KR20160053680A

KR20160053680A - Plenum moisturizing system

Info

Publication number: KR20160053680A
Application number: KR1020140153094A
Authority: KR
Inventors: 최영기; 최영진; 전수범; 김희재; 신용한; 왕영훈; 이윤수
Original assignee: 주식회사 원방테크
Priority date: 2014-11-05
Filing date: 2014-11-05
Publication date: 2016-05-13

Abstract

The present invention relates to a direct spraying type moisturizing system. The present invention as a system installed inside an air duct section and moisturizing an indoor space of a clean room includes: a manifold wherein an injection water header and a compressed air header are installed in a longitudinal direction; nozzles arranged in the manifold to be connected to the injection water header and the compressed air header and injecting injection water and compressed air; a solenoid valve opening and closing the nozzles; and an injection water tank installed in the manifold and connected to the injection water header in order to supply the injection water to the nozzles. The nozzles are arranged in part of the air duct section, wherein the part accounts for 30-45% of the entire length of the air duct section based on an inner wall of the air duct section adjacent to FAB. According to the present invention, the nozzles are arranged in part of the air duct section toward the FAB based on the center of the air duct section, wherein the part accounts for 30-45% of the entire length of the air duct section. Therefore, an effect of optimally maintaining the moisturizing state and a relative humidity difference is obtained.

Description

{PLENUM MOISTURIZING SYSTEM}

The present invention relates to a direct atomizing water humidifying system, and more particularly, to a direct atomizing water humidifying system capable of humidifying the inside of a clean room through a direct atomizing method in a clean room by an air atomizing nozzle in a clean room operating condition requiring precise temperature and humidity control The present invention relates to a humidifying system.

A clean room is a space in which suspended particulates in the air are managed under a limited degree of cleanliness and where temperature, humidity, pressure, etc. are also managed in the space.

In particular, the outside air conditioner, which is essential equipment for maintaining the humidity and positive pressure in the clean room, is installed separately from the clean room and introduces the outside air amount which is the sum of the exhaust air amount discharged from the clean room and the air amount required to maintain the positive pressure in the clean room , And the introduced outside air is changed in accordance with processes such as heating, humidification, cooling, and dehumidification by various components such as a heating coil, a cooling coil, a dehumidifier, and a humidifier provided in the outside air conditioner so as to have a required temperature and humidity in a clean room, Room.

The direct atomizing vaporization humidifier in the clean room is a device that simultaneously atomizes the sprayed water particles that are atomized by the nozzle and cools the air and humidifies the air.

Such a technique related to direct atomization type vaporization humidifier has been proposed in patent registration No. 0924960 and patent registration No. 0848933.

Hereinafter, the direct atomization type vaporization humidifier and the direct atomization type vaporization and humidification device in the clean room disclosed in the patent registration No. 0924960 and the patent registration No. 0848933 are described briefly.

1 is a schematic block diagram of a vaporization and humidification system in Patent Registration No. 0924960 (hereinafter referred to as "Prior Art 1"). 1, the vaporization and humidification system of the prior art 1 includes a manifold 40 located in the clean room 30 and equipped with a nozzle 41 for spraying ultrapure water, An ultrapure water supply unit 60 connected to the manifold 40 to supply ultrapure water and a compressed air generating unit 70 extending to the manifold 40. The control valve control unit 50 includes a control valve control unit 50, Each manifold (40) is provided with an ultrapure water storage tank (42) for storing ultrapure water. The ultrapure water storage tank 42 is provided with a hollow ball 42a which moves up and down according to gravity so as to control the supply of ultrapure water to the ultrapure water supply pipe 61a in accordance with the vertical movement of the hollow ball 42a.

However, according to the conventional direct spray type vaporization and humidification device in the clean room according to the prior art 1, there is a need for a solution to this problem because the humidity deviates from the position of the inside of the fab to the central part depending on the positions of the nozzles.

2 is an installation perspective view of a direct atomizing vaporization and humidification device in a clean room in Patent Registration No. 0848933 (hereinafter referred to as "Prior Art 2"). As shown in FIG. 2, the direct spray type vaporization and humidification device in the clean room of the prior art 2 is provided with a plurality of spray nozzles 1 spaced a certain distance on a nozzle fixing tube 2, (2) in which a plurality of the injection nozzles (1) are installed is extruded and cut to a required length to be used in a direct atomizing vaporization humidifying device (A) in a clean room equipped with an ultrapure water storage tank The cross section of the nozzle fixing tube 2 is integrally formed with an ultrapure water supply hole 21 and a compressed air supply hole 22 for supplying compressed air and the nozzle bracket 11 A nozzle bracket fixing groove 23 and a mount fixing groove 24 for fixing the nozzle fixing tube 2 to the mounting bracket 4 are formed. At this time, the ultrapure water storage tank 3 is connected to an ultrapure water supply pipe 31 to which ultrapure water is supplied from the upper part, an ultrapure water extension hole 32 through which the ultrapure water supplied from the ultrapure water supply pipe 31 flows downward, A reservoir tank 30 having a needle valve pedestal 33 with a perforated ultrapure water outlet hole 33a and a reservoir body 34 connected to an ultrapure water discharge pipe 35 and storing ultrapure water, A float body 36a which is installed in the reservoir tank 30 and the reservoir body 34 and contains air and an upper part of the float body 36a, And a float 36 provided with a needle valve 36b which contacts the ultrapure water outflow hole 33a and opens and closes the ultrapure water outflow hole 33a.

However, according to the conventional art 2, the direct spray type vaporization humidifying device in the cleanroom also requires a solution to this problem because the humidity deviation varies from the position of the inside of the fab to the central portion depending on the arrangement position of the nozzles.

KR 0924960 B1 KR 0848933 B1

The object of the present invention is to solve the problems of the conventional art as described above, and it is an object of the present invention to provide a method of disposing nozzles within 30 to 45% of the entire wind velocity section, which is the direction of the fab (FAB) And to provide a direct atomizing water humidifying system capable of optimally maintaining the relative humidity difference.

According to an aspect of the present invention, there is provided a system for humidifying the inside of a clean room provided in a wind speed zone, wherein a spray head and a compressed air header are formed in the longitudinal direction Manifold; A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air; A solenoid valve for opening / closing the nozzle; And a spray water tank installed on the manifold and connected to the spray water header to supply spray water to the nozzle, wherein the nozzle has an air flow rate with respect to the inner wall of the air flow section adjacent to the fab (FAB) This is accomplished through a direct atomizing humidification system that is located within 30-45% of the total distance.

The solenoid valve according to the present invention may be provided for each of the nozzles so that the nozzles are individually opened or closed, a plurality of nozzles are connected to each other, and a plurality of nozzles are simultaneously or sequentially opened and closed. The whole can be simultaneously opened and closed.

According to the present invention, it is possible to arrange the nozzles within 30 to 45% of the entire wind velocity section, which is the direction of the fab (FAB) with respect to the center of the wind speed section, to maintain optimum water spray condition and relative humidity difference.

1 is a schematic configuration diagram of a vaporization and humidification system according to Prior Art 1. FIG.
2 is an installation perspective view of a direct atomization type vaporization and humidification device in a clean room according to the prior art 2. FIG.
3 is a perspective view of a direct atomizing water humidification system according to the present invention.
FIG. 4 is a schematic view showing a state in which a direct atomizing water humidifying system according to the present invention is installed in a wind interval.
5 is an image showing a stream line state according to the arrangement position of the nozzles in the direct atomization type water humidifying system according to the present invention.
FIG. 6 is an image showing a state of water spray according to the arrangement position of the nozzles in the direct atomization type water humidifying system according to the present invention.
7 is an image showing the relative humidity according to the arrangement position of the nozzles in the direct atomization type water humidifying system according to the present invention.

The terms or words used in the present specification and claims are intended to mean that the inventive concept of the present invention is in accordance with the technical idea of the present invention based on the principle that the inventor can appropriately define the concept of the term in order to explain its invention in the best way Should be interpreted as a concept.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the structure of an embodiment of a direct atomization type humidification system according to the present invention will be described in detail with reference to the drawings.

FIG. 3 is a perspective view of a direct spray water humidifying system according to the present invention, and FIG. 4 is a schematic view of a direct spray water humidifying system according to the present invention installed in a wind speed section.

According to these drawings, the direct atomization type water humidifying system 100 of the present invention functions to atomize spray water by compressed air and includes a manifold 110, a spray water connection pipe 120a, A nozzle 130, a spray water tank 140, a solenoid valve 150, and a control unit. At this time, the spray water may be ultra pure water when the direct spray water humidifying system 100 of the present invention is applied to the clean room 10.

The direct atomizing water humidifying system 100 includes a humidifier humidifier 100 for humidifying the humidifier 100 in a humid air section 12 as a passage through which the inside air of the clean room 10 moves from the lower plenum to the upper plenum of the clean room 10 Is installed. Further, a dry cooling coil 20 is installed on the lower side of the direct spray water humidifying system 100 for precise temperature control.

The manifold 110 is extruded or injection-molded in a horizontal direction using a metal material such as an aluminum material, and both ends are covered with an end cover.

At this time, the manifold 110 may be plugged with both ends or one end of the spray water header 111 and the compressed air header 112 formed therein.

Furthermore, the manifold 110 has a spray water header 111 and a compressed air header 112 separated from each other in the longitudinal direction so as to separately supply spray water and compressed air.

In this case, the header in the spray headers 111 and the compressed air header 112 refers to a structure in which a plurality of branch pipes are in contact with an enlarged portion in order to divide or collect a plurality of branch pipes.

In addition, the manifold 110 has a spray passage header 111 and a compressed air header 112 and a wiring passage 113 formed in the longitudinal direction at an inner lower end thereof.

The wiring lines 113 are electrically connected to the solenoid valves 150 for controlling the solenoid valves 150 for controlling the opening and closing of the nozzles 130, And is formed at the lower portion of the fold 110.

The end cover 114 is provided with a spray water supply pipe 141 connected to the spray water tank 140 so as to communicate with the spray water header 111 and a compressed air generating unit And a compressed air supply pipe 142 connected to the compressed air supply pipe 142 are provided.

Although the spray water supply pipe 145 and the compressed air supply pipe 146 are connected to one end of the manifold 110, the spray water supply pipe 145 and the compressed air supply pipe 146 may be installed in the middle of the manifold 110.

The spray water connection pipe 120a is fastened to the upper surface of the manifold 110 perforated per setting interval and is vertically connected to the spray water header 111 so that spray water is supplied to the nozzle 130 from the spray water tank 140. [ ).

The compressed air connection pipe 120b is fixed on the upper surface of the manifold 110 perforated per setting interval and is compressed in the compressed air supply pipe 142 while supporting the nozzle 130 and the solenoid valve 150, Air is connected to the compressed air header 112 to be supplied to the nozzle 130.

Since the spray water connection pipe 120a and the compressed air connection pipe 120b are formed to have a structure in which the spiral holes are drilled on the upper surface of the manifold 110 and are then fastened to the respective spiral holes, It is not necessary to form the nozzle bracket fixing groove on the upper surface or the side surface of the nozzle bracket 110 as in the prior art. This is because the upper surface or the side surface of the manifold 110 is flat, and thus the influence on the airflow can be prevented.

The nozzle 130 is installed at the upper end of the compressed air connection pipe 120b to simultaneously spray the spray water and compressed air. In this case, the nozzle 130 is a siphon-type nozzle for supplying an adiabatic body, and atomized water and compressed air are respectively mixed from the outside, and the liquid is sprayed by the force of compressed air to realize fine spraying. Here, the nozzle 130 is rotatably installed to adjust spray angle and degree of spray for each installation position.

At this time, in this embodiment, spray water and compressed air are externally mixed and supplied, but the present invention is not limited thereto, and internal mixing and the like are also possible.

Meanwhile, the nozzle 130 is disposed in the direction of the fab (FAB) adjacent to the wind direction section 12 with respect to the center of the wind direction section 12. More specifically, the nozzle 130 is disposed within an optimum distance (l) of 30 to 45% of the entire distance of the wind direction section 12 with respect to the inner wall of the wind direction section 12 adjacent to the fab (FAB) do. In this way, it is possible to maintain the wind flow, the spray state, and the relative humidity difference relatively optimally depending on the arrangement position of the nozzle 130.

The spray water tank 140 is installed at one end of the manifold 110 to supply the spray water to the nozzle 130 while maintaining the atmospheric pressure state and is connected to the spray water header 111 A water supply pipe 145 is provided. At this time, the spray water tank 140 includes a tank body, a connection cover, a ball, and a sealing member (not shown).

Meanwhile, the spray water tank 140 is installed at one end of the manifold 110. However, the spray water tank 140 may be installed in the middle of the manifold 110, for example.

In the tank body, a spray water is stored in an upper opening, and a connection hole is formed in the bottom surface to connect the spray water header 111 of the manifold 110 to drain the spray water.

The connection cover is fastened to the open top of the tank body and is connected to an injection tube (not shown) for injecting spray water on the top surface. Meanwhile, the tank body and the connection cover may be made of a transparent material, so that the storage amount of the spray water stored in the tank body can be recognized.

The breech is rotatably provided at the lower end of the sealing member by a lever, and is raised and lowered while being rotated in accordance with the spray water level inside the tank body.

The sealing member is lowered when the spray water level in the tank body is low and opens the hole connected to the outlet of the spray water injection tube. When the spray water level reaches the set height, The connected holes are blocked to stop the spray water supply.

The solenoid valve 150 is installed at the upper end of the compressed air connection pipe 120b and controls the opening and closing of the compressed air connection pipe 120b using the electromagnet principle when the power is applied, do.

At this time, the solenoid valve 150 is provided for each of the nozzles 130 to individually open and close the nozzles 130, or a plurality of nozzles 130 are connected to each other, and a plurality of the solenoid valves 150 are simultaneously or sequentially opened and closed The solenoid valve 150 may be provided for each of the nozzles 130 to individually open and close the nozzles 130. In this case, .

The solenoid valve 150 includes a coil, a fixed iron core, a spring, a plunger, and a connector, though not shown in the figure.

The solenoid valve 150 is provided with a power supply line branched from a branch line for supplying power to the solenoid valve 150 in each wiring passage 113.

The coil is connected to a power line and electrified by an applied power source, and the fixed iron core is formed of a metal material and fixed inside the coil.

The spring is located in the hole of the plunger whose one end is located inside the hole of the fixed iron core with the end clogged and the other end is clogged.

At this time, the spring causes the plunger, which will be described later, to always provide a restoring force in the direction of the connecting port, so that the flow path of the connecting port is always closed through the restoring force.

The plunger is formed of a metallic material and opens the flow passage of the connection port by electromagnetism when power is applied to the coil while the flow passage of the connection port is closed by the restoring force of the spring.

The connecting port is connected to the fixed core by a spiral, and the inlet and the outlet are opened or closed according to the moving direction of the plunger in a state in which the inlet and the outlet are formed inside.

The compressed air generating unit is connected to the nozzle 130 at an end of the compressed air supply pipe 146 so as to supply compressed air to the nozzle 130, although not shown in the drawing.

The control unit controls the operation of the solenoid valve 150 by detecting the temperature of a temperature sensor (not shown) installed in a clean room (not shown in the drawing) and detecting the amount of humidification of the humidification amount sensor (not shown) So that it is possible to precisely or partially control the opening and closing of the nozzle 130 of the direct spray type water humidifying system 100 directly.

Therefore, the direct spray water humidifying system 100 according to an embodiment of the present invention operates when humidification or the like in a clean room is required.

That is, when power is applied to the solenoid valve 150 through the control of the controller, the coil becomes an electromagnet, and the plunger, which has closed the flow passage of the connection port, is moved to the fixed iron core side to open the flow passage of the connection port.

Next, when the flow passage of the connection port is opened, spray water and compressed air are supplied through the spray water supply pipe 145 connected to the spray water tank 140 and the compressed air supply pipe 146 connected to the compressed air generation unit, (130).

At this time, when the water level stored in the spray water tank 140 is low, the spray water rises and the sealing member connected thereto is lowered and is continuously supplied from the spray water supply part. When the water level reaches the proper position, And the spraying water supply is stopped by lifting the connected sealing member.

FIG. 5 shows an image of the stream line state according to the arrangement position of the nozzles in the direct atomization type water humidifying system according to the present invention, and FIG. 6 shows an image of the arrangement position of the nozzles in the direct atomizing water humidifying system according to the present invention. And FIG. 7 is an image showing the relative humidity according to the arrangement position of the nozzles in the direct spray water humidifying system according to the present invention.

In these drawings, the center (C), the middle (C), and the bottom (B) of the air-flow section 12 are defined with reference to the inner wall of the air-condition section 12 adjacent to the fab FAB in the direct atomizing water humidification system 100 according to the present invention. (L) and the right side (R), the humidity distribution in the fab was analyzed.

Other analysis conditions besides the nozzle arrangement position are as follows.

- Water spray: 2.5 kg / h

- Spray interval: 400 mm interval array

- Spray particle size: about 10 micrometers

- Spray angle: 80 °

- wind speed average wind speed: 3.0 m / s

- Nozzle position: Dry cooling coil rear section

First, the stream line state according to the arrangement position of the nozzles in the direct spray type water humidifying system is examined. In FIG. 5 (a), in the direct spray type water humidifying system 100, FIG. 5 (b) shows an analysis result when the nozzle 130 is installed at the center of the air-flow section in the direct atomizing water humidifying system 100, and FIG. 5 (c) shows that the nozzle 130 in the direct atomizing water humidifying system 100 is located within 30 to 45% of the entire wind velocity section with respect to the inner wall of the wind velocity section 12 adjacent to the right side (fab) The results are shown in Fig.

When the nozzles 130 are installed on the left (L), the center (C), and the right (R) of the wind velocity section 12 in the direct spray type water humidifying system 100, .

6 (a) is a graph showing the water spray state according to the arrangement position of the nozzles in the direct spray type water humidifying system. In FIG. 6 (a), in the direct spray water humidifying system 100, 6 (b) shows the result of analysis when the nozzle 130 is installed at the center of the air-flow section in the direct atomizing water humidifying system 100, and FIG. 6 (c) is a schematic view showing the structure of the direct spray type water humidifying system 100 in which the nozzle 130 is disposed on the right side of the wind direction section (disposed within 30 to 45% of the entire wind direction section with respect to the inner wall of the wind direction section adjacent to the fab) And the results of analysis when installed.

In this case, when the nozzle 130 is installed on the right side R of the air flow section 12 in the direct atomizing water humidifying system 100, it can be seen that the air is vaporized in the air ratio section 12 and the upper plenum. Furthermore, it can be seen that condensation occurs when the nozzle 130 is positioned close to the inner wall of the wind direction section 12 adjacent to the fab.

7 (a) shows the relative humidity according to the arrangement position of the nozzles in the direct atomizing water humidifying system, and FIG. 7 (a) FIG. 7 (b) shows the result of analysis when the nozzle 130 is installed at the center of the air-flow section in the direct atomizing water humidifying system 100, and FIG. 7 (c) is a schematic view showing the structure of the direct spray type water humidifying system 100 in which the nozzle 130 is disposed on the right side of the wind direction section (disposed within 30 to 45% of the entire wind direction section with reference to the inner wall of the wind direction section adjacent to the fab) And the results of analysis when installed.

In this way, in the direct spray type water humidifying system 100, the nozzle 130 is disposed on the right side of the air flow section 12 (R: within 30 to 45% of the entire air flow section relative to the inner wall of the air flow section adjacent to the fab) The relative humidity difference a1 is set to be greater than the relative humidity difference a1 when the relative humidity difference a2 is set at the center of the wind speed section C and the relative humidity difference a2 is set at the wind speed section center C, The relative humidity difference a3 in the air-fuel ratio FAB is reduced.

For example, if the total length of the wind velocity section 12 is 4 m, it is divided into eight zones so that the respective division distances are 0.5 m, The position of the left side L is made to be 2 m with respect to the inside wall of the wind direction section 12 adjacent to the fab FAB and the position of the left side L becomes 2.5 m with respect to the inside wall of the wind direction section 12 , And the position of the right side (R) is 1.5 m from the inner wall of the wind direction section (12), a distance of 1.20 m to 1.80 m, which is 30 to 45% of the entire wind direction section distance, ).

On the other hand, the analysis results show that the condensation phenomenon occurs when the arrangement position of the nozzle 130 is less than 30% of the entire wind velocity section, and the relative humidity variation in the fab increases when the nozzle position is 40% or more.

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. This is possible.

Therefore, the scope of the present invention should not be limited by the described embodiments, but should be determined by the equivalents of the appended claims, as well as the appended claims.

100: direct humidifier humidification system
110: manifold
120a: Sprayer connector
120b: compressed air connection pipe
130: nozzle
140: Spray water tank
150: Solenoid valve

Claims

A system for humidifying the inside of a clean room,
A manifold in which a spray head and a compressed air header are respectively formed in the longitudinal direction;
A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air;
A solenoid valve for opening / closing the nozzle; And
And a spray water tank installed on the manifold and connected to the spray water header to supply spray water to the nozzle,
Wherein the nozzle is disposed within 30% to 45% of the entire air-gap section with respect to the inner wall of the air-flow section adjacent to the fab (FAB).

The method according to claim 1,
The solenoid valve may be provided for each of the nozzles so that the nozzles are individually opened or closed, a plurality of nozzles are connected to each other, and a plurality of nozzles are simultaneously or sequentially opened or closed. Direct humidifier humidification system.