JP2009297882A - Machining device - Google Patents

Abstract

An object of the present invention is to provide a machining apparatus capable of increasing the machining speed and improving the productivity while suppressing variations in machining accuracy.
A rotating shaft 13a to which a workpiece 100 is fixed and a pair of processing shafts 62a and 63a to which tools 64 and 65 for processing the workpiece 100 are attached in parallel with the rotating shaft 13a. The shaft center A3 of the shaft 13a is arranged on a straight line connecting the shaft centers A1 and A2 of the pair of spindle shafts 62a and 63a, and the pair of spindle shafts 62a and 63a is movable in the X-axis direction orthogonal to the rotation shaft 13a. It is provided in.
[Selection] Figure 1

Description

  The present invention relates to a workpiece processing apparatus, and more particularly to a processing apparatus that performs cutting and polishing processes such as chamfering of a plate-shaped workpiece made of a brittle material such as a glass substrate or a semiconductor wafer.

  For example, in a substrate made of a brittle material such as a glass substrate or a semiconductor substrate such as silicon used in a hard disk device, the peripheral portion is chamfered and ground into a predetermined shape in order to prevent cracking and chipping.

  As a conventional grinding apparatus, as illustrated in FIG. 8, a plurality of grindstones 103 and 104 are brought into contact with a pair of opposed end surfaces 101a and 101b of a rectangular substrate 101, and a table 102 on which the substrate 101 is placed. A device that chamfers and grinds the end surfaces 101a and 101b by moving the table 102 in the Y-axis direction by a provided forward / backward movement control means is known.

  In this type of grinding apparatus, when the chamfering grinding of the end faces 101a and 101b is finished, the grindstones 103 and 104 on both sides are retracted and retracted in the X1 direction away from the substrate 101, and the table 102 on which the substrate 101 is placed is moved to the C axis. After turning 90 ° around, the grindstones 103 and 104 are again brought into contact with the substrate 101 to perform chamfering grinding of the remaining end faces 101c and 101d. Therefore, it is necessary to turn the table 102 and advance and retract the grindstone. There is a problem that the ratio of the net machining time for actual chamfering is low and the productivity is poor.

  Therefore, in a numerical control device using polar coordinate system data, there is a processing device that chamfers a peripheral portion of a rectangular plate or the like by only a turning operation around the C axis of the substrate and a movement operation in the X axis direction of the processing axis to which the grindstone is attached. It has been proposed (see, for example, Patent Document 2).

  In the control based on such polar coordinate system data, it is not necessary to retract the grindstone during the chamfering grinding process, so although the ratio of the net machining time for the actual chamfering process is high, one machining axis is in a single stroke. In some cases, sufficient productivity cannot be obtained because the peripheral portion of the workpiece is ground.

Although it is conceivable to provide a plurality of machining axes in the control based on the polar coordinate system data, in the control based on the polar coordinate system data, it is necessary to bring the grindstone into contact with the rotating substrate by moving the machining axis in the X-axis direction. For this reason, when a plurality of machining axes are provided, the movement speed of each machining axis is different, and there is a problem in that machining accuracy such as surface roughness due to each machining axis varies.
JP 2005-138213 A JP 2004-25325 A

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a machining apparatus capable of increasing the machining speed and improving the productivity while suppressing variations in machining accuracy.

  A processing apparatus according to the present invention includes: a rotating shaft to which a workpiece is fixed; and a pair of processing shafts that are arranged in parallel to the rotating shaft and to which a tool for processing the workpiece is attached. The centers are arranged on a straight line connecting the axes of the pair of machining axes, and the pair of machining axes are provided so as to be movable in a direction perpendicular to the rotation axis.

  In the present invention, it is preferable that the pair of machining axes are controlled to move at equal speeds in opposite directions to simultaneously machine the workpiece.

  Thus, since the processing apparatus of the present invention includes two processing axes, it is possible to increase the processing speed and improve productivity. In addition, since the axis of the rotating shaft is arranged on a straight line connecting the axes of the pair of machining axes, the rotationally symmetrical shape that overlaps the original shape every time the workpiece is rotated 180 °, such as a rectangle. When machining this workpiece, mirror image machining can be performed so that the moving speed of a pair of machining axes is equal to each other, and the machining accuracy of each machining axis is less likely to vary. If the amount of displacement is calculated, it is not necessary to calculate the amount of displacement of the other machining axis, and the control is difficult to be complicated.

  Moreover, in the said invention, it is preferable that a pair of said process shaft is provided so that a movement to the axial center position of the said rotating shaft is possible. With this configuration, the position adjustment for arranging the rotating shaft on a straight line connecting the axes of the pair of machining shafts becomes easy.

  Further, in the above processing apparatus, the workpiece may be placed on a processing stage having a placement hand on which the workpiece is placed and a moving table for moving the placement hand, and disposed on an upper end portion of the rotation shaft. A through-hole through which the processing stage can be inserted is formed in the placement hand, and the moving table lowers the placement hand on which the workpiece is placed from above the processing stage, You may comprise so that the said workpiece | work may be mounted on the said process stage by inserting the said process stage in the said through-hole. In such a case, the placing hand includes a claw portion that protrudes inward of the through hole, and the claw portion is configured to support a lower surface of the workpiece placed on the placing hand. Furthermore, a plurality of the placement hands may be provided at predetermined intervals in the circumferential direction on the outer peripheral portion of the moving table.

  By providing a plurality of mounting hands on the moving table with a predetermined interval in this way, by moving the moving table, it is possible to carry the unprocessed work and to take out the processed work at the same time. Time can be shortened.

  According to the processing apparatus of the present invention, it is possible to increase the processing speed and improve productivity while suppressing variations in processing accuracy.

  Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. 1 is a plan view showing a processing apparatus 10 according to the present embodiment, FIG. 2 is a front view of a processing section 60 in the processing apparatus 10, FIG. 3 is a side view of a transport section 20 in the processing apparatus 10, and FIG. FIG. 5 is a plan view of the placement hand 22.

  The processing apparatus 10 according to the present embodiment is, for example, a process that chamfers and grinds the peripheral edge of a plate-like workpiece 100 such as a rectangular glass substrate having a two-fold rotational symmetry that overlaps the original shape every time it is rotated 180 °. As shown in FIG. 1, the apparatus is a device that transports a workpiece 100 to a machining stage 12, and a positioning unit that adjusts the position of the workpiece 100 placed on the machining stage 12 to a predetermined position on the machining stage 12. 40 and a processing unit 60 for grinding the workpiece 100 placed on the processing stage 12.

  The processing stage 12 is a place on which an unprocessed workpiece 100 is placed and fixed. The processing stage 12 is formed to be slightly smaller than the outer shape of the workpiece 100 so that the peripheral portion of the placed workpiece 100 protrudes from the processing stage 12. The upper end portion of the rotating shaft 13 a of the C-axis motor unit 13 is fixed to the lower surface of the processing stage 12, whereby the workpiece 100 is fixed to the rotating shaft 13 a of the C-axis motor 13 via the processing stage 12.

  The transport unit 20 rotates, for example, a mounting hand 22 on which an unprocessed workpiece 100 stocked in a cassette (not shown) is mounted, a moving table 24 for moving the mounting hand 22, and a moving table 24. And a drive unit 26 that moves up and down, and a stand-by type transfer system in which a placing hand 22 on which the workpiece 100 is placed on the processing stage 12 stands by below the workpiece 100 is employed.

  A plurality of (four in this embodiment) mounting hands 22 are provided on the outer peripheral portion of the moving table 24 at predetermined intervals in the circumferential direction.

  As shown in FIG. 5, the mounting hand 22 includes a through hole 28 into which the processing stage 12 can be inserted, and a claw portion 29 that protrudes from the inner periphery toward the inside of the through hole 28. The part 29 supports the lower surface of the workpiece 100 placed on the placement hand 22.

  In such a conveyance unit 20, the driving unit 26 rotates the moving table 24 by a predetermined angle (90 ° in the present embodiment), so that the mounting hand 22 on which the unprocessed workpiece 100 is mounted is placed on the processing stage 12. The workpiece 100 is moved upward and an unprocessed workpiece 100 is carried in.

  Next, as shown in FIG. 4, the moving table 24 is lowered and the processing stage 12 is inserted into the through hole 28 formed in the mounting hand 22. At this time, the claw portion 29 passes through the notch portion 12 a provided on the processing stage 12, thereby placing the unprocessed workpiece 100 on the processing stage 12 and causing the mounting hand 22 to stand by below the workpiece 100.

  When the workpiece 100a that has been processed is taken out, the moving table 24 is raised so that the lower surface of the processed workpiece 100a is supported by the claw portion 29, and then the moving table 24 is moved at a predetermined angle (90 ° in this embodiment). ) The processed workpiece 100a is unloaded from the position above the processing stage 12 by rotating.

  In such a conveyance unit 20, the unprocessed workpiece 100 is placed on the placing hand 22 on the upstream side in the rotation direction of the moving table 24 after the unprocessed workpiece 100 is loaded onto the processing stage 12 and unloaded. By placing the processed workpiece 100a on the processing stage 12, the processed workpiece 100a is unloaded from the upper position of the processing stage 12, and the unprocessed workpiece 100 mounted on the mounting hand 22 on the upstream side in the rotation direction is moved above the processing stage 12. Can be carried in.

  The alignment means 40 includes holding members 42 and 42 arranged to face each other with the workpiece 100 placed on the processing stage 12, a pair of rods 44 and 44 that support the holding members 42 and 42, and a fixing (not shown). And holding member 42, 42 to adjust the position by sandwiching the outer periphery of the workpiece 100 placed on the processing stage 12 via the pair of rods 44, 44, and sandwiching the workpiece 100 by the holding member 42. In a state where the workpiece 100 is held, the fixing means presses the workpiece 100 against the machining stage 12 from the upper surface, thereby fixing the workpiece 100 at a predetermined position on the machining stage 12. The fixing means is not limited to the clamper that presses the workpiece 100 against the machining stage 20 from above. For example, the suction port 24 is provided in the machining stage 12 and the lower surface of the workpiece 80 is vacuum-sucked. 100 may be fixed to the processing stage 12, or the workpiece 100 may be fixed to the processing stage 12 by combining a clamper and vacuum suction.

  The processing unit 60 includes a pair of spindles 62 and 63 provided in parallel to the rotation shaft 13a of the C-axis motor 13, grindstones 64 and 65 attached to the spindle shafts 62a and 63a of the spindles, and the spindles 62 and 63. Spindle bases 68 and 69 that are moved separately and independently, and grindstones 64 and 65 are arranged opposite to each other with the processing stage 12 interposed therebetween.

  Specifically, as shown in FIG. 1, the machining is performed on a straight line connecting the axis A1 of the spindle shaft 62a of one spindle 62 and the axis A2 of the spindle shaft 63a as the machining axis of the other spindle 63. A pair of spindles 62 and 63 are arranged so that the axis A3 of the rotation shaft 13a of the C-axis motor 13 that rotates the stage 12 is located.

  The spindle bases 68 and 69 are linear guides extending in the X-axis direction along a straight line that is orthogonal to the rotation axis 13a of the C-axis motor 13 and connects the axis A1 of the spindle 62 and the axis A2 of the spindle 63. The ball screws 70 and 71 screwed to the spindle bases 68 and 69 are slidably attached along the spindles 66 and 66 and are rotated by controlling the rotation amounts by the X-axis motors 72 and 73, so that the spindle base 68 is rotated. , 69 are moved in the X-axis direction by a desired distance. The spindle bases 68 and 69 are provided so as to be movable to a position where the shaft centers A1 and A2 of the spindles 62 and 63 coincide with the shaft center A3 of the rotating shaft 13a of the C-axis motor 13.

  In such a processing apparatus 10, the position of the spindle shafts 62 a, 63 a is finely adjusted in a state where the spindle shafts 62 a, 63 a of the spindles 62, 63 are moved onto the rotation shaft 13 a of the C-axis motor 13. The axis A3 of the rotating shaft 13a of the C-axis motor 13 is accurately arranged on a straight line connecting the axis A1 of the spindle and the axis A2 of the spindle 63.

  That is, as shown in FIG. 6, with the spindle shaft 62a of one spindle 62 disposed above the rotation shaft 13a of the C-axis motor 13, the measuring element 90 fixed to the spindle shaft 62a is rotated by the C-axis motor 13. The spindle 91 is brought into contact with the shaft 13a, and the probe 91 fixed to the rotating shaft 13a of the C-axis motor 13 is brought into contact with the spindle shaft 62a of the spindle 62, and the spindle shaft 62a of the spindle 62 is rotated. The deviation between the center A1 and the axis A3 of the C-axis motor 13 is measured. A position adjusting screw (not shown) is operated according to the measured deviation to adjust the position of the axis A1 of the spindle 62 so that the axis A1 and the axis A3 coincide.

  In this embodiment, the measuring elements 90 and 91 are brought into contact with the rotating shafts 13a and 62a to measure the deviation between the axis A1 and the axis A3. However, the measuring element 90 is attached to a test bar fixed to the rotating shafts 13a and 62a. , 91 may be contacted to measure the misalignment between the axial center A1 and the axial center A3.

  Similarly to the spindle 62, the other spindle 63 is attached with the measuring elements 90 and 91 in a state where the spindle shaft 63a of the spindle 63 is disposed above the rotating shaft 13a of the C-axis motor 13, and the axis A2 of the spindle 63 is attached. And the axis A3 of the C-axis motor 13 are measured, and the position of the axis A2 of the spindle 63 is adjusted so that the axis A2 and the axis A3 coincide with each other according to the measured deviation. Thereby, the axis A3 of the rotating shaft 13a of the C-axis motor 13 can be accurately arranged on a straight line connecting the axis A1 of the spindle 62 and the axis A2 of the spindle 63.

  Next, operation | movement of the processing apparatus 10 which concerns on this embodiment is demonstrated with reference to drawings.

  First, the processing apparatus 10 rotates the moving table 24 in a state where the mounting hand 22 is at a higher position than the processing stage 12 and places the mounting hand 22 on which the unprocessed workpiece 100 is mounted above the processing stage 12. Move.

  Then, the workpiece table 100 is placed on the machining stage 12 by lowering the moving table 24 and inserting the machining stage 12 into the through hole 28 of the placement surface 27, and the placement hand 22 is placed below the workpiece 100. Wait.

  Then, the holding members 42 and 42 of the positioning means 40 adjust the position by sandwiching the workpiece 100 placed on the processing stage 12, and the holding members 42 and 42 hold the workpiece 100 and hold it (not shown). The fixing means presses and fixes the workpiece 100 to the processing stage 12. At this time, the fixing means presses the workpiece 100 against the machining stage 12 while the holding members 42 and 42 hold the workpiece 100. Therefore, the workpiece 100 is positioned at a predetermined position on the machining stage 12 without being displaced after positioning. 100 can be fixed.

  Then, after the holding members 42 and 42 are retracted, the spindle bases 68 and 69 are moved to predetermined positions, and the spindles 62 and 63 are driven to rotate the grindstones 64 and 65 rotating at, for example, about 30,000 rpm. Chamfer cutting is started by contacting the peripheral edge.

  Specifically, the spindle bases 68 and 69 are driven while rotating the C-axis motor 13 and rotating the workpiece 100 fixed to the rotating shaft 13a around the C-axis, for example, clockwise as shown in FIG. Then, by performing polar coordinate control for moving the spindles 62 and 63 in the X-axis direction, the entire peripheral edge portion of the workpiece 100 and the grindstones 64 and 65 come into contact with the entire peripheral edge portion of the workpiece 100 to perform chamfering grinding.

  At this time, since the axis A3 of the rotation shaft 13a of the C-axis motor 13 is arranged on a straight line connecting the axis A1 of the spindle 62 and the axis A2 of the spindle 63, the rotation axis 13a is rotated. The movements of the spindle 62 and the spindle 63 in the X-axis direction are opposite to each other, and the magnitudes of moving speeds | V1 | and | V2 | are equal.

  Further, by the time the machining of the workpiece 100 placed on the machining stage 12 is completed, the unmachined workpiece 100 stocked in a cassette (not shown) is placed on the placing hand 22 on the upstream side in the rotation direction of the moving table 24. Place.

  When the chamfering and cutting of the entire peripheral edge of the workpiece 100 is completed, the spindle bases 68 and 69 are moved to predetermined positions so that the spindles 62 and 63 are separated from the workpiece 100, and then the moving table 24 is raised. The mounting hand 22 that has been waiting under the workpiece 100 supports the lower surface of the processed workpiece 100a with the claw portion 29 and scoops it up, and then rotates the moving table 24, thereby removing the processed workpiece 100a. While being unloaded, the placing hand 22 on the upstream side in the rotational direction of the moving table 24 moves above the processing stage 12 and carries the unprocessed workpiece 100 onto the processing stage 12.

  Thereafter, placing on the processing stage 12, position adjustment and fixing of the workpiece 100, chamfering cutting of the workpiece 100, scooping up of the processed workpiece 100, unloading of the processed workpiece 100 and unloading of the unmachined workpiece 100 are repeated. The workpiece 100 is continuously chamfered and cut.

  As described above, in the processing apparatus 10 according to the present embodiment, the workpiece 100 is chamfered by the two grindstones 64 and 65, so that the processing speed can be increased and the productivity can be improved.

  Moreover, since the axis A3 of the rotating shaft 13a of the C-axis motor 13 is arranged on a straight line connecting the axis A1 of the spindle 62 and the axis A2 of the spindle 63, the spindle 62 accompanying the rotation of the rotating shaft 13a. The moving amount L1 of the spindle 63 and the moving amount L2 of the spindle 63 are equal, and the relative speed of the grindstone 64 with respect to the workpiece 100 and the relative speed of the grindstone 65 with respect to the workpiece 100 can be set to be equal. Even if chamfering grinding is performed with 64 and 65, variations in machining accuracy between the grindstones are less likely to occur.

  Further, it is necessary to control the displacement of the two spindles 62 and 63 in the X-axis direction. However, if the displacement amount of one spindle 62 is calculated, it is not necessary to calculate the displacement amount of the other spindle 63, and the calculation cost is reduced. Can be reduced, and the spindle control is less likely to be complicated.

  Further, in the processing apparatus 10 according to the present embodiment, the spindles 62 and 63 are provided so as to be movable up to a position above the rotation shaft 13a of the C-axis motor 13, and the spindle shafts 62a and 63a of the spindles 62 and 63 and the C-axis motor. 13 can be directly measured by a probe or the like, so that the rotation axis 13a of the C-axis motor 13 is on a straight line connecting the axis A1 of the spindle 62 and the axis A2 of the spindle 63. The axial center A3 can be accurately arranged.

  Further, since a plurality of placement hands 22 on which the workpiece 100 is placed are provided at predetermined intervals in the circumferential direction on the outer peripheral portion of the movement table 24, the transport unit 20 rotates the movement table 24. Further, the conveyance of the unprocessed workpiece 100 and the removal of the processed workpiece 100a can be performed at the same time, and the tact time can be shortened.

  Moreover, since the placing hand 22 supports the lower surface of the workpiece 100 at the claw portion 29 protruding inward of the through hole 28, the workpiece 100 is provided with a notch portion 12a through which the claw portion 29 passes. Even in the processing stage 12 that supports the vicinity of the inner periphery of the workpiece, the workpiece 100 can be transferred from the placement hand 22 to the processing stage 12 by inserting the through hole 28.

  Further, in the processing apparatus 10 of the present embodiment, a fixing means such as a clamper or vacuum suction is pressed against the processing stage 12 while the positioning means 40 holds the workpiece 100 positioned at a predetermined position on the processing stage 12. Therefore, the workpiece is placed at a predetermined position of the processing stage with high accuracy without being affected by the positional deviation that occurs when the workpiece 100 is conveyed and the positional deviation that occurs when the conveyance unit 20 places the workpiece 100 on the machining stage 12. Can be placed.

It is a top view of the processing apparatus concerning one Embodiment of this invention. It is a front view which shows the process part of the processing apparatus concerning one Embodiment of this invention. It is a side view which shows the conveyance part of the processing apparatus concerning one Embodiment of this invention. It is a principal part enlarged view of FIG. It is a top view which shows the mounting hand of the processing apparatus concerning one Embodiment of this invention. It is a front view explaining the method to adjust the axial center position of a spindle in the processing apparatus concerning one Embodiment of this invention. It is a top view explaining operation | movement of the processing apparatus concerning one Embodiment of this invention. It is a perspective view explaining the conventional processing apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Processing apparatus 12 ... Processing stage 13a ... Rotary shaft 62, 63 ... Spindle 62a, 63a ... Spindle shaft 64, 65 ... Grinding stone 100 ... Workpiece

Claims (6)

A rotating shaft to which the workpiece is fixed, and a pair of processing shafts that are arranged in parallel to the rotating shaft and to which a tool for processing the workpiece is attached,
The axis of the rotating shaft is arranged on a straight line connecting the axes of the pair of machining axes, and the pair of machining axes are provided so as to be movable in a direction orthogonal to the rotation axis. Processing equipment.   The machining apparatus according to claim 1, wherein the pair of machining axes are controlled to move at equal speeds in opposite directions to simultaneously machine the workpiece.   The processing apparatus according to claim 1, wherein the pair of processing axes are provided so as to be movable to an axial center position of the rotation shaft. A loading hand having a loading hand on which the workpiece is loaded; and a moving table for moving the loading hand; and a conveying unit configured to convey the workpiece to a processing stage disposed at an upper end portion of the rotating shaft. ,
A through-hole through which the processing stage can be inserted is formed in the placement hand,
The moving table lowers the mounting hand on which the work is placed from above the processing stage, and places the work on the processing stage by inserting the processing stage through the through hole. The processing apparatus according to any one of claims 1 to 3, wherein the processing apparatus is characterized.   The said placement hand is provided with the nail | claw part which protrudes toward the inner side of the said through-hole, The said claw part supports the lower surface of the said workpiece | work mounted in the said placement hand. The processing apparatus as described.   6. The processing apparatus according to claim 4, wherein a plurality of the placement hands are provided at predetermined intervals in a circumferential direction on an outer peripheral portion of the moving table.

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