KR20060131795A - 게이트 전극 구조의 트리밍을 제어하는 방법 - Google Patents

게이트 전극 구조의 트리밍을 제어하는 방법 Download PDF

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Publication number
KR20060131795A
KR20060131795A KR1020067013196A KR20067013196A KR20060131795A KR 20060131795 A KR20060131795 A KR 20060131795A KR 1020067013196 A KR1020067013196 A KR 1020067013196A KR 20067013196 A KR20067013196 A KR 20067013196A KR 20060131795 A KR20060131795 A KR 20060131795A
Authority
KR
South Korea
Prior art keywords
gate electrode
electrode structure
layer
dimension
trim
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020067013196A
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English (en)
Korean (ko)
Inventor
홍유 유
리 첸
Original Assignee
동경 엘렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 동경 엘렉트론 주식회사 filed Critical 동경 엘렉트론 주식회사
Publication of KR20060131795A publication Critical patent/KR20060131795A/ko
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P10/00—Bonding of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/23—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/013—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator
    • H10D64/01302—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H10D64/01304—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H10D64/01326—Aspects related to lithography, isolation or planarisation of the conductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Drying Of Semiconductors (AREA)
KR1020067013196A 2004-03-31 2005-02-11 게이트 전극 구조의 트리밍을 제어하는 방법 Withdrawn KR20060131795A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/812,952 US20050221513A1 (en) 2004-03-31 2004-03-31 Method of controlling trimming of a gate electrode structure
US10/812,952 2004-03-31

Publications (1)

Publication Number Publication Date
KR20060131795A true KR20060131795A (ko) 2006-12-20

Family

ID=34960978

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067013196A Withdrawn KR20060131795A (ko) 2004-03-31 2005-02-11 게이트 전극 구조의 트리밍을 제어하는 방법

Country Status (5)

Country Link
US (2) US20050221513A1 (https=)
JP (1) JP2007531309A (https=)
KR (1) KR20060131795A (https=)
CN (1) CN1938841A (https=)
WO (1) WO2005104218A1 (https=)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1994550A4 (en) * 2006-02-10 2012-01-11 Intermolecular Inc METHOD AND DEVICE FOR COMBINATORY VARIANT MATERIALS, UNIT PROCESS AND PROCESS PROCESS
JP2008124399A (ja) * 2006-11-15 2008-05-29 Toshiba Corp 半導体装置の製造方法
JP5229711B2 (ja) * 2006-12-25 2013-07-03 国立大学法人名古屋大学 パターン形成方法、および半導体装置の製造方法
JP4421618B2 (ja) * 2007-01-17 2010-02-24 東京エレクトロン株式会社 フィン型電界効果トランジスタの製造方法
US7674350B2 (en) * 2007-01-22 2010-03-09 Infineon Technologies Ag Feature dimension control in a manufacturing process
US20080248412A1 (en) * 2007-04-09 2008-10-09 John Douglas Stuber Supervisory etch cd control
JP5374039B2 (ja) * 2007-12-27 2013-12-25 東京エレクトロン株式会社 基板処理方法、基板処理装置及び記憶媒体
US8168542B2 (en) * 2008-01-03 2012-05-01 International Business Machines Corporation Methods of forming tubular objects
US8012811B2 (en) * 2008-01-03 2011-09-06 International Business Machines Corporation Methods of forming features in integrated circuits
CN101593685B (zh) * 2008-05-29 2011-05-04 中芯国际集成电路制造(北京)有限公司 栅极形成方法
JP2009289974A (ja) * 2008-05-29 2009-12-10 Toshiba Corp 半導体装置の製造方法
CN102194675B (zh) * 2010-03-11 2013-06-12 中芯国际集成电路制造(上海)有限公司 制作半导体器件栅极的方法
KR101145334B1 (ko) * 2010-05-31 2012-05-14 에스케이하이닉스 주식회사 반도체 장치 제조방법
CN102339772B (zh) * 2010-07-16 2014-01-15 中芯国际集成电路制造(上海)有限公司 检测通孔缺陷的方法
US20120083127A1 (en) * 2010-09-30 2012-04-05 Tokyo Electron Limited Method for forming a pattern and a semiconductor device manufacturing method
US8748199B2 (en) * 2011-04-22 2014-06-10 GlobalFoundries, Inc. In-situ measurement of feature dimensions
WO2013085290A1 (ko) * 2011-12-07 2013-06-13 주식회사 테스 반도체소자 제조방법
US9059038B2 (en) * 2012-07-18 2015-06-16 Tokyo Electron Limited System for in-situ film stack measurement during etching and etch control method
KR20160044545A (ko) * 2013-08-27 2016-04-25 도쿄엘렉트론가부시키가이샤 하드마스크를 측면으로 트리밍하기 위한 방법
US10497575B2 (en) * 2017-05-03 2019-12-03 Tokyo Electron Limited Method for increasing trench CD in EUV patterning without increasing single line opens or roughness
US10727143B2 (en) * 2018-07-24 2020-07-28 Lam Research Corporation Method for controlling core critical dimension variation using flash trim sequence
CN110687144B (zh) * 2019-10-28 2022-07-22 长江存储科技有限责任公司 一种ped样品及其制备方法
US12568781B2 (en) 2021-01-25 2026-03-03 Lam Research Corporation Selective silicon trim by thermal etching

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0313683A1 (en) * 1987-10-30 1989-05-03 International Business Machines Corporation Method for fabricating a semiconductor integrated circuit structure having a submicrometer length device element
US5943550A (en) * 1996-03-29 1999-08-24 Advanced Micro Devices, Inc. Method of processing a semiconductor wafer for controlling drive current
US6087238A (en) * 1997-12-17 2000-07-11 Advanced Micro Devices, Inc. Semiconductor device having reduced-width polysilicon gate and non-oxidizing barrier layer and method of manufacture thereof
JP2000299367A (ja) * 1999-04-15 2000-10-24 Tokyo Electron Ltd 処理装置及び被処理体の搬送方法
US6245581B1 (en) * 2000-04-19 2001-06-12 Advanced Micro Devices, Inc. Method and apparatus for control of critical dimension using feedback etch control
US6461878B1 (en) * 2000-07-12 2002-10-08 Advanced Micro Devices, Inc. Feedback control of strip time to reduce post strip critical dimension variation in a transistor gate electrode
US6518106B2 (en) * 2001-05-26 2003-02-11 Motorola, Inc. Semiconductor device and a method therefor
JP3708031B2 (ja) * 2001-06-29 2005-10-19 株式会社日立製作所 プラズマ処理装置および処理方法
AU2003225852A1 (en) * 2002-03-18 2003-10-08 University Of Southern California Reinforced phenolic foam

Also Published As

Publication number Publication date
CN1938841A (zh) 2007-03-28
WO2005104218A1 (en) 2005-11-03
JP2007531309A (ja) 2007-11-01
US20050221513A1 (en) 2005-10-06
US20070111338A1 (en) 2007-05-17

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