KR20060009273A - 하전 빔을 사용한 액적 토출장치 및 상기 장치를 사용한패턴의 제작 방법 - Google Patents
하전 빔을 사용한 액적 토출장치 및 상기 장치를 사용한패턴의 제작 방법 Download PDFInfo
- Publication number
- KR20060009273A KR20060009273A KR1020057020259A KR20057020259A KR20060009273A KR 20060009273 A KR20060009273 A KR 20060009273A KR 1020057020259 A KR1020057020259 A KR 1020057020259A KR 20057020259 A KR20057020259 A KR 20057020259A KR 20060009273 A KR20060009273 A KR 20060009273A
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- Prior art keywords
- substrate
- film
- droplet
- droplet ejection
- droplets
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/07—Ink jet characterised by jet control
- B41J2/075—Ink jet characterised by jet control for many-valued deflection
- B41J2/08—Ink jet characterised by jet control for many-valued deflection charge-control type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/053—Arrangements for supplying power, e.g. charging power
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/12—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to conditions of ambient medium or target, e.g. humidity, temperature position or movement of the target relative to the spray apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
- B05C5/0275—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated flow controlled, e.g. by a valve
- B05C5/0279—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated flow controlled, e.g. by a valve independently, e.g. individually, flow controlled
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
- B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Coating Apparatus (AREA)
- Electrostatic Spraying Apparatus (AREA)
- Ink Jet (AREA)
Abstract
Description
Claims (11)
- 기판상에 액적(液滴)을 토출하는 수단과, 상기 기판 표면에 하전 빔을 조사하는 수단과, 상기 액적을 토출하는 수단으로부터 토출되는 액적을 상기 하전 빔과는 역극성의 전하로 대전시키는 수단을 구비하는 것을 특징으로 하는 액적 토출장치.
- 기판상에 액적을 토출하는 수단과, 상기 기판 표면에 하전 빔을 조사하는 수단과, 상기 액적을 토출하는 수단으로부터 토출되는 액적을 상기 하전 빔과는 역극성의 전하로 대전시키는 수단과, 진공배기수단을 구비하는 것을 특징으로 하는 액적 토출장치.
- 제 1 항 또는 제 2 항에 있어서,상기 액적 토출장치에 있어서의, 하전 빔은 전자 빔인 것을 특징으로 하는 액적 토출장치.
- 제 1 항 또는 제 2 항에 있어서,상기 액적 토출장치에 있어서의, 하전 빔은 이온 빔인 것을 특징으로 하는 액적 토출장치.
- 액적 토출법을 사용하여 절연막을 갖는 기판상에 액적을 토출하기에 앞서 원하는 위치에 하전 빔을 조사하고, 액적 토출법에 의해 토출시킨 액적을 상기 하전 빔과는 역극성의 전하로 대전시키는 것을 특징으로 하는 패턴의 제작방법.
- 제 5 항에 있어서,상기 하전 빔은 전자 빔인 것을 특징으로 하는 패턴의 제작방법.
- 제 5 항에 있어서,상기 하전 빔은 이온 빔인 것을 특징으로 하는 패턴의 제작방법.
- 제 5 항 내지 제 7 항 중 어느 한 항에 있어서,상기 액적 토출법에 의한 직접 패터닝은 감압하에서 하는 것을 특징으로 하는 패턴의 제작방법.
- 제 5 항 내지 제 8 항 중 어느 한 항에 있어서,상기 액적 토출법에 의해 토출하는 액적은 금속미립자를 포함하는 것을 특징으로 하는 패턴의 제작방법.
- 제 5 항 내지 제 9 항 중 어느 한 항에 있어서,상기 액적 토출법에 의해 토출하는 액적은 레지스트 재료를 포함하는 용액으 로 이루어지는 것을 특징으로 하는 패턴의 제작방법.
- 제 5 항 내지 제 10 항 중 어느 한 항에 있어서,상기 액적 토출법에 의해 토출하는 액적은 규소화합물을 포함하는 용액으로 이루어지는 것을 특징으로 하는 패턴의 제작방법.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003121394 | 2003-04-25 | ||
JPJP-P-2003-00121394 | 2003-04-25 | ||
PCT/JP2004/005011 WO2004096449A1 (ja) | 2003-04-25 | 2004-04-07 | 荷電ビームを用いた液滴吐出装置及び該装置を用いてのパターンの作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060009273A true KR20060009273A (ko) | 2006-01-31 |
KR101084962B1 KR101084962B1 (ko) | 2011-11-23 |
Family
ID=33410040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020057020259A KR101084962B1 (ko) | 2003-04-25 | 2004-04-07 | 하전 빔을 사용한 액적 토출장치 및 상기 장치를 사용한패턴의 제작 방법 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7232773B2 (ko) |
JP (2) | JPWO2004096449A1 (ko) |
KR (1) | KR101084962B1 (ko) |
CN (1) | CN100482355C (ko) |
TW (1) | TWI335272B (ko) |
WO (1) | WO2004096449A1 (ko) |
Cited By (2)
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WO2013015759A1 (ru) * | 2011-07-26 | 2013-01-31 | ЛАБЕНДИК, Роман | Устройство для нанесения ворсового покрытия на зону поверхности тела человека |
US10312503B2 (en) | 2011-06-20 | 2019-06-04 | Yazaki Corporation | Cohesive assembly of carbon and its application |
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CN100380596C (zh) * | 2003-04-25 | 2008-04-09 | 株式会社半导体能源研究所 | 液滴排出装置、图案的形成方法及半导体装置的制造方法 |
US7354808B2 (en) * | 2003-08-15 | 2008-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Resist composition and method for manufacturing semiconductor device using the same |
US7494923B2 (en) | 2004-06-14 | 2009-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of wiring substrate and semiconductor device |
US8158517B2 (en) * | 2004-06-28 | 2012-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing wiring substrate, thin film transistor, display device and television device |
US7696625B2 (en) * | 2004-11-30 | 2010-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP5094019B2 (ja) * | 2005-01-21 | 2012-12-12 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US7537976B2 (en) * | 2005-05-20 | 2009-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of thin film transistor |
US7582969B2 (en) * | 2005-08-26 | 2009-09-01 | Innovative Micro Technology | Hermetic interconnect structure and method of manufacture |
JP2010010549A (ja) * | 2008-06-30 | 2010-01-14 | Konica Minolta Holdings Inc | 薄膜トランジスタの製造方法及び薄膜トランジスタ |
JP2010016037A (ja) * | 2008-07-01 | 2010-01-21 | Konica Minolta Holdings Inc | 薄膜トランジスタの製造方法 |
ES2820424T3 (es) | 2009-11-24 | 2021-04-21 | Kalwar Cft Fusions Technik Gmbh | Procedimiento para el tratamiento superficial de un sustrato y dispositivo para la realización del procedimiento |
US8724177B2 (en) * | 2010-06-09 | 2014-05-13 | Korea Institute Of Machinery & Materials | Printing apparatus having automatic printing sheet feeder |
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2004
- 2004-04-07 WO PCT/JP2004/005011 patent/WO2004096449A1/ja active Application Filing
- 2004-04-07 CN CNB2004800170435A patent/CN100482355C/zh not_active Expired - Fee Related
- 2004-04-07 JP JP2004567194A patent/JPWO2004096449A1/ja not_active Withdrawn
- 2004-04-07 KR KR1020057020259A patent/KR101084962B1/ko active IP Right Grant
- 2004-04-20 US US10/827,711 patent/US7232773B2/en not_active Expired - Fee Related
- 2004-04-22 TW TW093111265A patent/TWI335272B/zh not_active IP Right Cessation
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2007
- 2007-06-14 US US11/818,558 patent/US20070272149A1/en not_active Abandoned
-
2011
- 2011-02-15 JP JP2011029398A patent/JP5256315B2/ja not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10312503B2 (en) | 2011-06-20 | 2019-06-04 | Yazaki Corporation | Cohesive assembly of carbon and its application |
WO2013015759A1 (ru) * | 2011-07-26 | 2013-01-31 | ЛАБЕНДИК, Роман | Устройство для нанесения ворсового покрытия на зону поверхности тела человека |
Also Published As
Publication number | Publication date |
---|---|
TWI335272B (en) | 2011-01-01 |
CN100482355C (zh) | 2009-04-29 |
KR101084962B1 (ko) | 2011-11-23 |
JP2011171734A (ja) | 2011-09-01 |
WO2004096449A1 (ja) | 2004-11-11 |
CN1809425A (zh) | 2006-07-26 |
US7232773B2 (en) | 2007-06-19 |
JP5256315B2 (ja) | 2013-08-07 |
US20070272149A1 (en) | 2007-11-29 |
TW200505685A (en) | 2005-02-16 |
JPWO2004096449A1 (ja) | 2006-07-13 |
US20050142896A1 (en) | 2005-06-30 |
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