CN208018809U - The Hydra sprayer of CMP tool chamber - Google Patents
The Hydra sprayer of CMP tool chamber Download PDFInfo
- Publication number
- CN208018809U CN208018809U CN201820203197.2U CN201820203197U CN208018809U CN 208018809 U CN208018809 U CN 208018809U CN 201820203197 U CN201820203197 U CN 201820203197U CN 208018809 U CN208018809 U CN 208018809U
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- spraying
- hydra
- sprayer
- cmp tool
- hydrojet
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Abstract
The utility model discloses a kind of Hydra sprayer of CMP tool chamber, the Hydra sprayer of CMP tool chamber includes：Fluid reservoir；Spraying tube socket, spraying tube socket are located on fluid reservoir, and spraying tube socket is equipped with liquid inlet joint to inject liquid into fluid reservoir；Spray assembly, spray assembly are connected with spraying tube socket, and spray assembly includes：One end of hydrojet suction pipe, hydrojet suction pipe is connected to fluid reservoir；Two fluid spray heads, two fluid spray heads are located at the other end of hydrojet suction pipe and are sprayed so that the liquid in fluid reservoir to be atomized.According to the Hydra sprayer of CMP tool chamber of the utility model embodiment, it is convenient for via hydrojet suction pipe spraying the liquid in fluid reservoir by two fluid spray heads again by spray assembly, and two the position of fluid spray head can flexibly be arranged, to meet the needs of polishing chamber interior and moisturizing of modules surface.
Description
Technical field
The utility model is related to precision processing technology fields, more particularly to a kind of Hydra sprayer of CMP tool chamber.
Background technology
In the related technology, add the form of nozzle to needing the surface for cleaning moisturizing to be oriented sprinkling using hydrojet pipeline
DIW (Deionized Water, deionized water), to have the function that moisturizing.However, above-mentioned technical proposal exists centainly
It is insufficient：For example, the spray angle and area coverage requirement to nozzle are relatively high, it generally can not adjust or be only capable of to realize very little model
The adjusting enclosed, be susceptible to injection less than dead angle, and general flow is bigger, had both consumed DIW and has formed waste, also easily suitable
The protective plate around chamber flows to outside board.
Utility model content
The utility model aims to solve at least one of the technical problems existing in the prior art.For this purpose, the utility model carries
Go out a kind of Hydra sprayer of CMP tool chamber, the spread of spray of the Hydra sprayer of CMP tool chamber expands, uses
Performance is good.
According to the Hydra sprayer of CMP tool chamber of the utility model embodiment, including：Fluid reservoir；Spraying tube socket, institute
It states spraying tube socket to be located on the fluid reservoir, the spraying tube socket is equipped with liquid inlet joint to inject liquid into the fluid reservoir
Body；Spray assembly, the spray assembly are connected with the spraying tube socket, and the spray assembly includes：Hydrojet suction pipe, the hydrojet
One end of suction pipe is connected to the fluid reservoir；Two fluid spray heads, the two fluid sprays head are located at the another of the hydrojet suction pipe
One end is sprayed so that the liquid in the fluid reservoir to be atomized.
According to the Hydra sprayer of CMP tool chamber of the utility model embodiment, it is convenient for liquid storage by spray assembly
Liquid in tank is sprayed by two fluid spray heads again via hydrojet suction pipe, and the position of two fluid spray heads can be flexibly arranged,
To meet the needs of polishing chamber interior and moisturizing of modules surface.
In addition, also being had according to the Hydra sprayer of CMP tool chamber of the utility model above-described embodiment following additional
Technical characteristic：
Some embodiments according to the present utility model, the spray assembly further include：Moveable hollow hose, the hydrojet are inhaled
At least part of pipe is located in the moveable hollow hose, and one end of the moveable hollow hose is connected with the spraying tube socket
And the other end is connected with the two fluid sprays head.
Further, the spray assembly includes at least two, and at least two spray assembly is in the spraying tube socket
Upper arranged for interval.
Some embodiments according to the present utility model, the two fluid sprays head include：It sprays seat, in the spraying seat
Portion is formed with central through hole；Inlet suction port, the inlet suction port pass through first installation position sprayed on seat and the spraying
Seat is connected；Hose coupling, the hose coupling are connected by the second installation position on the spraying seat with the spraying seat；Spraying
Cap, the spraying cap are connected by the third installation position on the spraying seat with the spraying seat, and the spraying cap has and institute
State the spray orifice of central through hole coaxial arrangement.
Further, sealing element, the spraying seat and the spray are additionally provided between the spraying seat and the spraying cap
It is connected by screw between mist cap.
Further, the periphery of the inner bottom surface of the third installation position be equipped with sealing element holding tank, the one of the sealing element
Part is located at outside the sealing element holding tank and only supports the spraying cap；Wherein, the spraying cap, the sealing element and described
It is formed with the flow channel for liquids for being connected to the hose coupling between spraying seat.
Further, the spraying seat be equipped with intercommunicating pore, one end of the intercommunicating pore be connected to the hose coupling and
The other end is connected to the flow channel for liquids.
Further, the other end of the hydrojet suction pipe is plugged in the intercommunicating pore, and the hydrojet suction pipe
It is interference fitted with the intercommunicating pore.
Specifically, inlet channel is formed in the inlet suction port, the spraying seat is set at first installation position
There is venthole, one end of the venthole is connected to the inlet channel and the other end is connected to the central through hole；Wherein, institute
State the diameter that central through hole is less than the one end of the central through hole far from the spray orifice adjacent to the radial dimension of one end of the spray orifice
To size.
Optionally, the spraying tube socket is equipped with inlet opening and spout hole, and the inlet opening is connected to the liquid inlet joint,
When the liquid in the fluid reservoir reaches flood level, liquid is flowed out by the spout hole.
The additional aspect and advantage of the utility model will be set forth in part in the description, partly will be from following description
In become apparent, or recognized by the practice of the utility model.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the utility model will in the description from combination following accompanying drawings to embodiment
Become apparent and is readily appreciated that, wherein：
Fig. 1 is the stereogram according to the Hydra sprayer of CMP tool chamber of the utility model embodiment；
Fig. 2 is a schematic diagram according to the Hydra sprayer of CMP tool chamber of the utility model embodiment；
Fig. 3 is another schematic diagram according to the Hydra sprayer of CMP tool chamber of the utility model embodiment；
Fig. 4 is the sectional view of the line B-B along Fig. 3；
Fig. 5 is the vertical view according to the Hydra sprayer of CMP tool chamber of the utility model embodiment；
Fig. 6 is a sectional view according to the Hydra sprayer of CMP tool chamber of the utility model embodiment；
Fig. 7 is the vertical of two fluid spray heads in the Hydra sprayer of CMP tool chamber according to the utility model embodiment
Body figure；
Fig. 8 is a sectional view of Fig. 7.
Reference numeral：
The Hydra sprayer 100 of CMP tool chamber,
Fluid reservoir 1,
Spraying tube socket 2, liquid inlet joint 21, inlet opening 22, spout hole 23, fixed plate 24,
Spray assembly 3, hydrojet suction pipe 31, two fluid spray heads 32, seat 321 of spraying, central through hole 3211, the first installation position
3212, the second installation position 3213, third installation position 3214, intercommunicating pore 3215, venthole 3216, inlet suction port 322, inlet channel
3221, hose coupling 323, cap 324 of spraying, spray orifice 3241, sealing element 325, flow channel for liquids 326, screw 327, moveable hollow is soft
Pipe 33.
Specific implementation mode
The embodiments of the present invention are described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning
Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, it is intended to for explaining the utility model, and should not be understood as to the utility model
Limitation.
In the description of the present invention, it should be understood that the fingers such as term "center", "upper", "lower", "inner", "outside"
The orientation or positional relationship shown be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description the utility model and
Simplify description, does not indicate or imply the indicated device or element must have a particular orientation, with specific azimuth configuration
And operation, therefore should not be understood as limiting the present invention.In addition, define " first ", the feature of " second " can be bright
Show or implicitly include one or more this feature.In the description of the present invention, unless otherwise indicated, " multiple "
It is meant that two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, can also be electrical connection；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, it can understand above-mentioned art with concrete condition
The concrete meaning of language in the present invention.
In the related technology, CMP (CMP, that is, Chemical Mechanical Planarization, chemical-mechanical planarization)
It is required for moisturizing mechanism, internal volume and each component surface to carry out moisturizing inside apparatus cavity, main purpose is preventing
It learns the crystallization that leaves after liquid drying evaporation and falls to polishing disk, the component of trimmer, rubbing head etc. and wafer contacts is to pickup
Wafer, or slurry (mud) ingredient is influenced, influence polishing effect.
However, there are certain deficiencies for moisturizing mechanism in the related technology, for this purpose, the utility model provides a kind of CMP
The Hydra sprayer 100 of apparatus cavity, solving general atomizer passgae and can not carrying out any direction adjusting and spread of spray has
The problem of limit.
It is described below in conjunction with the accompanying drawings according to the Hydra sprayer of the CMP tool chamber of the utility model embodiment 100.
If Fig. 1-Fig. 8 shows, according to the Hydra sprayer 100 of the CMP tool chamber of the utility model embodiment, including：Storage
Flow container 1, spraying tube socket 2 and spray assembly 3.
Specifically, spraying tube socket 2 is located on fluid reservoir 1, spraying tube socket 2 is equipped with liquid inlet joint 21 with to fluid reservoir 1
Interior injection liquid.For example, deionized water etc. can be conveyed into fluid reservoir 1 by liquid inlet joint 21.
Spray assembly 3 is connected with spraying tube socket 2, and spray assembly 3 includes：Hydrojet suction pipe 31 and two fluid spray heads 32.
One end of hydrojet suction pipe 31 is connected to fluid reservoir 1.For example, one end of hydrojet suction pipe 31 can extend downwardly into fluid reservoir
The part-structure of hydrojet suction pipe 31 is shown in 1, in Fig. 4.
Two fluid spray heads 32 are located at the other end of hydrojet suction pipe 31, can be by fluid reservoir 1 by two fluid spray heads 32
Interior liquid atomization sprays.Wherein, the position of two fluid spray heads 32 can be flexibly arranged, so as to effectively to various positions
Moisturizing is carried out, and flow, break-make control can be carried out, saves resource.
According to the Hydra sprayer 100 of the CMP tool chamber of the utility model embodiment, being convenient for by spray assembly 3 will
Liquid in fluid reservoir 1 is sprayed by two fluid spray heads 32 again via hydrojet suction pipe 31, and the position of two fluid spray heads 32 can
To be flexibly arranged, to meet the needs of polishing chamber interior and moisturizing of modules surface.
In conjunction with Fig. 1 and Fig. 4, some embodiments according to the present utility model, spray assembly 3 further includes：Moveable hollow hose
33, at least part of hydrojet suction pipe 31 can be located in moveable hollow hose 33, one end of moveable hollow hose 33 and spraying
Tube socket 2 is connected, and the other end of moveable hollow hose 33 is connected with two fluid spray heads 32.It is soft by moveable hollow as a result,
Hydrojet suction pipe 31 can be protected and be supported to pipe 33, can also play a supporting role to two fluid spray heads 32, performance is good.
Specifically, hydrojet suction pipe 31 can be arranged in moveable hollow hose 33, which can be arbitrary
Bending direction is adjusted, can be fixed after adjustment, the two fluid spray heads 32 to being installed on 31 end of hydrojet suction pipe play solid
Fixed support, the effect that corner is adjusted.
Further, in conjunction with Fig. 1 to Fig. 5, spray assembly 3 includes at least two, and at least two spray assemblies 3 are in injection spray pipe
Arranged for interval on seat 2.By at least two spray assemblies 3, be conducive to expand spread of spray.
For example, showing two spray assemblies 3 in the example of Fig. 1 to Fig. 5, two spray assemblies 3 are on spraying tube socket 2
It is arranged spaced apart.But not limited to this, the specific number of spray assembly 3 adaptability can be arranged according to actual needs.
According to the Hydra sprayer 100 of the CMP tool chamber of the utility model embodiment, pass through at least two spraying of setting
Component 3 increases spread of spray, and can control the break-make of air inlet by Pneumatic valve (such as pneumatic control valve), realizes simultaneously
Control controls respectively；It can continue to spray, can also spray break time.The supply of DIW can also pass through air piloted fluid valve
Break-make realizes the control of water supply break-make, to make full use of the moisture-keeping functions of DIW, reduces waste.
Moisturizing position can be flexibly arranged in two fluid spray nozzles 32, effectively can carry out moisturizing to various dead angles, reduce and throw
Optical defect, and resource can be saved by controlling the break-make of mist flow and spraying.
Reference Fig. 7 and Fig. 8, some embodiments according to the present utility model, two fluid spray heads 32 include：Spraying seat 321,
Inlet suction port 322, hose coupling 323 and spraying cap 324.
Specifically, the middle part of spraying seat 321 is formed with central through hole 3211；And it is formed with the first peace on seat 321 of spraying
Fill position 3212, the second installation position 3213 and third installation position 3214.Inlet suction port 322 passes through the first installation on seat 321 of spraying
Position 3212 is connected with spraying seat 321；Hose coupling 323 passes through the second installation position 3213 sprayed on seat 321 and spraying 321 phase of seat
Even；Spraying cap 324 is connected by the third installation position 3214 sprayed on seat 321 with spraying seat 321, and spraying cap 324 has spray orifice
3241, spray orifice 3241 is coaxially disposed with central through hole 3211.
Wherein, air-flow is suitable for entering central through hole 3211 by inlet suction port 322 and forms negative pressure by the discharge of spray orifice 3241,
The liquid in fluid reservoir 1 to be sprayed by hose coupling 323 by spray orifice 3241.Convenient for further passing through two fluid spray heads 32
It is oriented spraying and moisturizing for the region for being susceptible to moisturizing dead angle.
Further, for inlet suction port 322 under aeration status, high-speed flow passes through the central through hole at 321 center of spraying seat
3211 and from spraying cap 324 on spray orifice 3241 spray, form vacuum in outlet, to extract the deionized water in fluid reservoir 1 out,
It is transported to by the hydrojet suction pipe 31 in hose coupling 323 at the spray orifice 3241 of spraying cap 324, under action of high-speed airflow, goes
Ionized water is broken into tiny water mist, to play the effect of spraying.
In addition, with reference to Fig. 7 and Fig. 8, can be connected by screw 327 between spraying cap 324 and spraying seat 321.Wherein, spiral shell
Nail 327 can be such as self-clinching stud.
Further, it with reference to Fig. 8, sprays and is additionally provided with (such as the sealing ring of sealing element 325 between seat 321 and spraying cap 324
Deng).Further, the periphery of the inner bottom surface of third installation position 3214 is equipped with sealing element holding tank (not shown), sealing element 325
A part is located at outside the sealing element holding tank, and the part that sealing element 325 is located at outside the sealing element holding tank can stop
To spraying cap 324.For example, sealing element 325 can be located in the sealing element holding tank, and the upper end protrusion of sealing element 325
The sealing element holding tank simultaneously only supports spraying cap 324.
Wherein, it sprays and is formed with flow channel for liquids 326, flow channel for liquids between cap 324, sealing element 325 and spraying seat 321
326 can be connected to hose coupling 323.As a result, the liquid in fluid reservoir 1 can be via hydrojet suction pipe 31, hose coupling
323, flow channel for liquids 326, then be atomized and sprayed by spray orifice 3241.
Further, with reference to Fig. 8, spraying seat 321 is equipped with intercommunicating pore 3215, one end of intercommunicating pore 3215 and hose coupling
323 connections, and the other end of intercommunicating pore 3215 is connected to flow channel for liquids 326.As a result, liquid in fluid reservoir 1 can be with
Via hydrojet suction pipe 31, hose coupling 323, intercommunicating pore 3215, flow channel for liquids 326, then it is atomized and is sprayed by spray orifice 3241.
Further, it as shown in figure 8, the other end of hydrojet suction pipe 31 can be plugged in intercommunicating pore 3215, and sprays
Liquid straw 31 is interference fitted with intercommunicating pore 3215.Thus, it is possible to ensure the assembly reliability of hydrojet suction pipe 31 and intercommunicating pore 3215.
Optionally, totally two, hydrojet suction pipe 31 shown in Fig. 4, hydrojet suction pipe 31 is out of fluid reservoir 1 one through to second-rate
In the spraying seat 321 of spray body head 32, and the intercommunicating pore 3215 that hydrojet suction pipe 31 is inserted into inside spraying seat 321 is fixed, and is sprayed
The part that liquid straw 31 stretches out outside fluid reservoir 1 can pass through moveable hollow hose 33.One end of moveable hollow hose 33 is connected to spray
On mist tube socket 2, the other end of moveable hollow hose 33 is connect with the hose coupling 323 on two fluid spray heads 32.
Specifically, in conjunction with Fig. 8, inlet channel 3221 is formed in inlet suction port 322, spraying seat 321 is adjacent to the first installation
Venthole 3216 is equipped at position 3212, one end of venthole 3216 is connected to inlet channel 3221, and venthole 3216 is another
One end is connected to central through hole 3211.As a result, when inlet suction port 322 is in aeration status, air-flow can be via inlet channel
3221, venthole 3216, central through hole 3211 are sprayed by spray orifice 3241.
Here, it should be noted that when air-flow flows through venthole 3216, it is logical along center that venthole 3216 is configured to gas
Hole 3211 moves upwards (rather than moving downward).Venthole 3216 can separate the top and bottom of central through hole 3211.
Wherein, diameter of the central through hole 3211 adjacent to one end upper end of central through hole 3211 (for example, in Fig. 8) of spray orifice 3241
It is less than the radial direction of the one end lower end of central through hole 3211 (for example, in Fig. 8) of central through hole 3211 far from spray orifice 3241 to size
Size.
Optionally, referring to figure 5 and figure 6, spraying tube socket 2 is equipped with inlet opening 22 and spout hole 23, inlet opening 22 and feed liquor
Connector 21 is connected to, and when the liquid in fluid reservoir 1 reaches flood level, liquid is flowed out by spout hole 23.
Fluid reservoir 1 can store the deionized water through liquid inlet joint 21 and the infeed of inlet opening 22, and will through hydrojet suction pipe 31
Deionized water is delivered to two fluid spray heads 32.Due to the work in a humid environment of the Hydra sprayer of CMP tool chamber 100
Make, therefore, when use, extra water can be discharged from spout hole 23, so that 1 inner product full water of fluid reservoir, when spraying can provide not
Interruption supplies water.
In addition, referring to Fig.1, fixed plate 24 is additionally provided on tube socket 2 of spraying.CMP tool chamber is convenient for by fixed plate 24 as a result,
The installation of the Hydra sprayer in room 100.
According to the Hydra sprayer 100 of the CMP tool chamber of the utility model embodiment, according to the original of two fluid sprays
Reason combines onsite application situation, is innovated in structure and function, mainly solving general atomizer passgae can not carry out arbitrarily
The problem that direction is adjusted and spread of spray is limited, the application can be oriented spray for the region for being susceptible to moisturizing dead angle
Mist moisturizing.
It is constituted and operation pair according to the Hydra sprayer of the CMP tool chamber of the utility model embodiment 100 other
All it is known for those of ordinary skill in the art, is not detailed herein.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means particular features, structures, materials, or characteristics described in conjunction with this embodiment or example
It is contained at least one embodiment or example of the utility model.In the present specification, schematic expression of the above terms
Necessarily it is directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be
It can be combined in any suitable manner in any one or more embodiments or example.In addition, without conflicting with each other, this field
Technical staff can carry out the feature of different embodiments or examples described in this specification and different embodiments or examples
In conjunction with and combination.
Although the embodiments of the present invention have been shown and described above, it is to be understood that above-described embodiment is
Illustratively, it should not be understood as limiting the present invention, those skilled in the art are in the scope of the utility model
Inside it can make changes, modifications, alterations, and variations to the above described embodiments.
Claims (10)
1. a kind of Hydra sprayer of CMP tool chamber, which is characterized in that including：
Fluid reservoir；
It sprays tube socket, the spraying tube socket is located on the fluid reservoir, and the spraying tube socket is equipped with liquid inlet joint with to described
Liquid is injected in fluid reservoir；
Spray assembly, the spray assembly are connected with the spraying tube socket, and the spray assembly includes：
One end of hydrojet suction pipe, the hydrojet suction pipe is connected to the fluid reservoir；
Two fluid spray heads, the two fluid sprays head are located at the other end of the hydrojet suction pipe with by the liquid in the fluid reservoir
Body atomization sprays.
2. the Hydra sprayer of CMP tool chamber according to claim 1, which is characterized in that the spray assembly also wraps
It includes：At least part of moveable hollow hose, the hydrojet suction pipe is located in the moveable hollow hose, and the moveable hollow is soft
One end of pipe is connected with the spraying tube socket and the other end is connected with the two fluid sprays head.
3. the Hydra sprayer of CMP tool chamber according to claim 2, which is characterized in that the spray assembly includes
At least two, at least two spray assembly arranged for interval on the spraying tube socket.
4. the Hydra sprayer of CMP tool chamber according to any one of claim 1-3, which is characterized in that described two
Fluid spray head includes：
It sprays seat, is formed with central through hole in the middle part of the spraying seat；
Inlet suction port, the inlet suction port are connected by the first installation position on the spraying seat with the spraying seat；
Hose coupling, the hose coupling are connected by the second installation position on the spraying seat with the spraying seat；
Spraying cap, the spraying cap are connected by the third installation position on the spraying seat with the spraying seat, the spraying cap
With the spray orifice being coaxially disposed with the central through hole.
5. the Hydra sprayer of CMP tool chamber according to claim 4, which is characterized in that the spraying seat with it is described
It is additionally provided with sealing element between spraying cap, is connected by screw between the spraying seat and the spraying cap.
6. the Hydra sprayer of CMP tool chamber according to claim 5, which is characterized in that the third installation position
The periphery of inner bottom surface is equipped with sealing element holding tank, and a part for the sealing element is located at outside the sealing element holding tank and only supports institute
State spraying cap；
Wherein, it is formed with the liquid for being connected to the hose coupling between the spraying cap, the sealing element and the spraying seat
Runner.
7. the Hydra sprayer of CMP tool chamber according to claim 6, which is characterized in that the spraying seat is equipped with
Intercommunicating pore, one end of the intercommunicating pore is connected to the hose coupling and the other end is connected to the flow channel for liquids.
8. the Hydra sprayer of CMP tool chamber according to claim 7, which is characterized in that the institute of the hydrojet suction pipe
It states the other end to be plugged in the intercommunicating pore, and the hydrojet suction pipe is interference fitted with the intercommunicating pore.
9. the Hydra sprayer of CMP tool chamber according to claim 4, which is characterized in that shape in the inlet suction port
At there is an inlet channel, the spraying seat is equipped with venthole at first installation position, one end of the venthole with it is described
Inlet channel is connected to and the other end is connected to the central through hole；
Wherein, radial dimension of the central through hole adjacent to one end of the spray orifice is less than the central through hole far from the spray orifice
One end radial dimension.
10. the Hydra sprayer of CMP tool chamber according to claim 4, which is characterized in that set on the spraying tube socket
There are inlet opening and spout hole, the inlet opening to be connected to the liquid inlet joint, when the liquid in the fluid reservoir reaches overflow water
When position, liquid is flowed out by the spout hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820203197.2U CN208018809U (en) | 2018-02-05 | 2018-02-05 | The Hydra sprayer of CMP tool chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820203197.2U CN208018809U (en) | 2018-02-05 | 2018-02-05 | The Hydra sprayer of CMP tool chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208018809U true CN208018809U (en) | 2018-10-30 |
Family
ID=63904352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820203197.2U Expired - Fee Related CN208018809U (en) | 2018-02-05 | 2018-02-05 | The Hydra sprayer of CMP tool chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208018809U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110732418A (en) * | 2019-11-13 | 2020-01-31 | 邓敏帅 | double-head cooling and lubricating sprayer |
| WO2021109693A1 (en) * | 2019-12-03 | 2021-06-10 | 郑州合晶硅材料有限公司 | Wax nozzle moisturizing apparatus for polishing device during polishing process of silicon wafer |
| CN116984733A (en) * | 2023-09-27 | 2023-11-03 | 蓝思智能机器人(长沙)有限公司 | Spraying system and processing device |
-
2018
- 2018-02-05 CN CN201820203197.2U patent/CN208018809U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110732418A (en) * | 2019-11-13 | 2020-01-31 | 邓敏帅 | double-head cooling and lubricating sprayer |
| WO2021109693A1 (en) * | 2019-12-03 | 2021-06-10 | 郑州合晶硅材料有限公司 | Wax nozzle moisturizing apparatus for polishing device during polishing process of silicon wafer |
| CN116984733A (en) * | 2023-09-27 | 2023-11-03 | 蓝思智能机器人(长沙)有限公司 | Spraying system and processing device |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100084 Beijing City, Haidian District Tsinghua Yuan Co-patentee after: Huahaiqingke Co.,Ltd. Patentee after: TSINGHUA University Address before: 100084 Beijing City, Haidian District Tsinghua Yuan Co-patentee before: TSINGHUA University Patentee before: TSINGHUA University |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181030 Termination date: 20210205 |