KR101623798B1 - Plenum moisturizing apparatus - Google Patents

Abstract

The present invention relates to a direct atomizing water humidifying apparatus, and more particularly, to a direct humidifying water humidifying apparatus which comprises a manifold in which a spray water header and a compressed air header are formed in the longitudinal direction, respectively, A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air; A solenoid valve for opening / closing the nozzle; A spray water tank installed on the manifold and connected to the spray water header to supply spray water to the nozzle; And an airflow guide member provided to adjust an airflow direction inside the clean room.
According to the present invention, the air flow direction inside the clean room can be adjusted through the airflow guide member to prevent the occurrence of condensation in an obstacle such as a beam installed on the upper plenum of the clean room by the airflow during the vaporization and humidification process It is effective.

Description

{PLENUM MOISTURIZING APPARATUS}

The present invention relates to a direct atomizing water humidifying device, and more particularly, to a direct atomizing water humidifying device capable of humidifying the inside of a clean room through a direct atomizing method in a clean room by an air nozzle in a clean room operating condition requiring precise temperature and humidity control. And a humidifying device.

A clean room is a space in which suspended particulates in the air are managed under a limited degree of cleanliness and where temperature, humidity, pressure, etc. are also managed in the space.

In particular, the outside air conditioner, which is essential equipment for maintaining the humidity and positive pressure in the clean room, is installed separately from the clean room and introduces the outside air amount which is the sum of the exhaust air amount discharged from the clean room and the air amount required to maintain the positive pressure in the clean room , And the introduced outside air is changed in accordance with processes such as heating, humidification, cooling, and dehumidification by various components such as a heating coil, a cooling coil, a dehumidifier, and a humidifier provided in the outside air conditioner so as to have a required temperature and humidity in a clean room, Room.

The direct atomizing vaporization humidifier in the clean room is a device that simultaneously atomizes the sprayed water particles that are atomized by the nozzle and cools the air and humidifies the air.

Such a technique related to direct atomization type vaporization humidifier has been proposed in patent registration No. 0924960 and patent registration No. 0848933.

Hereinafter, the direct atomization type vaporization humidifier and the direct atomization type vaporization and humidification device in the clean room disclosed in the patent registration No. 0924960 and the patent registration No. 0848933 are described briefly.

1 is a schematic block diagram of a vaporization and humidification system in Patent Registration No. 0924960 (hereinafter referred to as "Prior Art 1"). 1, the vaporization and humidification system of the prior art 1 includes a manifold 40 located in the clean room 30 and equipped with a nozzle 41 for spraying ultrapure water, An ultrapure water supply unit 60 connected to the manifold 40 to supply ultrapure water and a compressed air generating unit 70 extending to the manifold 40. The control valve control unit 50 includes a control valve control unit 50, Each manifold (40) is provided with an ultrapure water storage tank (42) for storing ultrapure water. The ultrapure water storage tank 42 is provided with a hollow ball 42a which moves up and down according to gravity so as to control the supply of ultrapure water to the ultrapure water supply pipe 61a in accordance with the vertical movement of the hollow ball 42a.

However, according to the conventional direct atomizing vaporization humidifying device in the clean room according to the prior art 1, in the clean room installation structure, a condensation phenomenon occurs in the bottom of the beam installed on the upper plenum by the airflow in the vaporization humidification process, There is a problem in that it adversely affects the performance.

2 is an installation perspective view of a direct atomizing vaporization and humidification device in a clean room in Patent Registration No. 0848933 (hereinafter referred to as "Prior Art 2"). As shown in FIG. 2, the direct spray type vaporization and humidification device in the clean room of the prior art 2 is provided with a plurality of spray nozzles 1 spaced a certain distance on a nozzle fixing tube 2, (2) in which a plurality of the injection nozzles (1) are installed is extruded and cut to a required length to be used in a direct atomizing vaporization humidifying device (A) in a clean room equipped with an ultrapure water storage tank The cross section of the nozzle fixing tube 2 is integrally formed with an ultrapure water supply hole 21 and a compressed air supply hole 22 for supplying compressed air and the nozzle bracket 11 A nozzle bracket fixing groove 23 and a mount fixing groove 24 for fixing the nozzle fixing tube 2 to the mounting bracket 4 are formed. At this time, the ultrapure water storage tank 3 is connected to an ultrapure water supply pipe 31 to which ultrapure water is supplied from the upper part, an ultrapure water extension hole 32 through which the ultrapure water supplied from the ultrapure water supply pipe 31 flows downward, A reservoir tank 30 having a needle valve pedestal 33 with a perforated ultrapure water outlet hole 33a and a reservoir body 34 connected to an ultrapure water discharge pipe 35 and storing ultrapure water, A float body 36a which is installed in the reservoir tank 30 and the reservoir body 34 and contains air and an upper part of the float body 36a, And a float 36 provided with a needle valve 36b which contacts the ultrapure water outflow hole 33a and opens and closes the ultrapure water outflow hole 33a.

However, according to the conventional art 2, the direct atomizing vaporizing and humidifying device in the clean room is also installed in the upper part of the upper plateau of the clean room so that condensation is generated by the airflow in the vaporizing and humidifying process, There is a problem in that it adversely affects the performance.

KR 0924960 B1 KR 0848933 B1

An object of the present invention is to solve the problems of the prior art as described above, and it is an object of the present invention to provide an air flow guide device capable of adjusting a direction of an air flow inside a clean room through an airflow guiding member, beam, which can prevent the occurrence of a condensation phenomenon in an obstacle such as a rainbow-like beam.

According to an aspect of the present invention, there is provided a system for humidifying an inside of a clean room, comprising: a manifold having a spray head and a compressed air header formed in a longitudinal direction; A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air; A solenoid valve for opening / closing the nozzle; A spray water tank installed on the manifold and connected to the spray water header to supply spray water to the nozzle; And an airflow guide member provided to adjust an air flow direction inside the clean room.

In addition, the airflow guiding member in the present invention may be inclined to a connecting member provided to connect the nozzle.

Further, the airflow guiding member in the present invention may be disposed at an upper end or a lower end of the manifold in an inclined manner.

Further, the airflow guiding member in the present invention may be provided integrally or in combination with the manifold.

Further, the airflow guiding member in the present invention may be disposed at an angle to the connecting member, or may be disposed at an upper or lower end of the manifold.

In addition, the nozzle of the present invention is rotatable so that the angle can be changed.

According to the present invention, the air flow direction inside the clean room can be adjusted through the airflow guide member to prevent the occurrence of condensation in an obstacle such as a beam installed on the upper plenum of the clean room by the airflow during the vaporization and humidification process It is effective.

1 is a schematic configuration diagram of a vaporization and humidification system according to Prior Art 1. FIG.
2 is an installation perspective view of a direct atomization type vaporization and humidification device in a clean room according to the prior art 2. FIG.
3 is a perspective view showing a state in which the airflow guide member of one embodiment is applied to the direct spray water humidifier of the present invention.
4 is a side view showing a state in which the airflow guiding member of one embodiment is applied to the direct spray water humidifying device of the present invention.
5 is a perspective view showing a state in which an airflow guide member of another embodiment is applied to the direct spray water humidifier of the present invention.
6 is a side view showing a state in which the airflow guide member of another embodiment is applied to the direct spray water humidifier of the present invention.
7 is a side view showing a state in which the airflow guide member of another embodiment is applied to the direct spray water humidifier of the present invention.
8 is a side view showing a state in which the airflow guide member of another embodiment is applied to the direct spray water humidifier of the present invention.
9 and 10 are schematic views showing a state in which the rotational angle of the nozzle is fixed by a plurality of nuts in the direct atomizing water humidifier of the present invention.

The terms or words used in the present specification and claims are intended to mean that the inventive concept of the present invention is in accordance with the technical idea of the present invention based on the principle that the inventor can appropriately define the concept of the term in order to explain its invention in the best way Should be interpreted as a concept.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the structure of an embodiment of a direct atomization type water humidifier according to the present invention will be described in detail with reference to the drawings.

FIG. 3 is a perspective view of a direct spray water humidifier according to an embodiment of the present invention applied to the airflow guiding member of the present invention. FIG. 4 is a sectional view of a direct spray water humidifier according to an embodiment of the present invention, The state is shown in a side view.

According to these drawings, the direct atomization type water humidifying apparatus 100 of the present invention functions to atomize spray water by compressed air and includes a manifold 110, a spray water connection pipe 120a, A nozzle 130, a spray water tank 140, a solenoid valve 150, a connecting member 160, an airflow guide member 170, and a controller. At this time, the spray water may be ultra pure water when the direct spray water humidifier 100 of the present invention is applied to a clean room.

The manifold 110 is extruded or injection-molded in a horizontal direction using a metal material such as an aluminum material, and both ends are covered with an end cover 114.

At this time, the manifold 110 may be plugged with both ends or one end of the spray water header 111 and the compressed air header 112 formed therein.

At this time, the spray water header 111 and the compressed air header 112 are separately formed in the longitudinal direction so that the spray water and the compressed air are separately supplied to the right and left sides of the upper portion of the manifold 110.

In the meantime, the header in the spray headers 111 and the compressed air header 112 refers to a structure in which a plurality of branch pipes are in contact with an enlarged portion to divide or collect a plurality of branch pipes.

In addition, the manifold 110 has a spray passage header 111 and a compressed air header 112 and a wiring passage 113 formed in the longitudinal direction at an inner lower end thereof.

The wiring lines 113 are electrically connected to the solenoid valves 150 for controlling the solenoid valves 150 for controlling the opening and closing of the nozzles 130, And is formed at the lower portion of the fold 110.

The end cover 114 is provided with a spray water supply pipe 141 connected to the spray water tank 140 so as to communicate with the spray water header 111 and a compressed air generating unit And a compressed air supply pipe 142 connected to the compressed air supply pipe 142 are provided.

Although the spray water supply pipe 141 and the compressed air supply pipe 142 are connected to one end of the manifold 110, they may be installed in the middle of the manifold 110.

The spray water connection pipe 120a is fastened to the upper surface of the manifold 110 perforated per setting interval and is vertically connected to the spray water header 111 so that spray water is supplied to the nozzle 130 from the spray water tank 140. [ ).

The compressed air connection pipe 120b is fixed on the upper surface of the manifold 110 perforated per setting interval and is compressed in the compressed air supply pipe 142 while supporting the nozzle 130 and the solenoid valve 150, Air is connected to the compressed air header 112 to be supplied to the nozzle 130.

Since the spray water connection pipe 120a and the compressed air connection pipe 120b are formed to have a structure in which the spiral holes are drilled on the upper surface of the manifold 110 and are then fastened to the respective spiral holes, It is not necessary to form the nozzle bracket fixing groove on the upper surface or the side surface of the nozzle bracket 110 as in the prior art. This is because the upper surface or the side surface of the manifold 110 is flat, and thus the influence on the airflow can be prevented.

The nozzle 130 is installed at the upper end of the compressed air connection pipe 120b to simultaneously spray the spray water and compressed air. In this case, the nozzle 130 is a siphon-type nozzle for supplying an adiabatic body, and atomized water and compressed air are respectively mixed from the outside, and the liquid is sprayed by the force of compressed air to realize fine spraying. Here, the nozzle 130 is rotatably installed to adjust spray angle and degree of spray for each installation position.

At this time, in this embodiment, spray water and compressed air are externally mixed and supplied, but the present invention is not limited thereto, and internal mixing and the like are also possible.

The spray water tank 140 is installed at one end of the manifold 110 to supply the spray water to the nozzle 130 while maintaining the atmospheric pressure state and is connected to the spray water header 111 A water supply pipe 141 is provided. At this time, the spray water tank 140 includes a tank body, a connection cover, a ball, and a sealing member (not shown).

In addition, the spray water tank 140 may be installed at one end of the manifold 110. However, the present invention is not limited thereto. For example, the spray water tank 140 may be installed between the nozzles 130 Any space can be installed in a spare space.

In the tank body, a spray water is stored in an upper opening, and a connection hole is formed in the bottom surface to connect the spray water header 111 of the manifold 110 to drain the spray water.

The connection cover is coupled to the open top of the tank body and is connected to an injection tube (not shown) for injecting spray water on the top surface. Meanwhile, the tank body and the connection cover may be made of a transparent material, so that the storage amount of the spray water stored in the tank body can be recognized.

The breech is rotatably provided by a lever connected from the lower end to the upper end of the sealing member and is lifted and lowered by moving the sealing member while being rotated according to the spray water level in the tank body to open and close a hole connected to the outlet of the spray water injection tube connected to the connection cover do.

That is, the lever connected to the upper surface of the boom is rotatably provided at the bottom of the connecting cover by a hinge so that the sealing member is moved up and down to open and close the hole connected to the outlet of the spray water inlet tube.

The sealing member is lowered when the spray water level in the tank body is low and opens the hole connected to the outlet of the spray water injection tube. When the spray water level reaches the set height, The connected holes are blocked to stop the spray water supply. At this time, a rubber pad or the like may be applied to the sealing member.

Although not shown in the drawings, an air passage may be provided on the mating surface of the tank body or the coupling surface of the connection cover to maintain the pressure in the spray water tank 140 at atmospheric pressure.

The solenoid valve 150 is installed at the upper end of the compressed air connection pipe 120b and controls the opening and closing of the compressed air connection pipe 120b using the electromagnet principle when the power is applied, do.

At this time, the solenoid valve 150 is provided for each of the nozzles 130 to individually open and close the nozzles 130, or a plurality of nozzles 130 are connected to each other, and a plurality of the solenoid valves 150 are simultaneously or sequentially opened and closed The solenoid valve 150 may be provided for each of the nozzles 130 to individually open and close the nozzles 130. In this case, .

The solenoid valve 150 includes a coil, a fixed iron core, a spring, a plunger, and a connector, though not shown in the figure.

The solenoid valve 150 is provided with a power supply line branched from a branch line for supplying power to the solenoid valve 150 in each wiring passage 113.

The coil is connected to a power line and electrified by an applied power source, and the fixed iron core is formed of a metal material and fixed inside the coil.

The spring is located in the hole of the plunger whose one end is located inside the hole of the fixed iron core with the end clogged and the other end is clogged.

At this time, the spring causes the plunger, which will be described later, to always provide a restoring force in the direction of the connecting port, so that the flow path of the connecting port is always closed through the restoring force.

The plunger is formed of a metallic material and opens the flow passage of the connection port by electromagnetism when power is applied to the coil while the flow passage of the connection port is closed by the restoring force of the spring.

The connecting port is connected to the fixed core by a spiral, and the inlet and the outlet are opened or closed according to the moving direction of the plunger in a state in which the inlet and the outlet are formed inside.

The connecting member 160 is provided in the form of a bar and is connected to each of the transverse through holes formed at the lower end of the nozzle 130 so as to be held by the handler during transportation. Since the nozzle 130 is arranged in the process of being connected to each lateral through hole formed at the lower end of the nozzle 130, the rotation of the spiral-connected nozzle 130 is prevented, Can be prevented.

The airflow guide member 170 adjusts the direction of the air flow inside the clean room to prevent the occurrence of condensation in an obstacle such as a beam or the like installed on the upper plenum of the clean room by the airflow during the vaporization and humidification process .

The upper end of the airflow guiding member 170 is inserted into the connecting member 160 and the lower end of the airflow guiding member 170 is formed in an inclined plate shape so that the connecting member 160 ) To adjust the position.

Meanwhile, in the present embodiment, the airflow guide members 170 are disposed one by one between the nozzles 130 and are inclined. However, the present invention is not limited to this, and the number of the airflow guide members 170 may be increased or decreased. For example, the airflow guide members 170 may be inclined with respect to one another in each of the nozzles 130 while being inclined or facing each other in the same direction.

Further, although the airflow guide member 170 has been described as being a surface type of the refracting surface of the airflow, the present invention is not limited thereto, and may be modified into a curved surface shape or the like.

The compressed air generating unit is connected to the nozzle 130 at an end of the compressed air supply pipe 142 so as to supply compressed air to the nozzle 130, though not shown in the drawing.

Although not shown in the drawing, the controller controls the operation of the solenoid valve 150 through detection of the temperature of a temperature sensor (not shown in the drawings) installed in a clean room (not shown in the drawings) and a humidification amount sensor So that the opening and closing of the nozzle 130 of the spray-type water humidifier 100 can be precisely controlled partially or totally.

Therefore, the direct spray water humidifier 100 according to an embodiment of the present invention operates when humidification or the like is required in a clean room.

That is, when power is applied to the solenoid valve 150 through the control of the controller, the coil becomes an electromagnet, and the plunger, which has closed the flow passage of the connector, is moved to the fixed iron core side to open the flow passage of the connector.

Next, when the flow passage of the connection port is opened, spray water and compressed air are supplied through a spray water supply pipe 141 connected to the spray water tank 140 and a compressed air supply pipe 142 connected to the compressed air generation unit, (130).

At this time, if the water level stored in the spray water tank 140 is low, the spraying water is supplied when the water level rises and the hole connected to the outlet of the spray water injection pipe is opened by lowering the sealing member connected to the boom, The breech descends and the sealing member connected to the breech descends to close the hole connected to the outlet of the spray water injection tube, so that the supply is stopped.

In this case, when an obstacle such as a beam is present in the upper plenum during the vaporization and humidification in the clean room, an airflow guide member 170 is installed along the inclined air flow refracting surface so that the direction of the airflow moves away from the obstacle, The occurrence of the phenomenon can be prevented.

FIG. 5 is a perspective view showing a state in which the airflow guiding member of another embodiment is applied to the direct atomizing water humidifying device of the present invention, and FIG. 6 is a sectional view of the airflow guiding member of another embodiment The state is shown in a side view.

According to these drawings, in the direct atomizing water humidifying device of the present invention, the airflow guide member 170 of another embodiment is formed in a manner that the groove 110a is formed on the upper surface of the manifold 110 and is fixed to the groove 110a .

At this time, it is preferable that the airflow guide member 170 has a length longer than the width of the manifold 110.

In the present embodiment, the airflow guide members 170 are arranged to be inclined with respect to one another on the upper surface of the manifold 110 between the nozzles 130, but the present invention is not limited thereto. It is possible. For example, the airflow guide members 170 may be inclined with respect to one another in each of the nozzles 130 while being inclined or facing each other in the same direction.

The airflow guiding member 170 is formed on the manifold 110 by forming grooves 110a on the upper surface and being fixed to the grooves 110a. However, the present invention is not limited thereto, A groove may be formed and fixed to the groove.

Also, the airflow guide member 170 has been described as a surface having a refracting surface of an airflow, but the present invention is not limited thereto, and it can be deformed into a curved surface shape or the like.

Also, the airflow guide member 170 is coupled to the manifold 110, but may be integrally formed with the manifold 110.

Although not shown in the drawing, in the case where a plurality of grooves 110a can be formed on the upper surface of the manifold 110, an airflow guide member 170 is provided in the grooves 110a, Can be adjusted.

FIG. 7 is a side view of a direct spray water humidifier according to another embodiment of the present invention.

According to this drawing, in the direct atomizing water humidifying device of the present invention, the airflow guide member 170 of another embodiment is provided in the shape of a longitudinal tube so that it can be inserted into the connecting member 160, And the nozzle 130 can be adjusted in position and angle between the nozzles 130.

That is, the airflow guiding member 170 includes a plate that is rotated by a hinge so as to adjust the direction of the air flow on the bottom surface of the tube inserted into the connecting member 160, thereby adjusting the angle of the plate.

Since the angle of the airflow guiding member 170 is adjustable, the direction of the airflow can be adjusted so that the obstacle such as the beam installed on the upper platen can be moved away from the nozzle 130 without adjusting the position of the nozzle 130.

Although the airflow guide member 170 has been described as being of a plane shape, it may be deformed into a curved shape or the like.

8 is a side view of a direct spray water humidifier according to another embodiment of the present invention.

According to this drawing, in the direct atomizing water humidifying device of the present invention, the airflow guide member 170 of the other embodiment forms the groove 110a on the upper surface of the manifold 110, and the lower end is fixed And the upper end thereof is provided in a rotatable plate shape so that position adjustment and angle adjustment between the nozzles 130 are possible.

At this time, it is preferable that the airflow guide member 170 has a length longer than the width of the manifold 110.

In the present embodiment, the airflow guide members 170 are arranged to be inclined with respect to one another on the upper surface of the manifold 110 between the nozzles 130, but the present invention is not limited thereto. It is possible. For example, the airflow guide members 170 may be inclined with respect to one another in each of the nozzles 130 while being inclined or facing each other in the same direction.

The airflow guiding member 170 is formed on the manifold 110 by forming grooves 110a on the upper surface thereof and fixing the grooves 110a to the grooves 110a. May be formed and fixed to the groove.

Also, the airflow guide member 170 has been described as a surface having a refracting surface of an airflow, but the present invention is not limited thereto, and it can be deformed into a curved surface shape or the like.

Although the airflow guide member 170 is coupled to the manifold 110, the airflow guide member 170 may be integrally formed with the manifold 110.

Since the angle of the airflow guiding member 170 is adjustable, the direction of the airflow can be adjusted so that the obstacle such as the beam installed on the upper platen can be moved without adjusting the position between the nozzles 130.

Also, the airflow guide member 170 has been described as a surface having a refracting surface of an airflow, but the present invention is not limited thereto, and it can be deformed into a curved surface shape or the like.

Although not shown in the drawing, in the case where a plurality of grooves 110a can be formed on the upper surface of the manifold 110, an airflow guide member 170 is provided in the grooves 110a, Can be adjusted.

9 and 10 schematically show a state in which the rotational angle of the nozzle is fixed by a plurality of nuts in the direct atomizing water humidifier of the present invention.

According to these drawings, the direct atomizing water humidifying device of the present invention includes a manifold 110, a spray water connecting pipe 120a, a compressed air connecting pipe 120b, a nozzle 130, a spray water tank, a solenoid valve, The manifold 110, the spray water connection pipe 120a, the compressed air connection pipe 120b, the nozzle 130, the spray water tank, the solenoid valve, and the controller are the same as those of the previous embodiment The detailed description thereof will be omitted. In this embodiment, when the direction of airflow is adjusted through the airflow guide member in the previous embodiment, the connection member is separated from the nozzle 130 so that the nozzle 130 can rotate, And then fixes the rotation direction of the nozzle 130 by the nozzle angle fixing part.

At this time, the nozzle angle fixing part is composed of a plurality of nuts N1 and N2, and a plurality of nuts N1 and N2 are fastened to the upper spiral of the compressed air connecting pipe 120b to which the nozzle 130 is screwed When the rotation angle of the nozzle 130 is determined, the rear nut N2 is brought into close contact with the opposing face of the front nut N1 in a state where the front nut N1 is tightly fastened to the outer wall of the nozzle 130 .

Since the rotation angle of the nozzle 130 can be fixed by the plurality of nuts N1 and N2 in this manner, the spray direction of the spray water can be set independently of the airflow guide member of the above- .

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. This is possible.

Therefore, the scope of the present invention should not be limited by the described embodiments, but should be determined by the equivalents of the appended claims, as well as the appended claims.

100: Direct humidifier humidifier
110: manifold
120a: Sprayer connector
120b: compressed air connection pipe
130: nozzle
140: Spray water tank
150: Solenoid valve
160:
170: airflow guide member

Claims (6)

In a system for humidifying the inside of a clean room,
A manifold in which a spray head and a compressed air header are respectively formed in the longitudinal direction;
A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air;
A solenoid valve for opening / closing the nozzle;
A spray water tank installed on the manifold and connected to the spray water header to supply spray water to the nozzle; And
And an airflow guiding member provided to adjust an air flow direction inside the clean room,
Wherein the airflow guide member is disposed at an angle to a connecting member provided to connect the nozzle or is arranged at an upper or lower end of the manifold so as to be adjusted in angle.
The method according to claim 1,
Wherein the airflow guiding member is disposed obliquely to a connecting member provided to connect the nozzle.
The method according to claim 1,
Wherein the airflow guiding member is disposed at an upper or lower end of the manifold in an inclined manner.
The method of claim 3,
Wherein the airflow guiding member is provided integrally or in combination with the manifold.
delete The method according to claim 1,
Wherein the nozzle is rotatable so that the angle can be changed.

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