KR20060041731A - 화학 기계 연마 패드, 그의 제조 방법 및 화학 기계 연마방법 - Google Patents
화학 기계 연마 패드, 그의 제조 방법 및 화학 기계 연마방법 Download PDFInfo
- Publication number
- KR20060041731A KR20060041731A KR1020050010513A KR20050010513A KR20060041731A KR 20060041731 A KR20060041731 A KR 20060041731A KR 1020050010513 A KR1020050010513 A KR 1020050010513A KR 20050010513 A KR20050010513 A KR 20050010513A KR 20060041731 A KR20060041731 A KR 20060041731A
- Authority
- KR
- South Korea
- Prior art keywords
- mechanical polishing
- chemical mechanical
- polishing pad
- polymer
- water
- Prior art date
Links
Classifications
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03B—INSTALLATIONS OR METHODS FOR OBTAINING, COLLECTING, OR DISTRIBUTING WATER
- E03B3/00—Methods or installations for obtaining or collecting drinking water or tap water
- E03B3/06—Methods or installations for obtaining or collecting drinking water or tap water from underground
- E03B3/08—Obtaining and confining water by means of wells
- E03B3/15—Keeping wells in good condition, e.g. by cleaning, repairing, regenerating; Maintaining or enlarging the capacity of wells or water-bearing layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Public Health (AREA)
- Water Supply & Treatment (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
Claims (8)
- (A) 스티렌 중합체 및 (B) 디엔 중합체를 포함하는 비수용성 매트릭스를 포함하는 화학 기계 연마 패드.
- 제1항에 있어서, 비수용성 매트릭스가 상기 (A) 성분과 (B) 성분 중 어느 하나의 성분 중에 다른 하나의 성분이 분산되어 해도 구조를 형성하고 있고, 그 평균 도메인 크기가 0.1 내지 30 ㎛의 범위에 있는 화학 기계 연마 패드.
- 제1항에 있어서, 비수용성 매트릭스가 (D) 산 무수물기를 갖는 중합체를 더 함유하는 화학 기계 연마 패드.
- 제1항에 있어서, (E) 수용성 물질을 비수용성 매트릭스 중에 입상으로 분산된 상태로 더 함유하는 화학 기계 연마 패드.
- (A) 스티렌 중합체, (B) 디엔 중합체 및 (C) 가교제를 함유하는 조성물을 준비하고, 상기 조성물을 소정 형상으로 부형시키며, 부형하면서 또는 부형 후 가열하여 경화시키는 것을 특징으로 하는 제1항에 기재된 화학 기계 연마 패드의 제조 방법.
- 제5항에 있어서, 상기 조성물이, JIS K 6300-2에 준하여 진동식 가황 시험기로 진폭 ±1 °, 비틀림 진동수 100 cycles/분의 조건하에 170 ℃의 온도와 490 kPa의 압력에서 18 분간 왜곡을 가한 후의 토크가 0.05 내지 0.50 N·m인 제조 방법.
- 제1항에 기재된 화학 기계 연마 패드에 의해 피연마체의 피연마면을 연마하는 것을 특징으로 하는 화학 기계 연마 방법.
- 제7항에 있어서, 피연마체가 절연막인 화학 기계 연마 방법.
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2004-00029393 | 2004-02-05 | ||
JP2004029393 | 2004-02-05 | ||
JPJP-P-2004-00173410 | 2004-06-11 | ||
JP2004173410 | 2004-06-11 | ||
JPJP-P-2004-00215931 | 2004-07-23 | ||
JP2004215931 | 2004-07-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060041731A true KR20060041731A (ko) | 2006-05-12 |
KR100661445B1 KR100661445B1 (ko) | 2006-12-27 |
Family
ID=34681985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050010513A KR100661445B1 (ko) | 2004-02-05 | 2005-02-04 | 화학 기계 연마 패드, 그의 제조 방법 및 화학 기계 연마방법 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20050222336A1 (ko) |
EP (1) | EP1561541B1 (ko) |
KR (1) | KR100661445B1 (ko) |
CN (1) | CN100410017C (ko) |
DE (1) | DE602005006326T2 (ko) |
TW (1) | TWI288688B (ko) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005340271A (ja) * | 2004-05-24 | 2005-12-08 | Jsr Corp | 化学機械研磨用パッド |
EP2083027B8 (en) * | 2008-01-24 | 2012-05-16 | JSR Corporation | Mechanical polishing pad and chemical mechanical polishing method |
JP5634903B2 (ja) * | 2010-02-25 | 2014-12-03 | 東洋ゴム工業株式会社 | 研磨パッド |
CN103347652A (zh) * | 2011-02-15 | 2013-10-09 | 东丽株式会社 | 研磨垫 |
US9259821B2 (en) * | 2014-06-25 | 2016-02-16 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing layer formulation with conditioning tolerance |
TWI565735B (zh) * | 2015-08-17 | 2017-01-11 | Nanya Plastics Corp | A polishing pad for surface planarization processing and a process for making the same |
JP7104174B2 (ja) * | 2018-11-09 | 2022-07-20 | 株式会社クラレ | 研磨層用ポリウレタン、研磨層、研磨パッド及び研磨層の改質方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5667344A (en) * | 1979-11-08 | 1981-06-06 | Asahi Chem Ind Co Ltd | Expandable polymer composition |
NL188100C (nl) * | 1984-11-12 | 1992-04-01 | Dow Chemical Nederland | Met rubber versterkte styrenische polymeerharsen die een vergrote rek vertonen, werkwijze voor de bereiding daarvan en gevormde produkten daaruit. |
NL8600671A (nl) * | 1986-03-17 | 1987-10-16 | Gen Electric | Polymeermengsel met pc en hips. |
GB9020462D0 (en) * | 1990-09-19 | 1990-10-31 | Filters For Industry Ltd | Abrasive segments |
US5247765A (en) * | 1991-07-23 | 1993-09-28 | Abrasive Technology Europe, S.A. | Abrasive product comprising a plurality of discrete composite abrasive pellets in a resilient resin matrix |
JPH0534697A (ja) * | 1991-07-25 | 1993-02-12 | Canon Inc | 強誘電性液晶表示素子 |
JP2993338B2 (ja) * | 1993-10-18 | 1999-12-20 | 住友化学工業株式会社 | ゴム変性ポリスチレン樹脂組成物、その製造方法及び射出成形品 |
JP3141791B2 (ja) * | 1996-10-01 | 2001-03-05 | 住友化学工業株式会社 | ゴム変性スチレン系樹脂組成物及びその成形品 |
ATE227194T1 (de) * | 1997-04-18 | 2002-11-15 | Cabot Microelectronics Corp | Polierkissen fur einen halbleitersubstrat |
SG79291A1 (en) * | 1998-11-20 | 2001-03-20 | Daicel Chem | Rubber-containing styrenic resin and process for producing the same |
US6354915B1 (en) * | 1999-01-21 | 2002-03-12 | Rodel Holdings Inc. | Polishing pads and methods relating thereto |
US6234875B1 (en) * | 1999-06-09 | 2001-05-22 | 3M Innovative Properties Company | Method of modifying a surface |
JP3925041B2 (ja) * | 2000-05-31 | 2007-06-06 | Jsr株式会社 | 研磨パッド用組成物及びこれを用いた研磨パッド |
KR100858392B1 (ko) * | 2001-04-25 | 2008-09-11 | 제이에스알 가부시끼가이샤 | 반도체 웨이퍼용 연마 패드와, 이를 구비한 반도체웨이퍼용 연마 적층체와, 반도체 웨이퍼의 연마 방법 |
JP2003100682A (ja) * | 2001-09-25 | 2003-04-04 | Jsr Corp | 半導体ウエハ用研磨パッド |
JP2004343099A (ja) * | 2003-04-25 | 2004-12-02 | Jsr Corp | 研磨パッドおよび化学機械研磨方法 |
-
2005
- 2005-02-04 EP EP05002400A patent/EP1561541B1/en not_active Expired - Fee Related
- 2005-02-04 KR KR1020050010513A patent/KR100661445B1/ko active IP Right Grant
- 2005-02-04 DE DE602005006326T patent/DE602005006326T2/de active Active
- 2005-02-05 CN CNB2005100542307A patent/CN100410017C/zh not_active Expired - Fee Related
- 2005-02-05 TW TW094104064A patent/TWI288688B/zh not_active IP Right Cessation
- 2005-02-07 US US11/050,730 patent/US20050222336A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
TW200538236A (en) | 2005-12-01 |
CN100410017C (zh) | 2008-08-13 |
US20050222336A1 (en) | 2005-10-06 |
EP1561541A1 (en) | 2005-08-10 |
DE602005006326T2 (de) | 2009-07-09 |
CN1654169A (zh) | 2005-08-17 |
KR100661445B1 (ko) | 2006-12-27 |
DE602005006326D1 (de) | 2008-06-12 |
TWI288688B (en) | 2007-10-21 |
EP1561541B1 (en) | 2008-04-30 |
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