JP2015128801A - Polishing device of plate-like body, polishing method of plate-like body and manufacturing method of plate-like body - Google Patents

Polishing device of plate-like body, polishing method of plate-like body and manufacturing method of plate-like body Download PDF

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JP2015128801A
JP2015128801A JP2014000397A JP2014000397A JP2015128801A JP 2015128801 A JP2015128801 A JP 2015128801A JP 2014000397 A JP2014000397 A JP 2014000397A JP 2014000397 A JP2014000397 A JP 2014000397A JP 2015128801 A JP2015128801 A JP 2015128801A
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polishing
plate
lane
glass plate
tool
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博之 大岩
Hiroyuki Oiwa
博之 大岩
宜佳 橋本
Nobuyoshi Hashimoto
宜佳 橋本
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AGC Inc
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Asahi Glass Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a polishing device of a plate-like body, a polishing method of the plate-like body and a manufacturing method of the plate-like body capable of corresponding to the polishing of the large-size plate-like body and capable of preventing breakage and cracking from occurring on the plate-like body during the polishing.SOLUTION: A plurality of polishing heads 16 are arranged in a conveyance direction A of a glass plate G and a conveyance path R of the glass plate G is divided into two in the width direction and is arranged so as to be partitioned into a set first polishing lane L1 and second polishing lane L2. Thereby, the polishing heads can correspond to the polishing of the glass plate G of a large-size. Further, a pressing roller 18 is placed between the polishing heads 16 having the different polishing lanes which are provided on the upstream side and the downstream side of the conveyance direction A of the glass plate G. Thereby, the floating of the glass plate G can be prevented and the breakage and the cracking on the glass plate G can be prevented from occurring.

Description

本発明は、板状体の研磨装置、板状体の研磨方法、及び板状体の製造方法に関する。   The present invention relates to a plate-like body polishing apparatus, a plate-like body polishing method, and a plate-like body manufacturing method.

板状体の表面を研磨する方法として、一定の搬送路に沿って板状体を搬送し、その搬送過程で板状体の表面を研磨する方法が知られている。   As a method for polishing the surface of the plate-like body, a method is known in which the plate-like body is conveyed along a certain conveyance path and the surface of the plate-like body is polished in the course of the conveyance.

たとえば、特許文献1には、板状体であるガラス板の幅よりも大きな直径を有する円形の研磨パッドを備えた研磨具をガラス板の搬送路上に配置し、その研磨具を自転及び公転させながら、搬送中のガラス板の表面に押し付けて、ガラス板の表面を研磨する方法が開示されている。   For example, in Patent Document 1, a polishing tool provided with a circular polishing pad having a diameter larger than the width of a glass plate that is a plate-like body is disposed on the conveyance path of the glass plate, and the polishing tool rotates and revolves. However, a method of polishing the surface of the glass plate by pressing against the surface of the glass plate being conveyed is disclosed.

また、特許文献2には、板状体であるガラス板の幅よりも小さな直径を有する円形の研磨パッドを備えた研磨具をガラス板の搬送方向に沿って千鳥状に複数配置し(いわゆる、ジグザグ配置(zigzag alignment))、各研磨具を自転及び公転させながら、搬送中のガラス板の表面に押し付けて、ガラス板の表面を研磨する方法が開示されている。   Further, in Patent Document 2, a plurality of polishing tools including a circular polishing pad having a diameter smaller than the width of a glass plate that is a plate-like body are arranged in a staggered manner along the conveyance direction of the glass plate (so-called, Zigzag alignment (zigzag alignment), a method of polishing the surface of the glass plate by pressing each polishing tool against the surface of the glass plate being conveyed while rotating and revolving.

特開2001−293656号公報JP 2001-293656 A 特開2007−190657号公報JP 2007-190657 A

しかしながら、特許文献1の方法の場合、ガラス板のサイズが大きくなると、それに合わせて研磨具のサイズも大きくなるため、大型サイズのガラス板の研磨に対応させることが困難という問題がある。   However, in the case of the method of Patent Document 1, when the size of the glass plate is increased, the size of the polishing tool is increased accordingly, so that there is a problem that it is difficult to cope with polishing of a large size glass plate.

一方、特許文献2の方法は、大型サイズのガラス板の研磨への対応が可能であるが、特許文献1の方法に比して、ガラス板に割れ、ひび割れ(クラック)が生じやすいという問題がある。   On the other hand, the method of Patent Document 2 can cope with polishing of a large-sized glass plate. However, compared with the method of Patent Document 1, there is a problem that the glass plate is likely to be cracked or cracked. is there.

本発明は、このような事情に鑑みてなされたもので、大型サイズの板状体の研磨に対応でき、かつ、研磨中に板状体に割れ、ひび割れが生じるのを防止できる板状体の研磨装置、板状体の研磨方法、及び板状体の製造方法を提供することを目的とする。   The present invention has been made in view of such circumstances, and is a plate-like body that can cope with polishing of a large-sized plate-like body and can prevent cracking and cracking of the plate-like body during polishing. An object of the present invention is to provide a polishing apparatus, a method for polishing a plate-like body, and a method for producing a plate-like body.

課題を解決するための手段は、次のとおりである。   Means for solving the problems are as follows.

第1の態様は、搬送手段によって所定の搬送路を搬送される板状体を板状体の搬送方向に沿って複数配置された研磨手段によって連続研磨する板状体の研磨装置において、研磨手段が、搬送路を幅方向に二分割して設定される第1の研磨レーンと第2の研磨レーンとに分配して配置され、板状体の搬送方向の上流側と下流側とで配置される研磨レーンが異なる研磨手段の間に、搬送中の板状体を搬送手段に押さえ付ける押さえ手段を配置した板状体の研磨装置である。   A first aspect is a polishing apparatus for a plate-like body in which a plurality of plate-like bodies conveyed on a predetermined conveyance path by a conveying means are continuously polished by a plurality of polishing means arranged along the conveyance direction of the plate-like body. Are distributed and arranged on a first polishing lane and a second polishing lane set by dividing the conveyance path into two in the width direction, and arranged on the upstream side and the downstream side in the conveyance direction of the plate-like body. A polishing apparatus for a plate-like body, in which pressing means for pressing the plate-like body being conveyed to the conveyance means is disposed between the polishing means having different polishing lanes.

本態様によれば、研磨手段が、搬送路を幅方向に二分割して設定される第1の研磨レーンと第2の研磨レーンとに分配して配置される。これにより、小型サイズの研磨手段であっても大型サイズの板状体の研磨に対応できる。また、板状体の搬送方向の上流側と下流側とで配置される研磨レーンが異なる研磨手段の間に押さえ手段が配置される。これにより、研磨中に割れ、ひび割れが生じるのを防止できる。これは、次の理由に基づく。研磨手段を第1の研磨レーンと第2の研磨レーンとに分配して配置すると、板状体は、表面の片側半分ずつを各研磨手段に研磨される。研磨中、板状体は片側半分だけに研磨具が押し付けられるため、研磨具が押し付けられていない方の端部に浮きが生じる。そして、このように浮きが生じた板状体に研磨具を押し付けると、板状体に割れ、ひび割れが生じるおそれがある。押さえ手段を配置することにより、板状体の浮きを防止でき、フラットな状態で板状体を次の研磨手段に移行できる。これにより、板状体の割れ、ひび割れを防止できる。   According to this aspect, the polishing means is distributed and arranged in the first polishing lane and the second polishing lane that are set by dividing the conveyance path into two in the width direction. Thereby, even a small-size polishing means can cope with polishing of a large-sized plate. In addition, a pressing unit is disposed between polishing units having different polishing lanes on the upstream side and the downstream side in the conveyance direction of the plate-like body. Thereby, it can prevent that a crack and a crack arise during grinding | polishing. This is based on the following reason. When the polishing means is distributed and arranged in the first polishing lane and the second polishing lane, the plate-like body is polished by each polishing means on one side half of the surface. During polishing, since the polishing tool is pressed against only one half of the plate-like body, floating occurs at the end where the polishing tool is not pressed. When the polishing tool is pressed against the plate-like body in which the float is generated as described above, the plate-like body may be cracked or cracked. By disposing the pressing means, the plate-like body can be prevented from floating, and the plate-like body can be transferred to the next polishing means in a flat state. Thereby, the crack of a plate-shaped body and a crack can be prevented.

第2の態様は、第1の態様の板状体の研磨装置において、研磨手段が配置される領域が板状体の搬送方向に沿って複数のブロックに分割され、ブロック単位で研磨手段が第1の研磨レーンと第2の研磨レーンとに交互に配置される態様である。   According to a second aspect, in the plate-like body polishing apparatus according to the first aspect, the region where the polishing means is disposed is divided into a plurality of blocks along the conveying direction of the plate-like body. In this embodiment, the first polishing lane and the second polishing lane are alternately arranged.

本態様によれば、ブロック単位で研磨手段が第1の研磨レーンと第2の研磨レーンとに交互に配置される。すなわち、同じブロックに属する研磨手段は、同じ研磨レーンに配置され、ブロックが切り換わると、研磨手段を配置する研磨レーンが切り換えられる。この結果、押さえ手段は、各ブロックの境界に配置される。これにより、押さえ手段の設置本数を削減できる。また、このように研磨手段を配置することにより、板状体を複数の研磨手段で連続して研磨でき、研磨力の向上を図れる。すなわち、板状体の同じ部位を複数の研磨手段で連続して研磨することにより、研磨部位の温度を高い状態に保つことができる。これにより、スラリーの温度を高い状態に保つことができ、研磨力の向上を図れる。また、同じ研磨レーンに複数の研磨手段を連続して配置することにより、単体で研磨手段をメンテナンス(ドレッシングや交換など)でき、稼働効率を向上できる(千鳥配置(研磨手段が、一台ずつ第1の研磨レーンと第2の研磨レーンとに交互に配置される配置形態)の場合、常に隣り合う二台の研磨手段を一組として、メンテナンスを行う必要がある。)。   According to this aspect, the polishing means is alternately arranged in the first polishing lane and the second polishing lane in units of blocks. That is, the polishing means belonging to the same block are arranged in the same polishing lane, and when the block is switched, the polishing lane in which the polishing means is arranged is switched. As a result, the pressing means is arranged at the boundary of each block. Thereby, the installation number of pressing means can be reduced. Further, by arranging the polishing means in this way, the plate-like body can be continuously polished by a plurality of polishing means, and the polishing power can be improved. That is, by continuously polishing the same portion of the plate-like body with a plurality of polishing means, the temperature of the polishing portion can be kept high. As a result, the temperature of the slurry can be kept high, and the polishing power can be improved. In addition, by arranging a plurality of polishing means in succession in the same polishing lane, the polishing means can be maintained (dressing, replacement, etc.) by itself and the operation efficiency can be improved (staggered arrangement (the polishing means are one by one). In the case of an arrangement configuration in which the first polishing lane and the second polishing lane are alternately arranged), it is necessary to always perform maintenance with two adjacent polishing means as a set.

第3の態様は、第2の態様の板状体の研磨装置において、研磨手段の研磨具は、板状体の幅よりも小さい直径を有する円形であり、自転及び公転する態様である。   According to a third aspect, in the plate-like body polishing apparatus according to the second aspect, the polishing tool of the polishing means is a circular shape having a diameter smaller than the width of the plate-like body, and rotates and revolves.

本態様によれば、板状体のサイズよりも小さいサイズの研磨具を用いて板状体を研磨できる。   According to this aspect, the plate-like body can be polished using the polishing tool having a size smaller than the size of the plate-like body.

第4の態様は、第3の態様の板状体の研磨装置において、ブロック単位で研磨具の自転及び公転の方向が揃えて設定され、かつ、研磨具の自転の方向が、板状体の搬送方向の上流側において板状体の幅方向の内側から外側に向かう方向に設定される態様である。   The fourth aspect is the plate-like body polishing apparatus according to the third aspect, wherein the direction of rotation and revolution of the polishing tool is set to be uniform for each block, and the direction of rotation of the polishing tool is that of the plate-like body. It is an aspect set in the direction from the inner side to the outer side in the width direction of the plate-like body on the upstream side in the transport direction.

本態様によれば、ブロック単位で研磨具の自転及び公転の方向が揃えて設定され、かつ、研磨具の自転の方向が、板状体の搬送方向の上流側において板状体の幅方向の内側から外側に向かう方向に設定される。これにより、更に板状体の幅方向の端部の浮きを防止できる。すなわち、板状体の搬送方向の上流側(板状体の入り側)において、板状体の幅方向の内側から外側に向かう方向に研磨具を自転させると、板状体の内側から外側に向かって板状体を押さえる力を作用させることができ、板状体の幅方向の端部の浮きを防止できる。   According to this aspect, the direction of rotation and revolution of the polishing tool is set in units of blocks, and the direction of rotation of the polishing tool is in the width direction of the plate-like body on the upstream side of the conveying direction of the plate-like body. It is set in the direction from the inside to the outside. Thereby, the float of the edge part of the width direction of a plate-shaped body can further be prevented. That is, when the polishing tool rotates in the direction from the inner side to the outer side in the width direction of the plate-like body on the upstream side in the conveyance direction of the plate-like body (the entrance side of the plate-like body), The force which presses a plate-shaped body toward can be made to act, and the floating of the edge part of the width direction of a plate-shaped body can be prevented.

第5の態様は、第4の態様の板状体の研磨装置において、ブロック単位で研磨具の公転の位相が揃えて設定され、かつ、隣り合うブロックにおいて研磨具の公転の位相が180度ずらして設定される態様である。   According to a fifth aspect, in the plate-like body polishing apparatus according to the fourth aspect, the revolution phase of the polishing tool is set to be equal for each block, and the revolution phase of the polishing tool is shifted by 180 degrees in adjacent blocks. This is the mode set.

本態様によれば、ブロック単位で研磨具の公転の位相が揃えて設定され、かつ、隣り合うブロックにおいて研磨具の公転の位相が180度ずらして設定される。これにより、ブロックの切り換わりにおいて、板状体に作用する負荷を相殺でき、板状体をスムーズに搬送できる。   According to this aspect, the revolution phase of the polishing tool is set to be equal for each block, and the revolution phase of the polishing tool is set to be shifted by 180 degrees in adjacent blocks. Thereby, in the switching of a block, the load which acts on a plate-shaped body can be canceled, and a plate-shaped body can be conveyed smoothly.

第6の態様は、搬送手段によって所定の搬送路を搬送される板状体を板状体の搬送方向に沿って複数配置された研磨手段によって連続研磨する板状体の研磨方法において、搬送路を幅方向に二分割して設定される第1の研磨レーンと第2の研磨レーンとに研磨手段を分配して配置し、搬送中の板状体を搬送手段に押さえ付ける押さえ手段を、板状体の搬送方向の上流側と下流側とで配置される研磨レーンが異なる研磨手段の間に配置する板状体の研磨方法である。   According to a sixth aspect of the present invention, there is provided a polishing method for a plate-like body in which a plurality of plate-like bodies conveyed on a predetermined conveyance path by the conveyance means are continuously polished by a plurality of polishing means arranged along the conveyance direction of the plate-like body. The pressing means for distributing and arranging the polishing means to the first polishing lane and the second polishing lane set by dividing the width into two in the width direction and pressing the plate-like body being transferred to the transfer means, This is a polishing method for a plate-like body arranged between polishing means having different polishing lanes arranged on the upstream side and the downstream side in the conveyance direction of the shape-like body.

本態様によれば、研磨手段が、搬送路を幅方向に二分割して設定される第1の研磨レーンと第2の研磨レーンとに分配して配置される。これにより、大型サイズの板状体の研磨に対応できる。また、板状体の搬送方向の上流側と下流側とで配置される研磨レーンが異なる研磨手段の間に押さえ手段が配置される。これにより、研磨中に割れ、ひび割れが生じるのを防止できる。   According to this aspect, the polishing means is distributed and arranged in the first polishing lane and the second polishing lane that are set by dividing the conveyance path into two in the width direction. Thereby, it can respond to grinding | polishing of a large sized plate-shaped object. In addition, a pressing unit is disposed between polishing units having different polishing lanes on the upstream side and the downstream side in the conveyance direction of the plate-like body. Thereby, it can prevent that a crack and a crack arise during grinding | polishing.

第7の態様は、第6の態様の板状体の研磨方法において、研磨手段が配置される領域を板状体の搬送方向に沿って複数のブロックに分割し、ブロック単位で研磨手段を第1の研磨レーンと第2の研磨レーンとに交互に配置する態様である。   According to a seventh aspect, in the method for polishing a plate-like body according to the sixth aspect, the region where the polishing means is disposed is divided into a plurality of blocks along the conveying direction of the plate-like body, and the polishing means is divided into blocks. In this embodiment, the first polishing lane and the second polishing lane are alternately arranged.

本態様によれば、ブロック単位で研磨手段が第1の研磨レーンと第2の研磨レーンとに交互に配置される。これにより、押さえ手段の設置本数を削減できる。また、研磨力の向上を図れる。   According to this aspect, the polishing means is alternately arranged in the first polishing lane and the second polishing lane in units of blocks. Thereby, the installation number of pressing means can be reduced. Further, the polishing power can be improved.

第8の態様は、第7の態様の板状体の研磨方法において、研磨手段の研磨具は、板状体の幅よりも小さい直径を有する円形であり、自転及び公転する態様である。   The eighth aspect is an aspect in which in the method for polishing a plate-like body according to the seventh aspect, the polishing tool of the polishing means is a circle having a diameter smaller than the width of the plate-like body and rotates and revolves.

本態様によれば、板状体のサイズよりも小さいサイズの研磨具を用いて板状体を研磨できる。   According to this aspect, the plate-like body can be polished using the polishing tool having a size smaller than the size of the plate-like body.

第9の態様は、第8の態様の板状体の研磨方法において、ブロック単位で研磨具の自転及び公転の方向を揃えて設定し、かつ、研磨具の自転の方向を板状体の搬送方向の上流側において板状体の幅方向の内側から外側に向かう方向に設定する態様である。   According to a ninth aspect, in the plate-like body polishing method according to the eighth aspect, the rotation direction and revolution direction of the polishing tool are set to be equal to each other in units of blocks, and the rotation direction of the polishing tool is transferred to the plate-like body. It is an aspect set in the direction from the inner side to the outer side in the width direction of the plate-like body on the upstream side in the direction.

本態様によれば、ブロック単位で研磨具の自転及び公転の方向が揃えて設定され、かつ、研磨具の自転の方向が、板状体の搬送方向の上流側において板状体の幅方向の内側から外側に向かう方向に設定される。これにより、更に板状体の幅方向の端部の浮きを防止できる。   According to this aspect, the direction of rotation and revolution of the polishing tool is set in units of blocks, and the direction of rotation of the polishing tool is in the width direction of the plate-like body on the upstream side of the conveying direction of the plate-like body. It is set in the direction from the inside to the outside. Thereby, the float of the edge part of the width direction of a plate-shaped body can further be prevented.

第10の態様は、第9の態様の板状体の研磨方法において、ブロック単位で研磨具の公転の位相を揃えて設定し、かつ、隣り合うブロックにおいて研磨具の公転の位相を180度ずらして設定する態様である。   According to a tenth aspect, in the method for polishing a plate-like body according to the ninth aspect, the revolution phase of the polishing tool is set to be equal for each block, and the revolution phase of the polishing tool is shifted by 180 degrees in adjacent blocks. This is a mode of setting.

本態様によれば、ブロック単位で研磨具の公転の位相が揃えて設定され、かつ、隣り合うブロックにおいて研磨具の公転の位相が180度ずらして設定される。これにより、ブロックの切り換わりにおいて、板状体に作用する負荷を相殺でき、板状体をスムーズに搬送できる。   According to this aspect, the revolution phase of the polishing tool is set to be equal for each block, and the revolution phase of the polishing tool is set to be shifted by 180 degrees in adjacent blocks. Thereby, in the switching of a block, the load which acts on a plate-shaped body can be canceled, and a plate-shaped body can be conveyed smoothly.

第11の態様は、第6〜10のいずれか一の態様の板状体の研磨方法により、板状体を研磨する工程を有する板状体の製造方法である。   An eleventh aspect is a method for manufacturing a plate-like body, which includes a step of polishing the plate-like body by the plate-like body polishing method according to any one of the sixth to tenth aspects.

本態様によれば、研磨工程で板状体に割れ、ひび割れが生じるのを防止でき、生産性を向上できる。   According to this aspect, it can prevent that a crack and a crack arise in a plate-shaped object at a grinding | polishing process, and can improve productivity.

本発明によれば、大型サイズの板状体の研磨に対応でき、かつ、研磨中に板状体に割れ、ひび割れが生じるのを防止できる。   ADVANTAGE OF THE INVENTION According to this invention, it can respond to grinding | polishing of a large sized plate-shaped object, and can prevent that a crack and a crack arise in a plate-shaped object during grinding | polishing.

研磨装置の一実施形態を示す平面図Top view showing one embodiment of a polishing apparatus 研磨装置の一実施形態を示す側面図Side view showing an embodiment of a polishing apparatus 研磨ヘッドの配置領域の一部を拡大した平面図An enlarged plan view of a part of the polishing head arrangement area (A)〜(C)は、研磨ヘッドの配置の変形例を示す平面図(A)-(C) are top views which show the modification of arrangement | positioning of a polishing head. 粗研磨と仕上げ研磨を行う場合の研磨ヘッドと押さえローラの配置例を示す平面図The top view which shows the example of arrangement of the polishing head and the pressing roller when rough polishing and finish polishing 研磨具の自転方向及び公転方向の設定方法の概念図Conceptual diagram of how to set the direction of rotation and revolution of the polishing tool

以下、添付図面に従って本発明を実施するための好ましい形態について詳説する。   Hereinafter, preferred embodiments for carrying out the present invention will be described in detail with reference to the accompanying drawings.

《研磨装置の構成》
図1、図2は、それぞれ本発明に係る研磨装置の一実施形態を示す平面図、側面図である。
<Configuration of polishing equipment>
1 and 2 are a plan view and a side view, respectively, showing an embodiment of a polishing apparatus according to the present invention.

図1、図2に示す研磨装置10は、板状体の一例であるガラス板Gの表面G1を連続研磨する研磨装置であり、主として、ガラス板Gを搬送する搬送装置(搬送手段)12と、搬送中のガラス板Gの表面G1に回転する円形の研磨具14を押し当てて、ガラス板Gの表面G1を連続研磨する複数の研磨ヘッド(研磨手段)16と、搬送中のガラス板Gを押さえる複数本の押さえローラ18と、研磨ヘッド16の配置領域において搬送中のガラス板の表面G1に、酸化セリウム等の砥粒を含むスラリーを供給するスラリー供給装置(不図示)と、を備えて構成される。   A polishing apparatus 10 shown in FIGS. 1 and 2 is a polishing apparatus that continuously polishes a surface G1 of a glass plate G, which is an example of a plate-like body, and mainly includes a conveying device (conveying means) 12 that conveys the glass plate G; A plurality of polishing heads (polishing means) 16 for continuously polishing the surface G1 of the glass plate G by pressing the rotating circular polishing tool 14 against the surface G1 of the glass plate G being conveyed, and the glass plate G being conveyed And a slurry supply device (not shown) for supplying slurry containing abrasive grains such as cerium oxide to the surface G1 of the glass plate being conveyed in the region where the polishing head 16 is disposed. Configured.

〈搬送装置〉
搬送装置12は、ガラス板Gの搬送路に沿って敷設される軌道(不図示)と、複数枚のガラス板Gを水平に保持して軌道上を走行するテーブル20と、を備えて構成される。
<Conveyor>
The transport device 12 includes a track (not shown) laid along the transport path of the glass plate G, and a table 20 that holds the plurality of glass plates G horizontally and travels on the track. The

テーブル20は、搬送方向に沿って延びる長尺状の形状を有し、上面部分に水平なガラス載置面20Aを有する。ガラス載置面20Aには、一定の厚さを有するウレタン樹脂製のバックパッド22が敷設される。   The table 20 has a long shape extending along the transport direction, and has a horizontal glass placement surface 20A on the upper surface portion. A back pad 22 made of urethane resin having a certain thickness is laid on the glass mounting surface 20A.

ガラス板Gは、バックパッド22を介してガラス載置面20Aに整列して載置される。この際、研磨対象とする主面(この面を表面G1とする)を鉛直方向上向きにして、ガラス載置面20Aに載置される。ガラス載置面20Aに載置された各ガラス板Gは、裏面(研磨対象とする主面の反対側の主面)をバックパッド22に吸着されて、テーブル20に保持される。   The glass plate G is placed in alignment with the glass placement surface 20 </ b> A via the back pad 22. At this time, the surface is placed on the glass placement surface 20A with the main surface to be polished (this surface is referred to as surface G1) facing upward in the vertical direction. Each glass plate G placed on the glass placement surface 20 </ b> A has its back surface (main surface opposite to the main surface to be polished) adsorbed to the back pad 22 and held on the table 20.

テーブル20は、図示しないテーブル駆動手段に駆動されて、軌道上を一定の速度で走行する。テーブル20の大きさは、図1の如く、長尺に限定されず、1枚又は複数枚のガラス板Gを載置できる短尺形状であってもよい。   The table 20 is driven by a table driving means (not shown) and travels on the track at a constant speed. As shown in FIG. 1, the size of the table 20 is not limited to a long shape, and may be a short shape on which one or a plurality of glass plates G can be placed.

ガラス板Gを載置したテーブル20を軌道に沿って一定の速度で走行させることにより、ガラス板Gが搬送路に沿って一定の速度で搬送される。   By causing the table 20 on which the glass plate G is placed to travel along the track at a constant speed, the glass plate G is transported at a constant speed along the transport path.

〈研磨ヘッド〉
研磨ヘッド16は、円形の研磨具14を備え、搬送中のガラス板Gの表面G1に、回転する、好ましくは自転及び公転する円形の研磨具14をガラス板Gの表面G1に押し付けて、ガラス板Gの表面G1を研磨する。
<Polishing head>
The polishing head 16 includes a circular polishing tool 14, and presses a rotating, preferably rotating and revolving circular polishing tool 14 against the surface G 1 of the glass plate G being conveyed against the surface G 1 of the glass plate G, The surface G1 of the plate G is polished.

研磨ヘッド16は、ガラス板Gの搬送方向Aに沿って所望の間隔で複数配置され、かつ、ガラス板Gの搬送路を幅方向(搬送方向Aと直交する方向)に二分割して設定される第1の研磨レーンL1と第2の研磨レーンL2とに分配して配置される。この研磨ヘッド16の配置については、後に詳述する。   A plurality of the polishing heads 16 are arranged at a desired interval along the conveyance direction A of the glass plate G, and the conveyance path of the glass plate G is set to be divided into two in the width direction (direction perpendicular to the conveyance direction A). The first and second polishing lanes L1 and L2 are distributed and arranged. The arrangement of the polishing head 16 will be described in detail later.

研磨具14は、円形の研磨具本体14Aと、その研磨具本体14Aの下面同軸上に装着される円形の研磨パッド14Bと、を備えて構成される。研磨パッド14Bは、ガラス板Gの幅(搬送方向Aと直交する方向の長さ)GWよりも小さい直径Dを有する。研磨具14は、ガラス板Gの搬送路上に、研磨パッド14Bの研磨面とガラス板Gの表面とが平行になるように設置される。   The polishing tool 14 includes a circular polishing tool body 14A and a circular polishing pad 14B mounted on the lower surface of the polishing tool body 14A. The polishing pad 14B has a diameter D smaller than the width of the glass plate G (the length in the direction orthogonal to the conveyance direction A) GW. The polishing tool 14 is installed on the conveyance path of the glass plate G so that the polishing surface of the polishing pad 14B and the surface of the glass plate G are parallel to each other.

研磨ヘッド16は、研磨具14を自転及び公転させる回転駆動機構(不図示)と、研磨具14をガラス板Gの表面の鉛直方向に進退移動させる進退駆動機構(不図示)と、を備える。   The polishing head 16 includes a rotation drive mechanism (not shown) that rotates and revolves the polishing tool 14, and an advance / retreat drive mechanism (not shown) that moves the polishing tool 14 forward and backward in the vertical direction of the surface of the glass plate G.

なお、この種の研磨装置において、研磨具14を自転及び公転させる機構、及び、研磨具14を鉛直方向に進退移動させる機構は、公知であるので、その構成についての説明は省略する。   In this type of polishing apparatus, a mechanism for rotating and revolving the polishing tool 14 and a mechanism for moving the polishing tool 14 back and forth in the vertical direction are well-known, and the description of the configuration is omitted.

研磨具14は、回転駆動機構に駆動されて、自転中心OA(=研磨具14の中心)を中心に自転し、かつ、公転中心OBを中心に公転する(図3参照)。   The polishing tool 14 is driven by the rotation drive mechanism, rotates around the rotation center OA (= center of the polishing tool 14), and revolves around the revolution center OB (see FIG. 3).

また、研磨具14は、進退駆動機構によって駆動されて、鉛直方向に上下動し、研磨位置と退避位置との間を移動する。研磨具14は、研磨位置に位置すると、搬送中のガラス板Gの表面G1に研磨パッド14Bが押し付けられ、退避位置に位置すると、研磨パッド14Bがガラス板Gから離間する。   Further, the polishing tool 14 is driven by an advance / retreat drive mechanism, moves up and down in the vertical direction, and moves between the polishing position and the retracted position. When the polishing tool 14 is positioned at the polishing position, the polishing pad 14B is pressed against the surface G1 of the glass plate G being conveyed, and when the polishing tool 14 is positioned at the retracted position, the polishing pad 14B is separated from the glass plate G.

スラリーが供給されたガラス板Gの表面G1に対して、研磨具14を自転及び公転させながら一定の押圧力で押し付けることにより、ガラス板Gの表面G1が研磨される。   The surface G1 of the glass plate G is polished by pressing the polishing tool 14 against the surface G1 of the glass plate G supplied with the slurry with a constant pressing force while rotating and revolving.

〈研磨ヘッドの配置〉
図3は、研磨ヘッドの配置領域の一部を拡大した平面図である。
<Position of polishing head>
FIG. 3 is an enlarged plan view of a part of the arrangement area of the polishing head.

上記のように、研磨ヘッド16は、ガラス板Gの搬送方向Aに沿って所望の間隔で複数配置され、かつ、ガラス板Gの搬送路を幅方向に二分割して設定される第1の研磨レーンL1と第2の研磨レーンL2とに分配して配置される。   As described above, a plurality of polishing heads 16 are arranged at desired intervals along the conveyance direction A of the glass plate G, and the first is set by dividing the conveyance path of the glass plate G into two in the width direction. The polishing lane L1 and the second polishing lane L2 are distributed and arranged.

ここで、ガラス板Gの搬送路R(図3において斜線で示す領域)とは、ガラス板Gが通る道筋であり、その幅RWはガラス板Gの幅GWと同じである。ガラス板Gは、テーブル20によって搬送されることにより、その中心が搬送路Rの中心線CL0上を移動する。   Here, the conveyance path R of the glass plate G (a region indicated by hatching in FIG. 3) is a path through which the glass plate G passes, and the width RW is the same as the width GW of the glass plate G. The glass plate G is transported by the table 20 so that the center thereof moves on the center line CL0 of the transport path R.

ガラス板Gの搬送路Rは、研磨ヘッド16の配置領域Zにおいて、直線で構成される(図1参照)。第1の研磨レーンL1及び第2の研磨レーンL2は、このガラス板Gの搬送路Rを幅方向に二等分割して設定される。したがって、第1の研磨レーンL1と第2の研磨レーンL2とは同じ幅で設定され、搬送路Rの中心線CL0を挟んで対称に設定される。   The conveyance path R of the glass plate G is configured with a straight line in the arrangement region Z of the polishing head 16 (see FIG. 1). The first polishing lane L1 and the second polishing lane L2 are set by dividing the conveyance path R of the glass plate G into two equal parts in the width direction. Therefore, the first polishing lane L1 and the second polishing lane L2 are set to have the same width, and are set symmetrically across the center line CL0 of the transport path R.

第1の研磨レーンL1に配置される研磨ヘッド16は、第1の研磨レーンL1の中心線CL1上に研磨具14の公転中心OBが位置するように配置される。   The polishing head 16 disposed in the first polishing lane L1 is disposed such that the revolution center OB of the polishing tool 14 is positioned on the center line CL1 of the first polishing lane L1.

また、第2の研磨レーンL2に配置される研磨ヘッド16は、第2の研磨レーンL2の中心線CL2上に研磨具14の公転中心OBが位置するように配置される。   The polishing head 16 disposed in the second polishing lane L2 is disposed such that the revolution center OB of the polishing tool 14 is positioned on the center line CL2 of the second polishing lane L2.

研磨ヘッド16は、第1の研磨レーンL1と第2の研磨レーンL2とに分配して配置されるが、その分配は、次のように行われる。   The polishing head 16 is distributed and arranged in the first polishing lane L1 and the second polishing lane L2, and the distribution is performed as follows.

すなわち、図1に示すように、研磨ヘッド16を配置する領域をガラス板Gの搬送方向Aに沿って複数のブロックに分割し、ブロック単位で研磨ヘッド16を第1の研磨レーンL1と第2の研磨レーンL2とに交互に配置する。本実施の形態の研磨装置10では、研磨ヘッド16を配置する領域を4つのブロックB1〜B4に分割し、奇数ブロックB1、B3に属する研磨ヘッド16を第1の研磨レーンL1に配置し、偶数ブロックB2、B4に属する研磨ヘッド16を第2の研磨レーンL2に配置している。これにより、ブロック単位で研磨ヘッド16が、第1の研磨レーンL1と第2の研磨レーンL2とに交互に配置される。ブロックB1〜B4には、それぞれ4個の研磨ヘッドが配置される。   That is, as shown in FIG. 1, the region where the polishing head 16 is disposed is divided into a plurality of blocks along the conveying direction A of the glass plate G, and the polishing head 16 is divided into the first polishing lane L1 and the second polishing block in units of blocks. Are alternately arranged in the polishing lane L2. In the polishing apparatus 10 of the present embodiment, the region in which the polishing head 16 is arranged is divided into four blocks B1 to B4, and the polishing heads 16 belonging to the odd blocks B1 and B3 are arranged in the first polishing lane L1, and the even number The polishing heads 16 belonging to the blocks B2 and B4 are arranged in the second polishing lane L2. As a result, the polishing heads 16 are alternately arranged in the first polishing lane L1 and the second polishing lane L2 in units of blocks. In each of the blocks B1 to B4, four polishing heads are arranged.

このように研磨ヘッド16を配置することにより、ガラス板Gは、その搬送過程で表面G1を片側ずつ研磨される。   By disposing the polishing head 16 in this way, the glass plate G is polished on the surface G1 one side at a time during the conveyance process.

〈押さえローラ〉
押さえ手段の一例である押さえローラ18は、研磨ヘッド16の配置領域Zにおいて、搬送中のガラス板Gの表面G1に押圧当接されて、搬送中のガラス板Gの表面G1を押さえる。押さえローラ18は、回転自在に支持され、ガラス板Gの移動に伴って回転する。
<Presser roller>
The pressing roller 18, which is an example of a pressing unit, is pressed against and brought into contact with the surface G 1 of the glass plate G being transported in the arrangement area Z of the polishing head 16 to press the surface G 1 of the glass plate G being transported. The pressure roller 18 is rotatably supported and rotates as the glass plate G moves.

押さえローラ18は、ガラス板Gの表面G1の幅方向に全域に当接するように、ガラス板Gの幅以上の長さを有し、ガラス板Gの搬送方向Aと直交して配置される。   The pressing roller 18 has a length equal to or greater than the width of the glass plate G so as to be in contact with the entire region in the width direction of the surface G1 of the glass plate G, and is disposed orthogonal to the conveying direction A of the glass plate G.

押さえローラ18の材質は、ガラス板Gを破損させないため、ガラス板Gよりも硬度が低い材質であればよく、たとえば、発泡樹脂で構成される。   The material of the pressing roller 18 may be any material having a lower hardness than the glass plate G so as not to damage the glass plate G, and is made of, for example, a foamed resin.

また、押さえローラ18は、次の位置に配置される。すなわち、隣り合う研磨ヘッド16と研磨ヘッド16との間であって、ガラス板Gの搬送方向Aの上流側の研磨ヘッド16と下流側の研磨ヘッド16との間で配置される研磨レーンが異なる研磨ヘッド16の間に配置される。   Further, the pressing roller 18 is disposed at the next position. That is, between the adjacent polishing heads 16 and the polishing heads 16, the polishing lanes arranged between the upstream polishing head 16 and the downstream polishing head 16 in the conveyance direction A of the glass plate G are different. It is disposed between the polishing heads 16.

図1に示すように、研磨ヘッド16は、ブロック単位で配置される研磨レーンが切り換えられるので、押さえローラ18は、各ブロックの境界に配置される。   As shown in FIG. 1, in the polishing head 16, the polishing lanes arranged in units of blocks are switched, so that the pressing roller 18 is arranged at the boundary of each block.

このように、ガラス板Gの搬送方向Aの上流側と下流側とで配置される研磨レーンが異なる研磨ヘッド16の間に押さえローラ18を配置することにより、ガラス板Gの浮き上がりを防止でき、ガラス板Gに割れ、ひび割れが生じるのを防止できる。   Thus, by placing the pressing roller 18 between the polishing heads 16 having different polishing lanes arranged on the upstream side and the downstream side in the conveyance direction A of the glass plate G, the glass plate G can be prevented from being lifted, It is possible to prevent the glass plate G from being cracked or cracked.

また、このように押さえローラ18を配置することにより、ブロック単位でスラリーを管理できる。また、研磨屑(ガラス板Gのカレット、研磨パッド14Bの欠片、及び使用済の砥粒)を含んだスラリーが、次のブロックに流出するのを防止できる。   Further, by arranging the pressing roller 18 in this way, the slurry can be managed in units of blocks. Moreover, it is possible to prevent the slurry containing polishing scraps (the cullet of the glass plate G, the fragments of the polishing pad 14B, and the used abrasive grains) from flowing out to the next block.

〈スラリー供給装置〉
スラリー供給装置(不図示)は、研磨ヘッド16の配置領域Zにおいて、搬送中のガラス板Gの表面G1にスラリーを供給する。
<Slurry supply device>
The slurry supply device (not shown) supplies the slurry to the surface G1 of the glass plate G being conveyed in the arrangement region Z of the polishing head 16.

なお、この種の研磨装置において、スラリーを供給する手段は、公知であるので、その構成についての説明は省略する。   In this type of polishing apparatus, the means for supplying the slurry is well known, so the description of the configuration is omitted.

上記のように、本実施の形態の研磨装置10は、ブロック間に押さえローラ18が配置されるので、ブロックごとにスラリーの供給が管理される。   As described above, in the polishing apparatus 10 of the present embodiment, since the pressing roller 18 is disposed between the blocks, the supply of slurry is managed for each block.

《研磨装置を用いたガラス板の研磨方法》
まず、研磨対象のガラス板Gをテーブル20にセットする。ガラス板Gは、テーブル20のガラス載置面20Aの上に並べて載置する。載置された各ガラス板Gは、裏面をバックパッド22に吸着されて、テーブル20に保持される。
<< Glass plate polishing method using polishing apparatus >>
First, the glass plate G to be polished is set on the table 20. The glass plate G is placed side by side on the glass placement surface 20 </ b> A of the table 20. Each glass plate G placed is attracted to the back pad 22 and held on the table 20.

次に、テーブル20を軌道に沿って一定の速度で移動させる。また、各研磨ヘッド16の研磨具14を自転及び公転させ、研磨位置に移動させる。   Next, the table 20 is moved at a constant speed along the track. Further, the polishing tool 14 of each polishing head 16 is rotated and revolved and moved to the polishing position.

テーブル20を移動させることにより、ガラス板Gが搬送路に沿って水平に搬送される。   By moving the table 20, the glass plate G is conveyed horizontally along the conveyance path.

ガラス板Gは、やがて研磨ヘッド16の配置領域Zに到達するので、ガラス板Gが研磨ヘッド16の配置領域Zに到達したところで、ガラス板Gの表面G1にスラリーを供給する。   Since the glass plate G eventually reaches the arrangement region Z of the polishing head 16, the slurry is supplied to the surface G1 of the glass plate G when the glass plate G reaches the arrangement region Z of the polishing head 16.

ガラス板Gは、研磨ヘッド16の配置領域Zを搬送される過程で表面G1に自転及び公転する研磨具14の研磨パッド14Bが押し付けられて、表面G1が研磨される。この際、ガラス板Gは、第1の研磨レーンL1と第2の研磨レーンL2とに分配して配置された研磨ヘッド16によって、表面G1を片側半分ずつ研磨される。   The glass plate G is polished by pressing the polishing pad 14B of the polishing tool 14 that rotates and revolves on the surface G1 in the course of being conveyed through the arrangement region Z of the polishing head 16, and the surface G1 is polished. At this time, the glass plate G is polished one half by one side on the surface G1 by the polishing head 16 that is distributed and arranged in the first polishing lane L1 and the second polishing lane L2.

ところで、このようにガラス板Gの表面G1を片側ずつ研磨すると、ガラス板Gには、研磨具14が押し付けられていない方の端部に浮きが生じる。そして、このように浮きが生じたガラス板Gに研磨具14を押し付けると、ガラス板Gに割れ、ひび割れが生じるおそれがある。   By the way, when the surface G1 of the glass plate G is polished one side at a time in this way, the glass plate G is lifted at the end where the polishing tool 14 is not pressed. Then, when the polishing tool 14 is pressed against the glass plate G that has floated in this way, the glass plate G may be cracked or cracked.

しかしながら、本実施の形態の研磨装置10では、研磨レーンが切り換わる位置に押さえローラ18が配置されているため、ガラス板Gをフラットな状態で次の研磨ヘッド16に移行させることができる。これにより、ガラス板Gに割れ、ひび割れが生じるのを防止できる。   However, in the polishing apparatus 10 of the present embodiment, since the pressing roller 18 is disposed at a position where the polishing lane is switched, the glass plate G can be transferred to the next polishing head 16 in a flat state. Thereby, it is possible to prevent the glass plate G from being cracked or cracked.

このように、本実施の形態の研磨装置10によれば、研磨ヘッド16を第1の研磨レーンL1と第2の研磨レーンL2とに分配して、ガラス板Gを研磨する場合であっても、割れ、ひび割れを生じさせることなくガラス板Gを研磨できる。   As described above, according to the polishing apparatus 10 of the present embodiment, even when the polishing head 16 is distributed to the first polishing lane L1 and the second polishing lane L2, and the glass plate G is polished. The glass plate G can be polished without causing cracks or cracks.

また、研磨ヘッド16を第1の研磨レーンL1と第2の研磨レーンL2とに分配して、ガラス板Gを研磨することにより、小型サイズの研磨手段であってもガラス板Gの大型化にも容易に対応することが可能になる。   Further, the polishing head 16 is distributed to the first polishing lane L1 and the second polishing lane L2, and the glass plate G is polished, so that the glass plate G can be enlarged even with a small-sized polishing means. Can be easily handled.

また、同じ研磨レーンに複数の研磨ヘッド16を連続して配置することにより、ガラス板Gを連続して研磨でき、研磨力の向上を図れる。すなわち、ガラス板Gの同じ部位を複数の研磨ヘッド16で連続して研磨することにより、研磨部位の温度を高い状態に保つことができる。これにより、スラリーの温度を高い状態に保つことができ、研磨力の向上を図れる。   In addition, by arranging a plurality of polishing heads 16 continuously in the same polishing lane, the glass plate G can be continuously polished, and the polishing power can be improved. That is, by continuously polishing the same portion of the glass plate G with the plurality of polishing heads 16, the temperature of the polishing portion can be kept high. As a result, the temperature of the slurry can be kept high, and the polishing power can be improved.

また、同じ研磨レーンに複数の研磨手段を連続して配置することにより、単体で研磨ヘッド16をメンテナンスでき、稼働効率を向上できる。たとえば、図1の如く、通常は4個の研磨ヘッド16を用いて、ガラス板Gの片側半分を研磨するが、メンテナンスのため、4個のうち1個の研磨ヘッド16を研磨装置10から除外し、残り3個の研磨ヘッド16を用いて、ガラス板Gの片側半分を研磨してもよい。   Further, by arranging a plurality of polishing means in succession in the same polishing lane, the polishing head 16 can be maintained alone and the operation efficiency can be improved. For example, as shown in FIG. 1, normally, four polishing heads 16 are used to polish one half of the glass plate G, but one of the four polishing heads 16 is excluded from the polishing apparatus 10 for maintenance. Then, one half of the glass plate G may be polished using the remaining three polishing heads 16.

さらに、ブロック化して研磨ヘッド16を配置することにより、ガラス板Gが割れた場合に、その原因個所の判別を容易にできる。たとえば、4つのブロックB1〜B4のうち3番目のブロックB3でカレットを含むスラリーが発見された場合、3番目のブロックB3でガラス板Gが割れたと判別できる。   Further, by arranging the polishing head 16 in a block form, when the glass plate G is broken, the cause can be easily identified. For example, when a slurry containing cullet is found in the third block B3 among the four blocks B1 to B4, it can be determined that the glass plate G is broken in the third block B3.

《変形例》
〈研磨ヘッド及び押さえローラの配置〉
図4(A)〜(C)は、研磨ヘッドの配置の変形例を示す平面図である。
<Modification>
<Arrangement of polishing head and pressing roller>
4A to 4C are plan views showing modifications of the arrangement of the polishing head.

図4(A)に示す例は、研磨ヘッド16を搬送方向Aに沿って一台ずつ第1の研磨レーンL1と第2の研磨レーンL2とに交互に配置したものである(いわゆる千鳥配置)。この場合、各研磨ヘッド16の間に押さえローラ18が配置される。すなわち、押さえローラ18は、ガラス板Gの搬送方向Aの上流側の研磨ヘッド16と下流側の研磨ヘッド16との間で配置される研磨レーンが異なる研磨ヘッド16の間に配置されるので、千鳥配置の場合は、各研磨ヘッド16の間に押さえローラ18が配置される。   In the example shown in FIG. 4A, the polishing heads 16 are alternately arranged in the first polishing lane L1 and the second polishing lane L2 one by one along the transport direction A (so-called staggered arrangement). . In this case, a pressing roller 18 is disposed between the polishing heads 16. That is, the pressing roller 18 is disposed between the polishing heads 16 having different polishing lanes between the polishing head 16 on the upstream side in the conveyance direction A of the glass plate G and the polishing head 16 on the downstream side. In the case of a staggered arrangement, a pressing roller 18 is arranged between the polishing heads 16.

図4(B)に示す例は、研磨ヘッド16の配置領域Zを8つのブロックB1〜B8に等分割し、ブロック単位で2個の研磨ヘッド16を第1の研磨レーンL1と第2の研磨レーンL2とに交互に配置したものである。このように、分割するブロック数は、適宜設定することができる。   In the example shown in FIG. 4B, the arrangement area Z of the polishing head 16 is equally divided into eight blocks B1 to B8, and the two polishing heads 16 are divided into the first polishing lane L1 and the second polishing in block units. They are alternately arranged in the lane L2. Thus, the number of blocks to be divided can be set as appropriate.

図4(C)に示す例は、各ブロックに属する研磨ヘッド16の数を変えたものである。ブロックB1、B2それぞれに4個の研磨ヘッド16が配置され、ブロックB3〜B6それぞれに2個の研磨ヘッド16が配置される。このように、各ブロックに属する研磨ヘッド16の数は、適宜設定することができる。   In the example shown in FIG. 4C, the number of polishing heads 16 belonging to each block is changed. Four polishing heads 16 are arranged in each of the blocks B1 and B2, and two polishing heads 16 are arranged in each of the blocks B3 to B6. Thus, the number of polishing heads 16 belonging to each block can be set as appropriate.

〈粗研磨及び仕上げ研磨〉
研磨ヘッドは、使用する研磨パッドを変えることにより、粗研磨及び仕上げ研磨を行うことができる。仕上げ研磨は、粗研磨よりも硬度の低い研磨パッド(柔らかい研磨パッド)が使用される。
<Rough polishing and finish polishing>
The polishing head can perform rough polishing and finish polishing by changing the polishing pad to be used. In the final polishing, a polishing pad (soft polishing pad) having a lower hardness than the rough polishing is used.

図5は、粗研磨及び仕上げ研磨を行う場合の研磨ヘッド並びに押さえローラの配置例を示す平面図である。   FIG. 5 is a plan view showing an arrangement example of the polishing head and the pressing roller when rough polishing and finish polishing are performed.

同図において、符号16Aが粗研磨を行う研磨ヘッドであり、符号16Bが仕上げ研磨を行う研磨ヘッドである。粗研磨を行う研磨ヘッド16Aには、粗研磨用の研磨パッドが研磨具の研磨具本体に装着される。また、仕上げ研磨を行う研磨ヘッド16Bには、仕上げ研磨用の研磨パッドが研磨具の研磨具本体に装着される。   In the figure, reference numeral 16A denotes a polishing head that performs rough polishing, and reference numeral 16B denotes a polishing head that performs final polishing. A polishing pad for rough polishing is attached to the polishing tool body of the polishing tool in the polishing head 16A that performs rough polishing. Further, a polishing pad for finish polishing is mounted on the polishing tool body of the polishing tool in the polishing head 16B that performs finish polishing.

粗研磨を行う研磨ヘッド16Aは、ガラス板の搬送方向Aの上流側の領域ZAに所望の間隔をもって配置される。ブロックBA1〜BA4それぞれに4個の研磨ヘッド16Aが配置され、ブロックBA5、BA6それぞれに2個の研磨ヘッド16Aが配置される。   The polishing head 16A that performs rough polishing is disposed at a desired interval in a region ZA on the upstream side in the conveyance direction A of the glass plate. Four polishing heads 16A are arranged in each of the blocks BA1 to BA4, and two polishing heads 16A are arranged in each of the blocks BA5 and BA6.

また、仕上げ研磨を行う研磨ヘッド16Bは、下流側の領域ZBに所望の間隔をもって配置される。ブロックBB1〜BB4それぞれに2個の研磨ヘッド16Bが配置され、ブロックBB5、BB6それぞれに1個の研磨ヘッド16Bが配置される。   Further, the polishing head 16B for performing the final polishing is disposed at a desired interval in the downstream region ZB. Two polishing heads 16B are arranged in each of the blocks BB1 to BB4, and one polishing head 16B is arranged in each of the blocks BB5 and BB6.

粗研磨を行う領域(粗研磨を行う研磨ヘッド16Bが配置される領域)ZA及び仕上げ研磨を行う領域(仕上げ研磨を行う研磨ヘッド16Bが配置される領域)ZBは連続しており、各研磨ヘッド16A、16Bは、ガラス板Gの搬送方向Aに沿って所望の間隔をもって配置される。   An area for rough polishing (area where the polishing head 16B for rough polishing is disposed) ZA and an area for final polishing (area where the polishing head 16B for final polishing is disposed) ZB are continuous, and each polishing head 16A and 16B are arrange | positioned with a desired space | interval along the conveyance direction A of the glass plate G. FIG.

粗研磨を行う領域ZAは、6つのブロックBA1〜BA6に分割され、ブロック単位で研磨ヘッド16Aが、第1の研磨レーンL1と第2の研磨レーンL2とに交互に配置される。   The area ZA where rough polishing is performed is divided into six blocks BA1 to BA6, and the polishing heads 16A are alternately arranged in the first polishing lane L1 and the second polishing lane L2 in units of blocks.

仕上げ研磨を行う領域ZBも6つのブロックBB1〜BB6に分割され、ブロック単位で研磨ヘッド16Bが、第1の研磨レーンL1と第2の研磨レーンL2とに交互に配置される。   The area ZB where final polishing is performed is also divided into six blocks BB1 to BB6, and the polishing heads 16B are alternately arranged in the first polishing lane L1 and the second polishing lane L2 in units of blocks.

押さえローラ18は、粗研磨を行う領域ZAと仕上げ研磨を行う領域ZBとの境界に配置され、かつ、各領域ZA、ZBにおいて、各ブロックの境界に配置される。   The pressing roller 18 is disposed at the boundary between the area ZA where rough polishing is performed and the area ZB where final polishing is performed, and is disposed at the boundary of each block in each of the areas ZA and ZB.

このように、粗研磨と仕上げ研磨とを行う場合も、ガラス板Gの搬送方向Aの上流側と下流側とで配置される研磨レーンが異なる研磨ヘッド16A、16Bの間に押さえローラ18を配置することにより、ガラス板の割れ、ひび割れを防止できる。   In this way, also in the case of performing rough polishing and finish polishing, the pressing roller 18 is disposed between the polishing heads 16A and 16B having different polishing lanes arranged on the upstream side and the downstream side in the conveyance direction A of the glass plate G. By doing so, the glass plate can be prevented from cracking or cracking.

なお、一般に仕上げ研磨は、粗研磨に比して研磨圧力が低くなるため、粗研磨よりもガラス板に割れ、ひび割れが生じる危険性は低い。したがって、仕上げ研磨を行う領域ZAについては、押さえローラ18の設置を省くこともできる。すなわち、一定の硬度以下の研磨パッドを使用して研磨する領域では、押さえローラ18を省くことができる。また、このような領域では、研磨ヘッドを千鳥状に配置することもできる。   In general, in the final polishing, the polishing pressure is lower than that in the rough polishing, so that the risk of cracking and cracking in the glass plate is lower than in the rough polishing. Therefore, it is possible to omit the pressing roller 18 in the area ZA where the finish polishing is performed. That is, the pressing roller 18 can be omitted in a region where polishing is performed using a polishing pad having a certain hardness or less. In such a region, the polishing heads can be arranged in a staggered manner.

〈自転及び公転の向き〉
上記実施の形態では、研磨具14を自転させる方向、及び、公転させる方向については、特に言及していないが、研磨具14を自転させる方向、及び、公転させる方向は、次のように設定することが好ましい。
<Direction of rotation and revolution>
In the above embodiment, the direction in which the polishing tool 14 rotates and the direction in which the polishing tool 14 rotates are not particularly mentioned, but the direction in which the polishing tool 14 rotates and the direction in which the polishing tool 14 rotates are set as follows. It is preferable.

図6は、研磨具の自転方向及び公転方向の設定方法の概念図である。   FIG. 6 is a conceptual diagram of a method for setting the rotation direction and the revolution direction of the polishing tool.

同図において、符号OAが研磨具14の自転中心、符号OBが研磨具14の公転中心である。また、符号WAで示す矢印の方向が研磨具14の自転方向、符号WBで示す矢印の方向が研磨具14の公転方向である。   In the figure, reference numeral OA is the rotation center of the polishing tool 14, and reference numeral OB is the revolution center of the polishing tool 14. Further, the direction of the arrow indicated by reference sign WA is the rotation direction of the polishing tool 14, and the direction of the arrow indicated by reference sign WB is the revolution direction of the polishing tool 14.

ブロック単位で研磨ヘッド16を第1の研磨レーンL1と第2の研磨レーンL2とに交互に配置する場合、各ブロックB1、B2に属する研磨ヘッド16は、その研磨具14の自転方向WA及び公転方向WBを揃えて設定する。すなわち、同じブロックに属する研磨ヘッド16は、同じ自転方向WAで自転し、かつ、同じ公転方向WBで公転するように設定する。   When the polishing heads 16 are alternately arranged in the first polishing lane L1 and the second polishing lane L2 in units of blocks, the polishing heads 16 belonging to the blocks B1 and B2 are rotated in the rotation direction WA and the revolution of the polishing tool 14. Align and set the direction WB. That is, the polishing heads 16 belonging to the same block are set so as to rotate in the same rotation direction WA and revolve in the same revolution direction WB.

また、自転の方向WAと公転の方向WBとは、互いに逆方向になるように設定する。ただし、自転の方向WAと公転の方向WBとは、互いに同方向になるように設定してもよい。   The direction of rotation WA and the direction of revolution WB are set to be opposite to each other. However, the rotation direction WA and the revolution direction WB may be set to be the same direction.

さらに、ガラス板Gの搬送方向Aの上流側(ガラス板Gの入り側)において、ガラス板Gの幅方向の内側から外側に向かう方向に研磨具14が自転するように、自転の方向WAを設定する。   Further, on the upstream side in the conveying direction A of the glass plate G (the entrance side of the glass plate G), the rotation direction WA is set so that the polishing tool 14 rotates in the direction from the inner side to the outer side in the width direction of the glass plate G. Set.

ここで、ガラス板Gの入り側とは、研磨具14をガラス板Gの搬送方向Aに沿って前後に二分割したとき、前側の領域を意味し(後側は、出側)、この前側の領域において、ガラス板Gの幅方向の内側から外側に向かう方向に研磨具14の自転の方向WAを設定する。   Here, the entrance side of the glass plate G means a front region when the polishing tool 14 is divided into two parts in the front-rear direction along the conveyance direction A of the glass plate G (the rear side is the exit side). In this region, the direction of rotation WA of the polishing tool 14 is set in the direction from the inner side to the outer side in the width direction of the glass plate G.

この結果、第1の研磨レーンL1に配置される研磨ヘッド16と第2の研磨レーンL2に配置される研磨ヘッド16とで研磨具14の自転方向WA及び公転方向WBが互いに逆になる。すなわち、第1の研磨レーンL1に配置される研磨ヘッド16は、自転方向WAが時計回りの方向、公転方向WBが反時計回りの方向に設定され、第2の研磨レーンL2に配置される研磨ヘッド16は、自転方向WAが反時計回りの方向、公転方向WBが時計回りの方向に設定される。   As a result, the rotation direction WA and the revolution direction WB of the polishing tool 14 are opposite to each other between the polishing head 16 disposed in the first polishing lane L1 and the polishing head 16 disposed in the second polishing lane L2. That is, the polishing head 16 disposed in the first polishing lane L1 has the rotation direction WA set in the clockwise direction and the revolution direction WB set in the counterclockwise direction, and the polishing head 16 disposed in the second polishing lane L2. The head 16 is set so that the rotation direction WA is counterclockwise and the revolution direction WB is clockwise.

このように研磨具14の自転の方向WAをガラス板Gの搬送方向Aの上流側においてガラス板Gの幅方向の内側から外側に向かう方向に設定することにより、研磨中、ガラス板Gに対して、ガラス板Gの内側から外側に向かってガラス板Gを押さえる力を作用させることができる。これにより、ガラス板Gの幅方向の端部の浮きを更に抑制できる。また、これにより、研磨中にガラス板Gとバックパッドとの間にスラリーが入り込むのを防止できる。   In this way, by setting the direction WA of rotation of the polishing tool 14 in the direction from the inner side to the outer side in the width direction of the glass plate G on the upstream side in the conveying direction A of the glass plate G, the polishing plate 14 is polished with respect to the glass plate G during polishing. Thus, a force for pressing the glass plate G from the inside to the outside of the glass plate G can be applied. Thereby, the float of the edge part of the width direction of the glass plate G can further be suppressed. This also prevents the slurry from entering between the glass plate G and the back pad during polishing.

〈公転の位相〉
研磨ヘッド16を第1の研磨レーンL1と第2の研磨レーンL2とに一台ずつ交互に配置する場合(千鳥状に配置する場合)、隣り合う各研磨ヘッド16は、公転の位相を180度ずつずらして設定することが好ましい。これにより、各研磨ヘッド16間でガラス板Gに作用する負荷を相殺でき、ガラス板Gを搬送路に沿ってスムーズに搬送できる。
<Phase of revolution>
When the polishing heads 16 are alternately arranged on the first polishing lane L1 and the second polishing lane L2 one by one (when arranged in a staggered manner), the adjacent polishing heads 16 have a revolution phase of 180 degrees. It is preferable to set by shifting each. Thereby, the load which acts on the glass plate G between each polishing head 16 can be offset, and the glass plate G can be smoothly conveyed along a conveyance path.

ブロック単位で研磨ヘッド16を第1の研磨レーンL1と第2の研磨レーンL2とに交互に配置する場合は、次のように、各研磨ヘッド16の公転の位相を設定する。すなわち、ブロック単位で位相を揃えて設定し、すなわち同じブロックに属する研磨ヘッド16の位相差を0度に設定し、かつ、隣り合うブロックにおいて、位相を180度ずらして設定する。これにより、ブロックの切り換わりでガラス板Gに作用する負荷を相殺でき、ガラス板Gを搬送路に沿ってスムーズに搬送できる。   When the polishing heads 16 are alternately arranged in the first polishing lane L1 and the second polishing lane L2 in block units, the phase of revolution of each polishing head 16 is set as follows. That is, the phases are set to be equal to each other, that is, the phase difference between the polishing heads 16 belonging to the same block is set to 0 degree, and the phases are set to be shifted by 180 degrees in adjacent blocks. Thereby, the load which acts on the glass plate G by switching of a block can be canceled, and the glass plate G can be conveyed smoothly along a conveyance path.

〈研磨具〉
研磨具を構成する研磨パッドの材質や硬度などは、研磨の目的に応じて、適宜選択される。すなわち、粗研磨には、粗研磨用の研磨具が用いられ、仕上げ研磨には、仕上げ研磨用の研磨具が用いられる。
<Abrasive tool>
The material and hardness of the polishing pad constituting the polishing tool are appropriately selected according to the purpose of polishing. That is, a polishing tool for rough polishing is used for rough polishing, and a polishing tool for final polishing is used for final polishing.

また、研磨具を構成する研磨パッドのサイズ(直径)、研磨具の公転半径、研磨具の自転速度、研磨具の公転速度、研磨圧力等は、研磨対象、研磨速度、研磨の目的等に応じて適宜設定される。   In addition, the size (diameter) of the polishing pad constituting the polishing tool, the revolution radius of the polishing tool, the rotation speed of the polishing tool, the revolution speed of the polishing tool, the polishing pressure, etc. depend on the polishing target, polishing speed, purpose of polishing, etc. Is set as appropriate.

〈板状体〉
本発明の研磨装置及び方法は、研磨対象の板状体として、大型のガラス板(たとえば、一辺が1000mm以上の矩形状)を研磨する場合に特に有効に作用する。なかでも第7世代(1900×2200mm)以上のガラス板を研磨する場合に有効に作用する。
<Plate-like body>
The polishing apparatus and method of the present invention are particularly effective when polishing a large glass plate (for example, a rectangular shape having a side of 1000 mm or more) as a plate-like object to be polished. In particular, it works effectively when polishing a glass plate of the seventh generation (1900 × 2200 mm) or more.

また、本発明の研磨装置及び方法は、フラットパネルディスプレイ用のガラス板のように、厚さの薄いガラス板(厚さ0.3〜1.1mm、好ましくは0.4〜0.7mm程度のガラス板)を研磨する場合に特に有効に作用する。   Further, the polishing apparatus and method of the present invention is a thin glass plate (thickness of about 0.3 to 1.1 mm, preferably about 0.4 to 0.7 mm, such as a glass plate for a flat panel display. This is particularly effective when polishing a glass plate.

なお、本発明は、研磨対象として、建材用やミラー用等の一般的なガラス板、金属製又は樹脂製の板状体を研磨する場合にも適用可能である。   In addition, this invention is applicable also when grind | polishing a general glass plate, metal, or resin-made plate-like objects for building materials, mirrors, etc. as grinding | polishing object.

また、ガラス板を研磨対象とする場合、その製造方法、ガラス組成は、特に限定されない。   Moreover, when making a glass plate into grinding | polishing object, the manufacturing method and glass composition are not specifically limited.

〈ガラス板の製造方法〉
ガラス板の製造工程は、時系列順に、溶融ガラスを帯状ガラス板に成形する成形工程、帯状ガラス板を所望サイズのガラス板に切断する切断工程、切断されたガラス板の縁部を面取りする面取り工程、ガラス板の主面を研磨する研磨工程、ガラス板を洗浄する洗浄工程、及び、ガラス板を検査する検査工程等を有する。研磨工程において、本発明の研磨方法を適用することにより、研磨工程でガラス板に割れ、ひび割れが生じるのを防止でき、生産性を向上できる。
<Glass plate manufacturing method>
The glass plate manufacturing process consists of a molding step for forming molten glass into a strip-shaped glass plate in chronological order, a cutting step for cutting the strip-shaped glass plate into a glass plate of a desired size, and chamfering for chamfering the edges of the cut glass plate. A polishing process for polishing the main surface of the glass plate, a cleaning step for cleaning the glass plate, an inspection step for inspecting the glass plate, and the like. By applying the polishing method of the present invention in the polishing step, it is possible to prevent the glass plate from being cracked or cracked in the polishing step, and the productivity can be improved.

10…研磨装置、12…搬送装置、14…研磨具、14A…研磨具本体、14B…研磨パッド、16…研磨ヘッド、16A…粗研磨を行う研磨ヘッド、16B…仕上げ研磨を行う研磨ヘッド、18…押さえローラ、20…テーブル、20A…ガラス載置面、22…バックパッド、G…ガラス板、G1…ガラス板の表面、GW…ガラス板の幅、R…搬送路、RW…搬送路の幅、L1…第1の研磨レーン、L2…第2の研磨レーン、CL0…搬送路の中心線、CL1…第1の研磨レーンの中心線、CL2…第2の研磨レーンの中心線、D…研磨パッドの直径、OA…研磨具の自転中心、OB…研磨具の公転中心、WA…研磨具の自転方向、WB…研磨具の公転方向、Z…研磨ヘッドの配置領域、ZA…粗研磨用の研磨ヘッドの配置領域、ZB…仕上げ研磨用の研磨ヘッドの配置領域、B1〜B8…研磨ヘッドの配置領域を分割したブロック、BA1〜BA6…研磨ヘッドの配置領域を分割したブロック、BB1〜BB6…研磨ヘッドの配置領域を分割したブロック   DESCRIPTION OF SYMBOLS 10 ... Polishing device, 12 ... Conveying device, 14 ... Polishing tool, 14A ... Polishing tool main body, 14B ... Polishing pad, 16 ... Polishing head, 16A ... Polishing head for rough polishing, 16B ... Polishing head for final polishing, 18 ... Pressing roller, 20 ... Table, 20A ... Glass placement surface, 22 ... Back pad, G ... Glass plate, G1 ... Glass plate surface, GW ... Glass plate width, R ... Conveyance path, RW ... Conveyance path width , L1 ... first polishing lane, L2 ... second polishing lane, CL0 ... center line of transport path, CL1 ... center line of first polishing lane, CL2 ... center line of second polishing lane, D ... polishing Pad diameter, OA ... center of rotation of polishing tool, OB ... center of revolution of polishing tool, WA ... direction of rotation of polishing tool, WB ... direction of revolution of polishing tool, Z ... area of polishing head, ZA ... for rough polishing Polishing head placement area, ZB ... Polishing head arrangement area for polishing, B1 to B8... Block that divides the polishing head arrangement area, BA1 to BA6... Block that divides the polishing head arrangement area, BB1 to BB6. block

Claims (11)

搬送手段によって所定の搬送路を搬送される板状体を前記板状体の搬送方向に沿って複数配置された研磨手段によって連続研磨する板状体の研磨装置において、
前記研磨手段が、前記搬送路を幅方向に二分割して設定される第1の研磨レーンと第2の研磨レーンとに分配して配置され、
前記板状体の搬送方向の上流側と下流側とで配置される研磨レーンが異なる前記研磨手段の間に、搬送中の前記板状体を前記搬送手段に押さえ付ける押さえ手段を配置した板状体の研磨装置。
In a plate-like polishing apparatus that continuously polishes a plate-like body conveyed on a predetermined conveyance path by a conveying means by a plurality of polishing means arranged along the conveyance direction of the plate-like body,
The polishing means is distributed and arranged in a first polishing lane and a second polishing lane set by dividing the conveyance path into two in the width direction,
A plate-like shape in which pressing means for pressing the plate-like member being conveyed against the conveying unit is arranged between the polishing units having different polishing lanes arranged on the upstream side and the downstream side in the conveying direction of the plate-like member. Body polishing equipment.
前記研磨手段が配置される領域が前記板状体の搬送方向に沿って複数のブロックに分割され、前記ブロック単位で前記研磨手段が前記第1の研磨レーンと前記第2の研磨レーンとに交互に配置される請求項1に記載の板状体の研磨装置。   The region where the polishing means is disposed is divided into a plurality of blocks along the conveying direction of the plate-like body, and the polishing means alternates between the first polishing lane and the second polishing lane in units of blocks. The plate-shaped body polishing apparatus according to claim 1, which is disposed on the surface. 前記研磨手段の研磨具は、前記板状体の幅よりも小さい直径を有する円形であり、自転及び公転する請求項2に記載の板状体の研磨装置。   3. The plate-like polishing apparatus according to claim 2, wherein the polishing tool of the polishing means has a circular shape having a diameter smaller than the width of the plate-like body, and rotates and revolves. 前記ブロック単位で前記研磨具の自転及び公転の方向が揃えて設定され、かつ、前記研磨具の自転の方向が、前記板状体の搬送方向の上流側において前記板状体の幅方向の内側から外側に向かう方向に設定される請求項3に記載の板状体の研磨装置。   The direction of rotation and revolution of the polishing tool is set in units of the block, and the direction of rotation of the polishing tool is on the inner side in the width direction of the plate-like body on the upstream side of the conveying direction of the plate-like body. The polishing apparatus for a plate-like body according to claim 3, wherein the polishing apparatus is set in a direction from the outer side to the outer side. 前記ブロック単位で前記研磨具の公転の位相が揃えて設定され、かつ、隣り合う前記ブロックにおいて前記研磨具の公転の位相が180度ずらして設定される請求項4に記載の板状体の研磨装置。   The polishing of the plate-shaped body according to claim 4, wherein the phase of revolution of the polishing tool is set to be equal for each block, and the phase of revolution of the polishing tool is set to be shifted by 180 degrees in the adjacent block. apparatus. 搬送手段によって所定の搬送路を搬送される板状体を前記板状体の搬送方向に沿って複数配置された研磨手段によって連続研磨する板状体の研磨方法において、
前記搬送路を幅方向に二分割して設定される第1の研磨レーンと第2の研磨レーンとに前記研磨手段を分配して配置し、
搬送中の前記板状体を前記搬送手段に押さえ付ける押さえ手段を、前記板状体の搬送方向の上流側と下流側とで配置される研磨レーンが異なる前記研磨手段の間に配置する板状体の研磨方法。
In the polishing method for a plate-like body, in which a plurality of plate-like bodies that are conveyed along a predetermined conveyance path by the conveyance means are continuously polished by a polishing means that is arranged along the conveyance direction of the plate-like body,
Distributing and arranging the polishing means in a first polishing lane and a second polishing lane set by dividing the conveyance path into two in the width direction,
A plate-like member disposed between the polishing means, which has different pressing lanes on the upstream side and the downstream side in the conveyance direction of the plate-like body, and the pressing means for pressing the plate-like body being transferred to the transfer unit. Body polishing method.
前記研磨手段が配置される領域を前記板状体の搬送方向に沿って複数のブロックに分割し、前記ブロック単位で前記研磨手段を前記第1の研磨レーンと前記第2の研磨レーンとに交互に配置する請求項6に記載の板状体の研磨方法。   An area where the polishing means is disposed is divided into a plurality of blocks along the conveying direction of the plate-like body, and the polishing means is alternately arranged on the first polishing lane and the second polishing lane in units of blocks. The method for polishing a plate-like body according to claim 6, which is disposed on the surface. 前記研磨手段の研磨具は、前記板状体の幅よりも小さい直径を有する円形であり、自転及び公転する請求項7に記載の板状体の研磨方法。   The polishing tool for a plate according to claim 7, wherein the polishing tool of the polishing means is a circle having a diameter smaller than the width of the plate, and rotates and revolves. 前記ブロック単位で前記研磨具の自転及び公転の方向を揃えて設定し、かつ、前記研磨具の自転の方向を前記板状体の搬送方向の上流側において前記板状体の幅方向の内側から外側に向かう方向に設定する請求項8に記載の板状体の研磨方法。   The direction of rotation and revolution of the polishing tool is set in units of the block, and the direction of rotation of the polishing tool is set on the upstream side of the transport direction of the plate from the inside in the width direction of the plate. The method for polishing a plate-like body according to claim 8, wherein the method is set in a direction toward the outside. 前記ブロック単位で前記研磨具の公転の位相を揃えて設定し、かつ、隣り合う前記ブロックにおいて前記研磨具の公転の位相を180度ずらして設定する請求項9に記載の板状体の研磨方法。   The method for polishing a plate-like body according to claim 9, wherein the phase of revolution of the polishing tool is set to be equal for each block, and the phase of revolution of the polishing tool is shifted by 180 degrees in the adjacent block. . 請求項6〜10のいずれか一項に記載の板状体の研磨方法により、板状体を研磨する工程を有する板状体の製造方法。   The manufacturing method of the plate-shaped object which has the process of grind | polishing a plate-shaped object with the polishing method of the plate-shaped object as described in any one of Claims 6-10.
JP2014000397A 2014-01-06 2014-01-06 Polishing device of plate-like body, polishing method of plate-like body and manufacturing method of plate-like body Pending JP2015128801A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110695789A (en) * 2019-11-15 2020-01-17 耒阳市鑫顺石材有限公司 Stone material is polished and is used strutting arrangement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110695789A (en) * 2019-11-15 2020-01-17 耒阳市鑫顺石材有限公司 Stone material is polished and is used strutting arrangement
CN110695789B (en) * 2019-11-15 2022-01-21 荣成市利威石材有限公司 Stone material is polished and is used strutting arrangement

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