KR20050025225A - 필터장치 - Google Patents

필터장치 Download PDF

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Publication number
KR20050025225A
KR20050025225A KR1020040044146A KR20040044146A KR20050025225A KR 20050025225 A KR20050025225 A KR 20050025225A KR 1020040044146 A KR1020040044146 A KR 1020040044146A KR 20040044146 A KR20040044146 A KR 20040044146A KR 20050025225 A KR20050025225 A KR 20050025225A
Authority
KR
South Korea
Prior art keywords
flow path
disposed
filter
vortex
exhaust gas
Prior art date
Application number
KR1020040044146A
Other languages
English (en)
Korean (ko)
Inventor
요시타카 사이토
Original Assignee
다이세이 기켄 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다이세이 기켄 가부시키가이샤 filed Critical 다이세이 기켄 가부시키가이샤
Publication of KR20050025225A publication Critical patent/KR20050025225A/ko

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/52—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material
    • B01D46/521—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material
    • B01D46/525—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material which comprises flutes
    • B01D46/527—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material which comprises flutes in wound arrangement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002—Casings; Housings; Frame constructions
    • B01D46/0005—Mounting of filtering elements within casings, housings or frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/4263—Means for active heating or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Separating Particles In Gases By Inertia (AREA)
  • Processes For Solid Components From Exhaust (AREA)
KR1020040044146A 2003-09-02 2004-06-15 필터장치 KR20050025225A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003310023A JP4864283B2 (ja) 2003-09-02 2003-09-02 フィルター装置および排気ガスの微粒子除去方法
JPJP-P-2003-00310023 2003-09-02

Publications (1)

Publication Number Publication Date
KR20050025225A true KR20050025225A (ko) 2005-03-14

Family

ID=34412010

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040044146A KR20050025225A (ko) 2003-09-02 2004-06-15 필터장치

Country Status (4)

Country Link
JP (1) JP4864283B2 (ja)
KR (1) KR20050025225A (ja)
CN (1) CN100393388C (ja)
TW (1) TWI291365B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007039751A (ja) * 2005-08-03 2007-02-15 Hitachi Kokusai Electric Inc 基板処理システム及びそのトラップ装置
JP4769164B2 (ja) * 2006-02-06 2011-09-07 株式会社育良精機製作所 工作機械および気液分離装置
JP5919824B2 (ja) 2012-01-05 2016-05-18 セントラル硝子株式会社 ガス生成装置
US9909405B2 (en) 2012-02-13 2018-03-06 Specialized Desanders Inc. Desanding apparatus and a method of using same
US9938812B2 (en) 2012-02-13 2018-04-10 Specialized Desanders Inc. Desanding apparatus and a method of using same
JP5848175B2 (ja) * 2012-03-23 2016-01-27 パンパシフィック・カッパー株式会社 エリミネータの洗浄方法
RU2496553C1 (ru) * 2012-10-09 2013-10-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Кубанский государственный аграрный университет" Прямоточный сепаратор для отделения дисперсных частиц от газа
CA2836437A1 (en) 2013-12-16 2015-06-16 Specialized Desanders Inc. An desanding apparatus and a method of using the same
US11035216B2 (en) 2017-05-30 2021-06-15 Specialized Desanders Inc. Gravity desanding apparatus with filter polisher

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940737B2 (ja) * 1971-11-19 1974-11-05
GB2055634B (en) * 1979-08-16 1983-01-26 Ishikawajima Harima Heavy Ind Gas-liquid separators
JPS5832729Y2 (ja) * 1981-03-05 1983-07-21 北越工業株式会社 油冷式回転圧縮機の油分離器
JPH0796087B2 (ja) * 1989-12-29 1995-10-18 明雄 五十嵐 液体濾過装置
US6068674A (en) * 1992-02-18 2000-05-30 Francis A. L. Dullien Removal of suspended fine particles from gases by turbulent deposition
JP4359975B2 (ja) * 1999-10-26 2009-11-11 株式会社Ｉｈｉ 固体分離装置
JP4636640B2 (ja) * 1999-11-26 2011-02-23 東洋紡績株式会社 フィルターユニット及びフィルター
JP2001269542A (ja) * 2000-03-24 2001-10-02 Nippon Donarudoson Kk 亜酸化窒素ガス触媒処理装置
JP2002013845A (ja) * 2000-06-30 2002-01-18 Mitsubishi Electric Corp 油分離器、冷凍サイクル装置およびその油分離方法

Also Published As

Publication number Publication date
CN100393388C (zh) 2008-06-11
JP2005074362A (ja) 2005-03-24
JP4864283B2 (ja) 2012-02-01
CN1589950A (zh) 2005-03-09
TWI291365B (en) 2007-12-21
TW200510052A (en) 2005-03-16

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application