JP2005074362A - フィルター装置 - Google Patents
フィルター装置 Download PDFInfo
- Publication number
- JP2005074362A JP2005074362A JP2003310023A JP2003310023A JP2005074362A JP 2005074362 A JP2005074362 A JP 2005074362A JP 2003310023 A JP2003310023 A JP 2003310023A JP 2003310023 A JP2003310023 A JP 2003310023A JP 2005074362 A JP2005074362 A JP 2005074362A
- Authority
- JP
- Japan
- Prior art keywords
- spiral
- filter
- flow path
- exhaust gas
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 25
- 239000000498 cooling water Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 abstract description 29
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 abstract 2
- 239000003546 flue gas Substances 0.000 abstract 2
- 238000000638 solvent extraction Methods 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 42
- 239000010419 fine particle Substances 0.000 description 20
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 11
- 239000007788 liquid Substances 0.000 description 6
- 239000003595 mist Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000002657 fibrous material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000001784 detoxification Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 239000010802 sludge Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- -1 reaction products Chemical compound 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/52—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material
- B01D46/521—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material
- B01D46/525—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material which comprises flutes
- B01D46/527—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material which comprises flutes in wound arrangement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0005—Mounting of filtering elements within casings, housings or frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
- B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/4263—Means for active heating or cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Separating Particles In Gases By Inertia (AREA)
- Processes For Solid Components From Exhaust (AREA)
Abstract
【解決手段】 入口6と出口8を有するケーシング2と、複数の渦巻部を有し渦巻状流路11を形成するようにケーシング2内に配置された隔壁3と、隔壁3の少なくとも一面に配置されたフィルター部材4とを有し、渦巻状流路11の最外側に位置する渦巻部3aの流路幅Aをこれより内側に位置する渦巻部3bの流路幅Bより広くしている。
【選択図】 図1
Description
従来の除害設備は、排気ガスに含まれる微粒子をイオン交換樹脂やゼオライトといった吸着材に吸着させたり、水スクラバーにより水に吸着させたり、バーナーによる燃焼で分解したりすることで除去している。
本発明のフィルター装置1は、図1および図2に示すように、円筒状ケーシング2と、円筒状ケーシング2の内部に配置された渦巻状隔壁3と、円筒状ケーシング2および隔壁3の内面に配置されたフィルター部材4と、隔壁3の中央部に配置された円筒状フィルター5とを有する。
本発明のフィルタ装置1は、図示しない半導体製造プロセスの除害設備の上流側に配置され、半導体製造プロセスの処理装置から排出される被処理ガスである排気ガス中の反応生成物等の夾雑物、その他ミストやダストを含む微粒子を除去するために用いられる。
そして、フィルター装置1において微粒子を除去した排気ガスは、フィルター装置1の出口8から図示しない配管を通して除害設備に導かれる。
2 ケーシング
3 渦巻状隔壁
4 フィルター部材
11 渦巻状流路
A 流路幅
B 流路幅
C 流路幅
Claims (5)
- 入口と出口を有するケーシングと、複数の渦巻部を有し連続した渦巻状流路を形成するようにケーシング内に配置された隔壁と、隔壁の少なくとも一面に配置されたフィルター部材とを有するフィルター装置において、前記渦巻状流路の外端側に位置する渦巻部の流路幅をこれより内側に位置する渦巻部の流路幅より広くしたことを特徴とするフィルター装置。
- 渦巻状流路は、渦巻部の流路幅が外側から内側に順次狭くなっていることを特徴とする請求項1に記載のフィルター装置。
- 隔壁の内側に形成される空間に円筒状フィルターを配置したことを特徴とする請求項1または2に記載のフィルター装置。
- 蓋体の下面に邪魔板を取り付けるとともに、円筒状フィルターの上方空間にドーナツ状エレメントを配置したことを特徴とする請求項1ないし3のいずれか1項に記載のフィルター装置。
- ケーシングの外面に冷却水ジャケットを配置したことを特徴とする請求項1ないし4のいずれか1項に記載のフィルター装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003310023A JP4864283B2 (ja) | 2003-09-02 | 2003-09-02 | フィルター装置および排気ガスの微粒子除去方法 |
KR1020040044146A KR20050025225A (ko) | 2003-09-02 | 2004-06-15 | 필터장치 |
TW093117483A TWI291365B (en) | 2003-09-02 | 2004-06-17 | Filter device |
CNB2004100714559A CN100393388C (zh) | 2003-09-02 | 2004-06-18 | 过滤器装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003310023A JP4864283B2 (ja) | 2003-09-02 | 2003-09-02 | フィルター装置および排気ガスの微粒子除去方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010193971A Division JP2011000590A (ja) | 2010-08-31 | 2010-08-31 | フィルター装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005074362A true JP2005074362A (ja) | 2005-03-24 |
JP4864283B2 JP4864283B2 (ja) | 2012-02-01 |
Family
ID=34412010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003310023A Expired - Lifetime JP4864283B2 (ja) | 2003-09-02 | 2003-09-02 | フィルター装置および排気ガスの微粒子除去方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4864283B2 (ja) |
KR (1) | KR20050025225A (ja) |
CN (1) | CN100393388C (ja) |
TW (1) | TWI291365B (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007039751A (ja) * | 2005-08-03 | 2007-02-15 | Hitachi Kokusai Electric Inc | 基板処理システム及びそのトラップ装置 |
JP2007229913A (ja) * | 2006-02-06 | 2007-09-13 | Ikura Seiki Seisakusho Co Ltd | 工作機械および気液分離装置 |
JP2013139607A (ja) * | 2012-01-05 | 2013-07-18 | Central Glass Co Ltd | ガス生成装置 |
JP2013198855A (ja) * | 2012-03-23 | 2013-10-03 | Pan Pacific Copper Co Ltd | エリミネータの洗浄方法、及びエリミネータの洗浄装置 |
RU2496553C1 (ru) * | 2012-10-09 | 2013-10-27 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Кубанский государственный аграрный университет" | Прямоточный сепаратор для отделения дисперсных частиц от газа |
US9861921B2 (en) | 2013-12-16 | 2018-01-09 | Specialized Desanders Inc. | Desanding apparatus and a method of using the same |
US9909405B2 (en) | 2012-02-13 | 2018-03-06 | Specialized Desanders Inc. | Desanding apparatus and a method of using same |
US9938812B2 (en) | 2012-02-13 | 2018-04-10 | Specialized Desanders Inc. | Desanding apparatus and a method of using same |
US11035216B2 (en) | 2017-05-30 | 2021-06-15 | Specialized Desanders Inc. | Gravity desanding apparatus with filter polisher |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4857263A (ja) * | 1971-11-19 | 1973-08-11 | ||
JPS57145521U (ja) * | 1981-03-05 | 1982-09-13 | ||
JPH03224609A (ja) * | 1989-12-29 | 1991-10-03 | Akio Igarashi | 液体濾過装置 |
JP2001121039A (ja) * | 1999-10-26 | 2001-05-08 | Ishikawajima Harima Heavy Ind Co Ltd | 固体分離装置 |
JP2001149723A (ja) * | 1999-11-26 | 2001-06-05 | Toyobo Co Ltd | フィルターユニット及びフィルター |
JP2002013845A (ja) * | 2000-06-30 | 2002-01-18 | Mitsubishi Electric Corp | 油分離器、冷凍サイクル装置およびその油分離方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2055634B (en) * | 1979-08-16 | 1983-01-26 | Ishikawajima Harima Heavy Ind | Gas-liquid separators |
US6068674A (en) * | 1992-02-18 | 2000-05-30 | Francis A. L. Dullien | Removal of suspended fine particles from gases by turbulent deposition |
JP2001269542A (ja) * | 2000-03-24 | 2001-10-02 | Nippon Donarudoson Kk | 亜酸化窒素ガス触媒処理装置 |
-
2003
- 2003-09-02 JP JP2003310023A patent/JP4864283B2/ja not_active Expired - Lifetime
-
2004
- 2004-06-15 KR KR1020040044146A patent/KR20050025225A/ko not_active Application Discontinuation
- 2004-06-17 TW TW093117483A patent/TWI291365B/zh not_active IP Right Cessation
- 2004-06-18 CN CNB2004100714559A patent/CN100393388C/zh not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4857263A (ja) * | 1971-11-19 | 1973-08-11 | ||
JPS57145521U (ja) * | 1981-03-05 | 1982-09-13 | ||
JPH03224609A (ja) * | 1989-12-29 | 1991-10-03 | Akio Igarashi | 液体濾過装置 |
JP2001121039A (ja) * | 1999-10-26 | 2001-05-08 | Ishikawajima Harima Heavy Ind Co Ltd | 固体分離装置 |
JP2001149723A (ja) * | 1999-11-26 | 2001-06-05 | Toyobo Co Ltd | フィルターユニット及びフィルター |
JP2002013845A (ja) * | 2000-06-30 | 2002-01-18 | Mitsubishi Electric Corp | 油分離器、冷凍サイクル装置およびその油分離方法 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007039751A (ja) * | 2005-08-03 | 2007-02-15 | Hitachi Kokusai Electric Inc | 基板処理システム及びそのトラップ装置 |
JP2007229913A (ja) * | 2006-02-06 | 2007-09-13 | Ikura Seiki Seisakusho Co Ltd | 工作機械および気液分離装置 |
JP2013139607A (ja) * | 2012-01-05 | 2013-07-18 | Central Glass Co Ltd | ガス生成装置 |
US9708720B2 (en) | 2012-01-05 | 2017-07-18 | Central Glass Company, Limited | Gas generation device |
US9909405B2 (en) | 2012-02-13 | 2018-03-06 | Specialized Desanders Inc. | Desanding apparatus and a method of using same |
US9938812B2 (en) | 2012-02-13 | 2018-04-10 | Specialized Desanders Inc. | Desanding apparatus and a method of using same |
JP2013198855A (ja) * | 2012-03-23 | 2013-10-03 | Pan Pacific Copper Co Ltd | エリミネータの洗浄方法、及びエリミネータの洗浄装置 |
RU2496553C1 (ru) * | 2012-10-09 | 2013-10-27 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Кубанский государственный аграрный университет" | Прямоточный сепаратор для отделения дисперсных частиц от газа |
US9861921B2 (en) | 2013-12-16 | 2018-01-09 | Specialized Desanders Inc. | Desanding apparatus and a method of using the same |
US11035216B2 (en) | 2017-05-30 | 2021-06-15 | Specialized Desanders Inc. | Gravity desanding apparatus with filter polisher |
Also Published As
Publication number | Publication date |
---|---|
CN100393388C (zh) | 2008-06-11 |
KR20050025225A (ko) | 2005-03-14 |
JP4864283B2 (ja) | 2012-02-01 |
CN1589950A (zh) | 2005-03-09 |
TWI291365B (en) | 2007-12-21 |
TW200510052A (en) | 2005-03-16 |
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