JP5129319B2 - Method of processing cylindrical single crystal silicon ingot block into square columnar block and composite chamfering processing apparatus used therefor - Google Patents

Description

  In the present invention, a cylindrical silicon ingot block is clamped by a clamp device comprising a headstock with an encoder and a tailstock having a function of rotating around its rotation C axis, and cutting is performed by scraping off the four side surfaces with a rotary cutting blade. The present invention relates to a method for processing into a quadrangular columnar block, and then processing the surface of the four side surfaces and the four corner R corners of the quadrangular columnar block into a quadrangular columnar block and a composite chamfering processing apparatus used therefor.

  A cylindrical ingot block, which is a raw material of a disk-shaped single crystal silicon substrate used for a semiconductor substrate or a rectangular single crystal silicon substrate used for a solar cell substrate, is a single crystal silicon ingot grown by the Czochralski method (CZ method). The both ends of the C-axis are cut off, and then sandwiched between clamping devices composed of a spindle stock having a function of rotating and a tailstock, and cylindrical grinding is performed to remove the bowl-shaped irregularities on the outer circumferential surface. It is cut into a length of 500 mm with an inner peripheral blade or wire cut, and is commercially available as an outer peripheral smooth cylindrical single crystal silicon ingot block.

  This outer peripheral surface smooth cylindrical single crystal silicon ingot block is subjected to slicing processing to a thin substrate by multi-wire saw in the next step. Alternatively, the four sides and four corners of a square columnar block supplied from an ingot block manufacturer to a solar cell substrate manufacturer and cut off on the four sides are chamfered and thinned by multi-wire saw in the next process. It is supplied to the slice processing stage for the substrate.

  In order to increase the effective usage rate of the single crystal silicon ingot, the crystal of the cylindrical single crystal silicon ingot is cut before being cut into a silicon block from the single crystal silicon ingot or prior to slicing with a multi-wire saw. It is necessary to detect the direction.

  Republished 2005/076333 (Patent Document 1) discloses a spindle head and a tailstock having a function of cutting off both end faces of a C-axis of a single crystal silicon ingot grown by the Czochralski method (CZ method) and then rotating it. Is clamped by a clamp device, and cylindrical grinding is performed to remove the wrinkled irregularities on the outer peripheral surface, and the crystal orientation in the C-axis vertical direction of the obtained outer peripheral smooth disk-like single crystal silicon ingot is read with an infrared detector A method is disclosed in which the crystal orientation is specified by drawing a line with a red marker pen based on the analysis peak and cut into a plurality of blocks with a DAISO along the red specific mark.

  Japanese Patent Laid-Open No. 2009-233819 includes a spindle stock and a tailstock having a function of cutting off both ends of the C-axis of a single crystal silicon ingot grown by the Czochralski method (CZ method) and then rotating it. It is clamped by a clamp device and cylindrically ground to remove the bowl-shaped irregularities on the outer peripheral surface, and the crystal orientation in the C-axis vertical direction of the obtained outer peripheral surface smooth disk-like single crystal silicon ingot is read with an X-ray analysis instrument. A red mark is attached on the basis of the crystal orientation line, then orientation flat and / or notch processing is performed along this red mark line with a grindstone, and then the slice processing into a thin substrate by multi-wire saw is performed. Disclose.

  The patent applicant of the present application, in Japanese Patent Application No. 2010-131606 (Patent Document 3, unpublished), holds a cylindrical silicon ingot block in a clamping device composed of a headstock and a tailstock, and rotates the silicon ingot block. Composite chamfering of a silicon ingot block in which a pair of rotary cutting blades, a pair of cup wheel type rough grinding wheels, and a pair of cup wheel type finishing grinding wheels are arranged from the left side to the right side across the axis (C axis) A device was proposed.

  In addition, the applicant of the present patent application, in Japanese Patent Application No. 2010-2332039 (Patent Document 4, unpublished), sandwiches a cylindrical silicon ingot block with a clamp device composed of a headstock and a tailstock, and the silicon ingot block A pair of rotary cutting blades, a pair of cup wheel type rough grinding wheels, a pair of cup wheel type finishing grinding wheels, and a crystal of a cylindrical silicon ingot block across the rotation axis (C axis) A compound chamfering machine for single crystal silicon ingot block with direction detecting sensor was proposed.

  As shown in FIG. 8, this composite chamfering apparatus has an ingot block stocker 14 and an ingot block loading / unloading mechanism on a base (machine frame) 2 from the right side to the left side as viewed from the front of the composite chamfering apparatus 1. Loading / unloading stage composed of 13 and load port 8, four corner R corner finish grinding chamfering / four side finishing grinding chamfering stage 10 of ingot block, four corner R corner rough grinding chamfering / four side rough grinding of ingot block This is a composite chamfering apparatus in which a chamfering stage 11 and a four-side stripping stage 90 of a cylindrical ingot block by a rotary cutting blade are arranged.

  The process of processing a cylindrical single crystal silicon ingot block into a square columnar block using the composite chamfering processing apparatus 1 described in Patent Document 4 is performed as follows.

(1) A cylindrical single crystal silicon ingot block is sandwiched between clamping devices including a headstock with an encoder and a tailstock having a function of rotating around the rotation C axis.
(2) A laser on a spindle base of a clamp device by irradiating laser light toward the C-axis of the cylindrical single crystal silicon ingot block from a displacement sensor installed at a front side of the sandwiched cylindrical single crystal silicon ingot block While the C-axis rotation angle is read by the encoder, the C-axis is rotated once (360 degrees), and a correlation diagram between the rotation angle and the pulse peak is displayed.
(3) Select one of the encoder rotation angles (θ) indicating the four displayed pulse peaks, and this angle is the position of the encoder rotation angle of 45 degrees relative to the rotary cutting blade radial direction surface (cutting start C axis The C-axis is rotated so as to be positioned at (position), and the crystal orientation position of the cylindrical single crystal silicon ingot block is fixed.
(4) The work table on which the clamp device is mounted is moved in the direction of the pair of rotating cutting blades, and the front and rear surfaces of the cylindrical single crystal silicon ingot block are cut by the pair of rotating cutting blades.
(5) The C axis of the cylindrical single crystal silicon ingot block is rotated by 90 degrees.
(6) The work table on which the clamp device is mounted is moved in the direction of the pair of rotating cutting blades to cut the front and rear surfaces of the cylindrical single crystal silicon ingot block with the pair of rotating cutting blades. A crystalline silicon ingot block is obtained.
(7) The pair of cups rotating the four corner R corners of the rotating quadrangular columnar single crystal silicon ingot block by moving the work table on which the clamping device is mounted between the pair of cup wheel type rough grinding wheels. Cylindrical grinding with a wheel type rough grinding wheel.
(8) Rotate the C-axis of the cylindrically ground square columnar single crystal silicon ingot block and fix it to the cutting start C-axis position at 45 degrees with respect to the surface in the blade diameter direction of the pair of cup wheel type rough grinding wheels.
(9) Before and after the square columnar single crystal silicon ingot block by moving a work table mounted with a clamping device between the pair of rotating cup wheel type rough grinding wheels and moving the pair of cup wheel type rough grinding wheels forward Chamfering is performed on the front and rear surfaces of the square columnar single crystal silicon ingot block by moving the work table while cutting the surface.
(10) The C-axis of the square columnar single crystal silicon ingot block is rotated 90 degrees to fix the processing side surface position of the square columnar single crystal silicon ingot block with respect to the blade radial direction surface of the pair of cup wheel type rough grinding wheels.
(11) A work table on which a clamp device is mounted is moved between the pair of rotating cup wheel type rough grinding wheels, and the pair of cup wheel type rough grinding wheels are advanced in the C-axis direction to form a square columnar single crystal silicon. Rough chamfering is performed to chamfer the front and rear surfaces of the square columnar single crystal silicon ingot block by moving the work table while cutting the front and rear surfaces of the ingot block.
(12) The C-axis of the square columnar single crystal silicon ingot block that has been subjected to rough chamfering is rotated and fixed at a cutting start C-axis position of 45 degrees relative to the surface in the blade diameter direction of the pair of cup wheel type finishing grinding wheels.
(13) A square columnar single crystal silicon is formed by moving a work table on which a clamp device is mounted between the pair of rotating cup wheel type finishing grinding wheels and moving the pair of cup wheel type finishing grinding wheels in the C-axis direction. Chamfering is performed on the front and rear surfaces of the square columnar single crystal silicon ingot block by moving the work table while cutting the front and rear surfaces of the ingot block.
(14) The C-axis of the square columnar single crystal silicon ingot block is rotated 90 degrees to fix the processing side surface position of the square columnar single crystal silicon ingot block with respect to the surface in the blade diameter direction of the pair of cup wheel type finishing grinding wheels.
(15) A square columnar single crystal silicon is formed by moving a work table on which a clamp device is mounted between the pair of rotating cup wheel type finishing grinding wheels and moving the pair of cup wheel type finishing grinding wheels in the C-axis direction. Finishing chamfering is performed in which chamfering is performed on the front and rear surfaces of the square columnar single crystal silicon ingot block by moving the work table while cutting the front and rear surfaces of the ingot block.

Republished 2005/076333 JP 2009-233819 A Japanese Patent Application No. 2010-131606 (unpublished) Japanese Patent Application No. 2010-2332039 (unpublished)

  The composite chamfering apparatus 1 described above is a quadrangular columnar silicon using a combination plant in which an existing four-side scraping slicing apparatus, a four-side surface grinding (polishing) machine, a four-side plane and four corner R corner etching apparatus are installed in parallel. There is an advantage that the manufacturing time of the ingot block can be shortened to 1/3 to 1/2. However, when the composite chamfering device was sold to a block manufacturer or a solar cell substrate manufacturer that had installed and used the slicing device and the chamfering device in parallel, some manufacturers reported that the slicing device and the four-sided flat surface Opinions were expressed in hopes of delivering two parts to the grinding / four corner R corner grinding machine.

The reason is that the composite chamfering apparatus is attractive in that the delivery work of the worker's ingot is omitted, but when the four-side scraping process is performed by the slicing device of the cylindrical silicon ingot block, When the four-side surface grinding / four-corner R corner grinding apparatus is not operated and the four-side surface grinding / four-corner R corner grinding process of the prismatic silicon ingot block is performed, the slicing apparatus cannot be operated.

The inventors of the present application use a pair of clamp mechanisms, and provide an ingot block transfer stage between a slicing stage for scraping four sides of a cylindrical silicon ingot block and a four-side surface grinding / four corner R corner grinding stage of a prismatic silicon ingot block. Newly installed and separated into a cylindrical silicon ingot block loading stage and a prismatic silicon ingot block unloading stage, so that the operation of the slicing device and the operation of the four-side surface grinding / four-corner R corner grinding device can be performed simultaneously. I came up with the idea that it was possible to do so.

Claim 1 of the present invention provides
a) A pair of work tables provided so as to be able to reciprocate in the left-right direction on guide rails provided in the left-right direction on the machine frame;
b) a first clamp mechanism and a second clamp mechanism comprising a pair of headstock and tailstock mounted separately on the left and right on the pair of work tables;
c) a drive mechanism for reciprocating the work table carrying the work supported by the first and second clamp mechanisms in the left-right direction;
d) A direction in which the work table is viewed from the front side of the composite chamfering apparatus, and from the right side to the left side,
e) Cylindrical silicon ingot block loading stage,
f) a standby position stage of the first clamp mechanism provided behind the loading stage;
g) Side peeling of a cylindrical silicon ingot block provided at the front and rear of the guide rail so that the diameter surfaces of the rotary cutting blades face each other across the work support shaft of the first clamp mechanism. Slicing stage,
h) Ingot block delivery stage provided on the left side of the slicing stage;
i) A rough grinding stage provided on the front and back of a work table with a work table sandwiched between a pair of cup wheel type whetstones supported by a pair of whetstone shafts that can move back and forth and move up and down;
j) A work table provided parallel to the left lateral side of the rough grinding stage so that the grindstone surfaces of a pair of cup wheel grindstones supported by a pair of grindstone shafts capable of moving back and forth and vertically moving up and down are opposed to each other. A finish grinding stage provided before and after the worktable,
k) a left side position of the finish grinding stage, the standby position stage of the second clamp mechanism comprising a pair of headstock and tailstock;
and,
l) an unloading stage of a prismatic silicon ingot block provided on the front side of the standby position stage of the second clamp mechanism;
The present invention provides a composite chamfering apparatus for a silicon ingot block, characterized in that is provided.

The invention of claim 2 provides a method of chamfering a cylindrical silicon ingot block into a prismatic silicon ingot block through the following steps using the composite chamfering processing apparatus of claim 1.
(1) A spindle head with an encoder and a tailstock having a function of rotating a cylindrical silicon ingot block as a workpiece (work) around the rotation C axis of the first clamp mechanism using a loading mechanism in a loading stage Then, the tailstock is advanced, and the cylindrical silicon ingot block is clamped by the first clamp mechanism.
(2) The C-axis drive motor of the head stock of the first clamp mechanism is operated to center the cutting start position of the cylindrical silicon ingot block with respect to the pair of rotary cutting blades.
(3) The work table on which the first clamp mechanism is mounted is moved in the direction of the pair of rotating cutting blades to rotate, and the front and rear surfaces of the cylindrical silicon ingot block are cut by the pair of rotating cutting blades.
(4) Next, the C axis of the cylindrical silicon ingot block is rotated by 90 degrees.
(5) The work table carrying the first clamp mechanism is moved in the direction of the pair of rotating cutting blades to rotate, and the front and rear surfaces of the cylindrical silicon ingot block are cut by the pair of rotating cutting blades to form a rectangular column shape. Get a silicon ingot block.
(6) The work table on which the first clamp mechanism is mounted is moved toward the delivery stage of the ingot block, the robot hand is advanced to the delivery stage, the gripping claws of the robot hand are closed, and the square columnar silicon ingot block is gripped. Then, after the tailstock of the first clamp mechanism is retracted to release the holding of the square pillar-shaped silicon ingot block, the robot hand is retracted to the standby position. Thereafter, the work table on which the first clamp mechanism is mounted is returned to the standby position stage position of the first clamp mechanism, and then the robot hand is advanced to the delivery stage.
(7) The work table on which the second clamp mechanism at the standby position stage position of the second clamp mechanism is moved to the right and moved to the robot hand position of the delivery stage. Next, after the tailstock of the second clamp mechanism is advanced to hold the square columnar silicon ingot block between the spindle base and the tailstock of the second clamp mechanism, the gripping claw of the robot hand is opened to The quadrangular silicon ingot block is released, and the robot hand is retracted to the standby position.
(8) The work table on which the second clamp mechanism for sandwiching the quadrangular columnar silicon ingot block is mounted is moved leftward, and the quadrangular columnar silicon ingot block is carried into the rough grinding stage.
(9) The pair of paired rotating corners of the quadrangular columnar silicon ingot block is moved by moving a work table on which the second clamp mechanism is mounted between the pair of cup wheel type rough grinding wheels. Cylindrical grinding with a cup wheel type rough grinding wheel.
(10) C-axis centering at the start of chamfering of the square columnar silicon ingot block relative to the surface in the radial direction of a pair of cup wheel type rough grinding wheels by rotating the C axis of the cylindrically ground square columnar silicon ingot block I do.
(11) The square columnar silicon is moved by moving the work table on which the second clamp mechanism is mounted between the pair of rotating cup wheel rough grinding wheels and moving the pair of cup wheel rough grinding wheels forward. A chamfering process is performed on the front and rear surfaces of the rectangular columnar silicon ingot block by moving the work table while cutting the front and rear surfaces of the ingot block.
(12) The C-axis of the quadrangular columnar silicon ingot block is rotated 90 degrees to perform centering to fix the processing side surface position of the quadrangular columnar silicon ingot block with respect to the blade radial direction surface of the pair of cup wheel type rough grinding wheels.
(13) Move the work table on which the second clamp mechanism is mounted between the pair of rotating cup wheel type rough grinding wheels, and advance the pair of cup wheel type rough grinding wheels in the C-axis direction. Rough chamfering is performed to chamfer the front and rear surfaces of the quadrangular columnar silicon ingot block by moving the work table while cutting the front and rear surfaces of the quadrangular columnar silicon ingot block.
(14) The work table on which the second clamp mechanism for sandwiching the square columnar silicon ingot block having been subjected to the rough chamfering process is moved leftward, and the square columnar silicon ingot block is carried into the finish grinding stage.
(15) The pair of cups rotating the four corner R corners of the rotating quadrangular columnar silicon ingot block by moving the work table on which the second clamp mechanism is mounted between the pair of cup wheel type finishing grinding wheels. Cylindrical grinding with a wheel-type finish grinding wheel.
(16) The C-axis of the cylindrically grounded square columnar silicon ingot block is rotated to center the grinding start positioning with respect to the surface in the blade diameter direction of the pair of cup wheel type finishing grinding wheels.
(17) The square columnar silicon ingot is moved by moving a work table on which the second clamp mechanism is mounted between the pair of rotating cup wheel type finishing grinding wheels and moving the pair of cup wheel type finishing grinding wheels forward. Chamfering is performed on the front and rear surfaces of the quadrangular columnar silicon ingot block by moving the work table while cutting the front and rear surfaces of the block.
(18) Next, the C-axis of the quadrangular columnar silicon ingot block is rotated by 90 degrees to center the processed side surface position of the quadrangular columnar silicon ingot block with respect to the blade radial direction surface of the pair of cup wheel type finishing grinding wheels.
(19) Move the work table mounted with the second clamp mechanism between the pair of rotating cup wheel type finishing grinding wheels, and advance the pair of cup wheel type finishing grinding wheels in the C-axis direction. Finishing chamfering of the front and rear surfaces of the quadrangular columnar silicon ingot block is performed by moving the work table while cutting the front and rear surfaces of the quadrangular columnar silicon ingot block.
(20) After finishing chamfering of the front and rear surfaces of the quadrangular columnar silicon ingot block, the work table having the second clamp mechanism for clamping the quadrangular columnar silicon ingot block that has been chamfered is moved to the left. Return to the standby position stage position of the second clamp mechanism.
(21) Hold the four side surfaces and the bottom surface of the quadrangular columnar silicon ingot block at the standby position stage position of the second clamp mechanism by the gripping claws of the transport mechanism in the unloading stage. Then, the tailstock of the second clamp mechanism is retracted to release the quadrangular columnar silicon ingot block from being clamped by the second clamp mechanism.
(22) The gripping claws of the transport mechanism are transferred out of the housing of the composite chamfering device, and the above-described quadrangular columnar silicon ingot block that has been subjected to finish grinding on the four side and four corner R corner portions on the block stocker shelf in the unloading stage. Place.

A pusher mechanism for the delivery mechanism of the ingot block is newly provided on the line connecting the four side peeling slicing device of the cylindrical ingot block and the four corner R corners of the quadrangular columnar ingot block and the grinding chamfering device of the four side surfaces, and the ingot Since the loading mechanism and unloading mechanism are provided in front of the clamp mechanism standby position of each device in-line and designed into a composite chamfering device, when chamfering an ingot block with one device, Ingot chamfering is now possible with the other device.

FIG. 1 is a plan view of a composite chamfering apparatus. FIG. 2 is a front view of the composite chamfering apparatus with the front surface of the sealing cover removed. FIG. 3 is a right side view in which a part of the finish grinding stage of the composite chamfering apparatus as viewed from the right side is cut away. FIG. 4 is a plan view in which a part of the finish grinding stage is cut away. FIG. 5 is a rear view of the ingot block delivery mechanism. FIG. 6 is a view of the ingot block delivery mechanism as viewed from the left side. FIG. 7 is a diagram showing the flow of chamfering a cylindrical ingot block using a composite chamfering device to form a square columnar ingot block from the right side of the composite chamfering device. FIG. 8 is a front view of a composite chamfering apparatus described in Japanese Patent Application No. 2010-2332039.

The ingot block composite chamfering apparatus 1 shown in FIGS. 1 and 2 uses a cylindrical single crystal silicon ingot block having a diameter of 200 mm and a length of 500 mm as a workpiece, and the loading process and the four-side stripping process are performed in about 25 minutes. The composite chamfering processing apparatus 1 capable of performing the delivery of the obtained square columnar ingot block and the four corner R corner cylindrical grinding and the four side surface grinding process and the ingot block unloading process in 26 to 30 minutes,
a) A pair of work tables 4, 4 ′ provided so as to be able to reciprocate in the left-right direction on the guide rails 3, 3 provided in the left-right direction on the machine frame 2.
b) a first clamp mechanism 7 and a second clamp mechanism 7 'comprising a pair of headstock 7a and tailstock 7b mounted separately on the left and right on the pair of work tables 4, 4';
c) a drive mechanism 7am for reciprocating the work tables 4 and 4 'carrying the work supported (clamped) between the first clamp mechanism 7 and the second clamp mechanism 7' in the left-right direction;
d) A direction in which the work table is viewed from the front side of the composite chamfering apparatus and from the right side direction of the composite chamfering apparatus 1 toward the left side.
e) a loading mechanism 13 for a component of the loading stage 8R of the cylindrical silicon ingot block;
f) a standby position stage 70 of the first clamp mechanism 7 provided behind the loading stage 8R;
g) Cylindrical silicon ingots provided at the front and rear of the guide rail so that the diameter surfaces of the rotary cutting blades 91a and 91b face each other across the workpiece support shaft of the first clamp mechanism 7 Block side slicing stage 90,
h) An ingot block transfer stage 80 in which a robot hand 81 provided on the left side of the side-peeling slicing stage 90 is fixed on a table 82 that can slide back and forth on a guide guide 83 by an air cylinder mechanism.
i) A pair of 11g and 11g of a cup wheel type grindstone supported by a pair of grindstone shafts 11a and 11b that can move back and forth and move up and down, and sandwich the work table 4 so that the grindstone surfaces face each other. Provided rough grinding stage 11,
j) The grindstone surface of a pair of cup wheel-type grindstones 10g, 10g supported by a pair of grindstone shafts 10a, 10b, which are provided parallel to the left lateral side of the rough grinding stage 11 and can move back and forth and move up and down. A finish grinding stage 10 provided before and after the work table with the work table 4 sandwiched therebetween,
k) A standby position stage 60 of the second clamp mechanism 7 ′, which is a left lateral position of the finish grinding stage 10 and is composed of a pair of a headstock 7a and a tailstock 7b.
l) An unloading mechanism 13 ′ for a work constituting an unloading stage 8L of a prismatic silicon ingot block provided on the front side of the standby position stage 60 of the second clamp mechanism 7 ′;
1 is a composite chamfering apparatus 1 for a silicon ingot block provided with

In addition, the laser light reflection type displacement sensor of the crystal orientation detection device of the cylindrical single crystal silicon ingot block (work) is not shown in the figure, but is identical to the C axis of the work sandwiched between the first clamp mechanisms. It is on a horizontal plane and is provided at a position 45 to 55 mm away from the workpiece to be measured. This laser light reflection type displacement sensor is attached so as to be able to rotate using a revolving arm so that no obstacle occurs when the work is carried into the load port 8 of the loading stage 8R. The laser light reflection type displacement sensor is rotated downward so as to be at the position when measuring the crystal orientation, and is rotated upward so that no obstacle occurs when the workpiece is loaded into the load port 8 when not measuring. Then, it is attached to the composite chamfering processing apparatus 1 so as to evacuate to the measurement standby position.

As shown in FIGS. 1 and 3, the first work table 4 is provided so as to be able to reciprocate in the left-right direction on a pair of guide rails 3, 3 laid on the machine frame 2 so as to extend in the left-right direction. is there. The reciprocating left and right of the work table 4 is rotated by the ball screw 6 being rotated by the servo motor 5, and the fixing table 6a screwed to the ball screw 6 moves leftward or rightward. The work table 4 in which the back surface of the work table 4 is fixed to the table surface moves forward in the left direction or the right direction. The advancement of the work table 4 in the left direction or the right direction depends on whether the rotation shaft of the servo motor 5 is clockwise or counterclockwise.

On the first work table 4 is mounted a first clamp mechanism 7 composed of a pair of a headstock 7a and a tailstock 7b mounted separately on the left and right. Therefore, accompanying the movement of the first work table 4 in the left direction or the right direction, the first clamp mechanism 7 also moves in the left direction or the right direction, and the headstock center support shaft (work spindle) 7a of the clamp mechanism 7 is moved. ₁ and the tailstock center support shaft 7b ₁ are suspended in a suspended state (silicon ingot block) w and can be moved to the side-peeling slicing stage 90 or the load port 8 front surface position.

The clamp mechanism 7 is a known chuck mechanism and is widely used in a cylindrical grinding machine. Headstock 7a is a workpiece w is continuously rotated 360 degrees to chamfered four corners R corner portion of the workpiece by rotating the headstock center support shaft 7a ₁ by the servo motor 7a _m, or rotated 45 degrees or 90 degrees And has the function of centering. Tailstock 7b is provided on the movable table 7b _t which can be moved on the guide rails on the left and right air cylinder 7e driving, after支架the workpiece by the clamp mechanism 7, and fixed by depressing the lever 7 _l, work table 4 moving base 7b _t for mounting the tailstock 7b by movement of preventing the movement.

The side-peeling slicing stage 90, the ingot block transfer stage 80, the rough grinding stage 11 and the finish grinding stage 10 are covered with a hermetic cover (housing material) 12. The load port 8 is closed by a one-hand side sliding door. An exhaust duct 18 is connected to the space of each of the grinding stages 10 and 11 and the side stripping stage 90 covered with the hermetic cover 12, and mist and grinding debris floating in this space are discharged to the outside.

  As shown in FIGS. 1 and 2, the ingot block carry-in mechanism 13 and the ingot stocker 14 constituting the loading stage 8 </ b> R are on the front side of the first work table 4, and the load port 8 and the second grinding stage 10. The work stockers 14, 14, 14 for storing the work loading device 13 and three ingot blocks are juxtaposed on the machine frame 2. The structures of the ingot block carry-in mechanism 13 and the ingot stocker 14 are disclosed in detail in FIGS. 5 and 7 of Japanese Patent Application No. 2010-61844, which was previously filed by the present applicant.

The work stockers 14, 14, and 14 have V-shaped shelves with an inverted isosceles triangle shape that can store three ingot blocks (work pieces), and are placed on positioning pins protruding from the machine frame.

The work loading device 13 holds one ingot block stored on the work stocker 14V-shaped shelf with a pair of claws and lifts the work by raising both claws, and then retracts and moves to the right. The workpiece is carried between the headstock 7a and the tailstock 7b of the clamping device 7 by moving and descending to be positioned in front of the load port 8 'and further retracting. After contact with one end of the workpiece to the center support shaft 7a ₁ of the headstock 7a, the work of the tailstock 7b is brought into contact with the other end is moved to the right by the air cylinder 7e to the center support shaft 7b ₁ suspended Suspend to state. Next, the gripping of the workpiece is released by separating the both claws, and then the fixing base supporting both the claws is lifted, moved to the left, and further retracted forward to move both claws to the ingot block loading mechanism 13. Return to the standby position.

The side-peeling slicing stage 90 includes a first clamping device 7, left and right guide rails 3 and 3 of the first work table 4 on which the first clamping device 7 is mounted, a headstock 7a of the first clamping mechanism, and a tailstock. A pair of rotary cutting blades (slicer blades) 91a and 91b that are supported by a pair of spindle shafts 92a and 92b that can move back and forth across the workpiece support shafts 7a ₁ and 7b ₁ of the table 7b so that their diameter surfaces face each other. And a slicing head 9 provided before and after the work table with the work table interposed therebetween.

The front and rear movements of the rotary cutting blades (outer peripheral blades) 91a and 91b are not shown on the tool tables 94 and 94 equipped with servo motors 93m and 93m for rotating the spindle shafts 92a and 92b that support the rotary cutting blades 91a and 91b. This is done by rotationally driving a motor-driven ball screw. The forward or backward movement direction of the tool table 94 depends on whether the rotation axis of the motor is clockwise or counterclockwise.

The pair of rotary cutting blades 91a and 91b are supported by a pair of spindle shafts 92a and 92b, and these spindle shafts are rotated by drive motors 93m and 93m so that the rotary cutting blades 91a and 91b rotate in the same clockwise direction with respect to the workpiece. The spindles are rotated in the direction of 50 to 7,500 min ⁻¹ (the rotation directions of both spindle shafts are opposite to each other). The spindle shafts 92a and 92b can be moved to the ingot block surface peeling processing position by moving the tool tables 94 and 94 back and forth. The work table 4 can move at a speed of 5 to 200 mm / min, and the rotary shafts 92a and 92b can move up and down to 100 mm. As the rotary cutting blade, a diamond cutter in which diamond fine particles are electrodeposited on the outer peripheral edge (thickness 1.3 to 4.5 mm) of a steel sheet having a diameter of 450 to 500 mm and a thickness of 1 to 2 mm is used.

By moving the first work table 4 on which the first clamp mechanism 7 for holding the C-axis of the work (cylindrical ingot block) in the horizontal direction is moved to the left, the front and back of the work end face are a pair of rotary cutting blades 91a and 91b. The surface of the cylindrical workpiece is scraped off into an arc shape by these rotary cutting blades. When the surface peeling of the workpiece front and back surfaces is completed, the support shaft of the headstock 7a of the first clamp mechanism 7 is rotated by 90 degrees, and the arc surface of the workpiece that has not been surface-cut is centered (positioned). Then, the first work table 4 is moved, and the pair of rotary cutting blades 91a and 91b are rotated by the drive motors 93m and 93m to perform the remaining surface peeling processing. The stripping time for the four side surfaces is 10 to 20 minutes for a cylindrical single crystal silicon ingot block having a diameter of 200 mm and a height of 250 mm, and 22 to 27 for a cylindrical single crystal silicon ingot block having a diameter of 200 mm and a height of 500 mm. It is possible to do in minutes.

  The ingot block delivery stage 80 includes a first clamping device 7, left and right moving guide rails 3 and 3 of the first work table 4 on which the first clamping device 7 is mounted, and a pair of upper and lower claws 85 a and 85 b of the robot hand 81. Comprises a robot hand 81 that can be opened and closed by synchronous control, a second clamp mechanism 7 ', and left and right movement guide rails 3 and 3 of a second work table 4' on which the second clamp mechanism 7 'is mounted.

  As shown in FIG. 1, FIG. 5 and FIG. 6, the robot hand 81 is a thin long stroke parallel hand “HLC series” (trade name) manufactured by Kondo Seisakusho Co., Ltd. A structure in which two pairs of gripping hand claws 85a and 85b are vertically provided on a pair of upper and lower hand claw fixing flanges 84 and 84 of the long stroke parallel hand is used.

  The robot hand 81 in the standby position shown in FIG. 1 and FIG. 6 is driven by the air cylinder, and the table 82 moves forward on the guide guide 83 and moves forward to the ingot block delivery position. The ingot block can be gripped by the upper and lower hand claws 85a and 85b by moving the pair of hand claw fixing flanges 84 and 84 so as to approach each other.

  After the hand claws 85a and 85b of the robot hand 81 grip the four-sided slicing quadrangular columnar silicon ingot block sandwiched between the first clamp mechanism 7, the tailstock 7b of the first clamp mechanism 7 is moved backward. The ingot block is fixed by the first clamp mechanism. Next, after the robot hand 81 is retracted to the standby position, the work table 4 on which the first clamp mechanism 7 is mounted is moved to the right and stopped at the first clamp mechanism standby position 70.

  Next, the work table 4 ′ on which the second clamp mechanism 7 ′ that has been waiting at the second clamp mechanism standby position 60 is moved to the right, and is stopped at the ingot block transfer stage 80. Next, after the robot hand 81 is advanced between the headstock 7a and the tailstock 7b of the second clamp mechanism 7 ', the quadrangular columnar silicon ingot held by a pair of hand claws 85a and 85b of the robot hand. The block is clamped between the headstock 7a and the tailstock 7b of the second clamp mechanism 7 'by the advancement of the tailstock 7b. Thereafter, the hand claws 85a and 85b of the robot hand 81 are separated from each other and released from the holding of the quadrangular columnar silicon ingot block, and the robot hand 81 is retracted to the standby position.

The rough grinding stage 11 is a pair of cup wheel type rough grinding wheels supported by a pair of grinding wheel shafts 11a and 11b provided on tool tables 11t and 11t that can be moved back and forth by the rotational drive of servo motors 11m ₁ and 11m _1. 11g, disposed at a position where the grinding wheel surface _11g s to 11g, 11g _s across the work table 4 so as to face each other and symmetrically around the work table 4 grindstone axis ₁₁ o, 11 _o is collinear, these wheel spindle 11a, 11b has a structure that is rotated by the rotational driving of the servo motor _{11 M, 11} M. These grindstone shafts 11a and 11b are fixed to a fixed plate, and the fixed plate is rotated by the rotational drive of servo motors 11m ₂ and 11m ₂ , and can be moved up and down on a guide rail provided on the front surface of the column. . The rough grinding stage 11 is configured by adding the second clamp mechanism 7 ′ and the guide rails 3, 3 to this.

When the ball screw receives the rotation drive by the servo motors 11m ₁ and 11m ₁ and rotates, and the fixing base screwed to the ball screw moves forward or backward in the forward or backward direction, the tool is placed on the surface of the fixing base. The tool tables 11t and 11t to which the back surfaces of the tables 11t and 11t are fixed move forward or backward. The forward or backward movement direction of the tool table depends on whether the rotation shafts of the servo motors 11m ₁ and 11m ₁ are clockwise or counterclockwise.

The rough grinding stage 11 is provided on the right side of the finish grinding stage 10 described later so that the grindstone shafts 10a, 11a, 10b, and 11b are parallel to each other. In other words, the grindstone axes 10 _o and 11 _o of both grinding stages 10 and 11 are provided in parallel.

The finish grinding stage 10 is a pair of cup wheel type finish grinding wheels supported by a pair of grinding wheel shafts 10a and 10b provided on tool tables 10t and 10t that can be moved back and forth by rotational drive of servo motors 10m ₁ and 10m _1. 10 g, provided at a position where the grinding wheel surface _{10 g} s a 10 g, 10 g _s across the work table 4 so as to face each other and symmetrically around the work table 4 grindstone axis ₁₀ o, 10 _o is collinear, these wheel spindle 10a, 10b has a structure that is rotated by the rotational driving of the servo motor _{10 M, 10} M. The grindstone shafts 10a and 10a are fixed to a fixed plate 16a. The fixed plate 16a is rotated by a servo motor 10m ₂ and 10m ₂ so that a ball screw 16c is rotated, whereby a guide rail 16b provided on the front surface of the column 16 is provided. , 16b, the fixed plate 16a can move up and down. Since the grinding wheel shafts 10a and 10b can be moved up and down, the grinding wheel shaft center heights of the pair of cup wheel type finishing grinding wheels 10g and 10g can be set to the same height when grinding the ingot block. It can also be made.

In addition, the ball screw receives the rotation drive by the servo motors 10m ₁ and 10m ₁ and rotates, and the fixed base screwed into the ball screw advances or retracts forward or backward, whereby a tool is placed on the surface of the fixed base. The tool tables 10t and 10t on which the back surfaces of the tables 10t and 10t are fixed move forward or backward. The forward or backward movement direction of the tool table depends on whether the rotation shafts of the servo motors 10m ₁ and 10m ₁ are clockwise or counterclockwise.

  The finish grinding stage 10 is configured by adding the second clamp mechanism 7 'and the guide rails 3 and 3 to these.

The grinding wheel numbers of the cup wheel type grindstones 11g and 11g used in the rough grinding stage 11 are 130 to 200, and the grinding wheel number of the cup wheel type grinding stones 10g and 10g used in the finish grinding stage 10 is preferably 380 to 700.

When the cup wheel grinding wheel 10g, 10g, 11g, or 11g has a cup grinding wheel diameter or ring grinding wheel diameter of a square silicon substrate for a solar cell with a side of 150mm, it is 230 to 260mm. The widths of 10 gs and 11 gs are preferably 3 to 10 mm, and the ring-shaped grindstone width is preferably 5 to 15 mm from the viewpoint of preventing grinding burn of the silicon ingot block. The distance (radius) from the center point of the wheel to the outer periphery of the wheel piece width is the same radius for one cup wheel type rough grinding wheel 11g and two cup wheel type finishing grinding wheels 10g, 10g. The diameter of the cup grindstones 11g and 11g of the molds is such that one of the diameters is 5 to 20 mm shorter than the other diameter to prevent yawing of the ingot block (vibration of the front and rear sides) during rough grinding of the four corner R corners. This is preferable.

The abrasive grains of the grinding wheels 10g and 11g are preferably diamond abrasive grains and CBN abrasive grains, and the binder is preferably a metal bond, vitrified bond, or epoxy resin bond. For example, the cup wheel type grinding wheels 10g and 11g are lower parts of a bottomed cylindrical grinding wheel base metal disclosed in, for example, Japanese Patent Laid-Open Nos. 9-38866, 2000-94342, and 2004-167617. A cup wheel type grindstone in which a large number of grindstone blades are annularly arranged on the annular ring with a gap interval at which the grinding fluid is dissipated, and the grinding fluid supplied to the inside of the base metal is preferably dissipated from the gap. It is preferable that the diameter of the ring wheel of the cup wheel type grindstones 10g and 11g is 1.2 to 1.5 times the length of one side of the prismatic silicon ingot.

As the grinding liquid, pure water, colloidal silica water dispersion, ceria water dispersion, SC-1 liquid, SC-2 liquid, or pure water and these water dispersion or grinding liquid are used in combination. As the grinding liquid, it is preferable to use only pure water from the viewpoint of water treatment considering the environment.

The unload port 8 ′ is formed by providing an opening in the housing material 12 positioned on the left side of the finish grinding stage 10 and on the front side of the work table 4 ′, and is at the second clamp mechanism standby position 60. The quadrangular columnar silicon ingot block sandwiched between the second clamp mechanisms 7 'can be transferred.

As shown in FIG. 1, work stockers 14 ′, 14 ′, 14 ′ for storing the ingot block transport mechanism 13 ′ and three ingot blocks are juxtaposed on the machine frame 2 before the unload port 8 ′. An unloading stage 8L is configured.

The ingot block transport mechanism 13 ′ grips the square pillar-shaped silicon ingotro block sandwiched between the second clamp mechanisms 7 ′ at the standby position 60 with a pair of claws. Next, the tailstock 7b of the second clamp mechanism 7 ′ is retracted to release the rectangular columnar silicon ingot block fixing of the second clamp mechanism 7 ′, and then both claws of the ingot block transport mechanism 13 ′ are raised. The quadrangular columnar silicon ingot block is lifted.

Next, after raising the fixed base that supports both claws, moving both claws to the left, and further moving back to the front, both claws are moved above the empty shelves of the work stockers 14 ′, 14 ′, 14 ′. After lowering and placing the quadrangular columnar silicon ingot block on the empty shelf, both the claws are separated to release the quadrangular columnar silicon ingot block, and then both claws are returned to the standby position of the ingot block transport mechanism 13 ′. It is.

The chamfered square columnar silicon ingot block on the work stocker 14 'is transferred onto the table of the carriage and packed and shipped to the substrate processing manufacturer, or the next thin substrate processing stage (multi-wire saw cutting) To the process).

The process of chamfering a cylindrical silicon ingot block into a quadrangular columnar silicon ingot block using the composite chamfering processing apparatus 1 shown in FIGS. 1 and 2 is performed as follows.

(1) A cylindrical silicon ingot block, which is a workpiece (workpiece) placed on the stocker 14, is gripped by both claws using a cylindrical ingot block loading mechanism 13 on the loading stage 8R. Next, the fixed base 13f that supports both claws is lifted and moved to the left, and the sliding surface 13s of the fixed base 13f is provided on the side of the column. The encoder has the function of sliding on the guide rail 13g to enter the load port 8 side, and then lowering the cylindrical ingot block by driving the air cylinder 13p and rotating it around the rotation C axis of the first clamp mechanism 7. After carrying in between the spindle head 7a and the tailstock 7b, the tailstock is moved forward to form a cylindrical silicon ingot block. Sandwiching w First clamping mechanism 7.

(2) Laser light is irradiated toward the C-axis of the cylindrical single crystal silicon ingot block from the laser light reflection type displacement sensor placed in the horizontal direction in front of the sandwiched cylindrical single crystal silicon ingot block, and clamped The cylindrical single crystal silicon ingot block that rotates the C-axis one time (360 degrees) is read while reading the C-axis rotation angle by the motor of the headstock 7a of the apparatus with an encoder, and the correlation between the rotation angle and the pulse peak is measured. The C-axis drive motor is operated so that the C-axis rotation angle at which the pulse peak appears is the cutting start angle of 45 degrees by the rotary cutting blade, and the cutting start position of the cylindrical silicon ingot block relative to the pair of rotary cutting blades 91a and 91b Perform centering.

(3) The rotation of the pair of rotary cutting blades 91a and 91b is started, the work table 4 on which the first clamp mechanism 7 is mounted is moved in the direction of the rotary cutting blades, and the cylindrical shape by the pair of rotary cutting blades Cutting the front and back surfaces of the silicon ingot block. (Fig. 7a)

(4) Next, the C axis of the cylindrical silicon ingot block is rotated 90 degrees by driving the motor of the headstock 7a.

(5) The work table 4 on which the first clamp mechanism is mounted is moved in the direction of the pair of rotating cutting blades 91a and 91b to cut the front and rear surfaces of the cylindrical silicon ingot block by the pair of rotating cutting blades. To obtain a square columnar silicon ingot block. (Fig. 7b)

(6) The work table 4 on which the first clamping mechanism is mounted is moved in the direction of the delivery stage of the ingot block, and is advanced to the delivery stage 80 where the hand claws 85a and 85b of the robot hand 81 are moved to the squares. Hold the columnar silicon ingot block. Next, after the tailstock 7b of the first clamp mechanism is retracted to release the holding of the square columnar silicon ingot block, the robot hand 81 is retracted to the standby position, and then the workpiece on which the first clamp mechanism is mounted The table 4 is returned to the position of the standby position stage 70 of the first clamp mechanism.

(7) The work table 4 ′ on which the second clamp mechanism 7 ′ at the standby position stage position of the second clamp mechanism is moved rightward and moved to the position of the robot hand 81 of the delivery stage 80. Next, after the tailstock 7b of the second clamp mechanism is moved forward to hold the square columnar silicon ingot block between the headstock 7a and the tailstock 7b of the second clamp mechanism, the hand claw 85a of the robot hand 81 , 85b are opened to release the holding of the rectangular columnar silicon ingot block, and then the robot hand 81 is moved back to the standby position.

(8) The work table 4 ′ on which the second clamp mechanism 7 ′ for sandwiching the quadrangular columnar silicon ingot block is moved to the left, and the quadrangular columnar silicon ingot block is carried into the rough grinding stage 11.

(9) One of the pair of grindstone shafts 11a and 11b of the rough grinding stage 11 is raised and the other is lowered so that the height between both grinding wheel shaft centers is 50 to 220 mm. Next, the square columnar silicon ingot rotated by driving the C-axis drive motor of the headstock 7a by moving the work table 4 'on which the second clamp mechanism is mounted between a pair of cup wheel type rough grinding wheels 11g, 11g. The pair of cups is moved by moving the work table 4 ′ on which the second clamp mechanism is mounted to the left while sliding the grindstone shafts 11 a and 11 b rotating with respect to the block to the four corners R corners of the ingot block. Four-corner R-corner cylindrical grinding of the front quadrangular columnar silicon ingot block is performed with the wheel-type rough grinding wheel 11g. The machining allowance is 0.01 to 1.0 mm. (Fig. 7c)

(10) The chamfering of the square columnar silicon ingot block with respect to the surfaces in the blade diameter direction of the pair of cup wheel type rough grinding wheels 11g, 11g by rotating the C axis of the quadrangular columnar silicon ingot block cylindrically ground at the four corners R corner. Perform C-axis centering at the start.

(11) The pair of cup wheel type rough grinding wheels 11g, 11g are moved by moving the work table 4 'on which the second clamp mechanism is mounted between the pair of rotating cup wheel type rough grinding wheels 11g, 11g. The front and rear surfaces of the quadrangular columnar silicon ingot block are chamfered by moving the work table while cutting the front and rear surfaces of the quadrangular columnar silicon ingot block. The machining allowance is 0.5 to 1.5 mm. (D in FIG. 7)

(12) A core for rotating the C-axis of the quadrangular columnar silicon ingot block 90 degrees to fix the processing side surface position of the quadrangular columnar silicon ingot block with respect to the blade 11gs radial direction surface of the pair of cup wheel type rough grinding wheels 11g, 11g. Make a delivery.

(13) The work table 4 ′ on which the second clamp mechanism is mounted is moved between the pair of rotating cup wheel rough grinding wheels 11 g and 11 g, and the pair of cup wheel rough grinding wheels 11 g and 11 g. A rough chamfering process is performed in which the front and rear surfaces of the quadrangular columnar silicon ingot block are chamfered by moving the work table 4 'while the front and rear surfaces of the quadrangular columnar silicon ingot block are cut in the C axis direction. The machining allowance is 0.5 to 1.5 mm. (E in FIG. 7)

(14) Move the work table 4 ′ mounted with the second clamp mechanism holding the square columnar silicon ingot block after the rough chamfering process to the left, and carry the square columnar silicon ingot block to the finish grinding stage 10. To do.

(15) One of the pair of grindstone shafts 10a and 10b of the finish grinding stage 11 is raised and the other is lowered so that the height between both grindstone shaft centers is 50 to 220 mm. Next, while moving the work table 4 'mounting the second clamp mechanism between the pair of cup wheel type finishing grinding wheels 10g, 10g, the pair of cup wheel type finishing grinding wheels 10g, 10g are advanced in the C-axis direction. Four corner R corners with the pair of cup wheel type finishing grinding wheels 10g and 10g rotating the four corner R corners of the rotating square columnar silicon ingot block by cutting the front and rear surfaces of the square columnar silicon ingot block. Part cylindrical grinding. The machining allowance is 0.5-2 μm. (F in FIG. 7)

(16) The C axis of the cylindrically grounded quadrangular columnar silicon ingot block is rotated to perform grinding start positioning (centering) with respect to the surface in the radial direction of the blade 10 gs of the pair of cup wheel type finishing grinding wheels.

(17) Move the work table 4 'on which the second clamp mechanism is mounted between the pair of rotating cup wheel type finishing grinding wheels 10g, 10g, and advance the pair of cup wheel type finishing grinding wheels. Chamfering is performed on the front and rear surfaces of the quadrangular columnar silicon ingot block by moving the work table while cutting the front and rear surfaces of the quadrangular columnar silicon ingot block. The machining allowance is 1 to 3 μm. (G in FIG. 7)

(18) Next, the C-axis of the quadrangular columnar silicon ingot block is rotated by 90 degrees to center the processing side surface of the quadrangular columnar silicon ingot block with respect to the blade radial direction surface of the pair of cup wheel type finishing grinding wheels 10g, 10g. To do.

(19) Move the work table mounted with the second clamp mechanism between the pair of rotating cup wheel type finishing grinding wheels, and advance the pair of cup wheel type finishing grinding wheels in the C-axis direction. Finishing chamfering of the front and rear surfaces of the quadrangular columnar silicon ingot block is performed by moving the work table while cutting the front and rear surfaces of the quadrangular columnar silicon ingot block. The machining allowance is 1 to 3 μm. (H in FIG. 7)

(20) After finishing chamfering of the front and rear surfaces of the quadrangular columnar silicon ingot block, the work table 4 ′ on which the second clamp mechanism 7 ′ that holds the chamfered quadrangular columnar silicon ingot block is mounted is left It moves to the direction and returns to the standby position stage 60 position of the second clamp mechanism.

(21) The ingot block transport mechanism 13 located on the unloading stage 8L on the bottom surface of the quadrangular columnar silicon ingot block w ′ that has been subjected to the finish grinding of the four side surfaces and the four corner R corner portions at the standby position stage 60 position of the second clamp mechanism. The gripping claw is held and held, and the tailstock 7b of the second clamping mechanism is retracted to release the quadrangular columnar silicon ingot block by the second clamping mechanism 7 '.

(22) The gripping claws of the ingot block transport mechanism 13 ′ are moved out of the housing 12 of the composite chamfering apparatus 1, and the above-mentioned four side surfaces and four corner R corner portions are ground onto the block stocker 14 shelf in the unloading stage 8L. The processed square columnar silicon ingot block is placed.

In the examples of the processing methods of the above-described steps (1) to (22), the cylindrical grinding of the four corner R corners of the square columnar single crystal silicon ingot block was performed in the rough grinding stage 11 and the finish grinding stage 10. Later, an example of performing four-side chamfering processing of a square columnar single crystal silicon ingot block was shown, but after performing four-side chamfering processing of a square columnar single crystal silicon ingot block, the four corners of the square columnar single crystal silicon ingot block were shown. Cylindrical grinding of the R corner may be performed.

The composite chamfering processing apparatus 1 of the present invention uses a pair of ingot block clamping mechanisms 7 and 7 ', and additionally provides an ingot block transfer stage 80 on a line connecting the slicing stage 90 and the grinding chamfering processing stage 11, By adopting a structure in which the loading stage 8L and the unloading stage 8L of the ingot block are respectively provided on the front front side of the clamp mechanism standby positions 70 and 60, the chamfering process by the rotary cutting blade of the ingot block and the ingot block It is possible to perform the four-corner R-corner cylindrical grinding and the side grinding simultaneously with a grinding wheel. Therefore, the throughput time for forming one cylindrical single crystal silicon ingot block having a diameter of 200 mm and a length of 500 mm into a square columnar ingot block is calculated to be 26 to 30 minutes, which is a highly productive composite chamfering apparatus 1. Further, the four-side stripping process for forming one cylindrical polycrystalline silicon ingot block having a diameter of 200 mm and a length of 500 mm into a quadrangular columnar ingot block is about 10 minutes, the grinding process is 10 to 12 minutes, and the throughput time is 10 Calculated as ~ 12 minutes.

1 Compound chamfering machine C C axis (workpiece rotation axis of clamp device)
w Cylindrical silicon ingot block (workpiece)
3 Guide rails 4, 4 ′ Work table 7, 7 ′ Clamp mechanism 7a Main shaft 7b Tailstock 8 Load port 8 ′ Unload port 10 Finish grinding stage 11 Coarse grinding stages 10a, 10b, 11a, 11b Grinding wheel shaft 10g Finish grinding Grinding wheel 11g Coarse grinding wheel 13 Ingot block loading mechanism 13 'Ingot block transport mechanism 14 Work stocker 60 Second clamp mechanism standby position stage 70 First clamp mechanism standby position stage 80 Ingot block delivery stage 81 Robot hand 90 Side-peeling slicing stage 91a, 91b Rotary cutting blade (peripheral blade)

Claims (2)

a) A pair of work tables provided so as to be able to reciprocate in the left-right direction on guide rails provided in the left-right direction on the machine frame;
b) a first clamp mechanism and a second clamp mechanism comprising a pair of headstock and tailstock mounted separately on the left and right on the pair of work tables;
c) a drive mechanism for reciprocating the work table carrying the work supported by the first and second clamp mechanisms in the left-right direction;
d) A direction in which the work table is viewed from the front side of the composite chamfering apparatus, and from the right side to the left side,
e) Cylindrical silicon ingot block loading stage,
f) a standby position stage of the first clamp mechanism provided behind the loading stage;
g) Side peeling of a cylindrical silicon ingot block provided at the front and rear of the guide rail so that the diameter surfaces of the rotary cutting blades face each other across the work support shaft of the first clamp mechanism. Slicing stage,
h) Ingot block delivery stage provided on the left side of the slicing stage;
i) A rough grinding stage provided on the front and back of a work table with a work table sandwiched between a pair of cup wheel type whetstones supported by a pair of whetstone shafts that can move back and forth and move up and down;
j) A work table provided parallel to the left lateral side of the rough grinding stage so that the grindstone surfaces of a pair of cup wheel grindstones supported by a pair of grindstone shafts capable of moving back and forth and vertically moving up and down are opposed to each other. A finish grinding stage provided before and after the worktable,
k) a left side position of the finish grinding stage, the standby position stage of the second clamp mechanism comprising a pair of headstock and tailstock;
and,
l) an unloading stage of a prismatic silicon ingot block provided on the front side of the standby position stage of the second clamp mechanism;
A composite chamfering apparatus for a silicon ingot block characterized by comprising: A method of chamfering a cylindrical silicon ingot block into a prismatic silicon ingot block using the composite chamfering apparatus according to claim 1 through the following steps.
(1) Using a loading mechanism on the loading stage, the cylindrical silicon ingot block, which is a workpiece, is loaded between a headstock with an encoder and a tailstock having a function of rotating around the rotation C axis of the first clamping mechanism. Then, the tailstock is advanced to clamp the cylindrical silicon ingot block between the first clamp mechanisms.
(2) The C-axis drive motor of the head stock of the first clamp mechanism is operated to center the cutting start position of the cylindrical silicon ingot block with respect to the pair of rotary cutting blades.
(3) The work table on which the first clamp mechanism is mounted is moved in the direction of the pair of rotating cutting blades to rotate, and the front and rear surfaces of the cylindrical silicon ingot block are cut by the pair of rotating cutting blades.
(4) Next, the C axis of the cylindrical silicon ingot block is rotated by 90 degrees.
(5) The work table carrying the first clamp mechanism is moved in the direction of the pair of rotating cutting blades to rotate, and the front and rear surfaces of the cylindrical silicon ingot block are cut by the pair of rotating cutting blades to form a rectangular column shape. Get a silicon ingot block.
(6) The work table on which the first clamp mechanism is mounted is moved toward the delivery stage of the ingot block, the robot hand is advanced to the delivery stage, the gripping claws of the robot hand are closed, and the square columnar silicon ingot block is gripped. Then, after the tailstock of the first clamp mechanism is retracted to release the holding of the square pillar-shaped silicon ingot block, the robot hand is retracted to the standby position. Thereafter, the work table on which the first clamp mechanism is mounted is returned to the standby position stage position of the first clamp mechanism, and then the robot hand is advanced to the delivery stage.
(7) The work table on which the second clamp mechanism at the standby position stage position of the second clamp mechanism is moved to the right and moved to the robot hand position of the delivery stage. Next, after the tailstock of the second clamp mechanism is advanced to hold the square columnar silicon ingot block between the spindle base and the tailstock of the second clamp mechanism, the gripping claw of the robot hand is opened to The quadrangular silicon ingot block is released, and the robot hand is retracted to the standby position.
(8) The work table on which the second clamp mechanism for sandwiching the quadrangular columnar silicon ingot block is mounted is moved leftward, and the quadrangular columnar silicon ingot block is carried into the rough grinding stage.
(9) The pair of paired rotating corners of the quadrangular columnar silicon ingot block is moved by moving a work table on which the second clamp mechanism is mounted between the pair of cup wheel type rough grinding wheels. Cylindrical grinding with a cup wheel type rough grinding wheel.
(10) C-axis centering at the start of chamfering of the square columnar silicon ingot block relative to the surface in the radial direction of a pair of cup wheel type rough grinding wheels by rotating the C axis of the cylindrically ground square columnar silicon ingot block I do.
(11) The square columnar silicon is moved by moving the work table on which the second clamp mechanism is mounted between the pair of rotating cup wheel rough grinding wheels and moving the pair of cup wheel rough grinding wheels forward. A chamfering process is performed on the front and rear surfaces of the rectangular columnar silicon ingot block by moving the work table while cutting the front and rear surfaces of the ingot block.
(12) The C-axis of the quadrangular columnar silicon ingot block is rotated 90 degrees to perform centering to fix the processing side surface position of the quadrangular columnar silicon ingot block with respect to the blade radial direction surface of the pair of cup wheel type rough grinding wheels.
(13) Move the work table on which the second clamp mechanism is mounted between the pair of rotating cup wheel type rough grinding wheels, and advance the pair of cup wheel type rough grinding wheels in the C-axis direction. Rough chamfering is performed to chamfer the front and rear surfaces of the quadrangular columnar silicon ingot block by moving the work table while cutting the front and rear surfaces of the quadrangular columnar silicon ingot block.
(14) The work table on which the second clamp mechanism for sandwiching the square columnar silicon ingot block having been subjected to the rough chamfering process is moved leftward, and the square columnar silicon ingot block is carried into the finish grinding stage.
(15) The pair of cups rotating the four corner R corners of the rotating quadrangular columnar silicon ingot block by moving the work table on which the second clamp mechanism is mounted between the pair of cup wheel type finishing grinding wheels. Cylindrical grinding with a wheel-type finish grinding wheel.
(16) The C-axis of the cylindrically grounded square columnar silicon ingot block is rotated to center the grinding start positioning with respect to the surface in the blade diameter direction of the pair of cup wheel type finishing grinding wheels.
(17) The square columnar silicon ingot is moved by moving a work table on which the second clamp mechanism is mounted between the pair of rotating cup wheel type finishing grinding wheels and moving the pair of cup wheel type finishing grinding wheels forward. Chamfering is performed on the front and rear surfaces of the quadrangular columnar silicon ingot block by moving the work table while cutting the front and rear surfaces of the block.
(18) Next, the C-axis of the quadrangular columnar silicon ingot block is rotated by 90 degrees to center the processed side surface position of the quadrangular columnar silicon ingot block with respect to the blade radial direction surface of the pair of cup wheel type finishing grinding wheels.
(19) Move the work table mounted with the second clamp mechanism between the pair of rotating cup wheel type finishing grinding wheels, and advance the pair of cup wheel type finishing grinding wheels in the C-axis direction. Finishing chamfering of the front and rear surfaces of the quadrangular columnar silicon ingot block is performed by moving the work table while cutting the front and rear surfaces of the quadrangular columnar silicon ingot block.
(20) After finishing chamfering of the front and rear surfaces of the quadrangular columnar silicon ingot block, the work table having the second clamp mechanism for clamping the quadrangular columnar silicon ingot block that has been chamfered is moved to the left. Return to the standby position stage position of the second clamp mechanism.
(21) Hold the four side surfaces and the bottom surface of the quadrangular columnar silicon ingot block at the standby position stage position of the second clamp mechanism by the gripping claws of the transport mechanism in the unloading stage. Then, the tailstock of the second clamp mechanism is retracted to release the quadrangular columnar silicon ingot block from being clamped by the second clamp mechanism.
(22) A rectangular columnar silicon ingot block in which the gripping claws of the transport mechanism are transferred out of the housing of the composite chamfering device, and the above-mentioned four side surfaces and four corner R corners are finish-ground on the block stocker shelf in the unloading stage. Is placed.

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