TWI449095B - Cutting device, cutting device unit and cutting method - Google Patents

Description

Cutting device, cutting device unit and cutting method

The present invention relates to a cutting device, a cutting device unit, and a cutting method, and more particularly to a cutting device, a cutting device unit, and a cutting method for a simple structure in which a workpiece such as a semiconductor wafer is cut into wafers.

Conventionally, a workpiece such as a semiconductor wafer or an electronic component material has been cut and divided into individual wafers by using a dicing apparatus. The cutting device includes: a table on which the workpiece is placed, a blade that cuts the workpiece, a table feed mechanism that relatively moves the workpiece to the blade, a spindle that mounts the blade to be rotatable, and the spindle is movably Supported spindle movement mechanism.

The technique described in JP-A-2002-280328 (Patent Document 1) and JP-A-11-77461 (Patent Document 2) is known. The technique of Patent Document 1 is as shown in FIG. 11, in order to secure a safe mechanical arrangement without increasing the floor space, the loading 埠2 is provided at the rear right side of the casing (the body portion of the cutting device D) 1, and A workpiece cleaning unit 3 is provided on the right front portion of the casing 1.

Further, the workpiece (wafer) cutting processing portion 4 is disposed at the center portion of the left side of the housing 1, and the table 5 is provided at the center portion of the right side of the housing 1, thereby being configured to be capable of cleaning the loading cassette 2 and the workpiece. Part 3 access. Further, since the table feed mechanism 6 is disposed at the center portion in the front-rear direction of the casing 1, the workpiece W travels in the center portion in the front-rear direction of the casing 1 far from the operator M, and travels in the left-right direction. Further, 7 in the figure is a blade for cutting the workpiece W, 8 is a spindle unit for arranging the blade 7 to be rotatable, and 9 is a guide rail (rail mechanism) for supporting the spindle unit 8.

Further, according to the technique of Patent Document 2, the rail mechanism is disposed on the left side of the square frame, and the table is disposed to cross the horizontal direction of the square frame. Further, the spindle unit and the guide rail are intersected on the left side of the square frame body, and the workpiece is cut at the intersection portion.

In general, when the workpiece cutting process is performed, the vibration generated during the cutting process is suppressed in addition to the required workpiece positioning accuracy. Therefore, in particular, the portion for supporting the workpiece cutting process portion has sufficient rigidity.

[Previous Technical Literature] [Patent Literature] 【0007】

[Patent Document 1] Japanese Patent Laid-Open 2002-280328

[Patent Document 1] Japanese Patent Laid-Open No. 11-77461

The techniques described in the above Patent Documents 1 and 2 have the following problems. In other words, in the technique described in Patent Document 1, the workpiece travels in the left-right direction of the casing, and since the blade is located at a central portion away from the front and rear direction of the frame of the operator, it is difficult to perform the so-called exchange of the blade. The problem of blade swapping operations.

Also, in order to confirm whether the blade is straight with respect to the table, the operator must confirm from the front side of the cutting device to the right side or the left side each time. Moreover, if the degree of straightness of the blade is not good, it is necessary to adjust the straightness of the blade while confirming.

At this time, the operator must move to a position where the blade and the guide do not interfere, for example, the right side of the frame to confirm/adjust the straightness of the blade. However, when the straightness confirmation/adjustment operation is performed from the right side surface of the casing, since the operator is away from the blade, it is difficult to confirm/adjust the straightness.

Furthermore, when the blade is mounted, the end face grinding for adjusting the flatness is performed on the spindle end face which is the reference surface of the blade. In this case, since the spindle end face has a large influence on the straightness of the blade to the workpiece, there is It is necessary to perform the aforementioned end face grinding very precisely. Regarding this end face grinding, the end face of the spindle is precisely ground using sand to express the straightness. Specifically, the grinding wheel is pushed against the end surface of the main shaft, and the main shaft is slowly rotated while removing the projections on the end surface of the main shaft, and the straightness of the end surface of the main shaft is continuously increased.

In the case of performing the above-described end face grinding, for example, in the case of the double-spindle cutting device having the opposite type as shown in Fig. 11, one spindle end face can be seen from the front side of the cutting device, but the other spindle end face faces the cutting device. On the back side, only one spindle end face can be ground from the front of the cutting device. Further, since the access distance from the front side of the dicing apparatus to the end surface of the main shaft is long, the grinding operation of the end surface of the main shaft is extremely difficult, and it is highly skilled.

Further, when the other end face of the main shaft is ground, the operator winds on the back side of the cutting device to perform the grinding operation, and a high degree of technique is required for performing the high-precision end polishing. That is, the accuracy after the blade exchange or the blade exchange is confirmed not only from the front side of the cutting device but also to the back side or the side surface side of the cutting device to confirm the accuracy.

On the other hand, in the cutting device of Patent Document 2, in particular, in order to suppress the vibration generated during the cutting of the workpiece, the portion for supporting the workpiece cutting portion has sufficient rigidity, but the degree of rigidity is also high. The weight of the cutting device is increased. Moreover, the aforementioned heavy portion is biased to one side of the center of the cutting device, so that the overall center of gravity position is also displaced from the center of the cutting device and becomes unbalanced. As a result, the cutting device breaks the entire balance and is easily vibrated, and the cutting accuracy provided in the cutting device cannot be maintained.

Moreover, it is necessary for the table feed mechanism and the rail mechanism to be mounted on a pedestal having sufficient rigidity. For example, in the case of a thick plate on a table feed mechanism or the like, the entire cutting device becomes very heavy. Therefore, a beam is placed between the pillars provided at the four corners of the frame, and a guide rail and a table feeding mechanism are provided on the beam.

In this case, since the rigidity of the beam itself is required to be able to suppress the rigidity of the rail and the table feed mechanism, it is necessary to set the thickness of the beam that is placed between the pillars to be large enough. The overall weight of the cutting device is increased, thus forcing the cutting device to be expensive to manufacture and the equipment to be too large.

Furthermore, the adjustment of the nozzle position can also be a problem. There are two types of nozzles, one is to supply lubricating water in the direction of rotation of the blade, and the other is to supply cooling water for the frictional heat of the cooling blade when cutting. The nozzle for lubrication is supplied by one nozzle along the rotation of the blade, and the nozzle for cooling the blade is supplied from the left and right sides of the blade toward the side of the blade. The orientation adjustment of these nozzles is very subtle, and in the case where the orientation is not correctly set, it becomes impossible to obtain the desired lubrication at the cutting point. Therefore, the vibration is generated by the frictional resistance at the time of cutting, or the resistance of the cutting process is increased by the self-heating of the blade, and as a result, the cutting speed may be lowered or the cutting accuracy may be deteriorated.

Further, since the number of nozzles is changed after the predetermined number of wafers are cut, it is necessary to adjust the position and orientation of the nozzles at any time. Regarding the nozzle adjustment, as shown in FIG. 8, two blades are opposed to each other on the same axis, and the number of directions to be adjusted at the time of maintenance is changed to three directions.

In the cutting device described in Patent Document 1, in addition to blade exchange, the adjustment of the position and orientation of the nozzle is extremely difficult. Further, when such nozzle adjustment, the above-described end surface polishing, and the like are performed, not only the front side of the cutting device but also the side surface side or the back side of the cutting device has to be adjusted.

As described above, in the case of maintenance from the front, side, or back of the cutting device, the following problems occur. That is, in a device in which a plurality of mass production methods of the same type of cutting device are arranged in parallel, it is required to arrange the cutting devices adjacent to each other without a gap. In addition, there is often a case where an operator performs work while monitoring a plurality of cutting devices.

In the cutting device described in Patent Document 1, it is difficult to arrange the cutting devices so as to be adjacent to each other without gaps in order to perform maintenance in all directions of the cutting device. Therefore, it is necessary to arrange the adjacent cutting devices to each other with a certain interval. Therefore, when a plurality of cutting devices are to be arranged, the floor space is designed to have a very large average area of each unit. problem.

There is also a problem with the space in the cutting device unit. Since the cutting device described in Patent Document 1 generates a dead space in the four corners of the cutting device, the space is effectively prevented from being used, and as a result, there is a problem that the function of the cutting device requires a large equipment space.

Therefore, in order to solve the problem, the blade exchange, the straightness, the coaxiality confirmation, the end face adjustment, the nozzle adjustment, and the like can be easily performed, and the maintenance workability is improved. The object of the present invention is to solve the problem by stabilizing the center of gravity of the cutting device and reducing the installation space, thereby deriving a technical problem to be solved.

The present invention provides a cutting device having the following configuration, comprising: a table on which a workpiece is placed; a blade for cutting the workpiece; and the table is provided for the purpose of the invention. a workpiece table feeding mechanism for relatively moving the workpiece toward the blade; a spindle for rotatably mounting the blade; and a spindle moving mechanism for supporting the spindle, the spindle moving mechanism and the table feeding mechanism Arranged orthogonally, the spindle moving mechanism and the table feeding mechanism are disposed on a diagonal line of a square frame of a square cutting device, and a substantially central portion of the cutting device is disposed The workpiece cutting unit is provided with a workpiece exchange unit at a front portion of the cutting device, and a water mist exhaust unit is disposed on a side opposite to the workpiece exchange unit via the workpiece cutting unit.

According to this configuration, the spindle moving mechanism and the table feeding mechanism are disposed on a diagonal line of the square frame of the square cutting device, and a workpiece cutting processing portion is disposed at a substantially central portion of the cutting device, and A workpiece exchange portion is provided at the front of the cutting device.

That is, the table feeding mechanism for moving the blade relative to the blade and the rail mechanism for supporting the spindle, the table feeding mechanism and the rail mechanism are orthogonal to each other, and the mechanisms are arranged in a square square frame On the diagonal line of the body, the workpiece cutting portion is at the substantially central portion of the cutting device. Therefore, even if the workpiece cutting portion has high rigidity and heavy weight, the part with a large weight is at the center of the cutting device. The department is consistent, so the balance of the center of gravity of the cutting device as a whole is stable. As a result, it is difficult to transmit vibration during processing. The structure of the cutting device can always maintain the machining accuracy set in the cutting device.

In short, since the workpiece cuts the processing portion substantially at the center of the cutting device, since the portion requiring the highest rigidity and precision is located substantially at the center of the cutting device, the center of gravity of the cutting device is slightly aligned with the center position of the cutting device. The balance of the cutting device as a whole is stabilized. Therefore, it is possible to prevent the vibration of the workpiece from being cut off as much as possible.

Further, since the workpiece exchange portion is at the front portion of the cutting device, any blade that faces the front side from the cutting device can be easily exchanged when the blade is exchanged. Further, the confirmation and adjustment of the mounting state of the blade after the blade exchange, for example, the adjustment of the coaxiality of the blade and the confirmation/adjustment of the straightness of the blade to the workpiece can be easily performed from the front side of the cutting device. In this case, the straightness of the blade to the workpiece can be confirmed from the front side of the cutting direction of the workpiece.

Moreover, the coaxiality of the mounting of the insert to the main shaft can be observed in the vertical direction of the cutting direction of the workpiece. Furthermore, both the adjustment of the coaxiality of the blade and the confirmation/adjustment of the true straightness of the blade to the workpiece can be observed in a direction inclined by 45 degrees from the front side of the cutting device, so that the light can be executed on the front side of the cutting device. Since the coaxiality and the straightness are confirmed/adjusted, the operator does not have to wrap around the side or back side of the cutting device as in the conventional example.

Further, as for the regular end face adjustment of the main shaft, as described above, the light can be performed on the front side of the cutting device, so that it is possible to easily perform the work without being wound around the side surface or the back side of the cutting device.

Further, as for the positional adjustment of the nozzle for supplying the lubricating water and the position adjustment of the nozzle for supplying the cooling water, as in the above, the light can be performed on the front side of the cutting device, so that it is not necessary to wind the cutting Side of the device The work can be easily performed under the back side.

According to the invention described in the first aspect of the invention, even if the workpiece cutting portion has high rigidity and a heavy weight, the weight portion is aligned with the center portion of the cutting device, so that the center of gravity of the entire cutting device is balanced. . As a result, the vibration is hardly transmitted to the cutting device during processing, and the machining accuracy set in the cutting device can be maintained at all times.

In short, since the workpiece cutting portion is located substantially in the center of the cutting device, since the portion requiring the highest rigidity and precision is located substantially at the center of the cutting device, the center of gravity of the cutting device is the center position of the cutting device. Slightly consistent, the balance of the cutting device as a whole is stable. Therefore, the vibration at the time of cutting the workpiece can be prevented as much as possible.

Further, when the blade is exchanged, the coaxiality or straightness of the blade is confirmed/adjusted, the end face of the spindle is adjusted, and the position of the nozzle is adjusted, the operator can perform the cutting device without moving to the back side of the cutting device. The front side is easy to carry out the work, so that the efficiency of such work can be improved as compared with the conventional example.

The invention according to the second aspect of the invention provides a cutting apparatus comprising: a table on which a workpiece is placed; a blade for cutting the workpiece; and a workpiece stage feeding mechanism for moving the workpiece relative to the blade; Rotatablely mounting two spindles for the blade; and a spindle moving mechanism for supporting the spindle, wherein the two spindles are disposed opposite to each other on the same axis, the spindle moving mechanism and the table feeding mechanism Arranged orthogonally to each other, the spindle moving mechanism and the table feeding mechanism are disposed on a diagonal line of a square frame of a square cutting device, and a substantially central portion of the cutting device is disposed A workpiece cutting unit is provided, and a workpiece exchange unit is provided at a front portion of the cutting device, and a water mist exhaust unit is disposed on a side opposite to the workpiece exchange unit via the workpiece cutting unit.

According to this configuration, there is a table feeding mechanism for moving the workpiece relative to the blade when the workpiece is cut, and a rail mechanism for supporting the spindle, and the table feeding mechanism and the rail mechanism are orthogonal to each other, and the mechanism is disposed at The square rectangular frame is on the diagonal line, and the workpiece cutting processing portion is at a substantially central portion of the cutting device. Therefore, even if the rigidity of the workpiece cutting portion is high and the weight is heavy, since the portion having a large weight coincides with the center portion of the cutting device, the center of gravity of the entire cutting device is balanced.

Further, since the workpiece exchange portion is at the front portion of the cutting device, any blade that faces the front side from the cutting device can be easily exchanged when the blade is exchanged. Further, the confirmation and adjustment of the mounting state of the blade after the blade exchange, for example, the adjustment of the coaxiality of the blade and the confirmation/adjustment of the straightness of the blade to the workpiece can be easily performed from the front side of the cutting device. In this case, the straightness of the blade to the workpiece can be confirmed from the front side of the cutting direction of the workpiece. Moreover, the coaxiality of the mounting of the insert to the main shaft can be observed in the vertical direction of the cutting direction of the workpiece.

Furthermore, the adjustment of the coaxiality of the blade and the confirmation/adjustment of the straightness of the blade to the workpiece can be observed in the direction inclined by 45 degrees from the front side of the cutting device, so that the light can be executed on the front side of the cutting device. The confirmation and adjustment of the coaxiality and straightness of the blade eliminates the need for the operator to wrap to the side or back side of the cutting device as is conventional. Further, since the periodic end face adjustment of the main shaft is performed in the same manner as described above, the light can be performed on the front side of the cutting device, so that it is possible to easily perform the work without being wound around the side surface or the back side of the cutting device.

Further, the position adjustment of the nozzle for supplying the lubricating water and the position adjustment of the nozzle for supplying the cooling water are also performed in the same manner as described above, and the light can be performed on the front side of the cutting device, so that it is not necessary to be wound to the cutting. Side of the device The work can be easily performed under the back side.

The invention of claim 3 is the cutting device according to the first or second aspect of the invention, wherein the square frame of the cutting device having a square shape in plan view is two of the diagonal lines. The front side of the front side of the workpiece exchange portion in the corner is formed with an oblique notch, and an opening portion is provided at the front corner portion of the cutting device for workpiece exchange and maintenance.

According to this configuration, the square frame of the square cutting device has an oblique defect on the front side and an opening on the front side of the square frame for workpiece exchange and maintenance. Therefore, the operator's access distance from the opening to the blade, the nozzle, and the main shaft becomes short.

The invention described in claim 4 of the present invention provides a device unit which is a cutting device unit in which a cutting device of the third application patent scope is set as a pair of mutually facing states, and is characterized in that The defective portions provided on the front side of the square frame of the cutting device of each group are disposed adjacent to each other.

According to this configuration, the defective portions provided on the front side of the square frame of the cutting device of each group are disposed adjacent to each other. Therefore, even if the array cutting device is arranged and arranged, the operator is from the opening of the adjacent defective portion. The access distance to the blade, nozzle and spindle is still shorter.

The invention described in claim 5 of the present invention provides a cutting method using the cutting device or the cutting device unit cutting method according to the first to fourth aspects of the patent application, wherein the workpiece is passed along the square square The frame is conveyed in a diagonal direction, and after stopping the workpiece cutting portion provided at a substantially central portion of the rectangular frame, the blade attached to the spindle is moved to the workpiece cutting position, and the blade is used. Rotate to cut off the workpiece.

According to this method, when the workpiece is made to follow a diagonal line of a square square frame After the workpiece cutting process is stopped in the direction of the substantially central portion of the rectangular frame, the blade attached to the spindle is moved to the workpiece cutting position, and the workpiece is cut by the rotation of the blade. In this case, the workpiece cutting portion having the highest rigidity is located substantially at the center of the cutting device, so that the center of gravity of the entire cutting device is slightly aligned with the center position of the cutting device, so that the balance of the cutting device is stable, and vibration is less likely to occur. The workpiece is cut off in the state.

According to the invention of the first aspect of the invention, even if the workpiece cutting portion has high rigidity and heavy weight, the weight portion is aligned with the center portion of the cutting device, so that the center of gravity of the cutting device is balanced. stable. As a result, the vibration is hardly transmitted to the cutting device during processing, and the machining accuracy set in the cutting device can be maintained at all times.

In short, since the workpiece cutting portion is located substantially in the center of the cutting device, since the portion requiring the highest rigidity and precision is located substantially at the center of the cutting device, the center of gravity of the cutting device is the center position of the cutting device. Slightly consistent, the balance of the cutting device as a whole is stable. Therefore, the vibration at the time of cutting the workpiece can be prevented as much as possible.

Further, when the blade is exchanged, the coaxiality or straightness of the blade is confirmed/adjusted, the end face of the spindle is adjusted, and the position of the nozzle is adjusted, the operator can perform the cutting device without moving to the back side of the cutting device. The front side is easy to implement, so it can significantly improve the efficiency of these operations.

According to the invention described in claim 2, since the portion requiring the highest rigidity and precision is located substantially at the center of the cutting device, the cutting device The overall center of gravity position is slightly aligned with the central position of the cutting device to stabilize the balance of the cutting device. Therefore, the cutting device is less likely to generate vibration when the cutting process is performed, and the machining accuracy set in the cutting device can be maintained at all times.

Further, when the blade is exchanged, the coaxiality or straightness of the blade is confirmed/adjusted, the end face of the spindle is adjusted, and the position of the nozzle is adjusted, the operator can perform the cutting device without moving to the back side of the cutting device. Since the front side is easy to carry out the work, the workability of these can be greatly improved.

In the invention described in the third aspect of the invention, the access distance from the operator to the blade, the nozzle, and the main shaft is shortened, and in addition to the effects of the invention described in the first or second aspect of the patent application, Even when the outer shape of the square frame is large, the blade exchange, the coaxiality or straightness of the blade can be more easily confirmed/adjusted, the end face adjustment of the spindle, and the position adjustment of the nozzle can be performed.

According to the invention of claim 4, by arranging the cutting device in which the multiple arrays are arranged, it is possible to improve the productivity of the cutting process of the workpiece, and to arrange the adjacent cutting devices in a compact manner, thereby enabling effective space. As a result, the average area of each cutting device becomes smaller, which saves space in the equipment.

Further, when the blade is exchanged, the coaxiality or straightness of the blade is confirmed/adjusted, the end face of the spindle is adjusted, and the position of the nozzle is adjusted, the access distance from the operator to the blade, the nozzle, and the spindle becomes short. Therefore, even when a plurality of cutting devices are collected in one place, it is possible to more easily perform blade exchange, confirmation and adjustment of the coaxiality or straightness of the blade, end face adjustment of the spindle, and position adjustment of the nozzle. .

In the invention described in the fifth aspect of the invention, since the vibration is less likely to occur during the cutting process of the workpiece, the high-precision machining set in the cutting device can be stably ensured.

[Best Embodiment of the Invention]

The present invention achieves the so-called easy exchange of the blade, the straightness, the coaxiality confirmation and the end face adjustment, the nozzle adjustment, and the like, and improves the workability of the maintenance, stabilizes the center of gravity of the cutting device, and reduces the installation space. The utility model is realized by the following structure, that is, a cutting device comprising: a table on which a workpiece is placed; a blade for cutting the workpiece; and a workpiece for moving the workpiece on the table toward the workpiece relative to the blade a mechanism for rotatably mounting the spindle for the aforementioned blade; and a spindle moving mechanism for supporting the spindle, the spindle moving mechanism and the table feeding mechanism being orthogonally disposed, wherein the spindle movement is The mechanism and the table feeding mechanism are disposed on a diagonal line of a square frame of a cutting device having a square shape in plan view, and a substantially central portion of the cutting device is provided with a workpiece cutting processing portion, and the cutting device is A workpiece exchange unit is provided at the front portion, and a water mist exhaust unit is disposed on the opposite side of the workpiece exchange unit via the workpiece cutting unit.

[Example 1]

Hereinafter, a preferred embodiment of the present invention will be described with reference to Figs. 1 to 7. Fig. 1 is a plan view showing a cutting device 21 according to the present embodiment. As shown in the figure, the frame body 22 of the main body portion of the cutting device 21 has a square shape in plan view, and the right-angled triangular portion of the right front corner portion of the square frame body (hereinafter referred to as "square frame body") 22 is a right-angled isosceles triangle portion. A defect is formed and a beveled edge portion at an angle of 45 degrees to the front surface of the cutting device 21 is formed. The oblique edge portion is provided with opening and closing The opening portion 23 of the cover is constructed so that the workpiece exchange and maintenance work can be performed from the opening portion 23 on the square frame body 22.

Further, the square housing 22 is provided with a rotatable table 24 on which the wafer W belonging to the workpiece is placed, blades 25 and 25 for cutting the wafer W, and work for placing the wafer W thereon. The table 24 is moved relative to the table 25, 25 by a table feed mechanism 26. As shown in FIG. 2, the table feed mechanism 26 is disposed on the first diagonal line for connecting the right front corner portion and the left rear corner portion of the square frame 22.

Further, the square housing 22 is provided with a spindle moving mechanism 28, and the spindle moving mechanism 28 is provided with a guide rail 29. The spindle moving mechanism 28 is provided on the second diagonal line for connecting the left front corner portion and the right rear corner portion of the square frame 22. Therefore, the spindle moving mechanism 28 is disposed orthogonally to the table feed mechanism 26. Therefore, the guide rail 29 of the spindle moving mechanism 28 is perpendicularly intersected with the workpiece feeding direction of the table feed mechanism 26.

The two main shafts 30, 30 are movably supported on the guide rails 29, which are disposed on opposite sides of each other on the same axis. Rotatable blades 25, 25 are mounted on the respective spindles 30, 30.

Further, at a substantially central portion of the cutting device 21, that is, a portion of the square housing 22 in which the spindle moving mechanism 28 and the table feeding mechanism 26 are orthogonal to each other, a workpiece cutting processing portion 32 is disposed, and is constructed. In the workpiece cutting processing unit 32, the processed wafer W can be cut by the blades 25 and 25.

In the wafer cutting processing unit 32 of the present embodiment, the moving distance of the main shafts 30 and 30 for holding the blades 25 and 25 can be lengthened by the length of the coping angle, so that even a large-diameter wafer can have Cut off efficiently. Further, the spindle moving mechanism 28 (or the guide rail 29) can form a gate structure in terms of strength. In the present embodiment, the gate type pillar for supporting the spindle moving mechanism 28 is constructed to be able to form a pillar with the square frame 22 of the cutting device 21. Share.

Therefore, even if the door type pillar is not particularly provided with the high-rigidity spindle moving mechanism 28, the spindle moving mechanism 28 and the guide rail 29 can be efficiently disposed in the cutting device 21, and the cutting device 21 having high rigidity and high precision can be constructed.

Further, a workpiece exchange portion 33 is provided on the right front side portion of the cutting device 21, and the workpiece exchange portion 33 is disposed in close contact with the opening portion 23 provided at the right front side oblique edge portion of the square frame 22. In the workpiece exchange unit 33, the wafer W placed on the stage 24 can be easily exchanged.

Reference numeral 34 in the figure is an oil bearing pan that receives the waste water of the cutting water and the washing water flowing out from the workpiece cutting processing portion 32, and the oil bearing pan 34 forms the surrounding table feeding mechanism 26.

Further, a drain mechanism 36 having a drain port 35 and an exhaust mechanism 38 having an exhaust port 37 are disposed in the left rear corner portion of the square frame 22. The drain port 35 is disposed on a substantially extended line in which the cutting water and the washing water scatter in the direction in which the blade W rotates when the wafer W is cut by the blades 25 and 25 that rotate at a high speed. Further, the exhaust port 37 is formed at the upper portion corresponding to the drain port 35. Further, an operation/display portion, an image pickup means, a monitor television, a display lamp, a controller (not shown), and the like are provided at predetermined positions of the cutting device 21.

Next, a cutting processing method using the above-described cutting device 21 will be described. First, the blades 25 and 25 are attached to the spindles 30 and 30, and the fixed wafer W is placed on the table 24. Then, the table feed mechanism 26 causes the table 24 to be conveyed to the substantially central portion side of the square frame 22 in the first diagonal direction of the square frame 22, and the wafer W is loaded into the workpiece at a predetermined moving speed. The processed portion 32 is cut.

Then, the main shafts 30 and 30 are moved toward the center of the workpiece cutting unit 32, and the wafers W and 25 attached to the main shafts 30 and 30 are rotated at high speed to cut the wafer W. During the machining, the cutting water nozzle and the cleaning nozzle (not shown) provided at the tips of the spindles 30 and 30 supply cutting water and washing water to the processing points of the wafer W, respectively.

Then, the supplied cutting water (including the washing water. The same applies hereinafter) is taken up by the oil receiving pan 34, and then flows to the downstream side of the oil pan 34, and is discharged from the drain port 36 through the drain pipe. Further, during the processing, the water mist is scattered along with the cutting water in the rotation direction of the blades 25 and 25, and the scattered water mist is lifted from the workpiece cutting portion 32 to suppress the left rear corner portion of the square frame 22. flow. The water mist flowing to the left rear corner portion of the square frame 22 is discharged to the outside through the exhaust pipe from the exhaust port 37 provided above the drain port 35.

Then, when the cutting process along a cutting line on the wafer W is completed, the blades 25, 25 are indexed and positioned on the adjacent cutting line to be processed next, using the same processing as described above. The program performs cutting processing along the cutting line.

Then, after the cutting process of the predetermined number of cutting lines is completed by repeating the cutting process, the wafer W is rotated by 90 degrees together with the table 24, and the cutting line is followed by the same cutting procedure as described above. Cutting lines in orthogonal directions are cut.

Then, when the cutting process of the cutting line is completed, the wafer W is cut and divided into a plurality of wafers. Thereafter, the stage 24 on which the wafer W is placed is transported to the workpiece exchange unit 33 by the table feed mechanism 26, and exchanged with the next wafer W to be processed. Thereafter, the cutting process of the wafer W is re-executed in accordance with the above-described processing procedure.

Next, a supplementary description will be given of a specific embodiment of the cutting process according to the present invention. The blade 25 is mounted as shown in Fig. 7 in a manner similar to the blade flange 50 for mounting the blade 25. Next, the blade 25 is fitted into the end surface of the blade flange disk 50, and the blade 25 is fixed by locking the nut 51 therefrom. Since the straightness of the blade flange disk 50 is sufficiently exhibited, there is almost no abnormality in the straightness, but sometimes there is a bite between the blade 25 and the blade flange disk 50, or the nut 51 is not sufficiently locked. In the case where the degree of straightness cannot be ensured.

The nut 51 for locking the blade 25 is locked with a dedicated torque wrench and with a torque of about 40 kgf.cm. After the blade 25 is mounted, as shown in FIG. 6, the pickup 53 of the electronic micrometer 52 is brought into contact with the side surface of the outer periphery of the blade 25, and the deflection width of the blade 25 is measured while slowly rotating the blade 25. Further, the electronic micrometer 52 is fixed to the above-described table 24 and the blade 25 is relatively slowly slid back and forth to confirm the straightness of the blade 25.

In this case, the blade 25 is slightly rotated in the same manner as described above, and the blade 25 is relatively slowly slid back and forth. In the case where the blade 25 is mounted obliquely with respect to the blade flange disk 50 without exhibiting the true straightness of the blade 25, a relative positional deviation is generated as compared with the true straightness of the end face of the blade flange disk 50. By confirming the positional deviation, the straightness of the blade 25 can be confirmed.

In this measurement, it is required to correctly set the electronic micrometer 52. When the electronic micrometer 52 for confirming the trueness is to be correctly set, it is necessary to touch the pickup 53 of the electronic micrometer 52 to a predetermined position near the outer periphery of the blade 25, and from the substantially front surface of the blade 25. Both sides of the blade 25 can be seen and seen in the direction in which the blade 25 is linear. According to the above configuration of the present invention, even if the end faces of the blade 25 and the main shaft 30 are opposed to each other, both of them can be observed and confirmed in the same manner, so that such maintenance can be appropriately performed. In general, in the adjustment of the straightness, the range of the displacement width is suppressed to be adjusted to 1 to 3 μm or less.

Further, in the confirmation of the coaxiality of the blade 25, as shown in Fig. 7, the pickup head 53 of the electronic micrometer 52 is touched against the outermost peripheral portion of the blade 25 for measurement. The roundness of the blade 25 unit is checked by the blade 25 itself. On the one hand, the concentricity may become poor at the center of the blade 25 and the center of the main shaft 30, which is caused by the maintenance of the blade 25 exchange. Therefore, when the blade 25 is exchanged and reinstalled, it is preferable to perform the coaxiality adjustment as much as possible.

When the coaxiality is not ensured, when the workpiece is cut, the blade 25 may intermittently contact the workpiece, and the outer circumference of the blade 25 may be greatly reduced. Moreover, in extreme cases, there are cases where vibration is generated and it is impossible to cut accurately. This concentricity is measured by touching the pickup head 53 of the electronic micrometer 52 against the outer circumference of the blade 25 and observing the deflection range while the main shaft 30 and the blade 25 are slowly rotated. The offset portion periodically appears in response to the rotation, and half of the offset amplitude corresponds to the coaxiality. The coaxiality is preferably about 1 to 3 μm or less.

With regard to such coaxiality, the blade 25 is viewed from the cutting direction, and the position of the blade 25 and the pickup 53 of the electronic micrometer 52 is confirmed at a position where the blade 25 can be regarded as a line, and the electronic micrometer is in this state. The pickup head 53 of 52 touches the front end of the outermost peripheral portion of the blade 25. When the position is deviated, although the coaxiality is good, there is a case where the deviation amplitude is deteriorated, and it is necessary to sufficiently adjust the adjustment from an appropriate direction. According to the configuration of the present invention, since it can be performed in an appropriate direction, the accuracy of the mounting of the blade 25 can be accurately confirmed.

As such a blade 25, for example, a rotary knife of the Mitsubishi Materials Corporation product MD325-50KMO50 or the like can be used. Diamond abrasive grains are electrolytically deposited on the front end portion of the blade 25. Further, it is also possible to use a blade 25 or the like which is sintered by a vitrified bond or the like. If the so-called blade 25 is used to cause cracking to cause the diamond to fall off and expose the new abrasive grains to the abrasive particles, the life of the blade 25 can be used for a long period of time.

The workpiece to be cut is usually a ruthenium wafer or a wafer for a semiconductor device, but is not limited thereto. It can also be applied to cutting of various workpieces such as ceramics such as alumina or quartz glass, GaN or AlTic substrates on sapphire substrates. Further, the shape of the workpiece is such that the wafer has a disk shape, but the angle substrate or the like can also be changed by changing the form of the table 24.

The following conditions can be used, for example, the cutting conditions of the workpiece. Spindle rotation number: 10000 rpm to 30,000 rpm Feed rate of workpiece (material to be processed): 50 to 100 mm/sec Pure water for lubrication: 1 to 2 L/min, pure water for cooling: 0.5 L/min to 2 L/min Pure water for lubrication In particular, the cutting of the blade 25 is performed at the time of cutting, and the blade 25 is wound up and conveyed toward the cutting point and supplied with pure water. The cooling water that does not allow the blade 25 to carry heat is supplied from the side of the blade 25. The supply amount is also about 0.5 to 2 L/min.

Further, such conditions are optimized depending on the material or thickness of the workpiece (subject to be processed), and the above is merely an example. The cutting direction of the workpiece (subject to be processed) is a single direction, and the blade 25 is rotated, and the workpiece is prevented from being fed in the direction in which the uncut portion is naturally wound in accordance with the rotation of the blade 25. Once the blade 25 is lowered in front of the workpiece, after the workpiece is cut and passed over the workpiece, the spindle 30 is moved by one pitch and moved to the next cutting position. At the same time, the blade 25 is temporarily lifted up, moved on the workpiece, and then the blade 25 is lowered again in front of the workpiece and the workpiece is cut in a straight line. In response to this work, the workpieces are sequentially moved and cut at equal intervals at regular intervals.

After the cutting in one direction is completed, the table 24 is rotated by 90 degrees, and the spindle is again moved relative to the workpiece, and is gradually cut off in a straight line. When all is finished, one workpiece can be divided into a plurality of small corner pieces (called wafers or small pieces), and the cutting process ends. This cutting process can be performed by using a single spindle, that is, using a spindle having one blade until it is completely cut, but it can also be another twin spindle mode. The twin spindles mostly use the opposite spindle. In the counter-type main shaft, the blade of one spindle is initially cut, and the other blade is finally cut, and the blade itself can be distinguished according to the state of the workpiece.

First, the workpiece is not completely cut at the initial cutting, and a cut is implanted near the surface. After the spindle is fed by one pitch, the final cutting blade is aligned with the same line, and the workpiece is fed and the final cutting blade travels on the same line to completely cut the workpiece. Such a cutting method of the workpiece (subject to be processed) can be suitably used, for example, when the composition of the surface and the inside of the workpiece is different.

For example, when the surface is an oxide film and the inside is a crucible or the like, the initial cutting system selects a blade for cutting the hard and soft material, and the final cutting is performed by using a blade capable of cutting a soft material. By distinguishing such a cutting method, the throughput is also improved, and cutting processing which is efficient in response to material characteristics can be performed. Further, the interval between the opposing two blades may be any interval corresponding to the small pieces (wafers) to be cut. In the case where the wafer size is small, the interval between the opposing blades can also be set at two small (wafer) intervals.

After the predetermined number of wafers W are cut, the grinding chips (including the grinding powder) are deposited in the vicinity of the drain opening 35 provided at the bottom of the most downstream side of the oil pan 34, and the operation of the cutting device 21 is periodically stopped to execute the bearing. The oil pan 34 is cleaned.

As described above, according to the present invention, the table feed mechanism 26 is disposed on the first diagonal of the square frame 22, and the spindle moving mechanism 28 is disposed on the second diagonal of the square frame 22 in the square frame. A workpiece cutting processing portion 32 is disposed at a substantially central portion of the body 22.

Therefore, the workpiece cutting processing portion 32 which is required to have the highest rigidity and precision, that is, even when the weight of the maximum weight portion is heavy, since the center of gravity position is slightly coincident with the center position of the cutting device 21, the cutting device 21 The overall balance is stable. As described above, during the workpiece cutting process, the vibration generated by the imbalance of the center of gravity of the cutting device 21 is prevented as much as possible, so that the machining accuracy set in the cutting device 21 is stably maintained.

Further, since the workpiece exchange portion 33 is provided at the right front corner portion of the square frame 22, the operator can easily exchange the two blades 25, 25 from the right front corner portion of the cutting device 21 when the blades 25, 25 are exchanged. Then, the confirmation/adjustment of the mounted state of the blades 25 and 25 after the exchange, for example, the coaxiality adjustment/confirmation of the blades 25, 25, and the confirmation/adjustment of the true straightness of the wafers W by the blades 25, 25 can also be performed from The right front corner portion of the cutting device 21 is easily implemented. In this case, the straightness of the wafers W, 25 to the wafer W can be accurately and easily observed from the front side in the cutting direction of the wafer W.

Further, the mounting coaxiality of the blades 25 and 25 with respect to the spindles 30 and 30 can be observed from a direction perpendicular to the cutting direction of the wafer W. Further, both the adjustment of the coaxiality of the blades 25 and 25 and the confirmation/adjustment of the straightness of the wafers W and 25 to the wafer W can be observed in a direction inclined by 45 degrees from the front right corner portion of the cutting device 21. As a result, when the coaxiality and straightness confirmation/adjustment work of the blades 25 and 25 are performed, the operator M can be executed in the right corner portion before the cutting device 21, so that it is not necessary to wrap around to the side of the cutting device 21 as in the conventional case or Back side.

Further, as for the regular end face adjustment of the main shafts 30, 30, the light can be performed on the front side of the cutting device 21 as in the foregoing, so that it is not required to be wound down to the side or the back side of the cutting device 21 as in the conventional example. Work easily.

Further, similarly to the above-described procedure, the position adjustment of the nozzle for supplying the lubricating water and the position adjustment of the nozzle for supplying the cooling water can be easily performed in the front right corner portion of the cutting device 21.

In the present embodiment, the right front corner portion of the square frame 22 is formed with a defect in the right oblique direction of 45 degrees, and an opening portion 23 is provided at the oblique edge portion of the defect for workpiece exchange and maintenance. Therefore, the access distance from the opening portion 23 to the blades 25, 25, the main shafts 30, 30, and the nozzle is shortened, so that the blade 25, 25 is even in the case where the outer shape of the square frame 22 is large. The exchange work, the coaxiality or straightness confirmation/adjustment work of the blades 25 and 25, the end face adjustment work of the spindles 30 and 30, and the position adjustment operation of the nozzle can be easily and quickly performed, and these workability is compared with the conventional one. The case is greatly improved.

As shown in FIGS. 2 to 4, the cutting device 21 according to the present invention can be configured as an even array by a pair of two facing faces, and the cutting device unit 40 can be configured. In this case, the oblique edge portions (opening portions 23, 23) of the defects formed on the front side of the square frame of the cutting devices 21, 21 of the respective groups are disposed adjacent to each other.

According to the cutting device unit 40, by arranging two or four cutting devices 21 side by side, even if the number of wafers W is large, the productivity of the cutting process can be improved.

In the present invention, as shown in FIG. 3, the loader 41 can be commonly disposed between the two cutting devices 21, 21. According to this configuration, the loader 41 can be shared by the two cutting devices 21 and 21, and the equipment cost can be reduced. Further, as shown in FIG. 4, the piping area 42 including the exhaust pipe and the drain pipe can be shared outside the adjacent portions of the pair of cutting devices 21 and 21 before the right or left side of the cutting device unit 40. According to this configuration, with the sharing of the piping area 42, the space of the cutting equipment can be saved and the piping cost can be reduced.

Further, by arranging the adjacent four cutting devices 21, 21, 21, and 21 to face each other, the arrangement space can be utilized more effectively, so that the exclusive area of each cutting device becomes small, and the space of the device can be greatly saved.

Even when the even-numbered cutting devices 21 and 21 are arranged side by side in one place, the workability of the operator M is improved by the increase in the space of the adjacent defective portions, and the opening portions 23 and 23 from the left and right sides are opposed to each other. The access distances of the blades 25 and 25, the main shafts 30 and 30, and the nozzles of the two cutting devices 21 and 21 are shortened. Therefore, when the exchange of the blades 25 and 25, the confirmation/adjustment of the coaxiality or the straightness of the blades 25 and 25, the end face adjustment of the spindles 30 and 30, and the position adjustment of the nozzle are performed, the confirmation adjustment operation and the end face can be easily performed. Adjustment work and position adjustment work can greatly improve the maintenance inspection workability.

Further, regarding the maintenance improvement, the spindle for rotating the blades 25 and 25 or the like can be exchanged by the method shown in (a) and (b) of Fig. 8 . The spindle exchange is also performed periodically, and various operations such as the rotation accuracy check are performed before the exchange.

The spindle exchange positions are respectively present in the both end directions of the spindle moving mechanism 28 with the position of the workpiece exchange unit 33 as a boundary. Typically, the cutting device has two major axes in an opposing configuration. The main axis from the position of the workpiece exchange unit 33 toward the left side is the main axis A, and the main axis toward the right side is the main axis B.

When the spindle A is to be exchanged, as shown in Fig. 8(a), the spindles A and B are moved and abutted to the left side of the position of the workpiece exchange portion 33. The position near the left side is set to spindle maintenance position 1 (SP.MT1). The maintenance of the spindle A can be immediately accessed by opening the left side panel at the position of the workpiece exchange unit 33, and the maintenance of the spindle A or the exchange of the spindle, etc., can be easily performed from the outside of the apparatus as indicated by the direction (3). .

Further, the blade 25 of the spindle B can be adjusted at the spindle maintenance position 1 (SP.MT1). In particular, when the spindle B is viewed from the left side shown by the direction (1) of the spindle maintenance position 1 (SP.MT1), the substantially front surface of the blade 25 of the spindle B can be seen. Therefore, the blade mounting adjustment and measurement can be performed while visually confirming the roundness measurement of the spindle B blade 25, the measurement of the coaxiality of the blade 25 with respect to the spindle B, and the end face grinding and measurement of the spindle B.

Further, when the spindle B is viewed from the right side indicated by the direction (2) of the spindle maintenance position 1 (SP.MT1), the blade 25 of the spindle B can be seen from the positive side. Therefore, in the measurement or adjustment of the perpendicularity of the workpiece by the blade 25 of the spindle B, the mounting adjustment of the blade 25 and the measurement of the perpendicularity or the deviation can be performed while confirming visually.

Next, in the case where the spindle B on the right side is exchanged, as shown in Fig. 8(b), the spindles B and A are moved and abutted toward the right side of the position facing the workpiece exchange portion 33. The position near the right side is set to spindle maintenance position 2 (SP.MT2). The maintenance of the spindle B can be immediately accessed by turning off the right side panel of the position of the workpiece exchange unit 33, and the maintenance of the spindle B or the exchange of the spindle, etc., as shown by the direction (6), can be easily performed from the outside of the apparatus. get on.

Further, in the spindle maintenance position 2 (SP.MT2), the blade 25 of the spindle A can be adjusted in the same manner as the front. In particular, when the spindle A is viewed from the right side indicated by the direction (4) of the spindle maintenance position 2 (SP.MT2), the substantially front surface of the blade 25 of the spindle A can be seen. Therefore, the roundness measurement of the spindle A blade 25, the measurement of the coaxiality of the spindle 25 with respect to the spindle A, the end surface grinding and measurement of the spindle A, and the like are performed so that the blade mounting adjustment and measurement can be performed while confirming visually.

Further, when the spindle A is viewed from the left side shown by the direction (5) of the spindle maintenance position 2 (SP.MT2), the blade 25 of the spindle A can be seen from the positive side. Therefore, in the measurement or adjustment of the perpendicularity of the workpiece by the blade 25 of the spindle A, it is possible to visually confirm the mounting adjustment of the blade 25 and the measurement of the perpendicularity or the offset.

In the case of the conventional device, when the spindle is exchanged, since the distance from the outside of the device to the position of the spindle is long, it takes a lot of effort to exchange, the spindle on one side is easy to access, and the spindle on the other side is difficult to access. Waiting for the problem. And for the opposite main shaft and the insert mounted on the main shaft, it is necessary to observe the two actions from the front side of the insert and from the side of the side of the insert in the adjustment of the blade. In the conventional device, it is necessary to at least 3 The directions are entered into the device for adjustment and measurement.

In the configuration of the present device, the adjustment of the blade 25 or the adjustment of the spindles A and B in the opposing spindle B can be easily adjusted only in the positions of the two spindles at the maintenance positions 1 and 2. The blade can be confirmed from both directions at one maintenance position, so that the blade mounting and adjustment can be performed efficiently, and the adjustment confirmation after adjustment.

Further, regarding the blade adjustment and the spindle maintenance, the nozzle position at which the cooling water is sprayed toward the blade, the nozzle orientation, the positional relationship of the blades, and the like are required, and the opposing blades can be confirmed from the two-way position by the respective blades. According to this configuration, the spindle maintenance work can be performed at a position very close to the outside of the apparatus, and the accuracy adjustment work can be performed very easily compared to the related art.

The above configuration is such that the spindle moving mechanism 28 is provided on the substantially diagonal line of the square frame 22, and the table feeding mechanism 26 perpendicular thereto is closer to the front side than the spindle moving mechanism 28 of the table feeding mechanism 26. There is a position of the workpiece exchange unit 33, and a drain port and a water mist exhaust unit are provided on the back side.

However, in other words, this composition is not strictly a square frame. In other words, the portion from the position of the workpiece exchange portion 33 to the spindle moving mechanism 28 can be configured such that the frame width of the device gradually increases. The reason for this is that, as described earlier, the maintenance of the spindle or the blade and the nozzle adjustment of the cooling water for the workpiece cutting process are easily performed from various angles. In order to ensure that the spindle moving mechanism 28 portion has a certain depth and to improve the drainage/exhaust efficiency of the cutting water/cutting water mist, it is only necessary to make the frame width of the device continuously narrow.

As a result, the cutting water and the cutting water mist which are scattered from the main shaft moving mechanism 28 and the table feed mechanism 26 in the intersecting machining portion are increased in flow rate due to the narrowing of the frame width, and can be efficiently eliminated.

As a result, in other words, it will have the following structure. That is, the frame width of the apparatus gradually increases from the position of the workpiece exchange unit 33 to the spindle moving mechanism 28, and the position width of the spindle moving mechanism 28 becomes the largest. In the configuration, the frame width of the apparatus is gradually narrowed from the main shaft moving mechanism 28 to the drain/exhaust mechanisms 36 and 38 on the opposite side of the position of the workpiece exchange unit 33. As shown in Fig. 9, the position side of the workpiece exchange portion 33 of the apparatus is the clean area CL.Z and is adjacent to the maintenance area. On the other hand, the opposite side of the spindle moving mechanism 28 is a dirty region DT.Z in which the workpiece is cut, the cutting water, the cutting water, the water mist, or the like is scattered due to the workpiece cutting process.

In order to distinguish such a field, it is necessary to position the workpiece exchange portion 33 and the position of the workpiece cutting portion 32 and the drain/exhaust mechanisms 36 and 38 in a substantially linear shape, and to cut the position of the workpiece portion 32. The position of the workpiece exchange portion 33 and the positions of the drain/exhaust mechanisms 36, 38 are arranged on the opposite side.

As long as you can master it, it is not strictly a square frame. For example, the corner portion of the frame may be chamfered, as shown in Fig. 10(a), the substantially octagonal frame 22a or the substantially rectangular frame 22b as shown in Fig. (b). As a result, there is not much change in the effect shown above. In the case where the casing 22a is formed in a substantially octagonal shape, the configuration of each portion can be as follows. That is, the spindle moving mechanism 28 and the table feeding mechanism 26 each have a certain width and are orthogonally arranged.

The configuration is such that both end faces formed by the width portion of the spindle moving mechanism 28 are formed on both sides of an octagon. The end faces formed by the width portions of the table feed mechanism 26 are formed on one side, and the end faces formed by the partial widths of the drain/exhaust mechanisms 36 and 38 are formed on one side. The remaining four sides connect these edges. It is also possible to have two sides of the octagon equivalent to the spindle maintenance positions SP.MT1 and SP.M2.

Further, in the case of the rectangular frame 22b, the drain/exhaust mechanisms 36, 38 are not formed as edges, but are formed as vertices for collecting cutting water in the center portion, and the remaining and octagonal frame 22a. The same can be done.

[Industrial value]

The present invention is applied to all of the cutting device having a table feeding mechanism for relatively moving the workpiece toward the blade and a spindle moving mechanism for supporting the spindle.

twenty one. . . Cutting device

twenty two. . . Square frame

22a, 22b. . . framework

twenty three. . . Opening

twenty four. . . Workbench

25. . . blade

26. . . Workbench feed mechanism

29. . . guide

28. . . Spindle moving mechanism

30. . . Spindle

32. . . Workpiece cutting section

33. . . Workpiece exchange department

34. . . Oil pan

35. . . Drainage port

36. . . Drainage mechanism

37. . . exhaust vent

38. . . Exhaust mechanism

40. . . Cutting unit

41. . . Loader

42. . . Piping area

50. . . Blade flange

51. . . Nut

52. . . Electronic micrometer

53. . . Pick up head

Fig. 1 is a plan view showing the arrangement of the respective portions of the cutting device according to an embodiment of the present invention.

Fig. 2 is a plan view showing a configuration example in which two cutting devices of Fig. 1 are arranged.

FIG. 3 is a plan view showing a configuration example in which the loaders of the cutting device according to the present embodiment are shared and arranged in two.

Fig. 4 is a plan view showing a configuration example in which four cutting devices of Fig. 1 are arranged.

Fig. 5 is a perspective view showing a state in which the insert according to the embodiment is attached to a spindle.

Fig. 6 is a perspective view showing a state in which the pickup head of the electronic micrometer of Fig. 5 touches the side surface of the outer periphery of the blade to measure the deviation of the blade.

Fig. 7 is a side view showing a state in which the pickup head of the electronic micrometer of Fig. 5 touches the outermost peripheral portion of the blade to measure the roundness of the blade.

FIG. 8 is a view for explaining the exchange of the main shafts and the like in the present embodiment, (a) is a plan view for explaining the exchange of the main spindles A, and the like, and (b) is a plan view for explaining the exchange of the main shafts B and the like.

Fig. 9 is a plan view showing that the position side of the workpiece exchange portion on the frame body in the present embodiment is a clean area, and the opposite side of the spindle moving mechanism is a dirty area.

FIG. 10 is a view showing a modification of the shape of the frame, and (a) is a plan view showing a case where the octagonal shape is formed (1) is a case where the octagonal shape is formed.

Fig. 11 is a plan view showing the arrangement of the respective portions of the cutting device, showing a conventional example.

twenty one. . . Cutting device

twenty two. . . Square frame

twenty three. . . Opening

twenty four. . . Workbench

25. . . blade

26. . . Workbench feed mechanism

28. . . Spindle moving mechanism

29. . . guide

30. . . Spindle

32. . . Workpiece cutting section

33. . . Workpiece exchange department

34. . . Oil pan

35. . . Drainage port

36. . . Drainage mechanism

37. . . exhaust vent

38. . . Exhaust mechanism

Claims (7)

A cutting device includes: a table on which a workpiece is placed; a blade for cutting the workpiece: a table feeding mechanism for moving the workpiece on the table toward the blade; and a spindle for rotatably mounting the blade And a spindle moving mechanism for supporting the spindle, wherein the spindle moving mechanism and the table feeding mechanism are orthogonally arranged, wherein the spindle moving mechanism and the table feeding mechanism are disposed in A workpiece cutting portion is disposed at a substantially central portion of the cutting device, and a workpiece exchange portion is disposed at a front portion of the cutting device, and the workpiece is interposed therebetween, on a diagonal line of the square frame of the square cutting device The cutting processing portion is provided with a water mist exhausting portion on the side opposite to the workpiece exchange portion. A cutting device includes: a table on which a workpiece is placed; a blade for cutting the workpiece; a table feeding mechanism for moving the workpiece on the table toward the blade; and rotatably mounting the blade 2 And a spindle moving mechanism for supporting the spindle, wherein the two spindles are disposed opposite to each other on the same axis, and the spindle moving mechanism and the table feeding mechanism are orthogonally arranged, and the features thereof The spindle moving mechanism and the table feeding mechanism are disposed on a diagonal line of a square frame of a cutting device having a square shape in plan view, and a substantially central portion of the cutting device is provided with a workpiece cutting processing portion, and A workpiece exchange portion is provided at a front portion of the cutting device, and a water mist exhaust portion is disposed on a side opposite to the workpiece exchange portion via the workpiece cutting portion. The cutting device of claim 1 or 2, wherein The square frame of the above-mentioned square-shaped cutting device is formed on the front side of the two sides of the diagonal line on the front side of the workpiece exchange portion to form an oblique defect, and is in front of the cutting device An opening is provided on one side for workpiece exchange and maintenance. A cutting device unit is a cutting device unit formed by setting two sets of mutually facing states in a cutting device as described in claim 3 of the patent application, wherein the cutting device has a square shape; The defective portions provided on the front side of the frame are disposed adjacent to each other. A cutting method using the cutting device unit according to the fourth aspect of the invention, characterized in that the workpiece is conveyed in a diagonal direction of the square frame and stopped at substantially the center of the square frame After the workpiece is cut by the portion, the blade attached to the spindle is moved to the workpiece cutting position, and the workpiece is cut by the rotation of the blade. A cutting method using the cutting device according to the third aspect of the invention, characterized in that the workpiece is conveyed in a diagonal direction of the square frame and stopped at a substantially central portion of the square frame. After the workpiece is cut by the workpiece, the blade attached to the spindle is moved to the workpiece cutting position, and the workpiece is cut by the rotation of the blade. A cutting method using the cutting device according to the first or the second aspect of the invention, characterized in that the workpiece is conveyed in a diagonal direction of the square frame and stopped in the square frame. After the workpiece is cut by the substantially central portion, the blade attached to the spindle is moved to the workpiece cutting position, and the workpiece is cut by the rotation of the blade.