KR20160114433A - Plenum moisturizing apparatus - Google Patents

Abstract

The present invention relates to a direct injection type humidifying apparatus. The present invention provides a system for humidifying the inside of a clean room, which comprises: a manifold in which a spraying water header, a compressed air header and a wiring path are formed in a longitudinal direction; nozzles multiply arranged on the manifold to be connected to the spraying water header for spraying the spraying water and the compressed air; solenoid valves opening and closing the nozzles of the manifold; a power input line fixating member fixating a power input line of the solenoid valve at one end or both ends in the longitudinal direction of the manifold; and a spraying water tank installed at one side of the manifold and connected to the spraying water tank to supply the spraying water to the nozzles, wherein the electrically connected power lines for individually controlling the solenoid valves are arranged within the wiring path. The present invention installs the solenoid valve for each of the nozzles to be capable of individually controlling each of the nozzles by the solenoid valves during the supply of the compressed air, thereby enabling the nozzles to continue or discontinue the supply of the compressed air; even though one of the solenoid valves is out of order, enables remaining valves to be normally operated, thereby capable of supplying a portion of the compressed air; and enables the nozzles to be mounted on the manifold via a simple structure.

Description

{PLENUM MOISTURIZING APPARATUS}

The present invention relates to a direct atomizing water humidifying device, and more particularly, to a direct atomizing water humidifying device capable of humidifying the inside of a clean room through a direct atomizing method in a clean room by an air nozzle in a clean room operating condition requiring precise temperature and humidity control. And a humidifying device.

A clean room is a space in which suspended particulates in the air are managed under a limited degree of cleanliness and where temperature, humidity, pressure, etc. are also managed in the space.

In particular, the outside air conditioner, which is essential equipment for maintaining the humidity and positive pressure in the clean room, is installed separately from the clean room and introduces the outside air amount which is the sum of the exhaust air amount discharged from the clean room and the air amount required to maintain the positive pressure in the clean room , And the introduced outside air is changed in accordance with processes such as heating, humidification, cooling, and dehumidification by various components such as a heating coil, a cooling coil, a dehumidifier, and a humidifier provided in the outside air conditioner so as to have a required temperature and humidity in a clean room, Room.

The direct atomizing vaporization humidifier in the clean room is a device that atomized impeller atomized by the nozzle is in contact with the air and satisfies the air cooling and humidification effect at the same time.

Such a technique related to direct atomization type vaporization humidifier has been proposed in patent registration No. 0924960 and patent registration No. 0848933.

Hereinafter, the direct atomization type vaporization humidifier and the direct atomization type vaporization and humidification device in the clean room disclosed in the patent registration No. 0924960 and the patent registration No. 0848933 are described briefly.

1 is a schematic block diagram of a vaporization and humidification system in Patent Registration No. 0924960 (hereinafter referred to as "Prior Art 1"). 1, the vaporization and humidification system of the prior art 1 includes a manifold 40 located in the clean room 30 and equipped with a nozzle 41 for spraying ultrapure water, An ultrapure water supply unit 60 connected to the manifold 40 to supply ultrapure water and a compressed air generating unit 70 extending to the manifold 40. The control valve controller 50 includes a control valve controller 50, Each manifold (40) is provided with an ultrapure water storage tank (42) for storing ultrapure water. The ultrapure water storage tank 42 is provided with a hollow ball 42a which moves up and down according to gravity so as to control the supply of ultrapure water to the ultrapure water supply pipe 61a in accordance with the vertical movement of the hollow ball 42a.

However, in the direct spray type humidifying and humidifying apparatus in the clean room according to the prior art 1, the valve 72 provided on the compressed air pipe 71 is opened, and the nozzle 41 on the manifold 40 is moved to the clean room 30 by compressed air. The nozzles 41 are uniformly operated by the operation of the valve 72 during the process of spraying the ultra pure water in the nozzle 72. When the valve 72 fails, the operation of the nozzle 41 is stopped . Particularly, in the prior art 1, since the operation of the multiple nozzles 41 is uniformly controlled by the valve 72, fine adjustment is not possible, and there is a time and space problem in which the required humidification amount and the supplied humidification amount are different.

2 is an installation perspective view of a direct atomizing vaporization and humidification device in a clean room in Patent Registration No. 0848933 (hereinafter referred to as "Prior Art 2"). As shown in FIG. 2, the direct spray type vaporization and humidification device in the clean room of the prior art 2 is provided with a plurality of spray nozzles 1 spaced a certain distance on a nozzle fixing tube 2, (2) in which a plurality of the injection nozzles (1) are installed is extruded and cut to a required length to be used in a direct atomizing vaporization humidifying device (A) in a clean room equipped with an ultrapure water storage tank The cross section of the nozzle fixing tube 2 is integrally formed with an ultrapure water supply hole 21 and a compressed air supply hole 22 for supplying compressed air and the nozzle bracket 11 A nozzle bracket fixing groove 23 and a mount fixing groove 24 for fixing the nozzle fixing tube 2 to the mounting bracket 4 are formed. At this time, the ultrapure water storage tank 3 is connected to an ultrapure water supply pipe 31 to which ultrapure water is supplied from the upper part, an ultrapure water extension hole 32 through which the ultrapure water supplied from the ultrapure water supply pipe 31 flows downward, A reservoir tank 30 having a needle valve pedestal 33 with a perforated ultrapure water outlet hole 33a and a reservoir body 34 connected to an ultrapure water discharge pipe 35 and storing ultrapure water, A float body 36a which is installed in the reservoir tank 30 and the reservoir body 34 and contains air and an upper part of the float body 36a, And a float 36 provided with a needle valve 36b which contacts the ultrapure water outflow hole 33a and opens and closes the ultrapure water outflow hole 33a.

However, according to the prior art 2, the direct spray type vaporization and humidification device in the clean room is configured such that when the injection nozzle 1 is mounted on the nozzle fixing tube 2 by the nozzle bracket 11, Since the compressed air supplied through the compressed air supply hole 22 is supplied to each of the injection nozzles 1 during the supply of the compressed air, 1, there is a problem in that the interruption of the compressed air is not performed immediately.

KR 0924960 B1 KR 0848933 B1

SUMMARY OF THE INVENTION It is an object of the present invention to solve the problems of the prior art as described above, and it is an object of the present invention to provide a solenoid valve which can individually control a solenoid valve for each unit when supplying compressed air, So that even if any one of the plurality of solenoid valves fails, the remaining units can be normally operated. It is another object of the present invention to provide a direct spray type water humidifying device capable of mounting a nozzle on a manifold through a simple structure.

It is still another object of the present invention to provide a solenoid valve in which a power input line of a solenoid valve is fixed to an end portion of a manifold by an elastic member so that a connector connected to a power input line end and a connector connected to an external power input line can be easily connected An object of the present invention is to provide an ignitable humidifier.

According to an aspect of the present invention, there is provided an apparatus for humidifying water in a clean room, comprising: a manifold header in which a spray head, a compressed air header, and a wiring path are formed in the longitudinal direction, ; A plurality of nozzles disposed on the manifold so as to be connected to the spray head, and spraying spray water and compressed air; A solenoid valve for opening and closing a nozzle of the manifold; A power input line fixing member for fixing the power input line of the solenoid valve at one end or both ends in the longitudinal direction of the manifold; And a spray water tank installed at one side of the manifold and connected to the spray water header to supply spray water to the nozzle, wherein a power line electrically connected to each of the solenoid valves to control the solenoid valve, And a direct atomizing water humidifying device which is wired in the inside.

The nozzle of the present invention communicates with a compressed air header of the manifold through a compressed air connection pipe while communicating with a spray water header of the manifold through a fractionless connection pipe, A valve is provided to open and close the compressed air supply pipe.

The spray water tank of the present invention may include a tank body connected to the spray water header to supply spray water to the spray water header, A connection cover which covers an opened upper end of the tank body and to which the spray water supply pipe is connected; A bracket rotatably mounted on a ceiling surface of the connection cover and lifted and lowered in accordance with a spray water level; And a connection cover provided on a ceiling surface of the connection cover to shut off a hole connected to the spray water supply pipe when the float rises to stop supply of spray water and open the hole connected to the spray water supply pipe when the float falls, It is possible to supply water.

In addition, in the present invention, an air passage may be provided on a mating surface of one of the coupling surfaces of the tank body or the connection cover to maintain the pressure in the spray water tank at atmospheric pressure.

In the power input line fixing member of the present invention, holes are formed so that the spray head and the compressed air header are connected to each other. A power input line of the solenoid valve is seated between the holes, And may be formed of a plate having a power input line seating hole in which an elastic member is formed.

According to the present invention, solenoid valves are individually provided for each unit, and individually controlled by a solenoid valve for each unit when compressed air is supplied, so that instantaneous interruption of compressed air in the unit is possible, and any one of a plurality of solenoid valves It is possible to supply a part of compressed air and the nozzle can be mounted on the manifold through a simple structure.

In addition, according to the present invention, there is an effect that a wiring line is formed so that the power line can be wired, and the power line is prevented from being exposed to the outside of the manifold.

1 is a schematic configuration diagram of a vaporization and humidification system according to Prior Art 1. FIG.
2 is an installation perspective view of a direct atomization type vaporization and humidification device in a clean room according to the prior art 2. FIG.
3 is a perspective view showing the direct spray water humidifier of the present invention.
4 is a perspective view showing a state where a power input line fixing member is mounted in the direct spray water humidifier of the present invention.
5 is a side cross-sectional view illustrating an ultrapure water tank of a direct atomization type water humidifier according to an embodiment of the present invention.

The terms or words used in the present specification and claims are intended to mean that the inventive concept of the present invention is in accordance with the technical idea of the present invention based on the principle that the inventor can appropriately define the concept of the term in order to explain its invention in the best way Should be interpreted as a concept.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the structure of an embodiment of a direct atomization type water humidifier according to the present invention will be described in detail with reference to the drawings.

3 is a perspective view illustrating a direct atomizing water humidifying device of the present invention, and FIG. 4 is a perspective view showing a state where a power input line fixing member is mounted in the direct atomizing water humidifying device of the present invention .

5 is a side sectional view showing an ultrapure water tank of a direct atomization type water humidifier according to an embodiment of the present invention.

Referring to these drawings, the direct spray type water humidifier 100 of the present invention mixes sprayed water and compressed air, and then atomizes the sprayed water. The manifold 110, the power input line fixing member 113, A spray air connection pipe 120a, a compressed air connection pipe 120b, a nozzle 130, a spray water tank 140, a solenoid valve 150 and a controller. At this time, the spray water may be ultra pure water when the direct spray water humidifier 100 of the present invention is applied to a clean room.

The manifold 110 is extruded or injection-molded in a horizontal direction using an aluminum material or the like, and both ends are opened and closed with an end cover 114.

The end cover 114 is provided with a spray water supply pipe 141 connected to the spray water tank 140 so as to communicate with the spray water header 111 and a compressed air generating unit And a connector C through which both ends of a power line connected to each solenoid valve 150 are connected in bundles.

At this time, the manifold 110 is formed such that the spray water header 111 and the compressed air header 112, which are the same size so that spray water and compressed air are separately supplied to the left and right of the wiring passage 110a, are separated in the longitudinal direction .

In the meantime, the header in the spray headers 111 and the compressed air header 112 refers to a structure in which a plurality of branch pipes are in contact with an enlarged portion to divide or collect a plurality of branch pipes.

The wiring line 110a is electrically connected to the manifold 150 so that the power lines electrically connected to the solenoid valves 150 are individually connected to the solenoid valves 150 for controlling the solenoid valves 150 controlling the opening / (Not shown).

The power input line fixing member 113 is formed in an upright plate shape and has the same structure as that of the manifold in which the wiring passage 110a is formed between the spray head 111 and the compressed air header 112 And fastened and fixed to the end portion of the manifold 110 by screws or the like. Here, the power supply lines wired in the wiring passages 110a of the manifold 110 are respectively closed at both ends with the connector C.

When the power input line fixing member 113 is provided on one side or both sides of the longitudinal direction of the manifold 110 and the connector C connected to the power line of the solenoid valve 150 is fixed, The connector can be easily connected to the connector. Further, even if the connector connected to the external power input line is disconnected, the connector C connected to the power input line of the solenoid valve 150 is fixed by the power input line fixing member 113, so that the recombination is also facilitated.

The end cover 114 is provided with a spray water supply pipe 141 connected to the spray water tank 140 so as to communicate with the spray water header 111 and a compressed air generating unit And a compressed air supply pipe 142 connected to the compressed air supply pipe 142 are provided.

The spray water connection pipe 120a is fastened to the upper surface of the manifold 110 perforated per setting interval and is vertically connected to the spray water header 111 so that spray water is supplied to the nozzle 130 from the spray water tank 140. [ ).

The compressed air connection pipe 120b is connected to the upper surface of the manifold 110 which is perforated every predetermined interval to be vertically supported while supporting the nozzle 130 so that compressed air is supplied through the compressed air supply pipe 142 to the nozzle 130 Air header 112 to be supplied to the compressed air header 112. [

Since the spray water connection pipe 120a and the compressed air connection pipe 120b are formed to have a structure in which the spiral holes are drilled on the upper surface of the manifold 110 and are then fastened to the respective spiral holes, It is not necessary to form the nozzle bracket fixing groove on the upper surface or the side surface of the nozzle bracket 110 as in the prior art. This is because the upper surface or the side surface of the manifold 110 is flat, and thus the influence on the airflow can be prevented.

The nozzle 130 is installed at the upper end of the compressed air connection pipe 120b to simultaneously spray the spray water and compressed air. In this case, the nozzle 130 is a siphon-type nozzle for supplying an adiabatic body, and atomized water and compressed air are respectively mixed from the outside, and the liquid is sprayed by the force of compressed air to realize fine spraying. Here, the nozzle 130 is rotatably installed to adjust spray angle and degree of spray for each installation position.

That is, the nozzle 130 discharges compressed air (3 kg / cm ² ) from the primary atomizer at a predetermined pressure, sucks the spray water from the spray water tank 140, and causes a primary impact, do. At the same time, fine spraying is realized while the sprayed water collides with the secondary air at the secondary compressed air discharge port.

The spray water tank 140 is installed at one end of the manifold 110 to supply the spray water to the nozzle 130 while maintaining the atmospheric pressure state and is connected to the spray water header 111 A water supply pipe 141 is provided. 5, the spray water tank 140 includes a tank body 143, a connection cover 144, a bore 145, and a sealing member 146 as shown in FIG.

In the tank body 143, spray water is stored in an upper opened portion, and a connection hole is formed in the bottom surface to connect the spray water header 111 of the manifold 110 to drain the spray water.

The connection cover 144 is coupled to the open upper end of the tank body 143 and is connected to an injection pipe (not shown) for injecting spray water on the upper surface. Meanwhile, the tank body 143 and the connection cover 144 may be formed of a transparent material so as to recognize the amount of the spray water stored therein.

The bail 145 is rotatably provided by a lever connected to the upper end of the sealing member 146 and is lifted up and down by rotating the sealing member 146 in accordance with the spray water level inside the tank body 143, 144 of the spray water inlet tube.

That is, the lever connected to the upper surface of the boom 145 is rotatably provided at the bottom of the connection cover 144 by a hinge so that the sealing member 146 is raised and lowered during the rotation process, Have the connected holes open and close.

The sealing member 146 is lowered when the spray water level in the tank body 143 is low and opens a hole connected to the outlet of the spray water injection tube. When the spray water level reaches the set height, The supply of spray water is stopped by cutting off the hole connected to the outlet of the water injection tube. At this time, the sealing member 143 may be a rubber pad or the like.

Although not shown in the drawing, an air passage may be provided on a mating surface of the tank body 143 or the coupling surface of the connection cover 144 to maintain the pressure in the spray water tank 140 at atmospheric pressure .

The solenoid valve 150 is installed in a compressed air supply pipe for each unit, and controls the opening and closing of the compressed air connection pipe 120b, that is, the opening and closing of the nozzle 130 installed in the unit, .

At this time, the solenoid valve 150 is provided for each of the units, and the nozzles of the unit are individually opened or closed, or a plurality of the solenoid valves 150 are connected to each other, and a plurality of the solenoid valves 150 are simultaneously or sequentially opened and closed. And the solenoid valve 150 is provided for each of the units so that the nozzles of the unit are individually opened and closed.

At this time, the solenoid valve 150 includes a coil, a fixed iron core, a spring, a plunger, and a connector, though not shown in the drawing.

A power supply line branched from the branch line for applying power to each solenoid valve 150 is disposed in the wiring path 110a and a jumper cable connected to both sides of the manifold 110 to connect the power supply line between the manifolds 110 Can be intervened.

The coil is connected to a power line and electrified by an applied power source, and the fixed iron core is formed of a metal material and fixed inside the coil.

The spring is located in the hole of the plunger whose one end is located inside the hole of the fixed iron core with the end clogged and the other end is clogged.

At this time, the spring causes the plunger, which will be described later, to always provide a restoring force in the direction of the connecting port, so that the flow path of the connecting port is always closed through the restoring force.

The plunger is formed of a metallic material and opens the flow passage of the connection port by electromagnetism when power is applied to the coil while the flow passage of the connection port is closed by the restoring force of the spring.

The connecting port is connected to the fixed core by a spiral, and the inlet and the outlet are opened or closed according to the moving direction of the plunger in a state in which the inlet and the outlet are formed inside. At this time, the connector can function as a nozzle.

Although not shown in the figure, the compressed air supply pipe 142 is connected to the nozzle 130 at an end of the compressed air supply pipe 142 so as to supply the compressed air to the nozzle 130.

Although not shown in the drawing, the controller controls the operation of the solenoid valve 150 through detection of the temperature of a temperature sensor (not shown in the drawings) installed in a clean room (not shown in the drawings) and a humidification amount sensor So that the opening and closing of the nozzle 130 of the spray-type water humidifier 100 can be precisely controlled partially or totally.

The direct spray water humidifier 100 according to an embodiment of the present invention operates when humidification or the like is required in a clean room.

That is, when power is applied to the solenoid valve 150 through the control of the controller, the coil becomes an electromagnet, and the plunger, which has closed the flow passage of the connector, is moved to the fixed iron core side to open the flow passage of the connector.

Next, when the flow passage of the connection port is opened, spray water and compressed air are supplied through a spray water supply pipe 141 connected to the spray water tank 140 and a compressed air supply pipe 142 connected to the compressed air generation unit, (130).

At this time, when the water level stored in the spray water tank 140 is low, the spray water drops down the sealing member 146 connected to the boom 145 when the boom 145 rises and the hole connected to the outlet of the spray water injection pipe is opened And when the water level reaches the proper position, the bail 145 descends and the sealing member 146 connected thereto is lifted up to close the hole connected to the outlet of the spray water injection pipe, so that the supply is stopped.

Here, since the connector C connected to the power input line of the solenoid valve 150 is stably fixed by the power input line fixing member 113 provided at one side or both sides of the longitudinal direction of the manifold 110, The connector connected to the power input line can be easily connected to or disconnected from the connector C connected to the power input line of the solenoid valve 150.

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. This is possible.

Therefore, the scope of the present invention should not be limited by the described embodiments, but should be determined by the equivalents of the appended claims, as well as the appended claims.

100: Direct humidifier humidifier
110: manifold
113: Power input line fixing member
120a: Sprayer connector
120b: compressed air connection pipe
130: nozzle
140: Spray water tank
150: Solenoid valve

Claims (5)

In a system for humidifying the inside of a clean room,
A manifold in which a spray head, a compressed air header, and a wiring passage are formed in the longitudinal direction, respectively;
A plurality of nozzles disposed on the manifold so as to be connected to the spray head, and spraying spray water and compressed air;
A solenoid valve for opening and closing a nozzle of the manifold;
A power input line fixing member for fixing the power input line of the solenoid valve at one end or both ends in the longitudinal direction of the manifold; And
And a spray water tank installed at one side of the manifold and connected to the spray water header to supply spray water to the nozzle,
And a power line electrically connected to each of the solenoid valves to control the solenoid valve is wired in the wiring passage.
The method according to claim 1,
Wherein the nozzle communicates with a compressed air header of the manifold through a compressed air connection tube while communicating with a spray water header of the manifold through a fractionless connection pipe and the solenoid valve is provided in the compressed air supply pipe, Direct humidifier with opening and closing air supply line.
The method according to claim 1,
Wherein the spray water tank has a tank body connected to the spray water header to supply spray water to the spray water header,
A connection cover which covers an opened upper end of the tank body and to which the spray water supply pipe is connected;
A bracket rotatably mounted on a ceiling surface of the connection cover and lifted and lowered in accordance with a spray water level; And
And a water supply pipe connected to the spray water supply pipe for discharging spray water when the water supply pipe is lowered, And a sealing member for supplying water to the humidifier.
The method of claim 3,
And an air passage for keeping the pressure in the spray water tank at atmospheric pressure is provided on a mating surface of any one of the coupling surfaces of the tank body or the connection cover.
The method according to claim 1,
Wherein the power input line fixing member has a hole formed therein for connecting the spray head and the compressed air header, and a seating hole having an elastic member formed on an inner circumferential surface so that a power input line of the solenoid valve can be seated and fixed therebetween, A flat, direct atomizing water humidifier.

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