KR102353490B1 - Plenum moisturizing system - Google Patents

Abstract

The present invention relates to a direct spray-type water humidification system, wherein a plurality of nozzles for humidifying the inside of a clean room by spraying spray water and compressed air are disposed on a manifold, and the nozzles are opened and closed through a solenoid valve. A system configured to: an output unit for detecting a humidity state of the clean room and outputting a signal; a PID control unit for controlling the nozzle by performing a PID operation based on the signal received from the output unit; and an event-based control unit configured to control the nozzle when an event in which the humidity value transmitted from the output unit successively exceeds or falls below a reference value is detected.
According to the present invention, since the control element configured in addition to the existing PID control transmits the direct output control signal of the nozzle, there is an effect that precise control is possible while preventing the delay of the control in preparation for an unknown humidity increase.

Description

Direct spray type water humidification system {PLENUM MOISTURIZING SYSTEM}

The present invention relates to a direct spray-type water humidification system, and more particularly, direct spray-type water humidifying the inside of a clean room through a direct spray method in a clean room by a two-fluid nozzle under clean room operating conditions requiring precise temperature and humidity control. It is about a humidification system.

A clean room refers to a space in which airborne particulates are managed below a limited degree of cleanliness, and temperature, humidity, pressure, etc. are also managed in the space.

In particular, the outdoor air conditioner, which is an essential facility for maintaining the humidity and positive pressure in the clean room, is installed separately outside the clean room, and it introduces an amount of outside air equal to the sum of the amount of exhaust air discharged from the clean room and the amount of air required to maintain positive pressure in the clean room. , the state of the introduced outdoor air is changed through the process of heating, humidification, cooling, dehumidification, etc. by various components such as heating coil, cooling coil, dehumidifier, and humidifier provided in the outdoor air conditioner so that it becomes the temperature and humidity required in the clean room. supplied into the room.

A direct atomization vaporization humidifier in a clean room is a device that simultaneously satisfies the cooling and humidifying effect of air by contacting air with atomized water particles atomized by a nozzle.

A technology related to such a direct spray type vaporizing humidifier has been proposed in Patent Registration No. 0924960 and Patent Registration No. 0848933.

Hereinafter, as prior art, the direct spray vaporization humidifier and the direct spray vaporization humidifier in the clean room disclosed in Patent Registration No. 0924960 and Patent Registration No. 0848933 will be briefly described.

1 is a schematic configuration diagram of a vaporization humidification system in Patent Registration No. 0924960 (hereinafter referred to as 'prior art 1'). As shown in FIG. 1, the vaporization humidification system of prior art 1 is located in the clean room 30 and is equipped with a nozzle 41 for ultrapure water spraying in the manifold 40, the temperature and humidity in the clean room 30 It includes a control valve control unit 50 for checking, an ultrapure water supply unit 60 connected to the manifold 40 to supply ultrapure water, and a compressed air generating unit 70 extending to the manifold 40 . An ultrapure water storage tank 42 in which ultrapure water is stored is installed in each manifold 40 . The ultrapure water storage tank 42 is provided with a hollow ball 42a that moves up and down according to gravity to control the ultrapure water supply of the ultrapure water supply pipe 61a according to the vertical movement of the hollow ball 42a.

However, the direct spray type vaporization and humidification device in the clean room according to the prior art 1 is controlled so that the ultrapure water spraying from the nozzle 41 is stopped when the humidity value inside the clean room rises for some unknown reason. In relation to control, when the current humidity value exceeds the reference value, all the nozzles 41 are turned off, and when the current humidity value is less than the reference value, all the nozzles 41 are turned on to simply turn on the nozzle 41 according to the excess or less than the reference value. Since /OFF is controlled, a solution to the low reaction rate is required.

2 is an installation perspective view of a direct spray type vaporization and humidification device in a clean room in Patent Registration No. 0848933 (hereinafter referred to as 'prior art 2'). As shown in FIG. 2, in the direct spray type vaporization and humidification device in the clean room of the prior art 2, a plurality of spray nozzles 1 are installed to be spaced apart from each other by a predetermined distance on the fixed nozzle extension tube 2, and the end of the nozzle fixed extension tube 2 In the direct spray type vaporization and humidification device (A) in the clean room where the ultrapure water storage tank (3) is installed, the nozzle fixing extension tube (2) in which a plurality of the spray nozzles (1) are installed is extruded and cut to the required length to be used. In the cross section of the nozzle fixing extension tube (2), the ultrapure water supply hole (21) and the compressed air supply hole (22) for supplying compressed air are integrally formed, and nozzle brackets (11) are formed at the upper and lower portions of the cross section. ) and a nozzle bracket fixing groove 23 and a holder fixing groove 24 for installing a holder 4 for fixing the nozzle fixing extension tube 2 are formed. At this time, the ultrapure water storage tank 3 is connected to an ultrapure water supply pipe 31 to which ultrapure water is supplied from the upper portion, and an ultrapure water extension hole 32 through which the ultrapure water supplied from the ultrapure water supply pipe 31 flows down is drilled downward, and the ultrapure water At the lower end of the extension hole 32, an ultrapure water outlet hole 33a is perforated, the storage tank cover 30 is installed, and the ultrapure water discharge pipe 35 is connected at the bottom, and the ultrapure water is stored in the storage tank body 34 ), the reservoir cover 30 and the reservoir body 34 are installed inside the bladder body (36a) and the bladder body (36a) containing air, and the upper part is formed to protrude on the upper part of the needle valve support (33). and a float 36 provided with a needle valve 36b that contacts the ultrapure water outlet hole 33a and opens and closes the ultrapure water outlet hole 33a.

However, the direct spray type vaporization and humidification device in the clean room according to the prior art 2 also turns off all of the injection nozzles 1 when the current humidity value exceeds the reference value in relation to control, and turns on all the injection nozzles 1 when it is less than the reference value Since ON/OFF of the injection nozzle 1 is simply controlled according to the excess or less than the reference value, a solution for a low reaction rate is required.

KR 0924960 B1 KR 0848933 B1

An object of the present invention is to solve the problems of the prior art as described above, and a control element additionally configured in the existing PID control transmits a direct output control signal of the nozzle, thereby preventing control delay in preparation for an unknown humidity increase It is to provide a direct spray type water humidification system that can be precisely controlled.

According to a feature of the present invention for achieving the above object, in the present invention, a plurality of nozzles for humidifying the inside of the clean room by spraying spray water and compressed air are disposed on the manifold, and the A system configured to open and close a nozzle, comprising: an output unit for detecting a humidity state of the clean room and outputting a signal; a PID control unit for controlling the nozzle by performing a PID operation based on the signal received from the output unit; and an event-based control unit for controlling the nozzle when an event in which the humidity value transmitted from the output unit successively exceeds or falls below the reference value is detected.

In addition, the reference value in the present invention may be characterized as an upper limit value and a lower limit value.

In addition, when an event is detected, the event-based control unit in the present invention can immediately control the nozzle even before the control through the PID operation is executed.

In addition, the event-based control unit in the present invention can control the nozzle immediately when detecting an event in which the measured value exceeds the reference value range.

In addition, the event-based control unit in the present invention may turn off the nozzle after a predetermined time when the reference value is exceeded based on a specific reference value, and turn on the nozzle after a predetermined time when it is less than the reference value.

According to the present invention, since the control element additionally configured in the existing PID control transmits the direct output control signal of the nozzle, there is an effect that precise control is possible while preventing delay of control in preparation for an unknown increase in humidity.

1 is a schematic configuration diagram of a vaporization humidification system according to prior art 1.
2 is an installation perspective view of a direct spray type vaporization and humidification device in a clean room according to the prior art 2.
3 is a perspective view of a direct spray type water humidification system according to the present invention.
4 is a schematic diagram showing the configuration of an event detection control logic that can be performed by the direct spray type humidification system according to the present invention.
5 is a graph related to limit control that can be implemented in the event-based control unit among the configuration of the direct spray type water humidification system according to the present invention.

The terms or words used in the present specification and claims have meanings consistent with the technical spirit of the present invention based on the principle that the inventor can appropriately define the concept of the term in order to best describe his invention. and should be interpreted as a concept.

Throughout the specification, when a part "includes" a certain component, it means that other components may be further included, rather than excluding other components, unless otherwise stated.

Hereinafter, the configuration of an embodiment of the direct spray type water humidification system according to the present invention will be described in detail with reference to the drawings.

3 is a perspective view of a direct spray-type water humidification system according to the present invention, and FIG. 4 schematically shows the configuration of event detection control logic that can be performed by the direct spray-type water humidification system according to the present invention. 5 is a graph related to the limit control that can be implemented in the event-based control unit among the configuration of the direct spray type water humidification system according to the present invention.

According to these drawings, the direct spray type water humidification system 100 of the present invention functions to finely atomize the spray water by compressed air, and the manifold 110, the spray water connection pipe (120a), and the compressed air connection pipe 120b, a nozzle 130, a spray water tank 140, a solenoid valve 150, a control unit, and an event detection control logic. At this time, the spray water may be ultrapure water when the direct spray type water humidification system 100 of the present invention is applied to the clean room 10 .

On the other hand, in the direct spray type humidification system 100, the air inside the clean room 10 moves from the lower plenum of the clean room 10 to the upper plenum. installed. Moreover, a dry cooling coil (20) is installed under the direct spray type water humidification system 100 for the purpose of precise temperature control.

Manifold 110 is extruded or injection-formed in the horizontal direction using a metal material such as aluminum material, and both ends are covered with an end cover.

At this time, the manifold 110 may be finished with a plug at both ends or one end of the spray water header 111 and the compressed air header 112 formed therein.

Moreover, the manifold 110 is formed to separate the spray water header 111 and the compressed air header 112 in the longitudinal direction so that spray water and compressed air are separately supplied therein.

At this time, in the spray water header 111 and the compressed air header 112, a header refers to a part enlarged to divide or collect a plurality of branch pipes, and a structure contacting a plurality of branch pipes.

Moreover, the manifold 110 has a wiring passage 113 formed in the longitudinal direction separately from the spray water header 111 and the compressed air header 112 at the bottom inside.

At this time, the wiring passage 113 is a manifold to wire the power lines electrically connected to each solenoid valve 150 for individual control of the solenoid valve 150 that controls whether to open or close each nozzle 130 . This is a space formed under the fold 110 .

And the end cover 114 has a spray water supply pipe 141 connected to the spray water tank 140 to communicate with the spray water header 111, and a compressed air generator (in the drawing) to communicate with the compressed air header 112. Compressed air supply pipe 142 connected to each other (not shown) is installed through each.

Meanwhile, although the spray water supply pipe 145 and the compressed air supply pipe 146 are illustrated as being connected to one end of the manifold 110 , they may be installed in the middle of the manifold 110 .

The spray water connection pipe 120a is respectively fastened in an upright state on the upper surface of the manifold 110 punched at set intervals so that the spray water is supplied from the spray water tank 140 to the nozzle 130. The spray water header 111 ) is associated with

The compressed air connection pipe (120b) is each fastened in an upright state on the upper surface of the manifold 110 punched at set intervals to support the nozzle 130 and the solenoid valve 150 and compressed air supply pipe 142 through the compressed air supply pipe 142. It is connected to the compressed air header 112 so that air is supplied to the nozzle 130 .

In this way, since the spray water connection pipe 120a and the compressed air connection pipe 120b are provided in a structure to be fastened to each spiral hole after drilling a spiral hole in the upper surface of the manifold 110, the manifold ( 110), there is no need to form a nozzle bracket fixing groove on the upper surface or side as in the prior art. This can prevent the influence on the airflow because the upper surface or the side surface of the manifold 110 is provided flat.

The nozzle 130 is installed on the upper end of the compressed air connection pipe (120b) to spray water and compressed air at the same time. At this time, the nozzle 130 is a siphon type nozzle for supplying a two-fluid medium, and after mixing spray water and compressed air from the outside, respectively, the liquid is sprayed with the power of compressed air to implement fine spraying. Here, the nozzle 130 is rotatably installed to adjust the spraying angle and spraying degree for each installation location.

At this time, in this embodiment, spray water and compressed air are externally mixed and supplied, but the present invention is not limited thereto, and internal mixing is also possible.

The spray water tank 140 is installed at one end of the manifold 110 to supply spray water to the nozzle 130 while maintaining the atmospheric pressure state, and the spray water header 111 is connected to the nozzle 130 for spraying. A water supply pipe 145 is provided. At this time, although not shown in the drawing, the spray water tank 140 is configured to include a tank body, a connecting cover, a swim bladder, and a sealing member.

On the other hand, although the spray water tank 140 is illustrated as being installed at one end of the manifold 110 , it is not limited thereto and it can be installed in the middle of the manifold 110 .

In the tank body, spray water is stored inside the open top, and a connection hole is formed in the bottom surface to be connected to the spray water header 111 of the manifold 110 to drain the spray water.

The connection cover is fastened to the open upper end of the tank body, and is connected to an injection pipe (not shown in the drawing) for injecting spray water on the upper surface. On the other hand, the tank body and the connection cover is formed of a transparent material can recognize the amount of spray water stored therein.

The swim bladder is provided rotatably by a lever at the lower end of the sealing member to raise and lower the sealing member while rotating according to the spray water level inside the tank body.

The sealing member descends when the spray water level inside the tank body is low to open a hole connected to the outlet of the spray water injection pipe, and rises when the spray water level reaches a set height, By blocking the connected hole, the spray water supply is stopped.

A solenoid valve (Solenoid valve: 150) is installed at the upper end of the compressed air connection pipe (120b) and opens and closes the compressed air connection pipe (120b) using the principle of an electromagnet when power is applied, that is, controls the opening and closing of the nozzle (130). do.

At this time, the solenoid valve 150 is installed for each of the nozzles 130 to individually open and close the nozzles 130, or to connect a plurality of the nozzles 130 in a group and then open and close them simultaneously or sequentially. , it is possible to open and close the entire nozzle 130 at the same time after connecting the entire nozzle 130 , and in this embodiment, the solenoid valve 150 is installed for each nozzle 130 to individually open and close the nozzle 130 . exemplified by doing

Meanwhile, although not shown in the drawing, the solenoid valve 150 includes a coil, a fixed iron core, a spring, a plunger, and a connector.

In addition, a power line from which a branch line is branched to apply power to the solenoid valve 150 is located in the wiring passage 113 .

The coil is electromagnetized by the power supply connected to it, and the fixed iron core is formed of a metal material and fixed inside the coil.

One end of the spring is located inside the hole of the fixed iron core whose end is blocked, and the other end is located within the hole of the plunger whose end is blocked.

In this case, the spring always provides a restoring force in the direction of the connector to the plunger, which will be described later, so as to always seal the flow passage of the connector through the restoring force.

The plunger is formed of a metal material, and when power is applied to the coil in a state in which the flow passage of the connector is closed by the restoring force of the spring, the flow passage of the connector is opened by the electromagnet principle.

The connector is spirally fastened to the fixed iron core, and the inlet and outlet are opened or closed according to the movement direction of the plunger with the inlet and outlet formed inside.

Although not shown in the drawing, the compressed air generator has an end of the compressed air supply pipe 146 connected to the nozzle 130 to supply compressed air to the nozzle 130 .

Although not shown in the drawing, the control unit operates the solenoid valve 150 through temperature detection of a temperature sensor (not shown in the drawing) installed in the clean room (not shown in the drawing) and detection of the amount of humidification by a humidification amount detection sensor (not shown in the drawing) By individually controlling the opening and closing of the nozzle 130 of the direct spray type water humidification system 100, it is possible to partially or completely precisely control the opening and closing.

As shown in FIG. 4 , the event detection control logic is used as a method to prevent delay of control when the humidity rises for an unknown cause, and includes a PID control unit 200 , an output unit 210 , and an event-based control unit 220 .

The PID control unit 200 controls the opening and closing of the nozzle 130 by controlling whether the solenoid valve 150 is operated or not through a PID operation performed by a signal transmitted from the output unit 210 to be described later.

The output unit 210 is connected to a sensor installed on the ceiling of the clean room, detects a humidity state through the sensor, and outputs a detection signal.

The event-based control unit 220 detects an event in which the humidity value transmitted from the output unit 210 successively exceeds and/or falls below the reference value, which is the upper limit value (e1) and the lower limit value (e2), whether the solenoid valve 150 operates or not By controlling the opening and closing of the nozzle 130 is controlled. In this case, the reference value is, for example, 49.9 to 50.1%, and is not limited thereto, and can be increased or decreased.

Moreover, when an event is detected, the event-based control unit 220 controls the opening and closing of the nozzle 130 by immediately controlling whether the solenoid valve 150 is operated or not even before the control through the PID operation is executed.

And when the event-based control unit 220 detects an event in which the measured value measured every second exceeds the reference value range, immediately controls whether the solenoid valve 150 operates, thereby controlling the opening and closing of the nozzle 130 .

In addition, the event-based control unit 220 turns off the nozzle 130 by controlling whether the solenoid valve 150 operates after a predetermined time when the reference value is exceeded based on a specific reference value, and when the reference value is less than the reference value, the solenoid valve after a predetermined time By controlling whether 150 is operated, the nozzle 130 is turned on.

As a result, for example, as shown in FIG. 5, when the dew point rises by 0.1 based on 50% of the humidity value in the clean room and reaches 50.1%, one solenoid valve 150 is turned OFF, and by 0.1 When it descends and reaches 49.9%, limit control is possible by turning on one solenoid valve 150. At this time, the upper limit e1 is 50.1%, and the lower limit e2 is 49.9%.

Therefore, the direct spray type water humidification system 100 according to an embodiment of the present invention operates when humidification in a clean room is required.

That is, when power is applied to the solenoid valve 150 through the control of the controller, the coil turns into an electromagnet and the plunger, which has closed the flow passage of the connector, moves toward the fixed iron core, and the flow passage of the connector is opened.

Next, when the flow passage of the connector is opened, the spray water and compressed air are sprayed into the nozzle through the spray water supply pipe 145 connected to the spray water tank 140 and the compressed air supply pipe 146 connected to the compressed air generator. It is sprayed through 130.

At this time, when the water level stored in the spray water tank 140 is low, the bladder rises and the sealing member connected thereto is lowered to be continuously supplied from the spray water supply unit. By lifting the connected sealing member, the spray water supply is stopped.

On the other hand, if an event situation occurs in which the humidity inside the clean room is detected through a humidification sensor, etc., and the humidity measured every second exceeds the range of the reference value (49.9-50.1%), this event situation is controlled by the event-based control unit. After sensing 220, when the humidity measurement value reaches the upper limit value e1 through the control of the event-based controller 220, one solenoid valve 150 is turned OFF, and the humidity measurement value reaches the lower limit value e2 If it does, one of the solenoid valves 150 is turned on, so that it is possible to implement PID control with a quick response.

As described above, although the present invention has been described with reference to limited embodiments and drawings, the present invention is not limited to the above embodiments, and various modifications and variations from these descriptions are provided by those skilled in the art to which the present invention pertains. This is possible.

Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined by the following claims as well as the claims and equivalents.

100: direct spray type water humidification system
110: manifold
120a: spray water connector
120b: compressed air connector
130: nozzle
140: spray water tank
150: solenoid valve
200: PID control unit
210: output unit
220: event-based control unit

Claims (5)

In the system configured such that a plurality of nozzles for humidifying the inside of the clean room by spraying spray water and compressed air are disposed on the manifold, and to open and close the nozzles through a solenoid valve,
an output unit for detecting the humidity state of the clean room and outputting a signal;
a PID control unit for controlling the nozzle by performing a PID operation based on the signal received from the output unit; and
and an event-based control unit for controlling the nozzle when an event in which the humidity value transmitted from the output unit successively exceeds or falls below a reference value is detected,
When the event-based control unit detects an event in which the measured value exceeds the reference value range, the direct spray type humidification system controls the nozzle immediately.
According to claim 1,
The reference value is an upper limit value and a lower limit value of a direct spray type humidification system.
According to claim 1,
When an event is detected, the event-based control unit controls the nozzle immediately even before control through PID operation is executed.
delete According to claim 1,
The event-based control unit turns off the nozzle after a predetermined time when the reference value is exceeded based on a specific reference value, and turns on the nozzle after a predetermined time when it is less than the reference value.

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