KR20060108219A - 광학 장치, 광조사 장치 및 광조사 방법 - Google Patents

광학 장치, 광조사 장치 및 광조사 방법 Download PDF

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Publication number
KR20060108219A
KR20060108219A KR1020060031922A KR20060031922A KR20060108219A KR 20060108219 A KR20060108219 A KR 20060108219A KR 1020060031922 A KR1020060031922 A KR 1020060031922A KR 20060031922 A KR20060031922 A KR 20060031922A KR 20060108219 A KR20060108219 A KR 20060108219A
Authority
KR
South Korea
Prior art keywords
optical
light
light source
light irradiation
optical member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020060031922A
Other languages
English (en)
Korean (ko)
Inventor
히데오 카와베
나오지 나다
료 코시이시
Original Assignee
소니 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 소니 가부시키가이샤 filed Critical 소니 가부시키가이샤
Publication of KR20060108219A publication Critical patent/KR20060108219A/ko
Withdrawn legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073Shaping the laser spot
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0933Systems for active beam shaping by rapid movement of an element
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • B23K2101/40Semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Laser Beam Processing (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
KR1020060031922A 2005-04-12 2006-04-07 광학 장치, 광조사 장치 및 광조사 방법 Withdrawn KR20060108219A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005114858A JP4475159B2 (ja) 2005-04-12 2005-04-12 光照射装置
JPJP-P-2005-00114858 2005-04-12

Publications (1)

Publication Number Publication Date
KR20060108219A true KR20060108219A (ko) 2006-10-17

Family

ID=37077540

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060031922A Withdrawn KR20060108219A (ko) 2005-04-12 2006-04-07 광학 장치, 광조사 장치 및 광조사 방법

Country Status (5)

Country Link
US (1) US7952819B2 (enExample)
JP (1) JP4475159B2 (enExample)
KR (1) KR20060108219A (enExample)
CN (1) CN100443951C (enExample)
TW (1) TW200643468A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110094778A1 (en) * 2009-10-27 2011-04-28 Cheng-Po Yu Circuit board and fabrication method thereof
JP5853331B2 (ja) * 2011-03-11 2016-02-09 株式会社ブイ・テクノロジー レーザ照射装置及びそれを使用した液晶表示パネルの輝点修正方法
JP2013193110A (ja) * 2012-03-21 2013-09-30 Sumitomo Heavy Ind Ltd レーザ加工装置及びレーザ加工方法
CN120786811A (zh) * 2024-04-09 2025-10-14 泓瀚科技股份有限公司 电路板上调整助焊剂分布位置的方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4767293A (en) 1986-08-22 1988-08-30 Copeland Corporation Scroll-type machine with axially compliant mounting
CN1030865C (zh) * 1992-05-15 1996-01-31 中国科学院上海光学精密机械研究所 全方位光束检验仪
JPH0669928A (ja) 1992-08-17 1994-03-11 Fuji Xerox Co Ltd ルーティング方式
JP3091075B2 (ja) * 1994-03-30 2000-09-25 ローム株式会社 重力感応型映像装置
US5525810A (en) * 1994-05-09 1996-06-11 Vixel Corporation Self calibrating solid state scanner
JPH08338962A (ja) 1995-06-13 1996-12-24 Toshiba Corp ビームホモジナイザ及びレーザ加工装置
JP3894509B2 (ja) * 1995-08-07 2007-03-22 キヤノン株式会社 光学装置、露光装置およびデバイス製造方法
JPH11156579A (ja) 1996-11-15 1999-06-15 Amada Co Ltd レーザー切断方法、レーザーピアス方法、レーザー溶接方法、およびレーザー加飾方法並びに前記各方法に使用するレーザー加工ヘッド
AU752405B2 (en) * 1998-03-27 2002-09-19 Hideyoshi Horimai Three-dimensional image display
JP3437088B2 (ja) 1998-06-04 2003-08-18 住友重機械工業株式会社 ビーム回転機能付ホモジナイザ装置及びこれを用いたレーザ加工装置
JP2000167682A (ja) 1998-12-03 2000-06-20 Amada Eng Center Co Ltd レーザ加工ヘッド
JP2001350117A (ja) 2000-06-09 2001-12-21 Hamamatsu Kagaku Gijutsu Kenkyu Shinkokai レーザ光強度分布平坦化マスクおよびそれを用いたレーザメッキ装置ならびにレーザメッキ方法
DE10049557B4 (de) * 2000-10-06 2004-09-02 Microlas Lasersystem Gmbh Vorrichtung zum Umwandeln der Intensitätsverteilung eines Laserstrahls
CN2454077Y (zh) * 2000-12-12 2001-10-17 魏学惠 激光加工机光学装置
CN1205490C (zh) * 2001-12-31 2005-06-08 深圳朗光科技有限公司 可调谐光纤衰减器

Also Published As

Publication number Publication date
JP2006293092A (ja) 2006-10-26
JP4475159B2 (ja) 2010-06-09
TW200643468A (en) 2006-12-16
US20060226381A1 (en) 2006-10-12
TWI325066B (enExample) 2010-05-21
CN1847921A (zh) 2006-10-18
US7952819B2 (en) 2011-05-31
CN100443951C (zh) 2008-12-17

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20060407

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid