KR20080050317A - A ceramic-metalized part and method of manufacturing the same - Google Patents

Abstract

A ceramic metallized parts for magnetron and a manufacturing method of ceramic metallized parts are provided to reduce the manufacturing cost by excluding plating, to reduce the environmental burden by employing simple equipment, to minimize industrial wastes by reducing inferior goods, and to improve work efficiency by reducing the number of process. A ceramic metallized part(2) for magnetron contains a frame part(6) which is on a cross section of ceramic parts' element(5) consisting of cylindrical alumina sintered compacts and an inside insular part(7). Each surface of the frame part and the insular part has a frame metallized layer(8a) and an inside insular part metallized layer(8b), respectively, which are produced by molybdenum-manganese method. The frame metallized layer and the inside insular part metallized layer are conductively insulated by a groove(10), so that the metallized layer has a frame nickel layer(9a) and an inside insular nickel layer(9b). A manufacturing method of ceramic metallized parts comprises steps of: painting nickel powder having diameter of 0.7mum in paste state on the frame metallized layer and the inside insular part metallized layer in the metallized layer by screen process printing; drying the baked layers with dryer; and baking the layers through continuous type baking furnace at 875deg.C in hydrogen atmosphere in order to form nickel layer having thickness of 5mum.

Description

Ceramic metallized parts and manufacturing method {A CERAMIC-METALIZED PART AND METHOD OF MANUFACTURING THE SAME}

TECHNICAL FIELD This invention relates to a ceramic sealing part.

The magnetron was a major evolution in the development of microwave radars in World War II, but it was now being produced in large quantities for microwave ovens, an unexpected use in modern times. . This is used to irradiate microwaves to a substance containing water, and to generate frictional heat by vibrating molecules along the cycle.

As a general magnetron, ceramic parts such as alumina having good insulating properties such as electric power tubes and electromagnetic tubes are used. Such ceramic parts are made of molybdenum-based ceramics in order to ensure airtightness with metal parts. After forming a metalized layer composed mainly of manganese (molybdenum-manganese) or the like, a nickel layer is formed to improve the bonding strength and the sealing property.

As a method of forming the nickel layer, an electroless plating method in which a metallized ceramic component body is immersed in a plating solution and a nickel plating layer having a predetermined thickness is formed on the surface of the metallized layer. A method of electroplating the metallization surface of a ceramic part through a metal jig | tool etc. is employ | adopted.

However, according to the nickel layer forming method by the plating method, there are a number of problems as follows.

According to the electroless plating method, the plating solution used is 5 times higher than the electrolytic plating solution, and the processing process is complicated.

On the other hand, according to the electrolytic plating method, a barrel type electrolytic plating method is generally employed, but this method includes a large number of metal small parts as a conducting medium (media) and metallized treatment. Thousands of ceramic parts are housed in a rotating container in which electrodes are placed, and current flows from the electrode while rotating the rotating container while immersing the rotating container in an electrolytic plating solution. Therefore, plating is performed on the ceramic parts like a periphery. In the case where there is a metallization surface which is easy to be plated, and a metallization surface which is hard to be plated like an inner side part, an auxiliary tool is formed in the hole part of a ceramic component main body in order to form a plating layer uniformly. As a ruler, a pin electrode must be inserted, which requires a great deal of effort and time.

In addition, since the barrel type electroplating method rotates, defects such as cracking or cracking of the ceramic parts may occur due to collision between the ceramic parts or the rotating container body, which causes a significant decrease in yield.

Moreover, although it is natural for the ceramic component which uses auxiliary tools, such as the said pin electrode, the operation | work which takes out a pin after plating process is needed.

Therefore, various techniques have been proposed to solve this problem. For example, in the joining method of joining a ceramic part and a metal part which comprise a magnetron for the purpose of providing the joining method of a magnetron part with a high productivity and a yield, the process of metallizing a joining surface, and metallizing The technique which consists of the process of plating two or more types of metal on the processed surface alternately and several times, and the process of heating is proposed (refer patent document 1). However, since such a technique includes a plating process, the above problem by the nickel layer forming method has not been solved.

Then, a paste of metallized component powder is coated on the ceramic surface, the copper alloy sheet is covered thereon, and the copper alloy sheet is sandwiched by a metallization layer by heat treatment. A method of forming a copper alloy layer having excellent workability on the ceramic surface by bonding or applying a paste of metallized component powder on the ceramic surface, applying a paste made of copper alloy powder thereon, and then applying the copper alloy powder paste To a copper alloy layer having excellent workability by heat treatment, and forming a metallized layer on the ceramic surface with the metal alloy layer interposed therebetween (see Patent Document 2). However, such a technique relates to a method for forming a metallization layer, which is different from the present invention in terms of its purpose and effect.

Patent Document 1: Japanese Unexamined Patent Publication No. Hei 8-115661

Patent Document 2: Japanese Unexamined Patent Publication No. Hei 8-91970

In view of the above problems, the present invention aims to provide a ceramic product for magnetron having excellent reliability and durability while improving productivity by easily bonding metals and ceramics without a plating process in ceramic metallized parts. will be.

In order to achieve the above object, the present invention provides a ceramic metallized part which is an integral part having airtightness by soldering with a metal part, wherein the paste is formed on the metallized layer. It is a method of manufacturing a ceramic metallized component in a process of forming a nickel layer by applying, drying, and firing nickel powder in a state.

Moreover, this invention can also be made into the ceramic metallization component manufactured by the manufacturing method of the said ceramic metallization component.

Moreover, in the said ceramic metallization part, it can also be set as the ceramic metallization part used especially for a magnetron.

 According to the ceramic metallized part and the manufacturing method which concerns on this invention, a nickel layer is formed using a nickel paste instead of nickel plating, and it is compared with a metal part more than the nickel layer by plating method. It is possible to obtain an excellent effect of achieving significant cost reduction while securing adhesive strength, airtightness and sealing property by soldering.

In addition, according to the ceramic metallization component and the manufacturing method of the present invention, unlike conventional plating method, it does not use a large-scale facility such as chemical liquid, large amount of washing water, electric power, etc. The effect of much less load is also obtained.

In addition, according to the ceramic metallized part and the manufacturing method thereof according to the present invention, since it does not rotate like the barrel type electroplating method, defects such as cracking or cracking of the ceramic part occur due to collision between the ceramic parts or the rotating container body. Since the number of defectives decreases since it does not do, the effect that generation | occurrence | production of industrial wastes, such as a ceramic waste, can also be suppressed is exhibited.

Moreover, according to the ceramic metallization component which concerns on this invention, and its manufacturing method, compared with the ceramic component which uses auxiliary fixtures, such as a pin electrode, working efficiency also improves in the point which the pin removal operation after a plating process does not need.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, the present inventors proposed the method of forming the nickel layer 9 which replaces plating, and focuses on the nickel paste and controls the particle size, coating thickness, baking conditions, etc. of this paste, It was found that the ceramic metallized component 2 having the nickel layer 9 formed thereon capable of securing adhesion strength, airtightness, and sealing property by soldering with a metal component at least equivalent to that of the nickel layer 9 can be produced. That is, according to the present invention, nickel powder in a paste state is applied to the surface of the metallization layer 8 formed on the surface of the ceramic component body 5, and dried and calcined to form the nickel layer 9. One feature is the maximum.

EMBODIMENT OF THE INVENTION Hereinafter, the ceramic metallization component 2 which concerns on this invention is demonstrated based on drawing.

1 is an explanatory diagram showing a step of manufacturing the ceramic metallized component 2 according to the present invention. Fig. 1 (a) shows the manufacturing process of the ceramic metallized part 2 according to the present invention, and Fig. 1 (b) shows the method for forming the nickel layer 9 by nickel plating for the purpose of contrast with the prior art. The process with * mark shown in the drawing may be an unnecessary process depending on the variety.

Molybdenum paste is first applied to the ceramic component body 5 and dried, and the metallization layer 8 is calcined. Thereafter, a nickel paste is applied / dried to the surface of the metallization layer 8 and subjected to completion inspection after sinter (fixing firing). In contrast to the prior art here (see Fig. 1 (b)), it is apparent that the nickel plating process can be omitted.

It is preferable that the particle diameter of the powder used for a nickel paste is 0.4-1.0 micrometer.

It is preferable that the application | coating thickness after a baking process is 3-10 micrometers.

As for the baking treatment, the temperature is preferably 800 ° C. or higher, and a reducing gas such as hydrogen or a vacuum is preferable as the atmosphere.

Next, the structure of the ceramic metallization component 2 for magnetrons concerning this invention is demonstrated based on drawing.

Fig. 2 is an explanatory diagram showing the structure of one embodiment in the ceramic metallization component 2 according to the present invention, which is a magnetron component (part of). In this magnetron part 1, an outer cylinder case 3 and an electrode lead 4, which are metal parts, are soldered to a ceramic metallization part 2 for magnetron.

3 is an explanatory diagram showing the detailed structure of the ceramic metallization component 2 for magnetron formed up to the nickel layer 9 before soldering. This part is provided with an edge portion 6 and an inner groove portion 7 formed in the cross section of the ceramic component element 5 made of a cylindrical alumina sintered body, and on the surfaces of the edge portion 6 and the inner portion 7 The edge metallization layer 8a and the inner side metallization layer 8b by the molybdenum-manganese method are formed, respectively, and the edge metallization layer 8a and the inner side metallization layer 8b are electrically insulated by the groove portion 10. Accordingly, the edge nickel layer 9a and the inner side nickel layer 9b are formed in the metallization layer 8, respectively.

The nickel layer 9 of the ceramic metallization component 2 for magnetron is a paste made of nickel powder having a particle diameter of 0.7 μm as a solvent, and the edge metallization layer 8a and the inner side portion are formed by screen printing. After apply | coating to the metallizing layer 8b and drying with a drier, it forms by baking through the continuous sintering furnace set at 875 degree | times in hydrogen gas atmosphere. The thickness of this nickel layer 9 is about 5 micrometers.

Fig. 4 is an explanatory diagram for explaining a method for manufacturing a ceramic metallized component 2 for magnetron using an auxiliary jig such as a conventional pin electrode. As a comparative example for specifying the contribution to the prior art, a sample of the conventional method was prepared and prepared. That is, the metallization layer 8 is formed in the ceramic component body 5 by the same method as in the above embodiment, and as shown in the drawing, the hole in the inner portion 7 of the ceramic component body 5 in which the metallization layer 8 is formed A stainless pin electrode 11 was inserted into the top plate, and a nickel plating layer 9 having a thickness of about 2 μm was formed on the top surfaces of the edge metallization layer 8a and the inner side metallization layer 8b by the barrel electroplating method. In the ceramic component body 5 in which the metallization layer 8 was formed and the pin electrode 11 was inserted, the amount of water put into the barrel was 3500, and the time required for the insertion of the pin electrode 11 was about 1.3 hours.

As a result of comparing the brazing strengths of the nickel layer 9 and the metal parts with respect to the ceramic metallized parts 2 for the magnetrons of the examples and the comparative examples thus prepared, the strength of the brazing according to the examples is equal to or greater than that of the comparative example. Indicated.

In addition, about 7% of defects, such as a nickel layer formation defect, a crack, a crack, and a contamination, generate | occur | produced the sample produced by the comparative example in the inspection after plating. In contrast, only about 2% of defects occurred in the examples.

Moreover, the time taken for manufacture by the Example was about 1/7 compared with that of the comparative example.

In the comparative example, about 90% of the nickel in the plating liquid adhered to the metal small parts serving as the conducting medium, resulting in a large material waste.

As described above, the present invention mainly manufactures microwave ovens in that the production of magnetrons facilitates adhesion of metals and ceramics, thereby improving productivity and providing ceramic magnetron products with excellent reliability and durability to consumers. Industrial applicability in the process is very high. Moreover, also in ceramic sealing products other than magnetron, it can use for manufacture of highly reliable ceramic metallization components.

BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing which shows the manufacturing process of the ceramic metallization component which concerns on this invention.

Fig. 2 is an explanatory view showing the structure of a magnetron part (partial part) of one embodiment of the ceramic metallization part according to the present invention.

3 is an explanatory view showing the detailed structure of the ceramic metallization component for magnetron formed up to the nickel layer before soldering.

Fig. 4 is an explanatory diagram of a method for manufacturing a ceramic metallized part for magnetron using an auxiliary jig such as a pin electrode in the related art.

* Description of the symbols for the main parts of the drawings *

1 magnetron parts (partial)

2 Ceramic Metallized Parts for Magnetron

 (magnetron ceramic metalized 部品)

3 Outer case 4 Electrode lead

5 Ceramic parts body

6 Rim 7 Inner Tobu

8 metalized layer 8a metallized layer

8b inner side metallization layer 9 nickel layer

9a rim nickel layer 9b inner side nickel layer

10 Groove 11 Pin Electrode

Claims (3)

In a ceramic metalized part, which is an integral part having airtightness by soldering with a metal part, nickel powder in a paste state is coated on the metallized layer. And drying and baking to form a nickel layer. A ceramic metallized part manufactured by the method of manufacturing the ceramic metallized part of claim 1. The method of claim 2, Especially ceramic metallized parts used for magnetron.

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