KR200477830Y1 - Plenum moisturizing apparatus - Google Patents

Abstract

The present invention relates to a direct atomizing water humidifying device, and more particularly, to a humidifying device for directly humidifying the inside of a clean room, comprising: a manifold in which a spray water header and a compressed air header are formed in the longitudinal direction; A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air; A connecting member for uniformly connecting the nozzles; A solenoid valve for opening / closing the nozzle; And a spray water tank installed at one side of the manifold and connected to the spray water header to supply spray water to the nozzle.
According to the present invention, since a plurality of nozzles are supported by the connecting member, it is possible to prevent breakage problems of the nozzles and the like caused in the process of holding the nozzles during transportation, prevent rotation of the spiral- It is effective. Also, in the present invention, a cap Cap is provided to surround the solenoid valve except the discharge port of the nozzle, thereby preventing the nozzle or the solenoid valve from being damaged by an external force, There is an effect that uniform binding or separation can be achieved.

Description

{PLENUM MOISTURIZING APPARATUS}

The present invention relates to a direct atomizing water humidifying device, and more particularly, to a direct atomizing water humidifying device for humidifying the inside of a clean room through a direct atomizing method in a clean room by an air atomizing nozzle in a clean room operating condition requiring precise temperature and humidity control And a humidifying device.

A clean room is a space in which suspended particulates in the air are managed under a limited degree of cleanliness and where temperature, humidity, pressure, etc. are also managed in the space.

In particular, the outside air conditioner, which is essential equipment for maintaining the humidity and positive pressure in the clean room, is installed separately from the clean room and introduces the outside air amount which is the sum of the exhaust air amount discharged from the clean room and the air amount required to maintain the positive pressure in the clean room , And the introduced outside air is changed in accordance with processes such as heating, humidification, cooling, and dehumidification by various components such as a heating coil, a cooling coil, a dehumidifier, and a humidifier provided in the outside air conditioner so as to have a required temperature and humidity in a clean room, Room.

The direct atomizing vaporization humidifier in the clean room is a device that simultaneously atomizes the sprayed water particles that are atomized by the nozzle and cools the air and humidifies the air.

Such a technique related to direct atomization type vaporization humidifier has been proposed in patent registration No. 0924960 and patent registration No. 0848933.

Hereinafter, the direct atomization type vaporization humidifier and the direct atomization type vaporization and humidification device in the clean room disclosed in the patent registration No. 0924960 and the patent registration No. 0848933 are described briefly.

1 is a schematic block diagram of a vaporization and humidification system in Patent Registration No. 0924960 (hereinafter referred to as "Prior Art 1"). 1, the vaporization and humidification system of the prior art 1 includes a manifold 40 located in the clean room 30 and equipped with a nozzle 41 for spraying ultrapure water, An ultrapure water supply unit 60 connected to the manifold 40 to supply ultrapure water and a compressed air generating unit 70 extending to the manifold 40. The control valve control unit 50 includes a control valve control unit 50, Each manifold (40) is provided with an ultrapure water storage tank (42) for storing ultrapure water. The ultrapure water storage tank 42 is provided with a hollow ball 42a which moves up and down according to gravity so as to control the supply of ultrapure water to the ultrapure water supply pipe 61a in accordance with the vertical movement of the hollow ball 42a.

However, since the direct spray type vaporization and humidification device in the clean room according to the prior art 1 is carried out while holding the nozzle 41 which is relatively weak when the vaporization and humidification device is moved after the installation or separation, This was a big problem.

2 is an installation perspective view of a direct atomizing vaporization and humidification device in a clean room in Patent Registration No. 0848933 (hereinafter referred to as "Prior Art 2"). As shown in FIG. 2, the direct spray type vaporization and humidification device in the clean room of the prior art 2 is provided with a plurality of spray nozzles 1 spaced a certain distance on a nozzle fixing tube 2, (2) in which a plurality of the injection nozzles (1) are installed is extruded and cut to a required length to be used in a direct atomizing vaporization humidifying device (A) in a clean room equipped with an ultrapure water storage tank The cross section of the nozzle fixing tube 2 is integrally formed with an ultrapure water supply hole 21 and a compressed air supply hole 22 for supplying compressed air and the nozzle bracket 11 A nozzle bracket fixing groove 23 and a mount fixing groove 24 for fixing the nozzle fixing tube 2 to the mounting bracket 4 are formed. At this time, the ultrapure water storage tank 3 is connected to an ultrapure water supply pipe 31 to which ultrapure water is supplied from the upper part, an ultrapure water extension hole 32 through which the ultrapure water supplied from the ultrapure water supply pipe 31 flows downward, A reservoir tank 30 having a needle valve pedestal 33 with a perforated ultrapure water outlet hole 33a and a reservoir body 34 connected to an ultrapure water discharge pipe 35 and storing ultrapure water, A float body 36a which is installed in the reservoir tank 30 and the reservoir body 34 and contains air and an upper part of the float body 36a, And a float 36 provided with a needle valve 36b which contacts the ultrapure water outflow hole 33a and opens and closes the ultrapure water outflow hole 33a.

However, since the direct spray type vaporization and humidification device in the clean room according to the prior art 2 is also carried out while holding the spray nozzle 1 which is relatively weak when the vaporization and humidification device is moved to the installation position or after the separation, There is a great risk of breakage.

KR 0924960 B1 KR 0848933 B1

It is an object of the present invention to solve the problems of the prior art as described above, and it is an object of the present invention to provide a nozzle assembly for a nozzle assembly in which a plurality of nozzles are supported by a connecting member to prevent breakage of nozzles, The present invention also provides a direct spray type water humidification system capable of preventing the occurrence of water leakage by preventing rotation of the nozzle.

Another object of the present invention is to provide a direct atomizing water humidifying device which is equipped with a cap for covering the remaining part except for the discharge port of the nozzle and the solenoid valve to prevent damage of the nozzle or the solenoid valve by external force .

It is another object of the present invention to provide a direct atomizing water humidifying device capable of uniformly coupling or separating a connecting member to a hole of a nozzle even in a narrow space.

According to an aspect of the present invention, there is provided a system for humidifying the inside of a clean room, comprising: a manifold in which a spray head and a compressed air header are formed in a longitudinal direction; A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air; A connecting member for uniformly connecting the nozzles; A solenoid valve for opening / closing the nozzle; And a spray water tank installed at one side of the manifold and connected to the spray water header to supply spray water to the nozzle.

In addition, a cap may be provided on the manifold in the present invention to cover the remaining portion of the nozzle except the discharge port and the solenoid valve.

In addition, the connecting member in the present invention may be provided in the form of a bar.

In addition, the connecting member in the present invention is formed to have a longer length than the arrangement length of the nozzles, and a groove is formed in the vicinity of the surface facing the nozzle, respectively; A nozzle engaging portion formed on the outer wall surface of the body portion, the nozzle engaging portion being formed on each of opposing surfaces of the nozzle body and inserted into holes of the nozzle; An interfering stopper provided in the groove of the body part spaced apart from the nozzle engaging part to prevent the hole of the nozzle from being separated from the nozzle engaging part; And an elastic member interposed between the bottom surface of the stopper and the bottom surface of the groove of the body to provide an elastic force so that the stopper always moves upward.

In the present invention, a plurality of nozzles are supported by a connecting member to prevent breakage of nozzles and the like caused in the process of catching the nozzles, and prevention of rotation of the spirally connected nozzles to prevent leakage . Also, in the present invention, a cap Cap is provided to surround the solenoid valve except the discharge port of the nozzle, thereby preventing the nozzle or the solenoid valve from being damaged by an external force, There is an effect that uniform binding or separation can be achieved.

1 is a schematic configuration diagram of a vaporization and humidification system according to Prior Art 1. FIG.
2 is an installation perspective view of a direct atomization type vaporization and humidification device in a clean room according to the prior art 2. FIG.
3 is a perspective view showing a direct atomization type water humidifying device of the present invention.
4 is an exploded perspective view showing a direct atomizing water humidifying device of the present invention.
5 is a perspective view showing a state in which a nozzle is closed by a cap in a direct atomizing water humidifying device of the present invention
6 is a plan view showing a connection member of another embodiment in the direct spray water humidifying device of the present invention.
7 is a plan view showing a state where the connecting member of another embodiment is coupled to the nozzle in the direct spray water humidifying device of the present invention.

The terms or words used in the present specification and claims are intended to mean that they conform to the technical idea of the present invention on the principle that the inventor can properly define the concept of the term in order to best explain his / Should be interpreted as a concept.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise. Also, the term " part "in the specification means a unit for processing at least one function or operation, which may be implemented by hardware or software or a combination of hardware and software.

Hereinafter, the structure of an embodiment of a direct atomizing water humidifying device according to the present invention will be described in detail with reference to the drawings.

FIG. 3 is a perspective view of the direct atomizing water humidifying device of the present invention, FIG. 4 is an exploded perspective view of the direct atomizing water humidifying device of the present invention, and FIG. A perspective view of the device with the nozzle closed by the cap is shown.

According to these drawings, the direct atomizing water humidifying device 100 according to the present invention functions to atomize spray water by compressed air, and includes a manifold 110, a spray water connection pipe 120a, A nozzle 130, a spray water tank 140, a solenoid valve 150, a connecting member 160, and a control unit. At this time, the spray water may be ultra pure water when the direct spray water humidifier 100 of the present invention is applied to a clean room.

The manifold 110 is extruded or injection-molded in a horizontal direction using a metal material such as an aluminum material, and both ends are covered with an end cover 114.

At this time, the manifold 110 may be plugged with both ends or one end of the spray water header 111 and the compressed air header 112 formed therein.

In addition, the manifold 110 has a spray water header 111 and a compressed air header 112 formed separately in the longitudinal direction so as to separately supply spray water and compressed air to left and right inner upper ends.

In the meantime, the header in the spray headers 111 and the compressed air header 112 refers to a structure in which a plurality of branch pipes are in contact with an enlarged portion to divide or collect a plurality of branch pipes.

The manifold 110 is formed with a wiring passage 110a in the longitudinal direction separately from the spray head 111 and the compressed air header 112 at an inner lower end thereof.

The wiring lines 113 are electrically connected to the solenoid valves 150 for controlling the solenoid valves 150 for controlling the opening and closing of the nozzles 130, And is formed at the lower portion of the fold 110.

The end cover 114 is provided with a spray water supply pipe 141 connected to the spray water tank 140 so as to communicate with the spray water header 111 and a compressed air generating unit And a compressed air supply pipe 142 connected to the compressed air supply pipe 142 are provided.

Although the spray water supply pipe 141 and the compressed air supply pipe 142 are connected to one end of the manifold 110, they may be installed in the middle of the manifold 110.

A connector fixing member may be provided at both ends of the manifold 110 to fix the connector coupled to both ends of the power line of the solenoid valve 150.

The connector fixing member is formed in a plate shape, and a connector coupling hole is formed so that a connector to which the power input line of the solenoid valve 150 is connected is formed.

The connector fixing member is provided on one side or both sides of the longitudinal direction of the manifold 110 to fix a connector connected to a power input line of the solenoid valve 150 to a connector coupling hole, This is easy. Furthermore, since the connector connected to the power input line of the solenoid valve 150 is fixed to the connector coupling hole even when the connector connected to the external power input line is disconnected, the recombination is also facilitated.

The spray water connection pipe 120a is fastened to the upper surface of the manifold 110 perforated per setting interval and is vertically connected to the spray water header 111 so that spray water is supplied to the nozzle 130 from the spray water tank 140. [ ).

The compressed air connection pipe 120b is fixed on the upper surface of the manifold 110 perforated per setting interval and is compressed in the compressed air supply pipe 142 while supporting the nozzle 130 and the solenoid valve 150, Air is connected to the compressed air header 112 to be supplied to the nozzle 130.

The nozzle 130 is installed at the upper end of the compressed air connection pipe 120b to simultaneously spray the spray water and compressed air. In this case, the nozzle 130 is a siphon-type nozzle for supplying an adiabatic body, and atomized water and compressed air are respectively mixed from the outside, and the liquid is sprayed by the force of compressed air to realize fine spraying. Here, the nozzle 130 is rotatably installed to adjust spray angle and degree of spray for each installation position.

At this time, in this embodiment, spray water and compressed air are externally mixed and supplied, but the present invention is not limited thereto, and internal mixing and the like are also possible.

The spray water tank 140 is installed at one end of the manifold 110 to supply the spray water to the nozzle 130 while maintaining the atmospheric pressure state and is connected to the spray water header 111 A water supply pipe 141 is provided. At this time, the spray water tank 140 includes a tank body, a connection cover, a ball, and a sealing member (not shown).

In addition, the spray water tank 140 may be installed at one end of the manifold 110. However, the present invention is not limited thereto. For example, the spray water tank 140 may be installed between the nozzles 130 Any space can be installed in a spare space.

In the tank body, a spray water is stored in an upper opening, and a connection hole is formed in the bottom surface to connect the spray water header 111 of the manifold 110 to drain the spray water.

The connection cover is fastened to the open top of the tank body and is connected to an injection tube (not shown) for injecting spray water on the top surface. Meanwhile, the tank body and the connection cover may be made of a transparent material, so that the storage amount of the spray water stored in the tank body can be recognized.

The flange is rotatably provided at the lower end of the sealing member by a lever, and is lifted and lowered by rotating the sealing member in accordance with the spray water level inside the tank body to close the hole connected to the outlet of the spray water injection tube connected to the connection cover.

The sealing member is lowered when the spray water level in the tank body is low and opens the hole connected to the outlet of the spray water injection tube. When the spray water level reaches the set height, The connected holes are blocked to stop the spray water supply.

The solenoid valve 150 is installed at the upper end of the compressed air connection pipe 120b and controls the opening and closing of the compressed air connection pipe 120b using the electromagnet principle when the power is applied, do.

At this time, the solenoid valve 150 is provided for each of the nozzles 130 to individually open and close the nozzles 130, or a plurality of nozzles 130 are connected to each other, and a plurality of the solenoid valves 150 are simultaneously or sequentially opened and closed The solenoid valve 150 may be provided for each of the nozzles 130 to individually open and close the nozzles 130. In this case, .

The solenoid valve 150 includes a coil, a fixed iron core, a spring, a plunger, and a connector, though not shown in the figure.

The coil is connected to a power line and electrified by an applied power source, and the fixed iron core is formed of a metal material and fixed inside the coil.

The spring is located in the hole of the plunger whose one end is located inside the hole of the fixed iron core with the end clogged and the other end is clogged.

At this time, the spring causes the plunger, which will be described later, to always provide a restoring force in the direction of the connecting port, so that the flow path of the connecting port is always closed through the restoring force.

The plunger is formed of a metallic material and opens the flow passage of the connection port by electromagnetism when power is applied to the coil while the flow passage of the connection port is closed by the restoring force of the spring.

The connecting port is connected to the fixed core by a spiral, and the inlet and the outlet are opened or closed according to the moving direction of the plunger in a state in which the inlet and the outlet are formed inside.

The compressed air generating unit is connected to the nozzle 130 at an end of the compressed air supply pipe 142 so as to supply compressed air to the nozzle 130, though not shown in the drawing.

The connecting member 160 is provided in the form of a bar and is connected to each of the transverse through holes formed at the lower end of the nozzle 130 so as to be held by the handler during transportation. It is possible to prevent the occurrence of breakage and the rotation of the spiral-connected nozzle 130, thereby preventing leakage.

In addition, the connecting member 160 may be arranged along the lateral direction through holes formed in the lower end of the nozzle 130 to orient the nozzle 130 in the process of being connected.

The upper surface of the manifold 110 is covered with a cap except for the discharge port of the nozzle 130 and a solenoid valve 150 so as to protect the nozzle 130 and the solenoid valve 150 from the outside. 170 are provided. (See Fig. 5)

The control unit controls the operation of the solenoid valve 150 by detecting the temperature of a temperature sensor (not shown) installed in a clean room (not shown in the drawing) and detecting the amount of humidification of the humidification amount sensor (not shown) So that the opening and closing of the nozzle 130 of the direct spray type water humidifying apparatus 100 can be precisely controlled in part or in whole.

Therefore, the direct spray water humidifier 100 according to one embodiment of the present invention operates when humidification or the like in a clean room is required.

That is, when power is applied to the solenoid valve 150 through the control of the controller, the coil becomes an electromagnet, and the plunger, which has closed the flow passage of the connection port, is moved to the fixed iron core side to open the flow passage of the connection port.

Next, when the flow passage of the connection port is opened, spray water and compressed air are supplied through a spray water supply pipe 141 connected to the spray water tank 140 and a compressed air supply pipe 142 connected to the compressed air generation unit, (130).

At this time, when the water level stored in the spray water tank 140 is low, the spray water rises and the sealing member connected thereto is lowered and is continuously supplied from the spray water supply part. When the water level reaches the proper position, And the spraying water supply is stopped by lifting the connected sealing member.

Meanwhile, since each of the nozzles 130 is uniformly connected by the connecting member 160 and moves while holding the connecting member 160 during transportation, damage is prevented in the process of holding the nozzle during transportation as in the conventional method .

FIG. 6 is a plan view of a direct atomizing water humidifying device according to another embodiment of the present invention, and FIG. 7 shows a state in which a connecting member of another embodiment is coupled to a nozzle in the direct atomizing water humidifying device of the present invention In a plan view.

According to these drawings, the connecting member 160 of another embodiment of the direct spray type water humidifying device of the present invention includes the body portion 162, the nozzle catching portion 164, the stopper 166, and the elastic member 168. The present embodiment can solve the disadvantage that a separate space is required as long as the length of the connecting member when connecting or separating a plurality of nozzles by using the bar-shaped connecting member in the previous embodiment.

The body portion 162 is longer than the interval between the nozzles 130 disposed at both ends of the manifold 110 among the nozzles 130. The body portion 162 has grooves 162a are formed.

The nozzle engaging portion 164 is bent in the direction of the stopper 166 to be described later on each of the surfaces facing the nozzle 130 on the outer wall surface of the body portion 162, Respectively.

At this time, it is preferable that the body portion 162 and the nozzle locking portion 164 are formed of metal material having rigidity.

The stopper 166 is provided in the groove 162a of the body 162 separated from the nozzle engaging part 164 so that the transverse direction through hole formed at the lower end of the nozzle 130 is separated from the nozzle engaging part 164 Interferes to prevent interference.

7 (b), the stopper 166 is formed in an equilateral triangle shape in which the inclined surface and the vertical surface are adjacent to each other, and the nozzle engaging portion 164 is inserted into the transverse direction through hole formed at the lower end of the nozzle 130 (See FIG. 7 (c)], the lower end of the nozzle 130 passes through while pressing the inclined surface (see FIG. 7C), and the nozzle engaging portion 164 is inserted into the transverse direction through hole formed at the lower end of the nozzle 130 (See FIG. 7 (d)), the vertical surface is caught by the lower end of the nozzle 130 to prevent the nozzle latching part 164 from being separated from the lateral through hole formed at the lower end of the nozzle 130.

The elastic member 168 intervenes between the bottom surface of the stopper 166 and the bottom surface of the groove 162a of the body portion 162 to provide an elastic force such that the stopper 166 always moves upward.

Since the elastic member 168 exerts an elastic force to move the stopper 166 in the outward direction at all times, the nozzle stopper 164 prevents the stopper 166 from descending, So that it is prevented from being separated from the directional through hole.

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. This is possible.

Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined by the scope of claims of utility model as well as equivalents thereof.

100: Direct humidifier humidifier
110: manifold
113: connector fixing member
120: connector
130: nozzle
140: Spray water tank
150: Solenoid valve
160:
170: Cap

Claims (4)

In a system for humidifying the inside of a clean room,
A manifold in which a spray head and a compressed air header are respectively formed in the longitudinal direction;
A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air;
A connecting member for connecting the nozzle;
A solenoid valve for opening / closing the nozzle; And
And a spray water tank installed at one side of the manifold and connected to the spray water header to supply spray water to the nozzle,
The connecting member
A body portion formed to be longer than an arrangement length of the nozzles and having a groove formed in the vicinity of the surface facing the nozzle;
A nozzle engaging portion formed on the outer wall surface of the body portion, the nozzle engaging portion being formed on each of opposing surfaces of the nozzle body and inserted into holes of the nozzle;
An interfering stopper provided in the groove of the body part spaced apart from the nozzle engaging part to prevent the hole of the nozzle from being separated from the nozzle engaging part; And
And an elastic member interposed between the bottom surface of the stopper and the bottom surface of the body so as to provide an elastic force so that the stopper always moves upward.
The method according to claim 1,
Wherein a cap is provided on the manifold so as to surround the remaining portion of the nozzle except the discharge port and the solenoid valve.
The method according to claim 1,
Wherein the connecting member is provided in the form of a bar.
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