KR20080030945A - 비접촉 반송장치 - Google Patents
비접촉 반송장치 Download PDFInfo
- Publication number
- KR20080030945A KR20080030945A KR1020070099279A KR20070099279A KR20080030945A KR 20080030945 A KR20080030945 A KR 20080030945A KR 1020070099279 A KR1020070099279 A KR 1020070099279A KR 20070099279 A KR20070099279 A KR 20070099279A KR 20080030945 A KR20080030945 A KR 20080030945A
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- KR
- South Korea
- Prior art keywords
- inclined surface
- air
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- support surface
- degrees
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/02—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (9)
- 바디(12,14)와,상기 바디(12,14)의 내부에 형성되며, 에어공급부(46)로부터 공급된 에어가 유통하는 통로(48)와,자재(W)에 면하도록 상기 바디(12,14)의 단부에 설치되는 지지면(40)과,상기 지지면(40)의 반지름의 내측방향에 설치되며, 상기 자재(W)에 면하여 개구를 가지며, 상기 자재(W)측을 향하여 서서히 확경한 제1 경사면(60)을 갖는 환상의 선회실(68)과,상기 선회실(68)의 제1 경사면(60)에 접속되며, 상기 선회실(68)과 상기 통로(48)의 사이를 연통하여 상기 에어를 상기 선회실(68)로 도출하는 도출홀(64)과,상기 선회실(68)의 대략 중앙부에 설치되며, 상기 자재(W)를 향하여 서서히 축경하게 되는 외부로 팽출한 돌출부(54)를 포함하는 비접촉 반송장치.
- 제 1항에 있어서,상기 도출홀(64)이 상기 선회실(68)에 대하여 접선을 이루도록 접속되는 것을 특징으로 하는 비접촉 반송장치.
- 제 2항에 있어서,상기 자재(W)와 팽출부(54) 사이의 클리어런스(C1)가, 상기 자재(W)와 지지 면(40) 사이의 클리어런스(C2)보다 크게 설정되는 것을 특징으로 하는 비접촉 반송장치.
- 제 2항에 있어서,상기 제1 경사면(60)의 경사각도(θ2)는, 상기 제1 경사면(60)의 기점이 되는 상기 선회실(68)의 벽면(58)에 대하여 30° 이상, 90°미만(30°≤θ2<90°)으로 설정되는 것을 특징으로 하는 비접촉 반송장치.
- 제 4항에 있어서,상기 돌출부(54)의 외주부에는 제2 경사면(56)이 형성되며, 상기 제2 경사면(56)의 경사각도(θ1)는, 상기 제2 경사면(56)의 기점이 되는 상기 선회실(68)의 벽면(58)에 대하여 30° 이상, 90°미만(30°≤θ1<90°)으로 설정되는 것을 특징으로 하는 비접촉 반송장치.
- 제 4항에 있어서,상기 제1 경사면(60)의 상기 경사각도(θ2)가 60°로 설정되는 것을 특징으로 하는 비접촉 반송장치.
- 제 5항에 있어서,상기 제2 경사면(56)의 상기 경사각도(θ1)가 60°로 설정되는 것을 특징으 로 하는 비접촉 반송장치.
- 제 5항에 있어서,상기 바디(14)는 상기 지지면(40)으로부터 반지름의 내측방향에 설치되고 상기 자재(W)측을 향하여 서서히 확경하는 제3 경사면(66)을 포함하고, 상기 제3 경사면(66)은 상기 제1 경사면(60)에 대하여 상기 지지면(40)측에 배치되며, 상기 제 3 경사면(66)의 경사각도(θ3)는 상기 선회실(68)의 벽면(58)에 대하여 상기 제1 경사면(60)의 경사각도(θ2)보다 작은 것을 특징으로 하는 비접촉 반송장치.
- 제 1항에 있어서,상기 통로(48)의 내벽면이 상기 지지면(40)을 향하여 단계적으로 확경하는 단계부(step portion)로 형성되는 것을 특징으로 하는 비접촉 반송장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2006-00270735 | 2006-10-02 | ||
JP2006270735A JP4243766B2 (ja) | 2006-10-02 | 2006-10-02 | 非接触搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080030945A true KR20080030945A (ko) | 2008-04-07 |
KR100916673B1 KR100916673B1 (ko) | 2009-09-08 |
Family
ID=39134698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070099279A KR100916673B1 (ko) | 2006-10-02 | 2007-10-02 | 비접촉 반송장치 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7690869B2 (ko) |
JP (1) | JP4243766B2 (ko) |
KR (1) | KR100916673B1 (ko) |
CN (1) | CN101172540B (ko) |
DE (1) | DE102007045854B4 (ko) |
TW (1) | TWI331981B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009139540A3 (ko) * | 2008-05-13 | 2010-01-07 | 한국뉴매틱 주식회사 | 비접촉식 진공패드 |
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JP4740414B2 (ja) * | 2007-04-24 | 2011-08-03 | 東京エレクトロン株式会社 | 基板搬送装置 |
KR20100053566A (ko) * | 2007-07-19 | 2010-05-20 | 쎈트로테름 서멀 솔루션즈 게엠베하 운트 콤파니 카게 | 평평한 기판의 무접촉 운반용 장치 |
WO2009119377A1 (ja) * | 2008-03-24 | 2009-10-01 | オイレス工業株式会社 | 非接触搬送装置 |
JP4982875B2 (ja) * | 2008-07-03 | 2012-07-25 | Smc株式会社 | シート状物品のための非接触パッド |
DE202008009838U1 (de) * | 2008-07-22 | 2008-10-23 | Robotics Technology Leaders Gmbh | Luftkissenplattform zum Tragen eines Manipulatorarms und verfahrbarer Roboter |
US8231157B2 (en) | 2008-08-28 | 2012-07-31 | Corning Incorporated | Non-contact manipulating devices and methods |
CN102239093B (zh) * | 2008-11-18 | 2013-12-18 | 翁令司工业股份有限公司 | 非接触式运送装置 |
CN101733716B (zh) * | 2008-11-18 | 2013-03-20 | 鸿富锦精密工业(深圳)有限公司 | 镜片承载治具 |
DE102008062343B4 (de) * | 2008-12-15 | 2013-05-29 | Festo Ag & Co. Kg | Nach dem Bernoulli-Prinzip arbeitender Sauggreifer |
TWI449653B (zh) * | 2009-04-03 | 2014-08-21 | Oiles Industry Co Ltd | Non - contact delivery device |
JP2010253567A (ja) * | 2009-04-21 | 2010-11-11 | Seiko Epson Corp | 吸引保持ハンド、吸引保持方法、及び搬送装置 |
JP5370664B2 (ja) * | 2009-09-07 | 2013-12-18 | 村田機械株式会社 | 基板の移載装置、およびその方法 |
DE102009051565A1 (de) | 2009-10-22 | 2011-04-28 | Alexander Borowski | Ansaug-Greifervorrichtung für flache Substrate |
US20110140726A1 (en) * | 2009-11-23 | 2011-06-16 | Applied Materials, Inc. | Apparatus and Methods for Measuring Solar Cell Module Performance |
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JP2011138877A (ja) * | 2009-12-28 | 2011-07-14 | Seiko Epson Corp | 非接触保持体及び非接触保持ハンド |
JP5110480B2 (ja) * | 2010-05-11 | 2012-12-26 | Smc株式会社 | 非接触搬送装置 |
KR101309144B1 (ko) | 2011-01-10 | 2013-09-17 | 엘아이지에이디피 주식회사 | 분사노즐, 이를 이용한 기판 반송장치 및 기판 검사장치 |
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JP5875294B2 (ja) * | 2011-08-29 | 2016-03-02 | 日本空圧システム株式会社 | 保持具 |
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US9676102B2 (en) * | 2014-10-24 | 2017-06-13 | Gison Machinery Co., Ltd. | Sucker |
JP5908136B1 (ja) * | 2015-03-03 | 2016-04-26 | 株式会社ハーモテック | 吸引装置 |
JP6116629B2 (ja) * | 2015-08-11 | 2017-04-19 | 株式会社ハーモテック | 吸引装置 |
DE102017203468B4 (de) | 2017-03-03 | 2021-05-06 | Festo Se & Co. Kg | Bernoulli-Sauggreifer |
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WO2019018786A1 (en) * | 2017-07-21 | 2019-01-24 | Electro Scientific Industries, Inc. | CONTACTLESS MANIPULATOR AND METHOD FOR HANDLING PARTS USING THE SAME |
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-
2006
- 2006-10-02 JP JP2006270735A patent/JP4243766B2/ja not_active Expired - Fee Related
-
2007
- 2007-09-26 DE DE102007045854A patent/DE102007045854B4/de not_active Expired - Fee Related
- 2007-09-26 TW TW096135661A patent/TWI331981B/zh active
- 2007-09-29 CN CN2007101529722A patent/CN101172540B/zh not_active Expired - Fee Related
- 2007-10-01 US US11/865,150 patent/US7690869B2/en active Active
- 2007-10-02 KR KR1020070099279A patent/KR100916673B1/ko active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009139540A3 (ko) * | 2008-05-13 | 2010-01-07 | 한국뉴매틱 주식회사 | 비접촉식 진공패드 |
Also Published As
Publication number | Publication date |
---|---|
JP2008087910A (ja) | 2008-04-17 |
DE102007045854A1 (de) | 2008-04-03 |
TWI331981B (en) | 2010-10-21 |
US20080079208A1 (en) | 2008-04-03 |
DE102007045854B4 (de) | 2013-08-08 |
US7690869B2 (en) | 2010-04-06 |
CN101172540B (zh) | 2012-04-18 |
TW200817262A (en) | 2008-04-16 |
KR100916673B1 (ko) | 2009-09-08 |
JP4243766B2 (ja) | 2009-03-25 |
CN101172540A (zh) | 2008-05-07 |
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