KR20100084467A - An apparatus for grinding a member having a rectangularly-shaped column - Google Patents

Abstract

A polishing device which reduces a failure rate in generating a substrate by minimizing the depth of micro cracks. The polishing device (M) has a carrying line (1) composed of a carry-in line (2) for carrying an unpolished prismatic member (W) and a carry-out line (3) for carrying out a polished prismatic member (W) and a polishing line (10) having plane polishing devices (11) and corner polishing devices (12) disposed at positions respectively opposed to each other. Moreover, each plane polishing device (11) has a plane polishing device for rough polishing, a plane polishing device for first finish and a plane polishing device for second finish which are juxtaposed. Each corner polishing device (12) has a corner polishing device for rough polishing and a corner polishing device for finish which are juxtaposed. Between the respective plane polishing devices (11) and corner polishing devices (12), the prismatic member (W) placed on a traveling truck (5) is traveled to be polished.

Description

Apparatus for polishing a member having a column of rectangular shape {AN APPARATUS FOR GRINDING A MEMBER HAVING A RECTANGULARLY-SHAPED COLUMN}

The present invention relates to an apparatus for polishing a member having a rectangular shaped column and composed of crystals of a hard brittle material. In particular, the present invention relates to an apparatus for polishing a member to remove microcracks arranged on a member having a column of rectangular shape. The member consists of crystals of hard brittle materials such as ceramics, glass and silicon and is used to make disk substrates.

A rectangular column member made of a hard brittle material is produced by the following steps. That is, first, a molten metal is cast into a mold to produce an ingot. Next, the ingot is cut by a cutting device such as a band saw, and the ingot is divided into a block, that is, a column member having a rectangular shape. A rectangular column member is divided into thin film disk substrates (wafers) having a thickness of less than 1 mm by a cutting device such as a band saw. The divided wafers are transported after the cleaning process, the dimension and surface roughness inspection process, and the packaging process.

As shown in Table 1 and FIG. 14, the maximum surface roughness of the rectangular column member divided by the cutting device is in the range of Ry = 9 to 11 μm. In addition, microcracks with a depth of 70-80 μm appear on the edges and surfaces of the member while the member is being cut. After the ingot is cut, if the columnar member having a rectangular shape is divided into a thin film disk substrate by a cutting device such as a file saw, a cracked or broken disk may be produced due to micro cracks. Typically, product defect levels ("defective rate") due to cracked or broken discs range from 30 to 40%. All cracked or broken discs are discarded. In order to reduce the defect rate, four surfaces of the rectangular column member are polished so that the maximum surface roughness of the member is in the range of Ry = 9 to 11 m and the depth of the micro crack is in the range of 10 to 15 m. However, the defect rate is still in the range of 20-30%.

TABLE 1

Table 1. Defect rate of divided disks during partitioning of rectangular columnar members

Note: The defect rate is defined as the defect level of a product based on a cracked or broken disk, which occurs when a rectangular columnar member is divided to form a disk substrate.

In order to reduce the defect rate based on the cracks or flaws of the disk substrate generated during manufacture, by grinding and flattening the side surface until the maximum surface roughness reaches a level of less than Ry = 8㎛, fine on the side of the rectangular column member The depth of a crack is reduced (refer patent document 1).

[Patent Document 1] Japanese Patent No. 3649393

In recent years, the market demand for disk substrates made of hard brittle materials is increasing. There is a strong demand for a significant reduction (less than 2%) of defect rates based on cracks or flaws on disk substrates. The microcracks that cause cracks or flaws on the disk substrate exist on the edges as well as on the side surfaces of the rectangular column members, as disclosed in Patent Document 1. Therefore, it is necessary to remove the micro cracks on the side and edge of the member.

The present invention seeks to solve the above problems. The present invention relates to a process of manufacturing a disk substrate by dividing a column member having a rectangular shape divided by cutting an ingot manufactured by casting a raw material. That is, it is an object of the present invention to reduce the defect rate to less than 2% by reducing the roughness of the side and edge of the rectangular column member to less than Ry = 2 μm and the depth of the microcracks to less than 3 μm. It is also an object of the present invention to provide an apparatus for polishing a rectangular column member made of a hard brittle material. The device has high productivity.

In the apparatus for polishing a rectangular column member according to the invention of claim 1, in order to solve the above problems, the apparatus includes a conveying line for conveying a rectangular column member and a polishing line for polishing a rectangular column member. Include. The polishing line is movable in a direction perpendicular to the conveying line and has moving means for holding a columnar columnar shape. In the polishing line, a pair of first polishing means for simultaneously polishing two sides of a rectangular column member and a pair of second polishing means for simultaneously chamfering two edges of a rectangular column member are arranged. A station for introducing and discharging a rectangular column member with respect to the polishing line is disposed at one end of the polishing line. In addition, a station for inverting the rectangular column member is disposed at the other end of the polishing line.

In the apparatus for polishing a rectangular-shaped column member according to the invention of claim 2, the first polishing means according to the invention of claim 1 comprises rough-grinding means using a brush-type tool, and a brush adjacent to the roughing means. Finishing-grinding means using a mold tool.

In the apparatus for polishing a rectangular column member according to the invention of claim 3, the second polishing means according to the invention of claim 1 comprises roughing means using a brush-type tool or a grinding-wheel type tool, and the roughing. And finishing means adjacent to the means and using a brushed or abrasive wheel tool.

In the apparatus for polishing a rectangular-shaped column member according to the invention of claim 4, the brush type tool of the first polishing means according to any one of claims 1 to 3 is a segmented-type brush. The brushed tool includes a rotating body of the polishing actuator fixed to one end of the rotating hollow shaft. The other end of the rotating hollow shaft is connected to the rotating driver. The brush tool further includes a holder fixed to one end of the central shaft that is inserted into the rotating hollow shaft. The other end of the central shaft is connected to a linear motion driver. Thus, the central shaft can move forward and backward along its central axis. The brushed tool further includes a plurality of brush bundles. Each end of the plurality of brush bundles can be inserted into and fixed to a plurality of holes arranged in the holder, and can be attached and detached with respect to the holes. Each other end of the plurality of brushes is inserted into the opening of the holding cap disposed on the end surface of the rotating body and protrudes from the holding cap. Slotted holes are disposed in the barrel of the rotor along the axis of the rotating hollow shaft and the axis of the central shaft, and pins that can be inserted into the slot forming holes are inserted into the holder through the slot forming holes. It is connected.

In the apparatus for polishing a rectangular column member according to the invention of claim 5, the moving means according to any one of claims 1 to 4 has a holding means for holding the rectangular column member. The moving means can move between a pair of first polishing means and between a pair of second polishing means.

In the apparatus for polishing a rectangular column member according to the invention of claim 6, the polishing line according to any one of claims 1 to 5 is characterized by the width of the rectangular column member before moving to the polishing line and polishing. It further includes measuring means for measuring the dimension of the height.

In the apparatus for polishing a rectangular column member according to the invention of claim 7, the conveying line according to any one of claims 1 to 6 is a conveying line for conveying the rectangular column unpolished member to the station. an in line and a conveying-out line for conveying the polished member from the station. The import line and export line are arranged on each side of the station.

In the apparatus for polishing a rectangular column member of claims 1 to 4, each of the rectangular column non-abrasive members is conveyed to a station, and is fed to and discharged from the polishing line by the conveying line. The station is arranged at one end of the polishing line. Next, the rectangular column member is conveyed to the movement means of a polishing line. The rectangular column member is moved between the pair of first polishing means and between the pair of second polishing means. The pair of first polishing means polish both opposing sides. The pair of second polishing means polish the upper both edges of the member to chamfer the edges. Thus, by moving both the rectangular column members between the first polishing means and the second polishing means, the step of polishing both sides of the rectangular column member and chamfering the upper both edges of the member is completed. Then, by the moving means, a rectangular column member is conveyed to the station which reverses the member arrange | positioned at the other end of a grinding | polishing line. After the member is reversed at the station, it is fixed again to the means of movement. The inverted rectangular shape column member again moves between the pair of first polishing means and then moves between the pair of second polishing means. Then, two remaining side surfaces of the rectangular column member facing each other are polished. The two remaining edges of the member are also polished and chamfered. Finally, the four surfaces of the rectangular columnar member are polished, and the four edges of the member are polished to chamfer. After the process of polishing the columnar member having a rectangular shape is completed, the member is automatically conveyed from the polishing line to the conveying line through a station for introducing and discharging the member into and out of the polishing line. The station is arranged at the end of the polishing line.

As described above, the apparatus for polishing a rectangular column member includes the following steps: a) conveying a rectangular column unpolished member to a polishing line; b) polishing four sides of the member extending in the longitudinal direction, and polishing the four edges of the member to chamfer; And c) the step of conveying the member out of the polishing line can be performed automatically, thereby improving the productivity.

According to the apparatus for polishing a rectangular column member of claim 2, the first polishing means for polishing the side of the member includes roughing means and finishing means. Therefore, most of the minute cracks generated on the side of the member can be effectively removed by the roughing means. The microcracks are generated on the side of the member when the ingot produced by casting the molten metal raw material into the mold is divided into rectangular column members by a cutting device such as a band saw. Next, since the polished side is finely polished by the finishing means, the depth of the microcracks can be reduced to less than 1 to 3 mu m.

In the apparatus for polishing a rectangular column member of claim 3, the second polishing means for grinding and chamfering the edges of the rectangular column member includes roughing means and finishing means. This configuration is the same as that of the first polishing means. The second polishing means may use a brush tool or a polishing wheel tool. In the second polishing means using the brush-shaped tool, most of the minute cracks on the edge of the rectangular-shaped column member divided by the cutting device are removed by finishing the edge by the roughing means. Next, since the edges are finely polished by the finishing means, the depth of the microcracks can be reduced to less than 1 to 3 mu m. The second polishing means using the polishing wheel type tool can remove most of the minute cracks on the edge of the member by chamfering the edge of the rectangular column member. Since the depth of the microcracks on the rectangular column member varies depending on the material and the type of the crystal forming the member, the edge of the member can be polished by selecting a brush tool or a polishing wheel tool. If deep chamfers and fine finishing are further desired, a combination of brushed and abrasive wheel tools may be used to polish the edges of the member to chamfer.

In the apparatus for polishing a rectangular column member of claims 1 to 3, when the rectangular column member is divided by a cutting device, it is on the edge and the surface of the member in the range of 70 to 80 µm (see Table 1). The depth of the microcracks can be reduced to 1-3 microns. In addition, the maximum surface roughness of the member can be improved to less than Ry = 2 μm. Thus, by dividing a rectangular column member by a cutting device such as a file saw, for example, when a 1 mm thick disk substrate is manufactured, any defects such as cracks or blemishes caused by microcracks can be prevented. As such, the defect rate of the divided disk substrate can be reduced to less than 2%.

In the apparatus for polishing a rectangular columnar member of claim 4, the brush-shaped tool of the first polishing means for polishing the side of the member includes a plurality of brush bundles. The brush bundle consists of a wire made of resin or steel containing abrasive grains. Each of the plurality of brush bundles can be inserted into and secured to the holder so that it can be attached and detached from the holder. Therefore, when the brush bundle is worn by the operation of polishing the member, it can be replaced immediately. The slot forming hole is disposed in the cylindrical portion of the rotating body of the polishing operation portion. Pins that can be inserted into the slot forming holes are connected to the holder through the slot forming holes. The holder with the brush bundle is rotated by the power of the rotary driver through the rotating hollow shaft and the rotating body of the polishing actuator. Due to the rotation of the holder, the brush bundle can be rotated. The length over which the brush bundle protrudes from the retaining cap can be controlled by the power to move the holder forward and backward by a linear motion driver (not shown) through the central shaft. Control of the length protruding from the holding cap of the brush bundle is performed as follows. That is, data on the working time of polishing the member by contacting the surface of the rectangular column member with the brush bundle, or data on the number of the rectangular column members to be polished are input to the control means (not shown). Then, the calculation result based on the data is input to the linear motion driver to control the movement of the holder through the center shaft.

As described above, since the end of the brush bundle is supported by the holding cap, the brush bundle does not bend. In addition, since the length protruding from the holding cap of the brush bundle is controlled, it is maintained at a constant value. Thus, since the force for polishing the surface of the member, which acts on the surface through the ends of the brush bundles, becomes constant, the surface of the member can be uniformly polished.

In the apparatus for polishing a rectangular column member of claim 5, the holding means of the moving means is provided between the pair of first polishing means and the pair of second polishing means while reliably holding the rectangular column member. You can move on. Therefore, since the holding means and the member are integrated, the member can reliably move on the polishing line between the pair of first polishing means and between the pair of second polishing means.

For the apparatus for polishing a rectangular column member of claim 6, the measuring means measures the dimensions of the width and height of the rectangular column non-abrasive member, and then inputs the measurement signal to the control means (not shown). When the member is polished by the first polishing means and the second polishing means, based on the signal, the supply amount and the starting position for polishing the member are controlled. By this control, the depth of the microcracks can be reduced to 1 to 3 mu m, and the maximum surface roughness of the member can be improved to less than Ry = 2 mu m.

An apparatus for polishing a rectangular column member according to claim 7, wherein the conveying line includes an import line for conveying the unpolished member to the polishing line through a station for introducing and discharging the rectangular column member into and out of the polishing line; And a carrying-out line which conveys the member polished from the polishing line through. The import line and export line are arranged separately. Therefore, the process of conveying the unpolished member to the apparatus and the process of conveying the polished member from the apparatus can be performed effectively.

1 shows a perspective view of an apparatus for polishing a member according to an embodiment of the present invention.

2 is a plan view of the apparatus of FIG. 1.

3 is an elevation view of the apparatus of FIG. 1.

4 shows a perspective view of the polishing means for plane polishing of the apparatus of FIG. 1.

FIG. 5 shows a side view of the operating part of the planar polishing polishing means of FIG. 4.

6 shows a perspective view of the polishing means for edge polishing of the apparatus of FIG. 1.

7 shows an apparatus for adjusting the height of the operating member of the edge polishing polishing means of FIG. 6.

8 shows the moving means 5 and the positioning device of FIG. 1.

FIG. 9 shows an elevation view of a measuring device for measuring the height of the rectangular columnar member of FIG. 1.

10 shows a side view of the conveying device of the device of FIG. 1.

FIG. 11 shows an elevation view of the inversion device of the device of FIG. 1.

12 shows a flowchart of a step of polishing a column member having a rectangular shape.

Fig. 13 shows a state in which the edges of the rectangular column members are polished and chamfered.

14 is a sectional view of a rectangular columnar member in which microcracks have occurred.

15 shows a partial cross-sectional view of a detachable brush.

FIG. 16 shows a bottom view of the detachable brush of FIG. 15.

17 shows a brush bundle used in the detachable brush of FIG. 15.

18 is an elevation view of a conventional cup brush.

FIG. 19 shows a bottom view of the conventional cup-shaped brush of FIG. 18.

Explanation of symbols on the main parts of the drawings

M: Apparatus for Polishing Rectangular Column Members

1: conveying line 2: carrying line

3: export line 5: means of transport

52: holding device 7, 8: positioning device

9A: Measuring device for measuring width

9B: Measuring device for measuring height

10: polishing line 11A: roughing means for plane polishing

11B: first finishing means for plane polishing 11C: second finishing means for plane polishing

14: brush bunch

15: Station to feed and discharge the member against the polishing line

17: station for reversing member 20: transfer device

25: reverse device 110: holder

110a: Pin 112: Actuator

112a: rotating body 112b: hole

112c: retaining cap 112d: slotting hole

12A: Roughing means for edge polishing 12B: Finishing means for edge polishing

124: working member

The device ("apparatus") for polishing a rectangular columnar member according to the present embodiment can polish four sides and edges extending in the longitudinal direction of a member having a square shape of 125 to 155 mm in cross section and a length of 200 mm. have.

In the following embodiment, the rectangular column member processed by the apparatus is manufactured by dividing an ingot made of glass in the longitudinal direction and the transverse direction with a band saw.

As shown in Table 1 and Fig. 14, after the rectangular column member was divided from the ingot by the band saw, the maximum roughness of the side surface of the member was Ry = 9 to 11 µm, and the depth of the microcracks on the surface of the member was 70 ˜80 μm.

EMBODIMENT OF THE INVENTION Hereinafter, the apparatus which concerns on embodiment of this invention is demonstrated based on drawing. The apparatus comprises a first polishing means and a second polishing means. Each of these means uses a brushed tool. The brush-type tool has the brush bundle which consists of a resin wire containing abrasive grain, as shown in Table 2. The first polishing means includes a pair of roughing means for planar polishing of the member and two pairs of finishing means for planar polishing of the member. The size of the abrasive grains of the two pairs of finishing means is different. The second polishing means comprises a pair of roughing means for polishing the edge of the member and a pair of finishing means for polishing the edge of the member.

The apparatus M of FIG. 1 has the conveyance line 1 which conveys the rectangular column member W, the polishing line 10 arrange | positioned laterally in the conveyance line 1, and the rectangular column member ( Moving means 5 which hold W) and which are movable in the polishing line 10. The apparatus M further comprises a station 15 for feeding and discharging the member W into the polishing line 10. The station 15 is arranged at one end of the polishing line 10 adjacent to the conveying line 1. The station 17 for inverting the member W is disposed at the other end of the polishing line 10.

The conveying line 1 includes the carrying-in line 2 which conveys the rectangular column unpolished member W, and the carrying-out line 3 which conveys the polished member. The carrying-in line 2 is arrange | positioned upstream of the station 15 which injects and discharges the member W with respect to the grinding | polishing line 10 (the left side of the station 15 in FIG. 1). The carrying-out line 3 is arrange | positioned downstream of the station 15 (right side of the station 15 in FIG. 1). The import line 2 and the export line 3 both include conveyors 4, 4. On the conveyors 4 and 4, a plurality of cradles 4a and 4a are arranged at equal intervals. The rectangular column unpolished member W is hold | maintained and conveyed by the conveyance stand 4a, 4a of the conveyor 4,4.

A plurality of first polishing means, i.e., a planar polishing means 11, and a plurality of second polishing means, i.e., an edge polishing means 12, are arranged in the polishing line 10. FIG. These means are arrange | positioned adjacent to each other along the direction to which the rectangular column member W moves. The planar polishing means 11 and the edge polishing means 12 may be arranged on either the center side or the end side along the direction in which the polishing line moves. In the embodiment shown in the figure, the edge polishing polishing means 12 is disposed adjacent to the center side, i.e., to the station 15 for feeding and discharging the member W into the polishing line 10. As shown in FIG. Polishing means 11 for planar polishing is disposed adjacent to the station 17 for inverting the member W. As shown in FIG.

2 and 3, three pairs of polishing means 11 for planar polishing are arranged side by side along the polishing line 10. A pair of roughing means 11A for planar polishing, a pair of first finishing means 11B for planar polishing, from a side adjacent to the station 15 for introducing and discharging the member W into and out of the polishing line 10, And a pair of second finishing means 11C for planar polishing are arranged in this order. In the embodiment shown in FIGS. 2 and 3, two pairs of polishing means 12 for edge polishing are also arranged side by side along the polishing line 10. From the side adjacent to the station 15, the edge polishing roughing means 12A and the edge polishing finishing means 12B are disposed in this order.

Each of the pair of planar polishing means 11 and the pair of edge polishing means 12 is arranged so as to face each other on both sides of the rectangular column member W moving on the polishing line 10. Therefore, these pairs of polishing means can simultaneously polish two sides or two edges of the rectangular-shaped column member W.

The operating portions of the planar polishing means 11 and the edge polishing means 12 use a brush-shaped tool formed by a brush bundle made of a resin wire containing abrasive grains. The configuration of the brush-type tool using the resin wire containing abrasive grains is shown in Table 2.

TABLE 2

Construction of a brush-type tool made of resin wire containing abrasive grain

Note: The weight fraction is defined as the ratio of abrasive grains to the total weight of the brushed tool.

Polishing means 11 for planar polishing is attached to the apparatus by an L-shaped bracket 111 attached to the apparatus as shown in FIG. That is, the operation part 112 of the grinding | polishing means 11 is arrange | positioned at the front side of the vertical part 111a of the bracket 111. As shown in FIG. The rotary driver 113 which rotates the operation part 112 and the linear operation driver 117 which moves the operation part 112 forward and rearward are arrange | positioned at the back side of the vertical part 111a of the bracket 111, It is opposed to the operation part 112.

The rotary driver 113 includes an electric motor, and is arranged to move horizontally along its axis with respect to the vertical portion 111a of the bracket 111 together with the operation portion 112. The rotary driver 113 and the actuating part 112 are connected to each other by a rotating hollow shaft 114 comprising an intermediate rod 114b and a small rod 114c. The ring gear 114a is fixed to the outer surface of the intermediate rod 114b. In addition, the ring gear 114a is engaged with a pinion gear (116a) connected to the pulse motor 116. Since the intermediate rod 114b can be moved slightly along its axis by the pulse motor 116 together with the rotary driver 113 and the actuator 112, the supply amount to the actuator 112 can be controlled. The supply amount to the operation part 112 is determined by the central control means (not shown) based on the measured value input to the control means by the measuring means.

For example, by engaging the ring gear 114a to the intermediate rod 114b by screws, the intermediate rod 114b can move forward and backward by rotating the ring gear 114a.

The linear motion driver 117 may, for example, comprise a mechanism using a cylinder and may be disposed on the horizontal portion 111b of the bracket 111. The piston rod 117a of the cylinder is connected to the ring member 118 of the rotary driver 113, which rotates forward and with the actuating part 112 by moving the piston rod 117a along its axis. You can move backwards.

The operation part 112 of the planar polishing polishing means 11 described above is shown in FIGS. 5, 15 and 16. Actuator 112 has a plurality of brush bundles 14, as shown in FIG. The brush bundle 14 is made of a resin wire containing abrasive grain, and one end bends and binds the metal ornament 14a to form a long elongated rod shape. Each of the brush bundles 14 is inserted into and fixed to a hole 112b formed in the holder 110. The slot forming hole 112d is disposed in the cylindrical part of the rotating body 112a of the operation part 112, and the pin 110a which can be inserted into the slot forming hole 112d forms the slot forming hole 112d. It is connected to the holder 110 through. Accordingly, since the driving force of the rotary driver 113 is transmitted to the holder 110 having the brush bundle 14 by the rotating hollow shaft 114 and the rotating body 112a of the operating portion 112, the plurality of brushes The bundle 14 can rotate. In addition, the brush bundle is brought into contact with the rectangular column member so that data on the working time of polishing the member or data on the number of the rectangular column member to be polished is input to the control means (not shown). Then, based on the calculation result by the control means, since the driving force of the linear motion driver 117 is transmitted to the holder 110 through the center shaft 110, from the holding cap 112c of the brush bundle 14 The protruding length can be controlled.

Incidentally, the operation part 301 of the conventional cup-shaped brush is demonstrated based on FIG. 18 and FIG. 19 below. A brush 304 containing abrasive grains is placed on the surface of the holder 303 to form a donut shape. Holder 303 is secured to a central shaft 302 which is connected to a rotary driver. Thus, when the brush 304 is worn due to the operation of grinding the column member in the rectangular shape, the entire operation part 301 is replaced.

As shown in FIG. 6, the edge polishing polishing means 12 includes a rectangular base plate 121 disposed on a main body of an apparatus (not shown), and a moving means (on the base plate 121). And a pair of rails 122 arranged parallel to each other along a direction perpendicular to the direction in which 5) moves, and a carrier table 123 capable of slidably moving on the pair of rails 122. The edge grinding polishing means 12 is arranged in the front portion of the carrier table 123 and extends in the direction in which the moving means 5 moves, and a rotation driver for rotating the operating member 124. (125), a driver (126) for linearly moving the carrier table (123) forward and backward, and a mechanism (127) for adjusting the height of the operating member (124) by swinging the front portion of the base plate (121). do.

Both side ends of the rear part of the base plate 121 are supported by the support rod 121a. The base plate 121 swings with respect to the pivot point supported by the support rod 121a by a mechanism 127 that supports both side ends of the central portion of the base plate 121 and adjusts the height of the operating member 124. can do.

The operating member 124 includes a rotating shaft 124a disposed on its central axis, and a brush made of a resin wire containing abrasive grains and placed on the surface of the rotating shaft 124a to form a cylinder. The operation member 124 is disposed on the carrier table 123 by being held by the pair of support members 123a and extends along the direction in which the movement means 5 moves.

The rotary driver 125 is installed on the support table 123b fixed to the carrier table 123. The rotary driver 125 of this embodiment contains an electric motor. The rotational force of the rotary driver 125 can be transmitted to the operating member 124 by connecting the shaft 125a of the motor to the rotating shaft 124a of the operating member 124 by the circulation belt 125b.

The driver 126 for linearly moving the carrier table 123 may be, for example, a pulse motor, a ball screw coupled to the carrier table 124, which extends from the front part of the carrier table 123 to the rear part, and a pulse motor. It may also include a circulation belt (126a) connecting the drive shaft and the ball screw. The carrier table 123 can move forward and backward by rotating the ball screw. The driver 126 can approach and retract the operation member 124 with respect to the rectangular column member W by moving the carrier table 123 at a large interval. In addition, the driver 126 may determine the amount of supply to the operating member 124 by slightly moving the carrier table 123. The supply amount to the operating member 124 is determined by the central control means based on the measured value input to the control means by the measuring means.

A mechanism 127 for adjusting the height of the operating member 124 is disposed on the main body of the device (not shown). The operation member 124 is formed on the base plate 121 by a roller guide 128 that can move forward and backward, a pulse motor 129 connected to the roller guide 128, and a bracket 131. It includes the roller 130 is disposed.

As shown in Figs. 6 and 7, the roller guide 128 has an irregular column shape with a trapezoidal protrusion 128a. The inclined surface 128b formed on the trapezoidal protrusion 128a and the plane 128c formed on the upper surface of the roller guide 128 constitute a contour (ie, a linear cam) for guiding the roller 130. The roller guide 128 may include a ball screw coupled to the roller guide 128 and a pulse motor capable of moving the roller guide 128 by rotating the ball screw. Since the roller 130 disposed on the base plate 121 can roll on the inclined surface 128b of the contour guiding the roller 130, the front portion of the base plate 121 swings vertically. Due to the operation of the front portion of the base plate 121, the operation member 124 can move vertically. In the present embodiment, a pair of mechanisms 127 for adjusting the height of the operating member 124 are used for one operating member 124. Each of the pair of mechanisms 127 for adjusting the height of the operating member 124 is disposed on both sides of the base plate 121, so that the operating member 124 is for polishing the edges of the rectangular column member W. It can be placed in the best position. The best position is determined by the central control means.

As shown in FIG. 1, FIG. 8, and FIG. 9, the movement means 5 is arrange | positioned between a pair of plane polishing polishing means 11, and between a pair of edge polishing polishing means 12. FIG. It is arrange | positioned on the pair of rail 6 and 6 which are provided. The moving means 5 can move between the station 15 which feeds the member W into and out of the polishing line 10 and the station 17 which inverts the member W by driving the chain mechanism. The moving means 5 is a carrier 51 having a projection 51a for mounting a columnar member W having a rectangular shape, and the member W is positioned from the top surface after positioning so that the member W is disposed on the carrier 51. ), A holding mechanism 52 for holding. One end of the holding mechanism 52 is pivotally connected to the carrier 51 by a pin 53.

As a means for driving the moving means 5, a pulse motor or a linear motor coupled to the carrier 51, a ball screw, an electric motor, or a chain mechanism disposed between the pair of rails 6 and 6 can be used. have. These means for driving the moving means 5 can be controlled by the central control means.

As shown in FIG. 8, the rectangular column member W conveyed from the carry-in line 2 to the moving means 5 is between the end position of the carry-in line 2 and the start position of the carry-out line 3. It can be positioned by means of the positioning device 7, 8 which is arranged at. Cylinders 72 and 82 are fixed to brackets 71 and 81 supported on the main body of the device. Positioning elements 73 and 83 attached to the distal ends of the cylinders 72 and 82 position both sides of the rectangular column member W. As shown in FIG. In the case of positioning the member W, the positioning device 7 may be fixed as a reference line side for positioning the member W, and then the positioning device 8 determines the position of the member W. May be moved.

Moreover, the measuring apparatus 9A which measures the width of the rectangular column member W is arrange | positioned at the bracket 81 of the positioning apparatus 8. As shown in FIG. When the positioning element 83 moves to one side opposite to the other side of the member W disposed in contact with the positioning element 73, the measuring device 9A causes the measuring probe 9a to have the member W. The width of the member W is measured by extending the measurement probe 9a until it comes in contact with one side of the side. An optical sensor may be used in the measuring device 9A to measure the width of the member W. As shown in FIG. When an optical sensor is used for the measuring device 9A, the optical sensor measures the gap between the sensor and the side of the member W by emitting a beam on the side of the member W. As shown in FIG.

Moreover, as shown in FIG. 9, the measuring apparatus 9B which measures the height of the rectangular column member W arrange | positioned on the moving means 5 is the measuring probe 9b which can be extended and contacted. It includes. The measuring device 9B is disposed on the bracket 91 which is disposed adjacent to the moving means 5. The measuring device 9B can rotate horizontally. The measuring apparatus 9B has the same structure as the measuring apparatus 9A. In addition to the bracket 81 of the positioning device 8 (or the bracket 71 of the positioning device 7), an L-shaped bracket can be used, so that the bracket 81 is used instead of the bracket 91. ), Install the measuring device (9B).

The positioning elements 73, 83 of the positioning devices 7, 8 are spaced apart from the member W after the rectangular column member W is positioned and measured.

Transfer device which carries the columnar unpolished member W of the rectangular shape from the carrying-in line 2 to the moving means 5, or conveys the polished member W from the moving means 5 to the carrying-out line 3 ( 20 is disposed at the station 15 which is disposed at one end of the polishing line 10 while feeding and discharging the member W with respect to the polishing line 10.

As shown in FIGS. 1 and 10, the conveying device 20 has an import line 2 and an export line 3 above the end position of the import line 2 and the start position of the export line 3. Guided by a pair of guide bars 21, 21 extending in parallel along. In addition, the conveying apparatus 20 can move along the conveying line 1. The conveying apparatus 20 includes the movable part 22 which moves on the guide bars 21 and 21, and the lifting part 23 which raises a rectangular column member by holding under the movable part 22. As shown in FIG.

The movable part 22 raises and lowers the sliding member 221 which can slide on the guide bars 21 and 21, and the lifting part 23 to raise the member W, and on the sliding member 221. Guiding cylinder 223 comprising a cylinder 222 disposed and a guide rod 232 extending from the lifting portion 23 through the sliding member 221 to guide the lifting and lowering operation of the lifting portion 23. It includes. The pair of guiding cylinders 223 are arranged diagonally across the cylinder 222. For example, the sliding member 221 may be moved horizontally by a linear motor (not shown) disposed between the guide bars 21 and 21.

In order to raise the member W, the lifting portion 23 is connected to the end of the piston rod 222a of the cylinder 222 which raises and lowers the lifting portion 23, and the pair of guide rods 232 The plate part 231 fixed also at the end and the hook 233 which extends downward from four corners of the plate part 231 are included. The hook 233 has an L-shaped shape and hangs up the bottom surface of the columnar member W having a rectangular shape. In order to hold the member W, the hook 233 can move the member W forward by a driving means such as a linear motor (not shown) disposed between the plate portion 231 and the hook 233. And the member W can be held.

As mentioned above, the conveying apparatus 20 raises the rectangular unpolished member W by the lifting part 23, and conveys it on the moving means 5. Then, the lifting part 23 releases the member W and waits above the position. In addition, the conveying apparatus 20 holds the member W polished in the polishing line 10 and conveys it to the carrying out line 3.

The inversion apparatus 25 which inverts the rectangular column member W is arrange | positioned at the station 17 arrange | positioned at the other end of the grinding | polishing line 10. As shown in FIG.

As shown in FIG. 1 and FIG. 11, the inversion apparatus 25 is the support member 26 fixed to the frame 251 above the station 17 which inverts the rectangular column member W, and The member W can be lifted and lifted up, and the lifting portion 27 disposed below the support member 26 and the cross-section of the member W in the longitudinal direction are held to invert the member W. Drive device 28.

The support member 26 raises and lowers the support part 261 and the lifting part 27 to raise the rectangular column member W, and the cylinder 262 disposed above the support plate 261. And a guiding cylinder 263 that extends from the lifting portion 27 through the support plate 261 and includes a guide rod 272 that guides the lifting and lowering operation of the lifting portion 27. The pair of guiding cylinders 263 is arranged diagonally across the cylinder 262.

In order to raise the member W, the lifting portion 27 is connected to the end of the piston rod 262a of the cylinder 262 which raises and lowers the lifting portion 27 and the pair of guide rods 272 The plate part 271 which is fixed also at the edge part and the hook 273 extended below from the four corners of the plate part 271 are included. The hook 273 has an L-shaped shape and hangs up the bottom surface of the rectangular column member W. As shown in FIG. In order to hold the member W, the hook 273 can move the member W forward by a driving means such as a linear motor (not shown) disposed between the plate portion 271 and the hook 273. have.

A pair of drive device 28 which inverts the rectangular column member W is arrange | positioned at the straight line perpendicular to the direction to which the hook 273 of the lifting part 27 moves. The devices 28 are opposed to each other. The device 28 includes a rotation driver 281, a linear motion driver 282, a driver 284 having a pulse motor 283 linearly moving grasping elements at short intervals, and a member ( And a holding element 285 for inverting the member W by holding both end surfaces of W) in the longitudinal direction thereof.

The rotary driver 281 and the retaining element 285 are integrally connected by an intermediate rod 286. The drive device 28 has a configuration similar to that of the polishing means 11 for planar polishing. That is, the ring gear 286a is fixed to the outer side surface of the intermediate rod 286. In addition, the ring gear 286a is engaged with the pinion gear 283a connected to the pulse motor 283. The linear motion driver 282 is connected to the rotation driver 281. Therefore, by driving the pulse motor or cylinder arranged in the linear motion driver 282, the linear motion driver 282 can approach or retract the retaining element 285 with respect to the rectangular column member W. As shown in FIG.

Moreover, the measuring apparatus which measures the height and width of the rectangular column member W is arrange | positioned not only in the station 15 but in the station 17 which inverts the member W. As shown in FIG. These devices are attached to the brackets.

As described above, the reversing device 25 is disposed on the moving means 5 and is polished in the polishing line 10 to lift the rectangular column member W, which is conveyed from the polishing line 10. It raises by (27). Then, after the retaining element 285 holds the member W again, the member W is inverted to 90 ° or 180 ° and again placed on the moving means 5.

Incidentally, the central control means (not shown) can control a number of tasks of the device, for example

1) an operation of determining the supply amount for polishing the member by each polishing means based on the result of calculating the measured value of the measuring device capable of measuring the height and width of the rectangular column member W;

2) controlling the rotation or movement of the driver, and

3) As will be described later, it is possible to control the operation of sequentially controlling the operation of the device.

Hereinafter, the operation of the apparatus having the above-described configuration will be described based on FIGS. 1 to 13.

When the rectangular column member W reaches the end position of the carry-in line 2, the movable part 22 of the conveying apparatus 20 moves from the station 15 along the guide bars 21 and 21 to the carry-in line 2. Move to the end position of). Then, by driving the cylinder 222, the lifting portion 23 is lowered to a position where the hook 233 of the lifting portion 23 can engage the bottom surface of the member (W). After the four hooks 233 reach and engage the member W, the lifting portion 23 is raised to the carrier 51 of the moving means 5 waiting for the member W at the station 15. To carry.

After the columnar member W having a rectangular shape is disposed on the moving member 5, the member W is positioned by the positioning devices 7 and 8 and held by the holding mechanism 52. When the member W is positioned, the positioning element 73 serving as the reference line side extends to a predetermined position. Then, the positioning element 83 serving as the movable side extends forward to position the member W. As shown in FIG.

At the same time, in order to measure the width and height of the rectangular column member W, the measuring probe 9a of the measuring device 9A for measuring the width and the measuring probe 9b of the measuring device 9B for measuring the height. Extends until it contacts one side or top surface of the member (W). The measured values of the width and height of the member W are input to the central control means. The central control means determines the supply amount to each working member of the polishing means for polishing the member W. As shown in FIG. Each operating member moves to a position determined by the central control means.

After the rectangular column member W is positioned and measured on the moving means 5, the measuring probes 9a, 9b of the positioning element 83 and the measuring devices 9A, 9B are removed from the member W. Retreat The moving means 5 holding the member W moves from the station 15 to the station 17 on the polishing line 10.

When the rectangular column member W is moved on the polishing line 10 by the moving means 5, the side surface of the member W is polished, and the upper edge of the member W is chamfered by polishing the edge. . In the first embodiment, the member W comprises the following steps:

1. a step in which the upper both edges (i), (ii) of the member W disposed on the moving means 5 are chamfered by grinding the edges thereof,

2. After inverting the member W to 180 °, the upper both edges iii and (iv) of the member W are chamfered by grinding the edge,

3. both sides W1 and W2 of the member W are polished, and

4. After inverting the member W to 90 °, both side surfaces W3 and W4 of the member W are treated in a step of polishing.

In the first embodiment, all polishing steps are performed based on the above steps 1 to 4, while the member W moves between the station 15 and the station 17. Before the part W passes through the polishing means 11, 12, the operating portion of the polishing means 11, 12 moves toward the polishing line 10, controlling the amount of supply to each operating portion.

One of the operating portions of the polishing means 11 and one of the operating portions of the polishing means 12 is arranged on one side of the polishing line 10 where the loading line 2 is located. The other of the operating portions of the polishing means 11 and the other of the operating portions of the polishing means 12 are arranged on the other side of the polishing line 10 in which the carrying out line 3 is located.

Therefore, when controlling the position of the operating portion, the operating portions of the polishing means 11 and 12, which are arranged on the same side as the side where the carry-in line 2 is located, serve as the reference side and are fixed at a predetermined position. The operating portions of the polishing means 11 and 12, which are arranged on the same side as the side on which the carry-out line 3 is located, move to the appropriate positions based on the calculated feed amounts for the respective operating portions.

In the above steps 1 to 4, only necessary polishing means are driven in each step. That is, in steps 1 and 2, only the operation members 124 and 124 of the edge polishing roughing means 12A and the edge polishing finishing means 12B are driven. In steps 3 and 4, only the operating part 112 of the roughing means 11A for planar polishing and the first and second finishing means 11B, 11C for planar polishing is driven.

Between steps 1 to 4, after the rectangular column member W moves from the station 15 to the station 17 (“access route”), the inverted member W at the station 17 is moved to the station ( Returning to 15) ("return root"), the actuation member or actuation portion of each polishing means returns from the actuation position to the initial position.

Table 3 shows the operating conditions of each polishing means. In the present embodiment, the speed at which the moving means 5 moves is 0.6 m / mim.

[Table 3]

Table 3. Working conditions of the grinding means

In step 1, the upper both edges i and (ii) of the rectangular columnar member W are polished by grinding the edges while the member passes between the pair of roughing means 12A and 12A for edge polishing. It is chamfered. The actuating member 124 with the rolled brush rotates so that the surface of the actuating member 124 moves from above to below with respect to the edge of the member W (“downward polishing”). As shown in FIG. 13, the center of the operating member 124 is located about 0-20 mm above the upper surface of the member W, and the contact point between the upper surface of the member W and the outer surface of the operating member 124 is It is preferable to be located at 1-3 mm toward the center of the member W from the side surface. By these conditions, the member W is chamfered by grinding the edge thereof without generating a recessed area on the upper surface or the side surface of the member W.

When a rectangular column member W is manufactured by cutting an ingot of a substrate by a band saw, most of the minute cracks generated on the edge of the member W can be removed by the roughing described above.

After the edge of the rectangular column member W is chamfered by the edge grinding roughing step 12A, the edge is further chamfered by the edge polishing finishing means 12B. The center position and rotation direction of the operating member 124 of the finishing means are set equal to the roughing means. By this chamfering step by the finishing means, the micro cracks remaining near the edge of the member W can be removed, and the roughness at the edge of the member W can be improved.

After the step of chamfering the edge of the rectangular column member W, the member W is moved to the station 17 which inverts the member W. Then, after the width and height of the member W are measured, the member W is reversed by the inverting device 25 of the station 17.

In the station 17, the rectangular column member W disposed on the moving means 5 is moved to a predetermined position of the station 17, and the holding mechanism 52 holding the member W has its upper surface. Freed from Next, the lifting part 27 of the reversing apparatus 25 descends, and the hook 273 engages with the bottom surface of the member W. Next, as shown in FIG. Next, the member W is raised to a predetermined position.

After the holding elements 285 of the pair of drive devices 28 hold both end surfaces of the rectangular column member W in the longitudinal direction, the member W is inverted to 180 degrees. The inverted member W is again placed on the carrier 51 of the moving means 5 and held by the holding mechanism 52.

The rectangular columnar member W disposed on the moving means 5 moves toward the station 15. While the member W returns to the station 15, the polishing means do not work.

In step 2 of FIG. 12, when the rectangular column member W, which is inverted to 180 ° and moves toward the station 15, reaches the end position of the polishing line 10, both edges of the upper portion of the member W (iii) and (iv) are chamfered by the roughing means and the finishing means as in step 1.

Next, both sides W1 and W2 of the rectangular column members W facing each other are polished at the same time. The member W conveyed to the station 17 moves along the return route without being reversed at the station 17. After the member W returns to the station 15, the operating portion 112 of the roughing means 11A for planar polishing, the first finishing means 11B for planar polishing, and the second finishing means 11C for planar polishing. Each one of them moves forward, so each actuating portion 112 acts as a baseline side. Then, both sides of the member W are polished as in step 3 of FIG.

In the planar polishing polishing means 11, the operation part 112 may rotate clockwise or counterclockwise. However, the pair of operating portions 112 rotate in the same direction with respect to the central axis thereof.

When the rectangular columnar member W is manufactured by roughing means by cutting the ingot of the substrate with a band saw, it is generated on the edge of the member W and extends inwardly from the surface of the member W. Most microcracks can be removed. Then, the remaining microcracks of the member W can be removed by the first and second finishing means.

After step 3, the rectangular columnar member W reaches the station 17. As described above, the member W is inverted by 90 ° at the station 17 and returns to the station 15. While the member W moves back to the station 17, the remaining side surfaces W3 and W4 of the member W are polished. Thus, step 4 is completed.

After all steps of polishing the rectangular column member W are completed, the member W returns from the station 17 to the station 15 and is discharged from the moving means 5 to the conveying device 20. It is arranged on the conveyor 4 of the carrying out line 3 by this.

By polishing the columnar member W having a rectangular shape, the maximum roughness Ry = 9.7 μm of the side surface of the member W before the polishing step passes through the roughing means 11A for plane polishing, and then Ry = 2.5 μm. Can be improved. After passing between the first polishing means 11B for planar polishing, it may be improved in the range of Ry = 1.2 to 1.7 mu m. After passing between the second polishing means 11C for planar polishing, it can be further improved to Ry = 0.7 mu m. Therefore, by the apparatus for polishing the member W, the maximum surface roughness of the member W can be improved to less than Ry = 2.0 μm, which is the target maximum value of the roughness.

After all the steps of polishing the rectangular column member W are completed, the depth of the micro crack in the member W can be improved in the range of 1 to 3 mu m. This is the target value of the depth of the microcracks.

Next, 2nd Embodiment of the method of grinding the rectangular column member W is demonstrated. In the second embodiment, the above steps 1 and 2 are performed simultaneously.

In other words,

1. The upper both edges i and (ii) of the member W arranged on the moving means 5 are chamfered by grinding the edges, and both sides W1 and W2 of the member W are simultaneously Polishing step,

2. after inverting the member W to 180 °, the upper both edges iii, (iv) of the member W are chamfered by grinding the edge, and

3. After inverting the member W to 90 °, a step is performed in which both side surfaces W3 and W4 of the member W are polished.

In step 1, after chamfering the two upper edges (i) and (ii) of the member W, the planar polishing roughing means in which the two side surfaces W1 and W2 are disposed at a position adjacent to the edge polishing polishing means. It is polished by 11A. In addition, the two pairs of finishing means 11B and 11C for planar polishing polish the two side surfaces W1 and W2 of the member W. As shown in FIG. In the second embodiment, most of the minute cracks can be removed by improving roughness of the side and edge of the member W by roughing means. Then, the remaining minute cracks of the member W can be removed by further improving the roughness of the side and the edge of the member W by the finishing means.

Steps 2 and 3 of the second embodiment are the same as steps 2 and 4 of the first embodiment, and thus descriptions of these steps are omitted.

In addition, in the operating portion or the operating member of the polishing means, if the roughing means and the finishing means are appropriately arranged, the member may be polished while the member is returned by inverting the rectangular column member W. Thus, the operating time can be reduced.

In the apparatus and method for grinding the rectangular column member W according to the above-described embodiment, the edge of the member W divided by the band saw by the apparatus M is formed by roughing means and finishing means. It is chamfered by continuously grinding the edges, and the side surface of the member W is continuously polished by the roughing means and the finishing means. Thus, the roughness of the surface and the edge of the member can be improved. By polishing the member W, most of the minute cracks generated on the surface of the member W when cut by the band saw can be removed by roughing means. Then, the remaining microcracks of the member W can be removed by the finishing means. Therefore, the maximum roughness of the side surface of the member W can be improved to less than Ry = 2.0 µm. In addition, the depth of the micro crack in the member W can be improved in the range of 1 to 3㎛.

12 A of edge grinding roughing means, 12 A of grinding means for edge grinding, 11 A of grinding means for surface grinding, 1st grinding means 11B for surface polishing, and 11 C of 2nd finishing means for surface polishing are polished It is arranged along the line 10. Thus, while the rectangular column member W disposed on the moving means 5 moves from the station 15 toward the station 17, the edges or sides of the member W are roughing means and finishing means. Polished by Or at the same time, the edges and sides of the member W can be polished by the roughing means and the finishing means. Thus, since the operating time can be significantly reduced, the cost of manufacturing the disk substrate can be reduced.

In addition, the device M has the following operations:

1. An operation of conveying the rectangular column member W conveyed by the carrying-in line 2 to the polishing line 10 by the conveying apparatus 20 arrange | positioned at the station 15,

2. an operation of inverting the member W at a predetermined angle by the inversion device 25 disposed at the station 17, and

3. The work of conveying the member W polished by the conveying device 20 from the polishing line 10 to the carry-out line 3 can be automatically performed.

Thus, by installing the apparatus M in a facility for manufacturing a disk substrate from an ingot formed from raw materials, the apparatus M can be controlled to operate automatically by the central control means. Thus, the cost of manufacturing the disk substrate can be reduced.

In addition, since the width | variety and the height of the rectangular column member W by which the apparatus M was divided | segmented by the band saw by the measuring apparatus 9A, 9B can be measured, each grinding | polishing for grinding | polishing the member W is carried out. The supply amount of the means can be controlled by the central control means. Thus, the member W having a high dimensional accuracy can be provided.

This invention is not limited to embodiment mentioned above. If the edges and side surfaces of the rectangular column members W can be roughed and finished, the number of roughing means and finishing means is not limited to the above.

Claims (7)

A conveying line 1 for conveying a rectangular columnar member W, A polishing line 10 which is movable in a direction perpendicular to the conveying line 1 and has moving means 5 for holding the columnar member W having a rectangular shape, A pair of first polishing means for simultaneously polishing two side surfaces of the rectangular column member, A pair of second polishing means for simultaneously chamfering two edges by polishing the edges of the rectangular column member, The rectangular column member W is introduced into the polishing line 10 from the conveying line 1, and fed into the conveying line 1 from the polishing line 10, and the polishing line 10. A station 15 disposed at one end of the station, and It includes a station 17 for inverting the rectangular column member (W) disposed at the other end of the polishing line 10, And the pair of first polishing means and the pair of second polishing means are arranged along the polishing line (10). The method of claim 1, The first polishing means comprises rough-grinding means using a brush-type tool and finishing-grinding means adjacent to the roughing means and using a brush-type tool, Apparatus for polishing a columnar member having a rectangular shape. The method of claim 1, The second polishing means comprises a rectangular shape comprising a roughing means using a brush-type tool or a grinding-wheel-type tool and a finishing means adjacent to the roughing means and using a brush-type tool or a polishing wheel-type tool. A device for polishing a column member of the. The method according to any one of claims 1 to 3, The brush type tool of the first polishing means is a segmented-type brush, As the rotating body 112a of the operating unit 112 for polishing the member W, the operating unit 112 is fixed to one end of the rotating hollow shaft 114, and the other end of the rotating hollow shaft 114 Is a rotating body 112a connected to the rotary driver 113, The holder 110 is fixed to one end of the center shaft 119 inserted into the rotary hollow shaft 114, the other end of the center shaft 119 is connected to a linear motion driver, the center shaft 119 Holder 110, which can move forward and backward along its central axis, As the plurality of brush bundles 14, each end of the plurality of brush bundles 14 is inserted and fixed in the hole 112b disposed in the holder 110, and the brush 14 is the hole 112b. And the other end of the plurality of brushes 14 are inserted into an opening of the holding cap 112c disposed at an end surface of the rotating body 112a, and the holding cap A plurality of brush bundles 14 protruding from 112c, A slotting hole 112d disposed in a barrel of the rotating body 112a along an axis of the central shaft 119 and the rotating hollow shaft 114, and And a pin (110a) inserted into the slot forming hole (112d) and connected to the holder (110) through the slot forming hole (112d). The method according to any one of claims 1 to 4, The moving means includes a holding means for holding the columnar column member W having a rectangular shape, and wherein the moving means can move between the pair of first polishing means and the pair of second polishing means. Apparatus for polishing a columnar member of the shape. 6. The method according to any one of claims 1 to 5, The polishing line 10 measures the dimensions of the width and height of the rectangular column member W before moving the rectangular column member W in the polishing line 10 to polish the rectangular column member W. Apparatus for polishing a columnar member having a rectangular shape, further comprising measuring means. 7. The method according to any one of claims 1 to 6, The conveying line 1 is a carrying-in line 2 for conveying a rectangular column unpolished member W to the station 15 and a carrying-out for conveying the polished member W from the station 15. Further comprising a line (3), wherein the import line (2) and the export line (3) are arranged on each side of the station (15).

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