WO2009084101A1

WO2009084101A1 - Prismatic member polishing device

Info

Publication number: WO2009084101A1
Application number: PCT/JP2007/075252
Authority: WO
Inventors: Hisashi Matsumoto; Masao Hirano
Original assignee: Sintobrator, Ltd.
Priority date: 2007-12-28
Filing date: 2007-12-28
Publication date: 2009-07-09
Also published as: KR20100084467A; CN101583463A; CN101583463B; TW200931509A; KR101301258B1; TWI483301B

Abstract

A polishing device which reduces a failure rate in generating a substrate by minimizing the depth of micro cracks. The polishing device (M) has a carrying line (1) composed of a carry-in line (2) for carrying an unpolished prismatic member (W) and a carry-out line (3) for carrying out a polished prismatic member (W) and a polishing line (10) having plane polishing devices (11) and corner polishing devices (12) disposed at positions respectively opposed to each other. Moreover, each plane polishing device (11) has a plane polishing device (11A) for rough polishing, a plane polishing device (11B) for first finish and a plane polishing device(11C) for second finish which are juxtaposed. Each corner polishing device (12) has a corner polishing device (12A) for rough polishing and a corner polishing device (12B) for finish which are juxtaposed. Between the respective plane polishing devices (11) and corner polishing devices (12), the prismatic member (W) placed on a traveling truck (5) is traveled to be polished.

Description

Polishing device for prismatic member

The present invention is an apparatus for polishing a crystalline prismatic member made of a hard and brittle material. More specifically, the present invention is a micro-device present in a prismatic member of a hard and brittle material before obtaining a substrate made of ceramics, glass, silicon, or the like. The present invention relates to a polishing apparatus for removing cracks.

This kind of prismatic member made of hard and brittle material is made by dividing the ingot formed by pouring the raw material into a mold and cutting it with a cutting machine such as a band saw, and cutting the prismatic member into a wire saw or the like A substrate (wafer) is formed by slicing to a thickness of 1 mm or less by a machine, and after packaging, inspection, and surface roughness inspection, the product is packaged and shipped.

As shown in Table 1 and FIG. 14, the maximum roughness of the surface is Ry 9 to 11 and the depth is 70 to 80 μm, as shown in Table 1 and FIG. Microcracks exist, and when the substrate is formed by slicing the prismatic member using a cutting machine such as a wire saw in the next step, the microcracks are cracked due to the microcracks. The occurrence rate of defective products with chipping or chipping (hereinafter referred to as “defective rate”) is 30 to 40%, and the defective products are discarded. Therefore, in order to reduce the defect rate, the prismatic member is improved by polishing the four surfaces along the longitudinal direction with a grindstone so that the maximum roughness is Ry6-7 and the microcrack depth is about 10-15 μm. However, the defect rate is still 20-30%.

Therefore, in order to reduce the depth of microcracks existing on the side surface of the prismatic member for the purpose of reducing the defect rate due to cracks / chips generated in the process of manufacturing the substrate, Patent Document 1 in which the side surface is polished and the surface roughness is flattened to Ry8 or less is disclosed.
Japanese Patent No. 3649393

In recent years, the demand for substrates made of hard and brittle materials has been increasing, and there has been a strong demand for greatly reducing the defect rate (2% or less) due to cracks and chipping of the substrates. The location of the microcracks in the prismatic member that is the cause is caused not only by the side surfaces disclosed in Patent Document 1, but also by the microcracks present at the corners. Need to be removed.

The present invention solves the above-mentioned problem, and in the process of manufacturing a substrate by slicing a prismatic member obtained by dividing and cutting an ingot formed with a raw material, the defect rate due to cracking or chipping of the substrate is 2% or less. In order to reduce this, a prismatic member made of a hard and brittle material that improves the surface roughness of the side surface and corner portion of the prismatic member to Ry2 or less to reduce the microcrack depth to 3 μm or less and improves productivity. An object of the present invention is to provide a polishing apparatus.

The present invention, which has been made to solve the above-mentioned problems, includes a conveyance line for conveying the prismatic member, and traveling means for gripping the prismatic member and traveling in a direction perpendicular to the conveyance line. A polishing line, a pair of first polishing means for simultaneously polishing both side surfaces of the prismatic member, and a pair of second polishing means for simultaneously chamfering both corners on the polishing line are provided in parallel. An entrance / exit station for allowing the prismatic member to enter / exit the polishing line from the transfer line is disposed at one end of the prism, and a reversing station for reversing the prismatic member is disposed at the other end of the polishing line. The member polishing apparatus is the invention of claim 1.

In addition, the first polishing means according to the invention of claim 1 is a prismatic member polishing apparatus in which rough brushing means and finish polishing means by a brush method are arranged in parallel.

Further, the second polishing means according to the invention of claim 1 comprises a brush type rough polishing means and a finish polishing means arranged side by side, and / or a prismatic member polishing apparatus having a grindstone type. It is set as invention of 3.

Further, the brushing method of the first polishing means according to any one of the first to third aspects of the present invention is a polishing process attached to the other end of a hollow rotating shaft having a rotational drive connected to one end. A rotating body, a holder inserted in the hollow of the rotating shaft, a linear drive source connected to one end, and attached to the other end of the operating shaft which is movable forward and backward in the axial direction, and a plurality of the holders A plurality of brush bundles having one end inserted into and fixed to the brush insertion hole in a detachable manner, and the other end inserted into and protruded from a locking base formed on the end face of the rotating body. A segment type brush comprising a long hole in the body of the rotating body in the same direction as the axial center of the rotating shaft and the operating shaft, and a pin fitted in the long hole in the holder The polishing apparatus for the attached prismatic member is defined as the invention of claim 4.

The traveling means according to any one of claims 1 to 4 includes gripping means for gripping the prismatic member, and the pair of first polishing means and the pair of second polishing means. A polishing apparatus for a prismatic member configured to be able to travel between the two is defined as the invention of claim 5.

Further, the polishing line according to any one of claims 1 to 5 is provided with measuring means for measuring the width dimension and the height dimension of the prismatic member before the prismatic member is run and polished. A polishing apparatus for a rectangular columnar member is an invention according to claim 6.

Further, the transfer line according to any one of claims 1 to 6 includes a carry-in line that conveys an unpolished prismatic member between the entry / exit stations, and a polished prismatic shape. A polishing apparatus for a prismatic member configured to operate by being divided into an unloading line for unloading the member is defined as an invention of claim 7.

According to the polishing apparatus for a prismatic member according to any one of claims 1 to 4, the unpolished prismatic member that has been carried in by the transfer line and has arrived at an entry / exit station disposed at one end of the polishing line is allowed to travel on the polishing line. Is moved between the first polishing means for polishing the opposing side surfaces of the prismatic member, or the second polishing means for performing chamfering polishing processing of the opposite corner portions, Polishing of the two side surfaces of the columnar member or chamfering of the two corners are performed. Next, the prismatic member reaches the other end of the polishing line by the traveling means, is inverted by the reversing station, is transferred again to the traveling means of the polishing line, and the reversing work is completed. It is run between the first polishing means or the second polishing means and the other two side surfaces are polished, or the corners are chamfered to complete the four side surfaces and the four corners. The prismatic member that has been polished is returned to one end of the polishing line, transferred to a transfer line via an entry / exit station, and automatically carried out. As described above, a series of processing steps from carrying in an unpolished prismatic member to polishing the four side surfaces in the longitudinal direction of the prismatic member, chamfering the four corners, and carrying out the polished prismatic member are automated to increase productivity. Can be improved.

In the invention according to claim 2, since the first polishing means for polishing the side surface of the prismatic member includes a rough polishing means and a final polishing means, the ingot formed with the raw material is cut into a cutting machine such as a band saw. When forming the prism-shaped member divided and cut by the above method, most of the microcracks generated on the side surfaces are efficiently removed by the rough polishing means, and the polished surface is finely polished by the finish polishing means to remove the microcracks. The depth can be reduced to 1 to 3 μm.

In the invention according to claim 3, the second polishing means for chamfering the corners of the prismatic member includes a rough polishing means and a finish polishing means, similarly to the first polishing means, and is divided and cut. The corners of the prismatic member are R-finished to remove most of the microcracks generated in the vicinity of the corners by rough polishing means, and then polished more finely by finishing polishing means to reduce the microcrack depth to 1 to 3 μm. There are a brush method to reduce, and a grindstone method that can remove most of the microcracks generated in the vicinity of the corner portion by chamfering the corner portion of the prismatic member, and a crystal that is a raw material of the prismatic member Since the depth of the microcracks that exist depends on the material and type of the body, the second polishing means can be selected from the brush method or the grindstone method, and corners can be processed. When deep chamfering and precise finishing are required, corners can be chamfered by a combination of a grinding wheel method and a brush method.

In the inventions according to the first to third aspects, the side surfaces and corners of the prismatic member divided and cut from the ingot forming the raw material have 10 to 80 μm generated at the time of the divided cutting as shown in Table 1 above. Since the microcrack depth can be reduced to 1 to 3 μm and the surface roughness can be improved to Ry2 or less, the prismatic member is sliced to a thickness of 1 mm or less using a cutting machine such as a band saw. Thus, cracks and chips generated due to the microcracks when the substrate is formed can be eliminated, and the defect rate of the substrate formed by slicing can be suppressed to 2% or less.

In a fourth aspect of the present invention, the brush system used for the first polishing means for polishing the side surface of the prismatic member is a brush bundle in which a brush made of resin or steel containing abrasive grains is bundled. The brush bundle that has been worn by polishing can be easily replaced by being detachably inserted and fixed, and a pin that fits into a long hole formed in the body of the rotating body of the polishing portion is attached to the holder. By attaching the holder, the brush bundle is inserted and fixed, the rotational power of the rotational drive source is transmitted to the holder via the rotating shaft and the rotating body of the polishing portion, and the brush bundle is rotated. The amount by which the forward / backward motive power of the drive source is transmitted through the operating shaft and the tip of the brush bundle protrudes from the locking base can be controlled. Note that the amount of protrusion of the tip of the brush bundle is controlled by inputting to the control means (not shown) the time when the brush bundle is in contact with the prismatic member for polishing or the number of polished prismatic members is counted. The calculated result is output to the linear drive source and transmitted via the operating shaft to be controlled. By this control, the tip of the brush is supported by the locking base even during polishing and bent (waisted back). ) And the protrusion amount can be kept constant at all times, so that the polishing force on the polishing surface of the tip of the brush is always constant, and uniform polishing can be achieved.

According to a fifth aspect of the present invention, the gripping means provided in the traveling means reliably grips the prismatic member transferred to the traveling means traveling between the first polishing means or the second polishing means of the polishing line. Since the prismatic member and the traveling means are integrated, the operation of the prismatic member traveling on the polishing line and passing through the first polishing means or the second polishing means is ensured. It is.

The measuring means provided in the polishing line of the invention according to claim 6 measures the width dimension and the height dimension of the unpolished prismatic member, and inputs a signal of the measurement result to a control device (not shown), By controlling the polishing start position and polishing feed amount of the first polishing means and the second polishing means for the prismatic member, the desired microcrack depth is 1 to 3 μm and the maximum surface roughness is Ry2 or less. It is something that can be done.

The conveyance line of the invention according to claim 7 is divided into a carry-in line for carrying an unpolished prismatic member into a polishing line via an entry / exit station and a carry-out line for carrying out a polished prismatic member from the polishing line. Thus, the unpolished prismatic member can be carried in and the polished prismatic member can be efficiently separated and conveyed to the polishing apparatus of the present invention.

The polishing apparatus according to the embodiment (hereinafter referred to as “this apparatus”) performs, for example, planar polishing of four side surfaces and chamfering of corners formed in the length direction of a square columnar member having a length of □ 125 to 155 mm × 200 mm. The prismatic member of the embodiment described below will be described using a prismatic member formed into a quadrangular prism by dividing an ingot made of glass into a longitudinal direction and a lateral direction with a band saw. .

When this prismatic member is divided and cut from the ingot, as shown in Table 1 and FIG. 14, the side surface of the prismatic member has the maximum surface roughness Ry9 to 11, and the depth of the microcracks is About 70 to 80 μm at maximum from the surface.

Hereinafter, as shown in Table 2, a brush method using a resin brush containing abrasive grains as a raw material is adopted, and the first polishing means is changed to one rough polishing flat polishing apparatus and the grain size of the abrasive grains is different. A polishing apparatus according to an embodiment of the present invention, comprising two finished polishing flat polishing apparatuses, a second polishing means including one rough polishing corner polishing apparatus and one finishing polishing corner polishing apparatus. This will be described with reference to the drawings.

The apparatus M shown in FIG. 1 includes a conveying line 1 that conveys a prismatic member W, a polishing line 10 that is extracted from the conveying line 1 and arranged in a direction perpendicular to the conveying line 1, and a prismatic shape. A traveling carriage 5 on which the member W is placed and travels in the polishing line 10. An input / output station 15 is disposed at one end of the polishing line 10 on the conveying line 1 side, and the other end of the polishing line 10 is positioned at the other end. A reversing station 17 is arranged.

The transfer line 1 is arranged with an input line 2 for transferring an unpolished prismatic member W on the upstream side (right front side in FIG. 1) with the input / output station 15 in between, and on the downstream side (left back side in FIG. 1). ) Is provided with a carry-out line 3 for conveying the polished prismatic member W. The carry-in line 2 and the carry-out line 3 are provided with

transport conveyors

4 and 4 having a plurality of convex mounting

parts

4a and 4a arranged at equal intervals at predetermined intervals, and the convex mounting parts of the

transport conveyors

4 and 4 The prismatic member W is supported and conveyed on 4a and 4a.

In the polishing line 10, a plurality of planar polishing apparatuses 11 that perform planar polishing of the side surfaces of the prismatic member W and a plurality of corner polishing apparatuses 12 that perform chamfering of the corners are arranged along the traveling direction of the prismatic member W. It is arranged to set up. Either the planar polishing apparatus 11 or the corner polishing apparatus 12 may be arranged on the base side or the tip side along the traveling direction. However, in the illustrated example, the corner polishing apparatus 12 is on the base side, that is, Arranged on the entrance / exit station 15 side, the flat polishing apparatus 11 is arranged on the reversing station 17 side.

Further, in the embodiment, as shown in FIGS. 2 to 3, in the embodiment, three flat polishing apparatuses 11 are arranged in parallel, and the rough polishing flat polishing apparatus 11A and the first finishing flat polishing apparatus 11B are sequentially arranged from the input / output station 15 side. In this embodiment, two corner polishing apparatuses 12 are arranged side by side as shown in FIGS. 2 to 3, and are used for rough polishing in order from the input / output station 15 side. A corner polishing apparatus 12A and a finishing corner polishing apparatus 12B are disposed.

A pair of the planar polishing device 11 and the corner portion polishing device 12 are arranged so as to face each other with the prismatic member W traveling on the polishing line 10 therebetween, and both sides of the traveling prismatic member W or Both upper corners are polished simultaneously.

In addition, the polishing unit of the flat polishing device 11 and the corner polishing device 12 employs a synthetic resin brush system containing abrasive grains composed of brushes containing abrasive grains. The composition of the synthetic resin brush system with abrasive grains is configured as shown in Table 2.

As shown in FIG. 4, the planar polishing apparatus 11 includes a rotation drive source 113 that drives the polishing processing unit 112 to rotate on an L-shaped bracket 111 that is mounted on the machine body, and a front-rear drive unit 117 that drives the polishing processing unit 112 back and forth. Are disposed integrally and on the opposite side with the bracket 111 interposed therebetween.

The rotation drive source 113 is constituted by a motor, and is arranged so as to be movable in the axial direction on a horizontal plane with respect to the vertical portion 111a of the bracket 111 together with the polishing processing portion 112. The rotation drive source 113 and the polishing processing part 112 are connected by a rotating shaft 110 constituted by an intermediate rod 114b and a small rod 114c. A ring gear 114a is attached to the intermediate rod 114b, and a pinion gear 116a connected to a pulse motor 116, The intermediate rod 114b is finely moved along the axial direction together with the rotational drive source 113 and the polishing processing unit 112 to set the cut amount of the polishing processing unit 112. The cutting amount is calculated and set by inputting a result measured by a measuring instrument described later to a central control device (not shown).

For example, if the ring gear 114a is screwed with the intermediate rod 114b, the intermediate rod 114b can be linearly moved back and forth by the rotation of the ring gear 114a.

The front / rear drive unit 117 is constituted by, for example, a cylinder mechanism, and is fixed to the lateral portion 111b of the bracket 111. The piston rod 117a of the cylinder mechanism is connected to the ring member 118 of the rotation drive source 113, and the rotation drive source 113 is moved forward and backward together with the polishing unit 112 by the movement of the piston rod 117a in the axial direction.

The polishing processing portion 112 of the planar polishing apparatus 11 described above is shown in FIGS. 5, 15, and 16, and the brush bundle 14 is formed with a plurality of brush insertion holes 112b in the holder 110 as shown in FIG. The brush bundle 14, which is bundled in the shape of a long bar by caulking one end of a brush containing abrasive grains into the brush insertion hole 112b, is inserted and fixed, and is formed in the body of the rotating body 112a of the polishing portion 112. By attaching a pin 110a to be fitted to 112d to the holder 110, the holder 110 to which the brush bundle 14 is inserted and fixed receives the rotational power of the rotational drive source 113 to the holder 110 and the rotating shaft 114 and the polishing portion 112. The brush bundle 14 is transmitted through the rotating body 112a to rotate, and the brush bundle 14 contacts the prismatic member W. Information on the polishing time or the number of polished prismatic members W is input to a control means (not shown), and the advancing / retreating power of the linear drive source that is driven according to the calculation result is transmitted via the operating shaft 119 and brushed. The amount by which the tip end of the bundle 14 protrudes from the locking base 112c is controlled.

For reference, the conventional polishing processing part 301 of this type cup-shaped brush will be described with reference to a holder 303 attached to a rotary shaft 302 connected to a rotary drive source as shown in FIGS. A brush 304 including abrasive grains is implanted and fixed in a donut shape. When the polishing process proceeds and the brush 304 is worn, the brush body 301 is replaced integrally.

As shown in FIG. 6, the corner polishing apparatus 12 is a rectangular plate-shaped base plate 121 placed on a machine body (not shown), and 2 disposed on the base plate 121 toward the traveling road side of the traveling carriage 5. The rails 122 arranged side by side, the moving table 123 that slides on the rails 122, and the polishing processing unit 124 and the polishing processing unit arranged in the front-rear direction of the moving table 123 (the direction toward the traveling path side of the traveling carriage 5). The rotary drive source 125 of 124, the front-and-rear drive part 126 which linearly drives the moving base 123 in the front-rear direction, and the up-and-down movement adjustment part 127 which swings and drives the front part of the base plate 121 are configured.

The base plate 121 is supported by a pair of support rods 121a at both ends of the rear portion and is disposed so that the front portion can swing around the support rod 121a, and both ends of the center portion are supported by the vertical movement adjustment portion 127. .

The polishing unit 124 is a roll brush in which a resin brush containing abrasive grains is implanted on a rotating shaft 124 a of a shaft center part so as to form a cylindrical body, and the polishing unit 124 is paired with a movable table 123. It is supported oppositely by the support 123a.

The rotational drive source 125 is mounted on a support base 123b fixed to the movable base 123, and in the embodiment is configured by a motor. The shaft 125a of the motor and the rotary shaft 124a of the polishing processing part 124 are connected by a belt 125b. Thus, the rotation of the rotation drive source 125 can be transmitted to the polishing unit 124.

The front / rear drive unit 126 incorporates, for example, a pulse motor, transmits the rotation of the pulse motor drive shaft to the moving table 123 via the belt 126a, and rotates, for example, a ball screw built in the moving table 123 along the front / rear direction. By doing so, the movable table 123 can be moved in the front-rear direction. The front / rear driving unit 126 moves the moving base 123 greatly to approach and separate from the prismatic member W traveling on the polishing processing unit 124 and sets the cut amount of the polishing processing unit 124 by a minute movement. The depth of cut is calculated and set by inputting a result measured by a measuring instrument, which will be described later, to the central control apparatus.

The vertical movement adjusting unit 127 is disposed on a machine body (not shown), a roller guide 128 that can move in the front-rear direction, a pulse motor 129 that is connected to the roller guide 128, and a bracket 131 on the base plate 121. And a roller 130.

As shown in FIG. 6 or FIG. 7, the roller guide 128 is formed in a deformed prismatic shape having a trapezoidal protrusion 128a at the top, and is formed on the inclined surface 128b formed on the trapezoidal protrusion 128a and the upper surface of the roller guide 128. The flat surface portion 128c forms a roller guide surface. The roller guide 128 is configured to be movable in the front-rear direction by, for example, incorporating a ball screw therein and rotating the ball screw by rotational driving of a pulse motor. Then, by sliding the roller 130 disposed on the base plate 121 on the roller guide surface and running on the inclined surface 128b, the front portion of the base plate 121 is swung in the vertical direction, and the polishing portion 124 is moved up and down. In addition, the vertical movement adjustment unit 127 is disposed in a pair at both ends of the base plate 121 and moves the polishing processing unit 124 so as to be disposed at the optimum position set by the central control device with respect to the prismatic member W. .

As shown in FIG. 1, FIG. 8, or FIG. 9, the traveling carriage 5 is mounted on a pair of

rails

6, 6 laid between a pair of planar polishing apparatuses 11 and a pair of corner polishing apparatuses 12 that are arranged to face each other. Is configured to be able to travel between the entry / exit station 15 and the reversing station 17 by chain drive or the like, and is provided with a mounting table 51 including a protruding mounting unit 51a on which the prismatic member W is mounted, After positioning the placed prismatic member W, a pressing member 52 is provided as a gripping means for pressing and locking the prismatic member W from the upper surface. One end of the presser member 52 is pivotally supported by the pin 53 so as to be rotatable.

As a means for moving the traveling carriage 5, a method of operating a pulse motor or a linear motor built in the mounting base 51, or a ball screw extending from the traveling carriage 5 is arranged between the pair of

rails

6 and 6. There are a method by operation of a motor or a method by chain drive, and each method is controlled and driven by a centralized control device (not shown).

In addition, the positioning of the prismatic member W transferred from the carry-in line 2 to the traveling carriage 5 is performed by positioning portions 7... Disposed at the end portion of the carry-in line 2 and the start end portion of the carry-out line 3 as shown in FIG. 8 is performed. In other words, the

cylinder devices

72 and 82 are arranged on the

brackets

71 and 81 supported by the airframe, and the positioning of the side surface portion of the prismatic member W is performed by the

positioning members

73 and 83 attached to the tip portions of the

cylinder devices

72 and 82. Will be performed. At this time, one positioning portion 7 is fixed as the reference side, and the other positioning portion 8 is set as the moving side.

Then, a width dimension measuring device 9A for measuring the width dimension of the prismatic member W is attached to the bracket 81 of the positioning portion 8. The width dimension measuring device 9A is configured such that the other positioning member 83 moves toward the opposing side surface of the prismatic member W that is in contact with the reference positioning member 73, and at the same time, the measuring portion 9a is extended to expand the prismatic member W. The width dimension of the prismatic member W is measured by bringing it into contact with the side surface portion. The width dimension measuring unit 9A may be an optical sensor. In this case, light is projected onto the side surface of the prismatic member W and the distance from the side surface of the prismatic member W is measured.

Further, as shown in FIG. 9, a height dimension measuring instrument 9 </ b> B that measures the height dimension of the prismatic member W placed on the traveling carriage 5 has a measuring unit 9 b that can be expanded and contracted. The height dimension measuring device 9B is mounted on a bracket 91 which is vertically installed in the vicinity so as to be rotatable in the horizontal direction, and the height measuring device 9B is configured and operated in the same manner as the width measuring device 9A. In place of the bracket 91, an L-shaped additional bracket is arranged so as to extend above the prismatic member W from the bracket 81 of the positioning portion 8 (or the bracket 71 of the positioning portion 7). The device 9B may be attached.

The

positioning members

73 and 83 of the

positioning portions

7 and 8 are operated in a direction away from the prismatic member W after the prismatic member W is positioned and dimensioned.

An unpolished prismatic member W is transferred from the carry-in line 2 to the traveling carriage 5 or the polished prismatic member W is carried out from the traveling carriage 5 to the entry / exit station 15 disposed at one end of the polishing line 10. The transfer device 20 for transferring to 3 is arranged.

As shown in FIGS. 1 and 10, the transfer device 20 includes a pair of guide bars 21, 21 that are arranged side by side so as to cross the upper portion between the end portion of the carry-in line 2 and the start end portion of the carry-out line 3. Is arranged so as to be movable along the conveying direction of the conveying line 1, and moves on the guide bars 21, 21, and is arranged below the moving unit 22 to sandwich the prismatic member W And a work lifter portion 23 for lifting.

The moving part 22 extends so that the sliding body 221 that slides on the guide bar 21, the lifting cylinder 222 that is arranged on the sliding body 221 and drives the work lifter part 23 to move up and down, and the sliding body 221 is inserted from the work lifter part 23. And a guide cylinder 223 of a guide rod 232 for guiding the lift of the work lifter unit 23, and a pair of guide cylinders 223 are provided diagonally across the elevation cylinder 222. The sliding body 221 is disposed between the guide bar 21 so as to be movable in the horizontal direction by arranging, for example, a linear motor (not shown).

The work lifter portion 23 is connected to the tip portion of the piston rod 222a of the lifting cylinder 222 and fixed to one end of the pair of guide rods 232, and a claw portion 233 disposed downward from the bottom corners of the plate portion 231. It has. The claw portion 233 is formed in an L shape toward the prismatic member W in order to engage the lower surface of the prismatic member W, and a linear motor (not shown) is interposed between the plate portion 231 and the like, for example. It moves toward the prismatic member W and is arranged so that it can be clamped.

As described above, when the transfer device 20 lifts and holds the unpolished prismatic member W conveyed by the carry-in line 2 on the work lifter 23 and transfers it onto the traveling carriage 5, the prismatic shape of the work lifter 23. The holding of the member W is released and the apparatus waits upward. Further, the polished prismatic member W polished by the polishing line 10 is sandwiched and transferred to the carry-out line 3.

The reversing station 17 disposed at the other end of the polishing line 10 is provided with a reversing device 25 for reversing the prismatic member W.

As shown in FIGS. 1 and 11, the reversing device 25 is disposed above the reversing station 17 and supported by the frame body 251, and is disposed below the supporting portion 26 to sandwich the prismatic member W. A work lifter 27 to be lifted and a reversal drive unit 28 that reverses by sandwiching a longitudinal end face of the prismatic member W are provided.

The support portion 26 is disposed on the support plate 261, and an elevating cylinder 262 that is disposed on the support plate 261 to drive the work lifter portion 27 up and down. The support portion 26 extends from the work lifter portion 27 so as to be inserted through the support plate 261. And a guide cylinder 263 of a guide rod 272 that guides raising and lowering, and a pair of guide cylinders 263 are provided diagonally across the elevation cylinder 262.

The work lifter 27 is connected to the tip of the piston rod 262a of the lifting cylinder 262, and a plate 271 for fixing one end of the pair of guide rods 272, and a claw 273 disposed downward from the bottom corners of the plate 271. The claw portion 273 is formed in an L shape toward the prismatic member W in order to engage the lower surface of the prismatic member W, and between the plate portion 273, for example, a linear motor (not shown) Is disposed so as to be movable toward the prismatic member W.

The reversing drive unit 28 is disposed in a pair so as to face each other in a direction orthogonal to the moving direction of the claw portion 273 of the work lifter unit 27, and includes a rotation drive source 281, a linear drive unit 282, and a pulse motor 283. A minute linear driving unit 284 that performs minute linear movement and a gripping unit 285 that grips the longitudinal end surface of the prismatic member W and reverses the prismatic member W are provided.

The rotation drive source 281 and the gripping portion 285 are integrally connected by an intermediate rod 286 and have substantially the same configuration as that of the planar polishing device 11, and the intermediate rod 286 is fitted with a ring gear 286a and meshed with the pinion gear 283a. Are connected to a pulse motor 283. Further, the linear drive unit 282 fixes the rotation drive source 281 and drives the cylinder device or the pulse motor arranged in the linear drive unit 282 in a direction in which the gripping unit 285 approaches and separates toward the prismatic member W. Moving.

Also, in the reversing station 17, as in the measuring instrument arranged at the entry / exit station 15, measuring instruments for measuring the width direction and height dimension of the prismatic member W are respectively supported by the brackets.

As described above, the reversing device 25 grips and lifts the prismatic member W on the traveling carriage 5 that has been polished and transported by the polishing line 10 with the work lifter 27 and re-gripped with the reversing unit. The columnar member W is inverted 90 ° or 180 ° and transferred again onto the traveling carriage 5.

It should be noted that the measurement results of the measuring instruments 9A and 9B that measure the width and height dimensions of the prismatic member W are calculated to set the cutting depth of the polishing portion of each polishing apparatus, and the rotation control of each drive source The sequence control of the operation command and the operation of the apparatus described below is performed by a central control apparatus (not shown).

Next, the operation of the polishing apparatus M configured as described above will be described with reference to FIGS.

When the prismatic member W conveyed in the carry-in line 2 reaches the end of the carry-in line 2, the transfer device 20 is activated to move the moving unit 22 from the load / unload station 15 along the guide bar 21 to the end of the carry-in line 2. Move to the position of the part. Then, the work lifter portion 23 lowers the claw portion 233 to a position where it engages with the lower surface of the prismatic member W by the operation of the elevating cylinder 222. When the four claw portions 233 approach the prismatic member W and engage with the prismatic member W, the work lifter portion 23 rises and is prismatic on the mounting table 51 of the traveling carriage 5 waiting at the entry / exit station 15. The member W is placed.

When the prismatic member W is placed on the traveling carriage 5, the prismatic member W is positioned by the

positioning portions

7 and 8 and is gripped by the pressing member 52. At this time, the positioning member 73 on the reference side is extended to a predetermined position, and the prismatic member W is positioned by extending the positioning member 83 on the moving side.

At the same time, the measuring part 9a of the width dimension measuring instrument 9A and the measuring part 9b of the height dimension measuring instrument extend and come into contact with the side surface or the upper surface of the prismatic member W, respectively. The dimension is measured. Then, the width dimension and height dimension of the prismatic member W are input to the centralized control device, and the cutting amount of the polishing processing portion when polishing with each polishing device is set, and each polishing processing portion is set at a predetermined position. Move to.

When the holding of the prismatic member W to the traveling carriage 5 and the measurement are completed, the positioning member 83 and the measuring

portions

9a and 9b of the measuring instruments 9A and 9B are separated from the prismatic member W. Then, the traveling cart 5 on which the prismatic member W is placed travels from the entrance / exit station 15 of the polishing line 10 toward the reversing station 17.

When the prismatic member W travels on the polishing line 10, the side surface processing and the corner chamfering processing of the prismatic member W are performed. In this case, in the first embodiment, as shown in FIG.
(1) Chamfering the upper corner portions (i) and (ii) of the prismatic member W placed on the traveling carriage 5 is performed.

(2) After the prismatic member W is turned 180 °, the corners (iii) and (iv) are chamfered.

(3) Surface processing of the side surfaces W1 and W2 of the prismatic member W is performed.

(4) After the prismatic member W is turned 90 °, the side surfaces W3 and W4 are processed.

All polishing processes in the first embodiment are performed in the above four steps (1) to (4) by causing the prismatic member W to travel between the entry / exit station 15 and the reversing station 17. Before the prismatic member W passes through each of the polishing

apparatuses

11, 12, the polishing processing part moves toward the traveling path of the prismatic member W along the set cut amount of the polishing processing part in each polishing

apparatus

11, 12. Moved.

At this time, in each of the polishing apparatuses disposed opposite to the carry-in line 2 side and the carry-out line 3 side, the polishing apparatus on the carry-in line 2 side is fixed at a preset position with the reference side as the polishing apparatus. The polishing part of the polishing apparatus on the line 3 side moves based on the set cutting amount.

Furthermore, among the four steps (1) to (4), only the polishing portion used in each step is moved. That is, in the steps (1) and (2), the polishing

portions

124 and 124 in the rough polishing corner portion polishing apparatus 12A and the final polishing corner portion polishing apparatus 12B are moved, and the steps (3) and (4) are performed. Then, the polishing

parts

112, 112, and 112 of the rough polishing flat polishing apparatus 11A and the final polishing

flat polishing apparatuses

11B and 11C are moved.

In each process, the prismatic member W that has traveled from the entry / exit station 15 to the reversing station 17 finishes the “going process”, and the prismatic member W that has reached the reversing station 17 and has been reversed is removed from the reversing station 17. In the “return process” for returning to the entry / exit station 15, the polishing processing unit of each moving polishing apparatus is once moved back to the original position.

The polishing conditions of each polishing apparatus are as shown in Table 3. In the embodiment, the traveling speed of the traveling carriage 5 is 0.6 m / min.

Therefore, in the step (1), when the prismatic member W passes between the pair of rough polishing

corner polishing apparatuses

12A and 12A, both corners (i) and (ii) on the upper surface of the prismatic member W are chamfered. Is done. Each of the roll brushes of the polishing unit 124 is rotated (down cut) from the upper side to the lower side of the corner part. As shown in FIG. 13, the center position of the polishing portion 124 is about 0 to 20 mm from the upper surface of the prismatic member W, and the outer peripheral surface of the polishing portion 124 is 1 from the polishing side surface. It is desirable to set the position so as to enter about 3 mm. Thereby, it is possible to perform chamfering without forming a recess on any of the upper surface side and the side surface.

Most of the microcracks generated in the vicinity of the corners of the prismatic member W obtained by dividing and cutting from the ingot with a band saw are removed by rough polishing in the chamfering process.

Once the corners are chamfered by the rough polishing corner polishing apparatus 12A, the corners are then chamfered by the finishing corner polishing apparatus 12B. The rotation direction and the center position of the polishing portion 124 are set in the same manner as the rough polishing corner portion polishing apparatus 12A. By this processing, the remaining microcracks near the corners are removed and the surface roughness of the corners is improved.

When the chamfering process of the corner portion is completed, the prismatic member W is transferred to the reversing station 17 and measured by the reversing device 25 after measuring the width dimension and the height dimension.

In the reversing station 17, when the prismatic member W placed on the traveling carriage 5 reaches a predetermined position, the pressing member 52 gripping the upper surface of the prismatic member W is released and the reversing device 25 The work lifter portion 27 is lowered and engaged with the lower surface of the prismatic member W by the claw portion 273 to raise the prismatic member W to a predetermined position.

Then, when the gripping member 285 of the pair of gripping portions 28 grips the end surface in the longitudinal direction of the prismatic member W, the prismatic member W is inverted 180 ° by the rotation drive source 281. The inverted prismatic member W is again placed on the mounting table 51 of the traveling carriage 5 and is gripped by the pressing member 52.

The prismatic member W remounted on the traveling carriage 5 travels toward the entry / exit station 15. During this return process, polishing is not performed.

The prismatic member W that is turned 180 ° and travels toward the entry / exit station 15 and reaches one end of the polishing line 10 is chamfered at the corners ((iii) and (iv)) of step (2) shown in FIG. Rough polishing and finish polishing are performed in the same manner as in step (1).

Next, surface processing on the opposite side surfaces (W1 and W2) of the prismatic member W is performed simultaneously. In this case, the prismatic member W conveyed to the reversing station 17 enters the “return process” without being reversed. When the prismatic member W reaches the loading / unloading station 15, the polishing processing portions 112 on the moving side of the rough polishing flat polishing apparatus 11A, the first finishing flat polishing apparatus 11B, and the second finishing flat polishing apparatus 11C are on the reference side. It moves toward each polishing apparatus 11, and enters the surface processing of the step (3) shown in FIG.

In the planar polishing apparatus 11, the polishing processing unit 112 may be forward or reverse with respect to the traveling direction of the prismatic member W, but the opposing polishing processing unit 112 is the same with respect to the traveling direction of the prismatic member W. The direction of rotation.

In the rough polishing, most of the microcracks generated from the side surface of the prismatic member W obtained by dividing and cutting from an ingot with a band saw are removed, and the first finish polishing and the second finish polishing are performed. The remaining microcracks will be removed.

When the prismatic member W that has completed step (3) reaches the reversing station 17, the prismatic member W is reversed 90 ° by the same action as described above, and returns from the reversing station 17 to the entry / exit station 15. The prismatic member W travels again toward the reversing station 17 to perform the planar processing of the remaining side surfaces (W3 / W4), and the step (4) is completed.

This completes the polishing process for one prismatic member W, returns from the reversing station 17 to the entry / exit station 15, is detached from the traveling carriage 5 by the transfer device 20, and is transferred to the conveyor 4 in the carry-out line 3. Will be carried out.

As a result of the above polishing process, the maximum surface roughness of the side surface of the prismatic member W before the polishing process was Ry 9.7, but the maximum side surface roughness of the prismatic member W that passed through the rough polishing planar processing apparatus 11A. The surface roughness is flattened to Ry2.5, and the maximum surface roughness of the side surface of the prismatic member W that has passed through the first finishing planar polishing apparatus 11B is flattened to Ry1.2 to 1.7. The maximum surface roughness on the side surface of the prismatic member W that passed through the finishing flat polishing apparatus 11C was flattened to Ry0.7, and the target surface roughness Ry2 or less could be achieved.

In addition, the microcrack depth of the prismatic member W after the final finish polishing was able to achieve the target of 1 to 3 μm.

Next, in the polishing method according to the second embodiment, the steps (1) and (2) are simultaneously performed. In other words,
(1) Chamfering the upper corner portions (i) and (ii) of the prismatic member W placed on the traveling carriage 5 and chamfering both side surfaces W1 and W2 of the prismatic member W.

(3) After the prismatic member W is turned 90 °, the side surfaces W3 and W4 are processed.

In the step (1), the prismatic member W on which the corners (i) and (ii) have been chamfered is subjected to both side surfaces W1 and W2 by the rough polishing planar processing device 11A disposed adjacent thereto. The surface roughing is performed, and the finishing of both side surfaces W1 and W2 is further performed by the double finishing flat

surface polishing apparatuses

11B and 11C. Even in the case of this form, the corners and side portions are roughened by roughing to remove most of the microcracks, and finishing is further flattened to further remove the microcracks by further flattening the surface roughness. Become. Since the steps (2) and (3) in the second embodiment are the same as the steps (2) and (4) in the first embodiment, the description thereof will be omitted.

Furthermore, if the rough polishing polishing unit and the finishing polishing processing unit are selectively arranged in the polishing processing unit in each polishing apparatus, the necessary reversal of the prismatic member W is performed during the “returning step”. Thus, the polishing process can be performed, and the work can be further shortened.

As described above, according to the polishing method and the polishing apparatus according to the embodiment, the prismatic member W divided and cut by the band saw performs rough polishing on the chamfering process of the corner part and the planar process of the side surface part in the apparatus M, respectively. The surface roughness can be improved by performing continuous polishing and finish polishing, and most of the microcracks generated by cutting with a band saw can be removed by rough polishing, and further removed by finishing. Therefore, the maximum surface roughness at the side surface can be made Ry2 or less, and the depth of the microcracks can be made 1 to 3 μm.

Moreover, along the polishing line 10, a rough polishing corner polishing device 12A, a finishing polishing corner polishing device 12B, a rough polishing flat polishing device 11A, a first finishing flat polishing device 11B, and a second finishing flat polishing device. Since the prismatic member W placed on the traveling carriage 5 is traveled from the entry / exit station 15 to the reversing station 17, rough machining and finishing of the corners or side portions are performed since the 11C is arranged in parallel. Processing, or roughing and finishing of corners and roughing and finishing of side surfaces can be performed at the same time. It has become possible.

Further, the apparatus M transfers the prismatic member W conveyed on the carry-in line 2 to the polishing line 10 by the transfer device 20 provided at the entry / exit station 15, or the prismatic member by the reversing device 25 at the reversing station 17. Since W can be reversed to a predetermined angle, and the prismatic member W polished by the polishing line 10 can be transferred to the carry-out line 3 by the transfer device 20, the apparatus M is formed with raw materials. The substrate can be installed in a manufacturing process facility for manufacturing a substrate from the ingot, and can be automatically operated in accordance with a command from the centralized control device, so that a substrate with reduced manufacturing costs can be provided.

Furthermore, the width and height dimensions of the prismatic member W cut with a band saw can be measured by the measuring instruments 9A and 9B, and the cutting amount of the polishing portion of each polishing apparatus can be set by the central control device. A highly accurate prismatic member W can be provided.

In the present invention, the present invention is not limited to the above-described embodiment. For example, if the corner portion and the flat portion of the prismatic member W are subjected to roughing and finishing, the number of each polishing apparatus is It is not limited to the above.

It is a schematic perspective view which shows the grinding | polishing apparatus of one Embodiment of this invention. It is a top view in FIG. It is a front view in FIG. It is a perspective view which shows the plane polishing apparatus in the polishing apparatus of FIG. It is a side view which shows the grinding | polishing process part in the plane polishing apparatus of FIG. FIG. 2 is a perspective view showing a corner polishing apparatus in the polishing apparatus of FIG. FIG. 7 is a side view showing a vertical movement adjusting unit of the corner polishing apparatus in FIG. FIG. 2 is a side view showing a traveling carriage and a positioning portion in FIG. FIG. 2 is a front view showing a height measuring device for a prismatic member in FIG. FIG. 2 is a side view showing a transfer device of the polishing apparatus in FIG. FIG. 2 is a front view showing a reversing device of the polishing apparatus in FIG. It is a flowchart figure which shows a process order. It is explanatory drawing which shows the processing state at the time of chamfering the corner | angular part of a prismatic member. It is a cross-sectional schematic diagram explaining the state of the micro crack which exists in a prismatic member. It is a partially cutaway front view of the segment brush which is the brush system of this invention. It is a bottom view in FIG. It is a front view of the brush bundle used for the segment brush in FIG. It is a front view of the cup-shaped brush which is the conventional brush system. It is a bottom view in FIG.

Explanation of symbols

M Polishing device 1 Transport line 2 Carry-in line 3 Carry-out line 5 Traveling carriage (traveling means)
52 Presser member (gripping means)
7, 8 Positioning part 9A Width measuring instrument (measuring means)
9B Height dimension measuring instrument (measuring means)
DESCRIPTION OF SYMBOLS 10 Polishing line 11A Rough surface polishing apparatus 11B Finishing surface polishing apparatus 11C Finishing surface polishing apparatus 14 Brush bundle 15 I / O station 17 Reversing station 20 Transfer apparatus 25 Reversing apparatus 110 Holder 110a Pin 112 Polishing processing part (segment brush)
112a Rotating body 112b Brush insertion hole 112c Locking cap 112d Long hole 12A Rough polishing corner polishing device 12B Finish polishing corner polishing device 124 Polishing processing portion (roll brush)

Claims

A polishing line (10) provided with a conveying line (1) for conveying the prismatic member (W) and traveling means capable of gripping the prismatic member (W) and traveling in a direction perpendicular to the conveying line (1). ) And a pair of first polishing means for simultaneously polishing both sides of the prismatic member (W) and a pair of second polishing means for simultaneously chamfering both corners on the polishing line (10). An entry / exit station (15) for allowing the prismatic member (W) to enter and exit the polishing line (10) from the transfer line (1) is disposed on one end side of the polishing line (10). A polishing apparatus for a prismatic member, wherein an inversion station (17) for inverting the prismatic member (W) is disposed at the other end of (10).
2. The prismatic member polishing apparatus according to claim 1, wherein the first polishing means comprises a brush-type rough polishing means and a finish polishing means arranged in parallel.
2. The prismatic member polishing apparatus according to claim 1, wherein the second polishing means comprises a brush-type rough polishing means and a finish polishing means arranged in parallel and / or a grindstone method. 3.
In the brush method of the first polishing means, the rotating body (112a) of the polishing portion (112) attached to the other end of a hollow rotating shaft (114) having a rotation driving source (113) continuously provided at one end. And a holder (110) attached to the other end of the operating shaft (119) inserted into the hollow of the rotating shaft (114) and connected to a linear drive source at one end so as to be movable forward and backward in the axial direction. A plurality of brush insertion holes (112b) are formed in the holder (110), and one end of the holder (110) is detachably inserted and fixed to the brush insertion hole (112b), and the other end is attached to the end surface of the rotating body (110a). A segment-type brush composed of a plurality of brush bundles (14) which are inserted into and protruded from the formed locking base (112c), and the rotating shaft (114) is mounted on the body of the rotating body (112a). And the axis of the actuating shaft (119) The long hole (112d) is formed in the same direction as the direction, and a pin (110a) fitted to the long hole (112d) is attached to the holder (110). The polishing apparatus for a prismatic member according to any one of the above.
The travel means includes gripping means for gripping the prismatic member (W), and is configured to travel between the pair of first polishing means and the pair of second polishing means. The polishing apparatus for a prismatic member according to any one of claims 1 to 4.
The said grinding | polishing line (10) was equipped with the measurement means which measures the width dimension and height dimension of this prismatic member (W) before driving | running | working and grinding | polishing a prismatic member (W). The polishing apparatus for a prismatic member according to any one of claims 1 to 5.
The conveyance line (1) has a carry-in line (2) for conveying an unpolished prismatic member (W) with the entry / exit station (15) in between, and a polished prismatic member (W). The polishing apparatus for a prismatic member according to any one of claims 1 to 6, wherein the polishing apparatus is operated separately from an unloading line (3).