KR101539578B1 - Plenum moisturizing apparatus - Google Patents

Abstract

The present invention relates to a direct spray-type water humidifying apparatus. The direct spray-type water humidifying apparatus according to the present invention humidifies the inside of a clean room, and comprises: a manifold on which a spray water header and a compressed air header are formed in a longitudinal direction; a plurality of nozzles disposed on the manifold and connected to the spray water header and the compressed air header to spray spray water and compressed air; a solenoid valve to open and close the nozzles; a connector module to connect a connector disposed on a power cable of the solenoid valve to a power supply connector installed on the manifold; and a spray water tank installed on the manifold and connected to the spray water header to supply the spray water to the nozzles. According to the present invention, when the solenoid valve needs to be replaced, the connector connected to the power cable of the solenoid valve can be easily detached from the connector connected to the manifold, and a connector connected to a power cable of a new solenoid valve can be easily connected to the connector connected to the manifold, which can reduce maintenance and repair time and manpower.

Description

{PLENUM MOISTURIZING APPARATUS}

The present invention relates to a direct atomizing water humidifying device, and more particularly, to a direct atomizing water humidifying device capable of humidifying the inside of a clean room through a direct atomizing method in a clean room by an air nozzle in a clean room operating condition requiring precise temperature and humidity control. And a humidifying device.

A clean room is a space in which suspended particulates in the air are managed under a limited degree of cleanliness and where temperature, humidity, pressure, etc. are also managed in the space.

In particular, the outside air conditioner, which is essential equipment for maintaining the humidity and positive pressure in the clean room, is installed separately from the clean room and introduces the outside air amount which is the sum of the exhaust air amount discharged from the clean room and the air amount required to maintain the positive pressure in the clean room , And the introduced outside air is changed in accordance with processes such as heating, humidification, cooling, and dehumidification by various components such as a heating coil, a cooling coil, a dehumidifier, and a humidifier provided in the outside air conditioner so as to have a required temperature and humidity in a clean room, Room.

The direct atomizing vaporization humidifier in the clean room is a device that simultaneously atomizes the sprayed water particles that are atomized by the nozzle and cools the air and humidifies the air.

A technology related to the direct atomization type vaporization humidifier has been proposed in Patent Registration No. 0915213.

Hereinafter, a control apparatus and a control method of the direct atomization type vaporization humidifier in the clean room disclosed in the patent registration No. 0915213 as a prior art will be briefly described.

1 is a perspective view illustrating installation of a direct atomizing vaporization humidifier in a clean room in Patent Registration No. 0915213 (hereinafter referred to as "prior art"). As shown in FIG. 1, the conventional direct atomization type vaporization humidifier includes a plurality of spray nozzles 10 spaced a predetermined distance apart from each other on a nozzle fixing tube 20, And the nozzle 10 is operated by the solenoid valve 40, detailed description thereof will be omitted. As is well known, solenoid valve 40 is an electrically operated device that is used to regulate the flow of fluids or gases in a fully closed or fully open manner and is typically used in place of a manual valve, Used in places. When the electricity is applied, the solenoid coil provides a strong magnetic force to lift the steel plunger inside the plunger tube, thus opening the normally closed valve orifice and allowing the flow of liquid or gas.

However, when the solenoid valve 40 fails due to an overcurrent or the like in the direct atomization type vaporization humidifier according to the related art, the failed solenoid valve 40 must be separated from the power supply line for supplying power, .

KR 0915213 B1

SUMMARY OF THE INVENTION It is an object of the present invention to solve the problems of the prior art as described above, and it is an object of the present invention to provide a solenoid valve which, when a solenoid valve is required to be replaced, And it is an object of the present invention to provide a direct atomizing water humidifying device capable of easily connecting a connector connected to a power line to a connector connected to a manifold, thereby reducing maintenance time and consuming power.

According to an aspect of the present invention, there is provided a system for humidifying an inside of a clean room, comprising: a manifold having a spray head and a compressed air header formed in a longitudinal direction; A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air; A solenoid valve for opening / closing the nozzle; A connector module provided on a power supply line of the solenoid valve to be connected to a power supply connector provided on the manifold; And a spray water tank installed on the manifold and connected to the spray water header to supply spray water to the nozzle.

Further, the connector module according to the present invention may include: a body member provided on the manifold and having a power supply connector installed therein; A connector provided on a power line of the solenoid valve to be connected to the power applying connector and having protrusions formed on opposite side walls thereof; An elevating member disposed vertically through the body member to ascend and descend, and a slope is formed on the bottom surface; A tilting surface is formed at one end so as to be horizontally moved when the elevating member is moved downward by being brought into close contact with the tilted surface of the elevating member, and when the tilting member is horizontally moved, A stopper member provided; And an elastic member interposed between the other end of the stopper member and the inner wall surface of the body member facing the other end of the stopper member to provide an elastic force to always move the stopper member in the direction of the elevation member.

In the present invention, one end of the protrusion formed on the connector and an inclined surface opposing one end of the coupling protrusion formed on the stopper member may be respectively formed.

Further, in the present invention, a separating member provided on the outer periphery of the power applying connector to separate the connector of the solenoid valve from the power applying connector at the time of lifting up; And an elastic member interposed between the bottom surface of the separating member and the bottom surface of the body member facing the bottom surface of the separating member to provide an elastic force so that the separating member always ascends.

According to the present invention, when the solenoid valve is required to be replaced, the connector connected to the power line of the solenoid valve is easily separated from the connector connected to the manifold, and the solenoid valve to be mounted is also connected to the power line, So that maintenance time and consuming force can be reduced.

1 is an installation perspective view of a direct atomizing vaporization humidifier in a clean room according to the prior art.
2 is a perspective view showing the direct spray water humidifier of the present invention.
3 is a plan view showing a connector module of another embodiment in the direct atomizing water humidifying device of the present invention.
Figs. 4 and 5 are side cross-sectional views showing the state before and after operation of the connector module of another embodiment in the direct-spray type water humidifying device of the present invention.

The terms or words used in the present specification and claims are intended to mean that the inventive concept of the present invention is in accordance with the technical idea of the present invention based on the principle that the inventor can appropriately define the concept of the term in order to explain its invention in the best way Should be interpreted as a concept.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the structure of an embodiment of a direct atomization type water humidifier according to the present invention will be described in detail with reference to the drawings.

2 is a perspective view of the direct spray water humidifier of the present invention.

According to this drawing, the direct atomizing water humidifying apparatus 100 of the present invention functions to atomize spray water by compressed air, and has a manifold 110, a spray water connection pipe 120a, A nozzle 130, a spray water tank 140, a solenoid valve 150, a connector module 160, and a controller. At this time, the spray water may be ultra pure water when the direct spray water humidifier 100 of the present invention is applied to a clean room.

The manifold 110 is extruded or injection-molded in a horizontal direction using a metal material such as an aluminum material, and both ends are covered with an end cover 113.

At this time, the manifold 110 may be plugged with both ends or one end of the spray water header 111 and the compressed air header 112 formed therein.

In addition, the manifold 110 has a spray water header 111 and a compressed air header 112 formed separately in the longitudinal direction so as to separately supply spray water and compressed air to left and right inner upper ends.

In the meantime, the header in the spray headers 111 and the compressed air header 112 refers to a structure in which a plurality of branch pipes are in contact with an enlarged portion to divide or collect a plurality of branch pipes.

The end cover 114 is provided with a spray water supply pipe 141 connected to the spray water tank 140 so as to communicate with the spray water header 111 and a compressed air generating unit And a compressed air supply pipe 142 connected to the compressed air supply pipe 142 are provided.

Although the spray water supply pipe 141 and the compressed air supply pipe 142 are connected to one end of the manifold 110, they may be installed in the middle of the manifold 110.

The spray water connection pipe 120a is fastened to the upper surface of the manifold 110 perforated per setting interval and is vertically connected to the spray water header 111 so that spray water is supplied to the nozzle 130 from the spray water tank 140. [ ).

The compressed air connection pipe 120b is fixed on the upper surface of the manifold 110 perforated per setting interval and is compressed in the compressed air supply pipe 142 while supporting the nozzle 130 and the solenoid valve 150, Air is connected to the compressed air header 112 to be supplied to the nozzle 130.

The nozzle 130 is installed at the upper end of the compressed air connection pipe 120b to simultaneously spray the spray water and compressed air. In this case, the nozzle 130 is a siphon-type nozzle for supplying an adiabatic body, and atomized water and compressed air are respectively mixed from the outside, and the liquid is sprayed by the force of compressed air to realize fine spraying. Here, the nozzle 130 is rotatably installed to adjust spray angle and degree of spray for each installation position.

At this time, in this embodiment, spray water and compressed air are externally mixed and supplied, but the present invention is not limited thereto, and internal mixing and the like are also possible.

In addition, since a plurality of the nozzles 130 are supported by the connecting members 131, it is possible to prevent the breakage of nozzles and the like caused in the process of holding the nozzles during transportation, It is also possible to prevent occurrence.

The spray water tank 140 is installed at one end of the manifold 110 to supply the spray water to the nozzle 130 while maintaining the atmospheric pressure state and is connected to the spray water header 111 A water supply pipe 141 is provided. At this time, the spray water tank 140 includes a tank body, a connection cover, a ball, and a sealing member (not shown).

In addition, the spray water tank 140 may be installed at one end of the manifold 110. However, the present invention is not limited thereto. For example, the spray water tank 140 may be installed between the nozzles 130 Any space can be installed in a spare space.

In the tank body, a spray water is stored in an upper opening, and a connection hole is formed in the bottom surface to connect the spray water header 111 of the manifold 110 to drain the spray water.

The connection cover is coupled to the open top of the tank body and is connected to an injection tube (not shown) for injecting spray water on the top surface. Meanwhile, the tank body and the connection cover may be made of a transparent material, so that the storage amount of the spray water stored in the tank body can be recognized.

The breech is rotatably provided by a lever connected from the lower end to the upper end of the sealing member and is lifted and lowered by moving the sealing member while being rotated according to the spray water level in the tank body to open and close a hole connected to the outlet of the spray water injection tube connected to the connection cover do.

That is, the lever connected to the upper surface of the boom is rotatably provided at the bottom of the connecting cover by a hinge so that the sealing member is moved up and down to open and close the hole connected to the outlet of the spray water inlet tube.

The sealing member is lowered when the spray water level in the tank body is low and opens the hole connected to the outlet of the spray water injection tube. When the spray water level reaches the set height, The connected holes are blocked to stop the spray water supply. At this time, a rubber pad or the like may be applied to the sealing member.

Although not shown in the drawings, an air passage may be provided on the mating surface of the tank body or the coupling surface of the connection cover to maintain the pressure in the spray water tank 140 at atmospheric pressure.

The solenoid valve 150 is installed at the upper end of the compressed air connection pipe 120b and controls the opening and closing of the compressed air connection pipe 120b using the electromagnet principle when the power is applied, do.

At this time, the solenoid valve 150 is provided for each of the nozzles 130 to individually open and close the nozzles 130, or a plurality of nozzles 130 are connected to each other, and a plurality of the solenoid valves 150 are simultaneously or sequentially opened and closed The solenoid valve 150 may be provided for each of the nozzles 130 to individually open and close the nozzles 130. In this case, .

The solenoid valve 150 includes a coil, a fixed iron core, a spring, a plunger, and a connector, though not shown in the figure.

The coil is connected to a power line and electrified by an applied power source, and the fixed iron core is formed of a metal material and fixed inside the coil.

The spring is located in the hole of the plunger whose one end is located inside the hole of the fixed iron core with the end clogged and the other end is clogged.

At this time, the spring causes the plunger, which will be described later, to always provide a restoring force in the direction of the connecting port, so that the flow path of the connecting port is always closed through the restoring force.

The plunger is formed of a metallic material and opens the flow passage of the connection port by electromagnetism when power is applied to the coil while the flow passage of the connection port is closed by the restoring force of the spring.

The connecting port is connected to the fixed core by a spiral, and the inlet and the outlet are opened or closed according to the moving direction of the plunger in a state in which the inlet and the outlet are formed inside.

The compressed air generating unit is connected to the nozzle 130 at an end of the compressed air supply pipe 142 so as to supply compressed air to the nozzle 130, though not shown in the drawing.

The connector module 160 includes a connector 165 provided on a power line of the solenoid valve 150 and a power supply connector 168 mounted on the manifold 110 to connect the connector 165 to the power supply line .

The connector module 160 connects the connector 165 provided on the power supply line of the solenoid valve 150 to the power supply connector 168 provided on the manifold 110 so that the solenoid valve 150 ) Can be maintained.

Although not shown in the drawing, the controller controls the operation of the solenoid valve 150 through detection of the temperature of a temperature sensor (not shown in the drawings) installed in a clean room (not shown in the drawings) and a humidification amount sensor So that the opening and closing of the nozzle 130 of the spray-type water humidifier 100 can be precisely controlled partially or totally.

Therefore, the direct spray water humidifier 100 according to an embodiment of the present invention operates when humidification or the like is required in a clean room.

That is, when power is applied to the solenoid valve 150 through the control of the controller, the coil becomes an electromagnet, and the plunger, which has closed the flow passage of the connector, is moved to the fixed iron core side to open the flow passage of the connector.

Next, when the flow passage of the connection port is opened, spray water and compressed air are supplied through a spray water supply pipe 141 connected to the spray water tank 140 and a compressed air supply pipe 142 connected to the compressed air generation unit, (130).

At this time, when the water level stored in the spray water tank 140 is low, the spray water drops down the sealing member 146 connected to the boom 145 when the boom 145 rises and the hole connected to the outlet of the spray water injection pipe is opened And when the water level reaches the proper position, the bail 145 descends and the sealing member 146 connected thereto is lifted up to close the hole connected to the outlet of the spray water injection pipe, so that the supply is stopped.

When the solenoid valve 150 is damaged due to overcurrent or the like and is required to be replaced, the connector 165 provided in the power line of the solenoid valve 150 is disconnected from the power supply connector 168 provided on the manifold 110 The connector 165 provided on the power line of the solenoid valve 150 to be mounted is connected to the power supply connector 168 provided on the manifold 110. [ The connector 165 provided on the power line of the solenoid valve 150 is connected to the power supply connector 168 provided on the manifold 110 by the connector module 160 so that the solenoid valve 150) can be maintained.

3 is a plan view of the connector module of another embodiment of the direct-atomic water humidifier of the present invention, and FIGS. 4 and 5 show the direct-atomic water humidifier of the present invention, The state is shown in side sectional view.

According to these drawings, in the direct spray type water humidifying device of the present invention, the connector module 160 of another embodiment includes the body member 161, the elevation member 162, the stopper member 163, the lateral elastic member 164, A power supply connector 165, a separating member 166, a longitudinal elastic member 167, and a connector 168. [

The body member 161 is inserted and fixed in the groove portion 110a formed in the lower portion of the upper surface of the manifold 110 where the solenoid valve 150 is installed. At this time, it is preferable that the body member 161 is inserted so that the upper surface of the body member 161 coincides with the upper surface of the manifold 110.

The elevating member 162 is vertically disposed on the upper surface of the body member 161 and is raised and lowered, and an inclined surface (preferably 45 degrees) is formed on the bottom surface.

The stopper member 163 prevents the connector 168 provided on the power supply line of the solenoid valve 150 from being separated from the power supply connector 165 provided inside the body member 161, The connector 168 provided on the power supply line of the solenoid valve 150 is separated from the power supply connector 165 provided in the body member 161. In addition,

That is, the stopper member 163 is a plate positioned in the longitudinal direction, and a through hole 163a is formed at the center thereof, and a coupling protrusion 163b is formed on both side walls of the through hole 163a, An inclined surface (preferably 45 deg.) Is formed at one end of the projection 163b in contact with the elevation member 162. [

The inclined surface formed at one end of the stopper member 163 is in close contact with the inclined surface of the elevating member 162 and horizontally moves along the inclined surface when the elevating member 162 descends.

The stopper member 163 interferes with or interrupts the movement of the connector 168 provided on the power line of the solenoid valve 150 when the horizontally moving coupling hole 163b formed at both ends of the through hole 163a moves.

The transverse elastic member 164 is interposed between the other end of the stopper member 163 and the inner wall surface of the body member 161 opposed to the stopper member 163 so as to constantly move the stopper member 163 in the direction of the lifting member 162 .

That is, even if the stopper member 163 is moved by pressing the lift member 162, the lateral elastic member 164 releases the stop force of the stopper member 163 due to the restoring force when the pushing force is released by the lift member 162, Lt; / RTI >

The power supply connector 165 is provided on the inner bottom surface of the body member 161 and is provided for each branching end of the power supply line electrically connected to each solenoid valve 150 for controlling the solenoid valve 150 individually.

The separating member 166 is provided on the outer periphery of the power applying connector 165 so as to have a rectangular shape so that the elastic force of the longitudinal elastic member 167, (168).

The longitudinal elastic member 167 is interposed between the bottom surface of the separating member 166 and the bottom surface of the opposed body member 161 to provide an elastic force such that the separating member 166 always ascends.

The connector 168 is connected to the power line terminal of the solenoid valve 150 and is connected to the power supply connector 165. At this time, the connector 168 is formed with a projection 168a on opposite side walls.

One end of the protrusion 168a formed on the connector 168 and an inclined surface opposing one end of the coupling protrusion 163b formed on the stopper member 163 are formed.

That is, when the connector 168 is connected to the power supply connector 165 provided on the bottom surface of the body member 161, the connector 168 is lowered to be formed on the opposite side walls of the connector 168 The inclined surface formed on the projection 168a of the connector 168 contacts the coupling protrusion 163a of the through hole 163a of the stopper member 163 when the protrusion 168a contacts the coupling protrusion 163b formed at both ends of the through hole 163a of the stopper member 163, The stopper member 163 gradually moves backward while moving along an inclined surface formed in the stopper member 163b. When the inclined surface formed on the protrusion 168a of the connector 168 is separated from the inclined surface formed on the coupling protrusion 163b of the through hole 163a, the stopper member 163 is lifted by the restoring force of the transverse elastic member 164 And is displaced in the direction of the member 162.

Therefore, the connector module of this embodiment is operated as follows.

First, when the solenoid valve to be replaced is to be mounted on the manifold, the upper end of the lifting member 162 is pressed.

Next, when the upper end of the elevating member 162 is pressed, the inclined surface formed on the bottom surface of the elevating member 162 is gradually pushed downwardly on the inclined surface formed at one end of the stopper member 163, The stopper member 163 moves.

Next, the stopper member 163 gradually moves so that the inclined surface formed on the protrusion 168a of the connector 168 is released from the inclined surface formed on the coupling protrusion 163b of the through hole 163a, Respectively.

At this time, the bottom surface of the connector 168 starts to be connected to the power applying connector 165 and presses the upper surface of the separating member 166, and the longitudinal elastic member 167 ).

The stopper member 163 is moved in the direction of the elevation member 162 by the restoring force of the transverse direction elastic member 164 to raise the elevation member 162 to the original position and the elastic force of the longitudinal direction elastic member 167 The coupling member 166 is raised by the coupling projection 163b but the coupling projection 163b interferes with the projection of the projection 168a of the connector 168. [

Thereafter, in order to separate the solenoid valve to be replaced from the manifold, the upper end of the lifting member 162 is pressed.

Next, when the upper end of the elevating member 162 is pressed, the inclined surface formed on the bottom surface of the elevating member 162 gradually pushes downward the inclined surface formed at one end of the stopper member 163 in close contact with the transverse elastic member 164 The stopper member 163 moves.

Next, the stopper member 163 gradually moves and the inclined surface formed on the protrusion 168a of the connector 168 is separated and separated from the inclined surface formed on the coupling protrusion 163b of the through hole 163a.

Next, the separating member 166 which is in close contact with the bottom surface of the connector 168 separates the connector 168 from the power applying connector 165 by the elastic force of the longitudinal elastic member 167.

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. This is possible.

Therefore, the scope of the present invention should not be limited by the described embodiments, but should be determined by the equivalents of the appended claims, as well as the appended claims.

100: Direct humidifier humidifier
110: manifold
120a: Sprayer connector
120b: compressed air connection pipe
130: nozzle
140: Spray water tank
150: Solenoid valve
160: Connector module

Claims (4)

In a system for humidifying the inside of a clean room,
A manifold in which a spray head and a compressed air header are respectively formed in the longitudinal direction;
A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air;
A solenoid valve for opening / closing the nozzle;
A connector module provided on a power supply line of the solenoid valve to be connected to a power supply connector provided on the manifold; And
And a spray water tank installed on the manifold and connected to the spray water header to supply spray water to the nozzle,
The connector module
A body member provided on the manifold and having a power supply connector installed therein;
A connector provided on a power line of the solenoid valve to be connected to the power applying connector and having protrusions formed on opposite side walls thereof;
An elevating member disposed vertically through the body member to ascend and descend, and a slope is formed on the bottom surface;
A tilting surface is formed at one end so as to be horizontally moved when the elevating member is moved downward by being brought into close contact with the tilted surface of the elevating member, and when the tilting member is horizontally moved, A stopper member provided; And
And an elastic member interposed between the other end of the stopper member and the inner wall surface of the body member facing the other end to provide an elastic force to always move the stopper member in the direction of the elevation member.
delete The method according to claim 1,
Wherein a protrusion formed on the connector is formed with an inclined surface opposed to one end of a coupling protrusion formed on the stopper member.
The method according to claim 1,
A separating member provided on the outer periphery of the power applying connector and configured to separate the connector of the solenoid valve from the power applying connector at the time of lifting; And
And an elastic member interposed between the bottom surface of the separating member and the bottom surface of the body member facing the bottom surface of the separating member to provide an elastic force so that the separating member always ascends.

Images