KR20090031518A - 전기 전도층 제조 방법 - Google Patents

전기 전도층 제조 방법 Download PDF

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Publication number
KR20090031518A
KR20090031518A KR1020087031211A KR20087031211A KR20090031518A KR 20090031518 A KR20090031518 A KR 20090031518A KR 1020087031211 A KR1020087031211 A KR 1020087031211A KR 20087031211 A KR20087031211 A KR 20087031211A KR 20090031518 A KR20090031518 A KR 20090031518A
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KR
South Korea
Prior art keywords
layer
deposited
electrically conductive
conductive ceramic
weight
Prior art date
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Ceased
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KR1020087031211A
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English (en)
Korean (ko)
Inventor
칼 카일러
게오르그 쿤스헤르트
슈테판 슐리히트헤르레
게오르그 슈트라우스
Original Assignee
플란제 에스이
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Application filed by 플란제 에스이 filed Critical 플란제 에스이
Publication of KR20090031518A publication Critical patent/KR20090031518A/ko
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/088—Oxides of the type ABO3 with A representing alkali, alkaline earth metal or Pb and B representing a refractory or rare earth metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3485—Sputtering using pulsed power to the target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/90—Selection of catalytic material
    • H01M4/9016—Oxides, hydroxides or oxygenated metallic salts
    • H01M4/9025—Oxides specially used in fuel cell operating at high temperature, e.g. SOFC
    • H01M4/9033—Complex oxides, optionally doped, of the type M1MeO3, M1 being an alkaline earth metal or a rare earth, Me being a metal, e.g. perovskites
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y10T428/24997—Of metal-containing material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electrochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Fuel Cell (AREA)
  • Non-Insulated Conductors (AREA)
KR1020087031211A 2006-07-07 2007-07-05 전기 전도층 제조 방법 Ceased KR20090031518A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT0053406U AT9543U1 (de) 2006-07-07 2006-07-07 Verfahren zur herstellung einer elektrisch leitfähigen schicht
ATGM534/2006 2006-07-07

Publications (1)

Publication Number Publication Date
KR20090031518A true KR20090031518A (ko) 2009-03-26

Family

ID=38456742

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087031211A Ceased KR20090031518A (ko) 2006-07-07 2007-07-05 전기 전도층 제조 방법

Country Status (8)

Country Link
US (3) US20100047565A1 (cg-RX-API-DMAC10.html)
EP (1) EP2038450B1 (cg-RX-API-DMAC10.html)
JP (1) JP5421101B2 (cg-RX-API-DMAC10.html)
KR (1) KR20090031518A (cg-RX-API-DMAC10.html)
CN (1) CN101484606B (cg-RX-API-DMAC10.html)
AT (1) AT9543U1 (cg-RX-API-DMAC10.html)
DK (1) DK2038450T3 (cg-RX-API-DMAC10.html)
WO (1) WO2008003113A1 (cg-RX-API-DMAC10.html)

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DE102008049606A1 (de) * 2008-09-30 2010-04-01 Siemens Aktiengesellschaft Verfahren zur Verringerung der Chromdiffusion aus Chrom enthaltenden, gesinterten porösen Metallsubstraten zwecks Verwendung in einer Hochtemperatur-Brennstoffzelle bzw. Brennstoffzellenanlage
EP2333883A1 (de) 2009-11-18 2011-06-15 Forschungszentrum Jülich Gmbh (FJZ) Anode für eine Hochtemperatur-Brennstoffzelle sowie deren Herstellung
EP2325931A1 (de) * 2009-11-18 2011-05-25 Plansee Se Anordnung für eine Brennstoffzelle sowie Verfahren zu deren Herstellungen
DE112012001479B4 (de) 2011-03-31 2018-10-31 Murata Manufacturing Co., Ltd. Brennstoffzelle
KR101421245B1 (ko) * 2011-12-26 2014-07-18 한국기계연구원 금속지지형 고체산화물 연료전지의 제조방법 및 이에 의해 제조되는 금속지지형 고체산화물 연료전지
DE102012103383A1 (de) * 2012-04-18 2013-10-24 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren zur Herstellung eines Trägersubstrats, Trägersubstrat und elektrochemische Einrichtung
EP2808932A1 (en) 2013-05-31 2014-12-03 Topsøe Fuel Cell A/S Metal-supported solid oxide cell
US9992917B2 (en) 2014-03-10 2018-06-05 Vulcan GMS 3-D printing method for producing tungsten-based shielding parts
US10084192B2 (en) 2014-03-20 2018-09-25 Versa Power Systems, Ltd Cathode contact layer design for preventing chromium contamination of solid oxide fuel cells
US9559366B2 (en) 2014-03-20 2017-01-31 Versa Power Systems Ltd. Systems and methods for preventing chromium contamination of solid oxide fuel cells
WO2015171595A1 (en) 2014-05-05 2015-11-12 Daramic, Llc Improved lead-acid battery separators, electrodes, batteries, and methods of manufacture and use thereof
AT521011B1 (de) 2018-09-21 2019-10-15 High Tech Coatings Gmbh Bauelement mit einer zweilagigen, oxidischen Schutzschicht
CN111028977B (zh) * 2019-12-24 2021-04-20 东北大学 一种双层复合质子导体材料及其制备方法
AT523864B1 (de) 2020-05-20 2022-12-15 High Tech Coatings Gmbh Verfahren zur Herstellung einer Schutzschicht auf einem Bauelement
CN111785916B (zh) * 2020-07-29 2024-05-24 吉林大学 一种pet膜双面快速镀膜、涂覆设备
DE102021209890A1 (de) 2021-09-08 2023-03-09 Robert Bosch Gesellschaft mit beschränkter Haftung Kriechfester Stahl
DE102023210745A1 (de) 2023-10-30 2025-04-30 Robert Bosch Gesellschaft mit beschränkter Haftung Elektrochemische Zellenvorrichtung und Verfahren zur Herstellung einer elektro-chemischen Zellenvorrichtung
CN117712389B (zh) * 2024-02-18 2024-04-16 深圳市汉嵙新材料技术有限公司 多孔集流体的制备方法、制造装置、电极以及二次电池

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Also Published As

Publication number Publication date
US10320019B2 (en) 2019-06-11
JP5421101B2 (ja) 2014-02-19
DK2038450T3 (da) 2013-01-14
US20150155581A1 (en) 2015-06-04
US20100047565A1 (en) 2010-02-25
EP2038450B1 (de) 2012-09-26
CN101484606B (zh) 2013-03-13
AT9543U1 (de) 2007-11-15
US20120171464A1 (en) 2012-07-05
JP2009542899A (ja) 2009-12-03
EP2038450A1 (de) 2009-03-25
CN101484606A (zh) 2009-07-15
WO2008003113A1 (de) 2008-01-10

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Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20140619

Effective date: 20150930

Free format text: TRIAL NUMBER: 2014101003763; TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20140619

Effective date: 20150930

PJ1301 Trial decision

Patent event code: PJ13011S01D

Patent event date: 20150930

Comment text: Trial Decision on Objection to Decision on Refusal

Appeal kind category: Appeal against decision to decline refusal

Request date: 20140619

Decision date: 20150930

Appeal identifier: 2014101003763