KR20070095210A - 플라즈마 처리 장치 및 플라즈마 처리 방법 - Google Patents
플라즈마 처리 장치 및 플라즈마 처리 방법 Download PDFInfo
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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Abstract
Description
Claims (23)
- 에칭 처리 가스 플라즈마에 의해 가공되는 피처리체를 수용하는 챔버와,이 챔버 자체의 플라즈마 생성 분위기에 노출되는 부위, 이 챔버 내에 배치되어 있는 부재 또는 부품으로 이루어지고,상기 부위, 상기 부재 또는 상기 부품 중 어느 하나 이상의 표면에는, 금속 산화물로 이루어지는 다공질층과 그 다공질층 상에 형성된 상기 금속 산화물의 2차 재결정층을 포함하는 복합층을 마련하여 이루어지는 플라즈마 처리 장치.
- 제1항에 있어서, 상기 다공질층 아래에는, 금속·합금, 세라믹스 또는 서멧으로 이루어지는 언더코트층을 갖는 것을 특징으로 하는 플라즈마 처리 장치.
- 제1항에 있어서, 상기 에칭 처리가, 불소 함유 가스 플라즈마에 의한 처리, 불소 함유 가스와 탄화수소 함유 가스와의 혼합 가스 플라즈마에 의한 처리, 또는 불소 함유 가스와 탄화수소 함유 가스를 번갈아 반복하여 도입하여 처리하는 것 중 어느 하나인 것을 특징으로 하는 플라즈마 처리 장치.
- 제3항에 있어서, 상기 불소 함유 가스는, CxFy 가스, CHF계 가스, HF계 가스, SF계 가스 및 이들 가스와 O2와의 혼합 가스 중으로부터 선택되는 1종 이상의 가스인 것을 특징으로 하는 플라즈마 처리 장치.
- 제3항에 있어서, 상기 탄화수소 함유 가스는, CxHy 가스, H 함유 가스 및 CxHy 가스와 O2와의 혼합 가스 중으로부터 선택되는 1종 이상의 가스인 것을 특징으로 하는 플라즈마 처리 장치.
- 제1항에 있어서, 상기 금속 산화물은, IIIa족 원소를 포함하는 금속 산화물인 것을 특징으로 하는 플라즈마 처리 장치.
- 제1항 또는 제2항에 있어서, 상기 2차 재결정층은, 다공질층에 포함되는 1차 변태한 금속 산화물을 고에너지 조사 처리에 의해, 2차 변태시켜 형성한 것인 것을 특징으로 하는 플라즈마 처리 장치.
- 제1항 또는 제2항에 있어서, 상기 2차 재결정층은, 사방정계의 결정을 포함하는 다공질층이 고에너지 조사 처리에 의해 2차 변태하여 정방정계의 조직으로 된 층인 것을 특징으로 하는 플라즈마 처리 장치.
- 제7항에 있어서, 상기 고에너지 조사 처리가, 전자 빔 조사 처리 또는 레이저 빔 조사 처리인 것을 특징으로 하는 플라즈마 처리 장치.
- 제8항에 있어서, 상기 고에너지 조사 처리가, 전자 빔 조사 처리 또는 레이저 빔 조사 처리인 것을 특징으로 하는 플라즈마 처리 장치.
- 제1항에 있어서, 상기 챔버 자체의 플라즈마 분위기에 노출되는 부위, 부재 또는 부품의 표면과, 상기 플라즈마와는, 120 V 이상 550 V 이하의 전위차를 갖는 것을 특징으로 하는 플라즈마 처리 장치.
- 제11항에 있어서, 상기 전위차는, 상기 챔버 내에 설치된 피처리체의 적재대에 인가된 고주파 전력에 의해 제어되는 것인 것을 특징으로 하는 플라즈마 처리 장치.
- 챔버 내에 수용한 피처리체의 표면을, 에칭 처리 가스의 플라즈마에 의해 가공하는 플라즈마 처리에 있어서,우선, 상기 챔버 자체의 플라즈마 분위기에 노출되는 부위, 이 챔버 내에 배치되어 있는 부재 또는 부품의 표면에, 미리 금속 산화물로 이루어지는 다공질층과, 그 다공질층 상에 형성된 상기 금속 산화물의 2차 재결정층을 포함하는 복합층을 피복 형성하는 공정과,이 챔버 내에 불소 함유 가스를 포함하는 제1 가스를 도입하고, 이 가스를 여기시켜 제1 플라즈마를 발생시켜 처리하는 공정을 갖는 플라즈마 처리 방법.
- 챔버 내에 수용한 피처리체의 표면을, 에칭 처리 가스의 플라즈마에 의해 가공하는 플라즈마 처리에 있어서,우선, 상기 챔버 자체의 플라즈마 분위기에 노출되는 부위, 이 챔버 내에 배치되어 있는 부재 또는 부품의 표면에, 미리 금속 산화물로 이루어지는 다공질층과, 그 다공질층 상에 형성된 상기 금속 산화물의 2차 재결정층을 포함하는 복합층을 피복 형성하는 공정과,이 챔버 내에 불소 함유 가스를 포함하는 제1 가스를 도입한 후 여기시켜 제1 플라즈마를 발생시키는 공정과,그리고, 이 챔버 내에 탄화수소 가스를 포함하는 제2 가스를 도입한 후 여기시켜 제2 플라즈마를 발생시켜 처리하는 공정을 갖는 플라즈마 처리 방법.
- 제13항 또는 제14항에 있어서, 상기 불소 함유 가스는, CxFy 가스, CHF계 가스, HF계 가스, SF계 가스 및 이들 가스와 O2를 포함하는 혼합 가스 중으로부터 선택되는 1종 이상의 가스인 것을 특징으로 하는 플라즈마 처리 방법.
- 제13항 또는 제14항에 있어서, 상기 탄화수소를 함유하는 가스는, CxHy 가스, H 함유 가스 및 CxHy 가스와 O2와의 혼합 가스 중으로부터 선택되는 1종 이상의 가스인 것을 특징으로 하는 플라즈마 처리 장치.
- 제13항 또는 제14항에 있어서, 상기 금속 산화물은, IIIa족 원소를 포함하는 금속 산화물인 것을 특징으로 하는 플라즈마 처리 방법.
- 제13항 또는 제14항에 있어서, 상기 2차 재결정층은, 다공질층에 포함되는 1차 변태한 금속 산화물을 고에너지 조사 처리에 의해, 2차 변태시켜 형성한 것인 것을 특징으로 하는 플라즈마 처리 장치.
- 제13항 또는 제14항에 있어서, 상기 2차 재결정층은, 사방정계의 결정을 포함하는 다공질층이 고에너지 조사 처리에 의해 2차 변태하여 정방정계의 조직으로 된 층인 것을 특징으로 하는 플라즈마 처리 장치.
- 제18항에 있어서, 상기 고에너지 조사 처리가, 전자 빔 조사 처리 또는 레이저 빔 조사 처리인 것을 특징으로 하는 플라즈마 처리 장치.
- 제19항에 있어서, 상기 고에너지 조사 처리가, 전자 빔 조사 처리 또는 레이저 빔 조사 처리인 것을 특징으로 하는 플라즈마 처리 장치.
- 제13항 또는 제14항에 있어서, 상기 챔버 내의, 플라즈마 분위기에 노출되는 부위, 부재 또는 부품의 표면과 상기 플라즈마와는, 전위차를, 120 V 이상 550 V 이하의 전위차를 갖는 것을 특징으로 하는 플라즈마 처리 방법.
- 제22항에 있어서, 상기 전위차는, 상기 챔버 내에 설치된 피처리체의 적재대에 인가된 고주파 전력에 의해 제어하는 것을 특징으로 하는 플라즈마 처리 방법.
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KR20140051280A (ko) * | 2011-08-11 | 2014-04-30 | 도쿄엘렉트론가부시키가이샤 | 플라즈마 처리 장치 |
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