 405 adsorbs a sheet 201. In the case where a plurality of sheets 201 are arranged in the front-rear direction, a plurality of sets of the suction units 405 are also arranged in the front-rear direction. In addition, in the partial basket 200, a plurality of sheets 201 are placed in the left-right direction in one basket 200, and in this case, a plurality of sets of the adsorbing units 405 may be arranged in the left-right direction. That is, the plurality of suction members 405 may be mounted to the mounting bracket 408 in a rectangular array in the left-right direction and the front-rear direction. The suction assembly 405 may include a plurality of vacuum cups 409 for sucking the sheet 201, and the vacuum cups 409 may be, for example, bernoulli cups.

Referring to fig. 4 with additional reference to fig. 2, the acquisition unit 402 may further include a second driving unit 410, and the second driving unit 410 may be driven in an up-down direction orthogonal to the left-right direction, the front-back direction, and perpendicular to the surface of the sheet 201. The second driving unit 410 is mounted on the adjustment stage 404, and can drive the plurality of suction units 405 in the up-down direction. The second driving part 410 may include: based on the motor-driven screw transmission mechanism 411 and two linear guide portions 412, the screw transmission mechanism 411 is disposed in the middle of the adjustment platform 404, and the two linear guide portions 412 are disposed on two sides of the adjustment platform 404 respectively. The linear guide 412 may include, for example, a linear slide, and the two linear guides 412 may be provided on both sides of the adjustment table 404 in the front-rear direction, for example. The mounting brackets 408 for mounting the suction assemblies 405 are then mounted on two linear guides 412. Thereby, the second driving portion 410 can drive the plurality of suction members 405 to rise and fall in the up-down direction, and thereby can easily acquire the sheet 201 that has been positioned or transfer the sheet 201 into the carrier 202.

The second driving unit 410 may be directly mounted on the base 406 of the gantry unit 401, and the adjustment platform 404 may be mounted on the second driving unit 410. Alternatively, the acquisition unit 402 may not include the second driving unit 410, but may be provided with another driving unit that drives in the up-down direction perpendicular to the surface of the sheet 201, for example, at the position of the sheet taking device 100 and the carrier 202, so that the sheet 201 can be transferred between the sheet taking device 100 and the acquisition unit 402, or between the acquisition unit 402 and the carrier 202.

As described above, the adjustment stage 404 may adjust the positions of the plurality of suction components 405 simultaneously based on the position of the carrier 202. Specifically, the adjustment platform 404 adjusts the plurality of suction components 405 based on the position of the carrier 202 detected by a peripheral detection device (not shown). The detection device may be, for example, a detection device based on CCD detection, and the detection device is used to detect a specific position of the carrier 202. For example, mark points may be provided on the carrier 202, and the position of the carrier 202 may be accurately determined by CCD detection. In the case of the position of the carrier 202 being determined, the adjustment stage 404 adjusts the position of the suction member 405 based on the position information of the carrier 202, and thereby adjusts the position of the sheet 201 sucked at the suction member 405. Thus, the sheet 201 is already positioned before being sucked, and therefore, there is no need to additionally provide a detection device for detecting a specific position or angle of the sheet 201, nor to additionally provide an adjustment stage 404 or the like for adjusting the specific position or angle of the sheet 201.

In addition, the control method of the adjustment platform 404 for fine adjustment based on the actual position of the object detected by the detection device to accurately position the object is well known to those skilled in the art, and the present utility model is not intended to protect the control method of the adjustment platform 404 for fine adjustment based on the actual position of the object detected by the detection device to accurately position the object. Therefore, the control method is not explained in detail here.

With continued reference to fig. 2 to 4, as described above, in the partial basket 200, a plurality of sheets 201 are placed in the left-right direction in one basket 200, and in this case, a plurality of sets of the adsorbing modules 405 may be arranged in the left-right direction. However, the distance between two sheets 201 adjacent in the left-right direction in the basket 200 is not necessarily equal to the distance between two sheets 201 adjacent in the left-right direction in the carrier 202. In order to enable the acquisition unit 402 to accommodate different baskets 200 and carriers 202, the acquisition unit 402 may further include a distance changing unit 413, and the distance changing unit 413 may adjust the distance between at least two adjacent suction units 405 in the left-right direction. The variable-pitch section 413 includes, for example, a variable-pitch motor 414 driven in the left-right direction, and the variable-pitch motor 414 is attached to the adjustment platform 404. In addition, the mounting brackets 408 include a plurality of mounting brackets distributed in the left-right direction, and a set of suction members 405 are respectively mounted on each mounting bracket 408. Taking two mounting brackets 408 as an example, one mounting bracket 408 is fixed to the adjustment platform 404, and the other mounting bracket 408 is mounted to the adjustment platform 404 and connected to the pitch motor 414 via, for example, a guide rail 415 that guides in the left-right direction. Thus, the variable-pitch motor 414 can drive the other mounting bracket 408 to move in the left-right direction, thereby changing the distance between the two mounting brackets 408 in the left-right direction. Thereby, the acquisition unit 402 can be compatible with different baskets 200 and carriers 202.

In addition, although the example in which the distance changing portion 413 adjusts the two adjacent suction units 405 in the left-right direction has been described above, it is not limited thereto. For example, the pitch motor 414 of the pitch varying portion 413 may be connected to the plurality of mounting brackets 408 distributed in the left-right direction by a link mechanism, a rack-and-pinion mechanism, or the like, for example, so that more suction units 405 can be adjusted according to actual conditions.

Referring to fig. 5 to 7, and mainly to fig. 5, in embodiment 2, a plate type PECVD apparatus loader 500 using the transfer device 400 of the above embodiment will be briefly described below. Specifically, the loader 500 for the platen PECVD apparatus according to embodiment 2 is used to transport the sheet 201 of the basket 200 to the carrier 202 for the platen PECVD apparatus. This plate-type PECVD is material loading machine 500 for equipment includes: the sheet taking apparatus 100 and the conveying apparatus 400 according to any one of the above.

The sheet take-out device 100 is used to take out sheets 201 from a basket 200. The sheet taking device 100 includes: a slice taking part 101 and a plurality of cache parts 102.

Referring to fig. 6 and 7, and with additional reference to fig. 5, the sheet taking section 101 includes a third driving section 103 driven in the front-rear direction, for example, and a first mounting section 104 driven by the third driving section 103. The third driving part 103 may include, for example, a motor-driven single-shaft slide table module (not numbered). The first mounting portion 104 is mounted on a slider (not numbered) of the slide table module. The first placement portion 104 has a first support 105 and a first positioning member 106. The first support 105 supports the sheet 201, for example, in a line-contact manner with the sheet 201. The first positioning member 106 positions the sheet 201.

The plurality of buffer portions 102 are arranged in the front-rear direction, for example. Each buffer unit 102 has, for example, a fourth driving unit 107 driven in the up-down direction, and a second placement unit 108 driven by the fourth driving unit 107. The fourth driving section 107 may include, for example, a cylinder (not numbered) that is linearly driven in the up-down direction. The second mounting portion 108 is mounted on the fourth driving portion 107. The second placement portion 108 has a second supporter 109 and a second positioner 110. The second support 109 supports the sheet 201, for example, in a line-contact manner with the sheet 201. The second positioning member 110 positions the sheet 201.

The first mounting portion 104 is driven by the third driving portion 103 to move between the basket 200 and the buffer portion 102 in the left-right direction. When the first placement unit 104 is at the position of the basket 200, the first placement unit 104 can place the sheet 201 from the basket 200. When the first mounting portion 104 is located at a position (for example, a position facing in the vertical direction) opposite to the buffer portion 102, the second mounting portion 108 can be driven by the fourth driving portion 107 to abut against and mount the sheet 201 in the vertical direction, and the sheet 201 can be separated from the first mounting portion 104.

The sheet taking device 100 of the feeder 500 for the plate-type PECVD apparatus according to the present embodiment can take and place the sheet 201 with higher accuracy. Specifically, in the sheet pickup apparatus 100 of the present embodiment, the sheet 201 is placed by the first placement portion 104 having the first holders 105 and the first positioners 106 and the second placement portion 108 having the second holders 109 and the second positioners 110, compared to the conventional technique of placing the sheet 201 (for example, silicon wafer) using a belt line or a timing belt, and therefore the sheet 201 can be picked up and placed with higher accuracy. Further, since the first support 105 and the second support 109 support the sheet 201 in such a manner as to be in line contact with the sheet 201, the area where the first support 105 and the second support 109 contact the sheet 201 can be reduced as much as possible, whereby contamination or the like of the surface of the sheet 201 can be suppressed.

Therefore, in the feeder 500 for the platen PECVD apparatus of the present embodiment, the buffered sheet 201 can be positioned in the material taking stage of the sheet 201. In the case where the buffered sheet 201 has been positioned, the position of the sheet 201 does not need to be repositioned again, but can be directly carried into the carrier 202.

Therefore, the feeder 500 for the platen PECVD apparatus according to the present embodiment can use the conveyor 400 according to embodiment 1, for example, and reduce the cost of the conveyor 400 used. The acquisition section 402 of the conveyance device 400 may be driven by the gantry section 401 to transfer between the carrier 202 and the buffer section 102 to adsorb the sheet 201 placed on the buffer section 102 by each adsorption unit 405 or to transfer the sheet 201 held by the adsorption unit 405 to the carrier 202.

Hereinafter, the operation of the feeder 500 for the plate-type PECVD apparatus according to the present embodiment will be described.

The wafer taking device 100 is abutted with the stacked basket 200 to obtain the silicon wafer placed on the basket 200. The basket 200 carries a plurality of layers of silicon wafers (sheets 201) in the vertical direction. Before picking up the tablets, the basket 200 is transported to the elevator 300 by means of a transport trolley or the like, for example. The third driving part 103 of the wafer taking device 100 drives the first loading part 104 to extend into the basket 200 and is positioned below the vertically lowest wafer. Then, the lifter 300 drives the basket 200 to descend, and as the basket 200 descends, the silicon wafer falls onto the first loading part 104. When the silicon wafer is dropped onto the first mounting portion 104, the silicon wafer is positioned by the first positioning member 106 and then dropped onto the first support member 105, whereby it is ensured that the silicon wafer is transferred to the first mounting portion 104 with higher accuracy.

After the silicon wafer is transferred to the first mounting portion 104, the silicon wafer is separated from the basket 200, the elevator 300 stops descending, and the third driving portion 103 drives the first mounting portion 104 on which the silicon wafer is mounted to move above the second mounting portion 108 of the buffer portion 102. After the first mounting portion 104 is positioned above the second mounting portion 108, the second mounting portion 108 is driven by the fourth driving portion 107 to vertically lift the silicon wafer, and the silicon wafer is separated from the first mounting portion 104. When the silicon wafer is lifted by the second mounting portion 108, the silicon wafer is positioned by the second positioning member 110 and then supported by the second supporting member 109, or the silicon wafer is directly in contact with the second supporting member 109 and lifted by the second supporting member 109 (for example, the silicon wafer is accurately within a preset range). Accordingly, when the silicon wafer is lifted up by the second mounting portion 108, the silicon wafer is positioned by the second positioning tool 110 and then falls onto the second support 109, whereby it is ensured that the silicon wafer is transferred to the second mounting portion 108 with higher accuracy.

After the silicon wafer is transferred from the first mounting portion 104 to the second mounting portion 108, the silicon wafer is buffered in the second mounting portion 108, and the first mounting portion 104 continues to be driven by the third driving portion 103 to extend into the basket 200, and the silicon wafer of the basket 200 continues to be mounted. At the same time, the silicon wafer placed on the second placement unit 108 of the buffer unit 102 waits for the transport device 400 to transport the silicon wafer.

After the wafers buffered by the buffer portion 102 reach the preset number, the plurality of adsorption modules 405 of the acquisition portion 402 are driven by the gantry portion 401 to above the plurality of second placement portions 108 of the buffer portion 102. Then, the adsorption assembly 405 is driven to descend by the second driving part 410 and adsorbs the silicon wafer supported by the second support 109. The silicon wafer is positioned by the second positioning member 110, and thus, the adsorption assembly 405 can be adsorbed to the silicon wafer with higher accuracy.

After the adsorption member 405 is adsorbed to the silicon wafer, the second driving part 410 drives the adsorption member 405 to rise. The first driving unit 403 then drives the acquisition unit 402 in the left-right direction to move above the carrier 202. In addition, while the acquisition unit 402 is driven, the adjustment stage 404 adjusts the position of the suction unit 405, and thus the position of the silicon wafer, in accordance with the position of the carrier 202 detected by a detection device such as a CCD provided below the carrier 202. Then, the second driving part 410 drives the adsorption assembly 405 to descend, and accurately puts the silicon wafer into the carrier 202.

Thereby, the transfer of the silicon wafer from the basket 200 to the carrier 202 for the platen PECVD apparatus is completed.

While examples of the present embodiment have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the embodiments, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A carrying device for transferring a sheet that has been positioned into a carrier, characterized by comprising:

a gantry part having a first driving part driven in a first direction;

an acquisition section provided on the gantry section and driven by the first driving section to acquire the sheet or transfer the sheet into the carrier, the acquisition section having: the device comprises an adjusting platform and a plurality of adsorption assemblies, wherein the adsorption assemblies are respectively mounted on the adjusting platform, one adsorption assembly can independently adsorb and hold one sheet of sheet, and the adjusting platform can simultaneously adjust the positions of the adsorption assemblies based on the positions of the carriers.

2. The carrying device according to claim 1, wherein the gantry portion is provided with a base, and the base is provided with the plurality of the acquisition portions arranged in a second direction orthogonal to the first direction in a horizontal direction.

3. The conveying apparatus according to claim 1, wherein the acquisition section further includes a second driving section that drives in a third direction perpendicular to a surface of the sheet and orthogonal to the first direction;

the second driving part is mounted on the adjustment platform and can drive the plurality of adsorption assemblies along the third direction.

4. A handling device according to claim 3, wherein the second drive section comprises:

the screw rod transmission mechanism is arranged in the middle of the adjustment platform;

the two linear guide parts are respectively arranged at two sides of the adjusting platform.

5. The conveying apparatus according to claim 1, wherein the acquisition section further includes a second driving section that drives in a third direction perpendicular to a surface of the sheet and orthogonal to the first direction;

the adjustment platform is mounted on the second driving unit.

6. The handling device of any of claims 1 to 5, wherein the adjustment platform adjusts the plurality of suction assemblies based on the position of the carrier detected by a peripheral detection device.

7. The handling device of any of claims 1 to 5, wherein a plurality of the suction assemblies are divided into a plurality of groups along the first direction.

8. The carrier device of claim 7, wherein the acquisition section further has a variable-pitch section that adjusts a distance between at least two adjacent groups of the suction assemblies in the first direction.

9. The handling device of claim 2 wherein a plurality of said suction assemblies are divided into a plurality of groups along said second direction.

10. The utility model provides a loading machine for plate PECVD equipment for carry the sheet of basket to the carrier that plate PECVD equipment was used, its characterized in that includes: a sheet taking device and a handling device according to any one of claims 1 to 9, wherein:

the sheet taking device is used for obtaining the sheet from the material basket, and the sheet taking device comprises:

a sheet taking section having a third driving section and a first placement section driven by the third driving section, the first placement section having a first support and a first positioning member, the first support being configured to position the sheet material, the first positioning member being configured to position the sheet material,

a plurality of buffer units each having a fourth driving unit and a second placement unit driven by the fourth driving unit, the second placement unit having a second support member supporting the sheet and a second positioning member positioning the sheet,

the first mounting portion is driven by the third driving portion to be transferred between the basket and the buffer portion, the first mounting portion being capable of mounting the sheet from the basket when the first mounting portion is at the position of the basket, and the second mounting portion being driven by the fourth driving portion to be abutted against and mounted on the sheet when the first mounting portion is at the position opposite to the buffer portion;

the acquisition section may be driven by the gantry section to transfer between the carrier and the buffer section to adsorb the sheet placed on the buffer section by each of the adsorption assemblies or to transfer the sheet held by the adsorption assembly to the carrier.