KR101548636B1 - Plenum moisturizing apparatus - Google Patents

Abstract

The present invention relates to a direct-spray humidifying device. The system for humidifying the inside of a clean room according to the present invention comprises: a manifold having a spray water header and a compressed air header formed in a lengthwise direction; multiple nozzles arranged on top of the manifold to be connected to the spray water header and the compressed air header and spraying spray water and compressed air; a solenoid valve for opening and closing the nozzles; a spray water tank installed on top of the manifold and connected to the spray water header to supply the spray water to the nozzles; and an overflow preventing pipe installed on top of the manifold to prevent the overflow of the spray water through the nozzles when the float of the spray water tank malfunctions or there is a defect in sealing. According to the present invention, the overflow preventing pipe is arranged on top of the manifold to prevent the overflow of the spray water through the nozzles when the float of the spray water tank malfunctions or there is a defect in sealing. The leakage of the spray water to a floor is prevented by collecting the spray water, which falls from the nozzles at the lower side of the manifold or the spray water tank, using a drain member.

Description

{PLENUM MOISTURIZING APPARATUS}

The present invention relates to a direct atomizing water humidifying device, and more particularly, to a direct atomizing water humidifying device capable of humidifying the inside of a clean room through a direct atomizing method in a clean room by an air nozzle in a clean room operating condition requiring precise temperature and humidity control. And a humidifying device.

A clean room is a space in which suspended particulates in the air are managed under a limited degree of cleanliness and where temperature, humidity, pressure, etc. are also managed in the space.

In particular, the outside air conditioner, which is essential equipment for maintaining the humidity and positive pressure in the clean room, is installed separately from the clean room and introduces the outside air amount which is the sum of the exhaust air amount discharged from the clean room and the air amount required to maintain the positive pressure in the clean room , And the introduced outside air is changed in accordance with processes such as heating, humidification, cooling, and dehumidification by various components such as a heating coil, a cooling coil, a dehumidifier, and a humidifier provided in the outside air conditioner so as to have a required temperature and humidity in a clean room, Room.

The direct atomizing vaporization humidifier in the clean room is a device that simultaneously atomizes the sprayed water particles that are atomized by the nozzle and cools the air and humidifies the air.

Such a technique related to direct atomization type vaporization humidifier has been proposed in patent registration No. 0924960 and patent registration No. 0848933.

Hereinafter, the direct atomization type vaporization humidifier and the direct atomization type vaporization and humidification device in the clean room disclosed in the patent registration No. 0924960 and the patent registration No. 0848933 are described briefly.

1 is a schematic block diagram of a vaporization and humidification system in Patent Registration No. 0924960 (hereinafter referred to as "Prior Art 1"). 1, the vaporization and humidification system of the prior art 1 includes a manifold 40 located in the clean room 30 and equipped with a nozzle 41 for spraying ultrapure water, An ultrapure water supply unit 60 connected to the manifold 40 to supply ultrapure water and a compressed air generating unit 70 extending to the manifold 40. The control valve control unit 50 includes a control valve control unit 50, Each manifold (40) is provided with an ultrapure water storage tank (42) for storing ultrapure water. The ultrapure water storage tank 42 is provided with a hollow ball 42a which moves up and down according to gravity so as to control the supply of ultrapure water to the ultrapure water supply pipe 61a in accordance with the vertical movement of the hollow ball 42a.

However, in the case of the direct spray type vaporization and humidification apparatus according to the prior art 1, when the hollow ball 42a of the ultrapure water storage tank 42 is broken and fails to function, the supply water level of the ultrapure water is not sensed. There is a problem that an overflow phenomenon occurs.

2 is an installation perspective view of a direct atomizing vaporization and humidification device in a clean room in Patent Registration No. 0848933 (hereinafter referred to as "Prior Art 2"). As shown in FIG. 2, the direct spray type vaporization and humidification device in the clean room of the prior art 2 is provided with a plurality of spray nozzles 1 spaced a certain distance on a nozzle fixing tube 2, (2) in which a plurality of the injection nozzles (1) are installed is extruded and cut to a required length to be used in a direct atomizing vaporization humidifying device (A) in a clean room equipped with an ultrapure water storage tank The cross section of the nozzle fixing tube 2 is integrally formed with an ultrapure water supply hole 21 and a compressed air supply hole 22 for supplying compressed air and the nozzle bracket 11 A nozzle bracket fixing groove 23 and a mount fixing groove 24 for fixing the nozzle fixing tube 2 to the mounting bracket 4 are formed. At this time, the ultrapure water storage tank 3 is connected to an ultrapure water supply pipe 31 to which ultrapure water is supplied from the upper part, an ultrapure water extension hole 32 through which the ultrapure water supplied from the ultrapure water supply pipe 31 flows downward, A reservoir tank 30 having a needle valve pedestal 33 with a perforated ultrapure water outlet hole 33a and a reservoir body 34 connected to an ultrapure water discharge pipe 35 and storing ultrapure water, A float body 36a which is installed in the reservoir tank 30 and the reservoir body 34 and contains air and an upper part of the float body 36a, And a float 36 provided with a needle valve 36b which contacts the ultrapure water outflow hole 33a and opens and closes the ultrapure water outflow hole 33a.

However, the direct spray type vaporization and humidification device in the clean room according to the prior art 2 also fails to detect the supply water level of the ultrapure water when the burea 36a is broken and fails to function, so that overflow phenomenon occurs due to continuous supply of ultrapure water There was a problem.

KR 0924960 B1 KR 0848933 B1

The object of the present invention is to overcome the problems of the prior art as described above, and it is an object of the present invention to provide an overflow prevention tube on a manifold, and to overflow the spray water tank The present invention also provides a direct atomization type water humidifying device that prevents the water from leaking to the floor by collecting the spray water dropped from the nozzle or the spray water tank by the drain member on the lower side of the manifold.

According to an aspect of the present invention, there is provided a system for humidifying an inside of a clean room, comprising: a manifold having a spray head and a compressed air header formed in a longitudinal direction; A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air; A solenoid valve for opening / closing the nozzle; A spray water tank installed on the manifold and connected to the spray water header to supply spray water to the nozzle; And an overflow prevention pipe installed on the manifold to prevent an overflow of the spray water through the nozzle when the spray water tank is broken or sealed. do.

In addition, the present invention may further include a drain member installed below the manifold to collect spray water from the spray water tank or the nozzle.

In addition, the overflow prevention tube of the present invention may be bent so that one end thereof is connected to the spray water header and the other end thereof is positioned within the drain member.

Further, in the overflow preventing pipe according to the present invention, the overflow level may be formed at the same height as the maximum level in the nozzle.

In addition, the overflow preventing pipe in the present invention can be characterized in that the height can be adjusted.

According to the present invention, there is provided an overflow prevention pipe on a manifold to prevent overflow of spray water through a nozzle of a spray water tank or an abnormal sealing of the spray water tank, There is an effect of collecting the spray water falling from the tank by the drain member and preventing the water from leaking to the floor.

1 is a schematic configuration diagram of a vaporization and humidification system according to Prior Art 1. FIG.
2 is an installation perspective view of a direct atomization type vaporization and humidification device in a clean room according to the prior art 2. FIG.
3 is an assembled perspective view of a direct spray water humidifier according to an embodiment of the present invention.
4 is a side cross-sectional view illustrating a spray water tank of a direct spray water humidifier according to an embodiment of the present invention.
FIG. 5 is an enlarged view showing an overflow prevention pipe of another embodiment in a direct spray water humidifier according to an embodiment of the present invention. FIG.

The terms or words used in the present specification and claims are intended to mean that the inventive concept of the present invention is in accordance with the technical idea of the present invention based on the principle that the inventor can appropriately define the concept of the term in order to explain its invention in the best way Should be interpreted as a concept.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the structure of an embodiment of a direct atomization type water humidifier according to the present invention will be described in detail with reference to the drawings.

FIG. 3 is a perspective view of a direct spray type water humidifier according to an embodiment of the present invention. FIG. 4 is a side cross-sectional view of a spray water tank of a direct spray water humidifier according to an embodiment of the present invention. Respectively.

According to these drawings, the direct atomization type water humidifying apparatus 100 of the present invention functions to atomize spray water by compressed air and includes a manifold 110, a spray water connection pipe 120a, A nozzle 130, a spray water tank 140, a solenoid valve 150, a drain member 160, an overflow prevention pipe 170, and a control unit. At this time, the spray water may be ultra pure water when the direct spray water humidifier 100 of the present invention is applied to a clean room.

The manifold 110 is extruded or injection-molded in a horizontal direction using a metal material such as an aluminum material, and both ends are covered with an end cover.

At this time, the manifold 110 may be plugged with both ends or one end of the spray water header 111 and the compressed air header 112 formed therein.

The manifold 110 has a spray water header 111 and a compressed air header 112 separated from each other in the longitudinal direction so as to separately supply spray water and compressed air.

In this case, the header in the spray headers 111 and the compressed air header 112 refers to a structure in which a plurality of branch pipes are in contact with an enlarged portion in order to divide or collect a plurality of branch pipes.

The end cover includes a spray water supply pipe 145 connected to the spray water tank 140 so as to communicate with the spray water header 111 and a compressed air generator (not shown in the drawing) And a compressed air supply pipe 146 connected to the compressed air supply pipe 146, respectively.

Although the spray water supply pipe 145 and the compressed air supply pipe 146 are connected to one end of the manifold 110, the spray water supply pipe 145 and the compressed air supply pipe 146 may be installed in the middle of the manifold 110.

The spray water connection pipe 120a is fastened to the upper surface of the manifold 110 perforated per setting interval and is vertically connected to the spray water header 111 so that spray water is supplied to the nozzle 130 from the spray water tank 140. [ ).

The compressed air connection pipe 120b is fixed on the upper surface of the manifold 110 perforated per setting interval and is compressed in the compressed air supply pipe 142 while supporting the nozzle 130 and the solenoid valve 150, Air is connected to the compressed air header 112 to be supplied to the nozzle 130.

Since the spray water connection pipe 120a and the compressed air connection pipe 120b are formed to have a structure in which the spiral holes are drilled on the upper surface of the manifold 110 and are then fastened to the respective spiral holes, It is not necessary to form the nozzle bracket fixing groove on the upper surface or the side surface of the nozzle bracket 110 as in the prior art. This is because the upper surface or the side surface of the manifold 110 is flat, and thus the influence on the airflow can be prevented.

The nozzle 130 is installed at the upper end of the compressed air connection pipe 120b to simultaneously spray the spray water and compressed air. In this case, the nozzle 130 is a siphon-type nozzle for supplying an adiabatic body, and atomized water and compressed air are respectively mixed from the outside, and the liquid is sprayed by the force of compressed air to realize fine spraying. Here, the nozzle 130 is rotatably installed to adjust spray angle and degree of spray for each installation position.

At this time, in this embodiment, spray water and compressed air are externally mixed and supplied, but the present invention is not limited thereto, and internal mixing and the like are also possible.

The spray water tank 140 is installed at one end of the manifold 110 to supply the spray water to the nozzle 130 while maintaining the atmospheric pressure state and is connected to the spray water header 111 A water supply pipe 141 is provided. At this time, the spray water tank 140 includes a tank body, a connection cover, a ball, and a sealing member (not shown).

In addition, the spray water tank 140 may be installed at one end of the manifold 110. However, the present invention is not limited thereto. For example, the spray water tank 140 may be installed between the nozzles 130 Any space can be installed in a spare space.

In the tank body, a spray water is stored in an upper opening, and a connection hole is formed in the bottom surface to connect the spray water header 111 of the manifold 110 to drain the spray water.

The connection cover is fastened to the open top of the tank body and is connected to an injection tube (not shown) for injecting spray water on the top surface. Meanwhile, the tank body and the connection cover may be made of a transparent material, so that the storage amount of the spray water stored in the tank body can be recognized.

The breech is rotatably provided at the lower end of the sealing member by a lever, and is raised and lowered while being rotated in accordance with the spray water level inside the tank body.

The sealing member is lowered when the spray water level in the tank body is low and opens the hole connected to the outlet of the spray water injection tube. When the spray water level reaches the set height, The connected holes are blocked to stop the spray water supply.

The solenoid valve 150 is installed at the upper end of the compressed air connection pipe 120b and controls the opening and closing of the compressed air connection pipe 120b using the electromagnet principle when the power is applied, do.

At this time, the solenoid valve 150 is provided for each of the nozzles 130 to individually open and close the nozzles 130, or a plurality of nozzles 130 are connected to each other, and a plurality of the solenoid valves 150 are simultaneously or sequentially opened and closed The solenoid valve 150 may be provided for each of the nozzles 130 to individually open and close the nozzles 130. In this case, .

The solenoid valve 150 includes a coil, a fixed iron core, a spring, a plunger, and a connector, though not shown in the figure.

The coil is connected to a power line and electrified by an applied power source, and the fixed iron core is formed of a metal material and fixed inside the coil.

The spring is located in the hole of the plunger whose one end is located inside the hole of the fixed iron core with the end clogged and the other end is clogged.

At this time, the spring causes the plunger, which will be described later, to always provide a restoring force in the direction of the connecting port, so that the flow path of the connecting port is always closed through the restoring force.

The plunger is formed of a metallic material and opens the flow passage of the connection port by electromagnetism when power is applied to the coil while the flow passage of the connection port is closed by the restoring force of the spring.

The connecting port is connected to the fixed core by a spiral, and the inlet and the outlet are opened or closed according to the moving direction of the plunger in a state in which the inlet and the outlet are formed inside.

The compressed air generating unit is connected to the nozzle 130 at an end of the compressed air supply pipe 142 so as to supply compressed air to the nozzle 130, though not shown in the drawing.

The drain member 160 is disposed below the manifold 110 in a state where the drain member 160 extends more than the length of the manifold 110 and the flow rate of the sprayed water overflows or the malfunction of the solenoid valve 150, When the spray water leaks from the nozzle 130 due to breakage of the nozzle 130 or the like and collects the spray water falling from the nozzle 130 and connects them to the drain flow path do.

The overflow prevention pipe 170 is provided on the upper surface of the manifold 110 so as to communicate with the spray water header 111 to prevent overflow of spray water through the nozzle 130 when the spray water tank 140 is broken or sealed. (Over flow).

That is, the overflow prevention pipe 170 has a vent formed at the upper end communicating with one end of the overflow prevention pipe 170 while being connected to the spray water header 111 in a standing manner, and the other end of the overflow prevention pipe 170 is vertically positioned inside the drain member 160 And the upper end of the upright tube and the upright tube positioned inside the drain member 160 are bent and formed to communicate with each other.

Since the overflow prevention pipe 170 is formed at the same height as the maximum water level in the nozzle 130, when the spray water is discharged through the nozzle 130, the spray water connection pipe 120a And the water level in the spray water tank 140 rises, the water is drained into the drain member 160 while exceeding the overflow level h.

At this time, a leakage sensor (not shown in the drawing) may be installed in the middle of the drain passage to detect whether the spray water flows.

The control unit controls the operation of the solenoid valve 150 by detecting the temperature of a temperature sensor (not shown) installed in a clean room (not shown in the drawing) and detecting the amount of humidification of the humidification amount sensor (not shown) So that the opening and closing of the nozzle 130 of the direct spray type water humidifying apparatus 100 can be precisely controlled in part or in whole.

Therefore, the direct spray water humidifier 100 according to an embodiment of the present invention operates when humidification or the like is required in a clean room.

That is, when power is applied to the solenoid valve 150 through the control of the control unit, the coil becomes the electromagnet, and the plunger, which has closed the flow passage of the connection port, is moved to the fixed iron core 152 side to open the flow passage of the connection port.

Next, when the flow passage of the connection port is opened, spray water and compressed air are supplied through a spray water supply pipe 141 connected to the spray water tank 140 and a compressed air supply pipe 142 connected to the compressed air generation unit, (130).

At this time, when the water level stored in the spray water tank 140 is low, the spray water rises and the sealing member connected thereto is lowered and is continuously supplied from the spray water supply part. When the water level reaches the proper position, And the spraying water supply is stopped by lifting the connected sealing member.

Here, in the case where an abnormal phenomenon such as unsteady operation or malfunction of the spray water tank 140 occurs, even if the water level of the spray water reaches the stop water level, the supply does not stop but flows continuously, 170 to the drain member 160, thereby preventing an overflow phenomenon.

FIG. 5 is an enlarged view of an overflow preventing pipe of another embodiment in a direct atomizing water humidifying device according to an embodiment of the present invention.

According to this drawing, in the direct spray water humidifier according to another embodiment of the present invention, the overflow preventing pipe includes a fixing pipe member 171, a steel pipe member 172, a height adjusting member 173 and a nut.

The fixing tube member 171 has a lower end threadedly connected to the spray water header 111 on the upper surface of the manifold 110 and a spiral formed on the upper end thereof so as to be spirally engaged with a lower end of a height adjusting member 173 described later.

One end of the ascending pipe member 172 is connected to the upper end of the height adjusting member 173 so as to be raised or lowered by the rotation of the height adjusting member 173 and the other end is connected to the drain member 160 .

The screw thread formed on the upper inner circumferential surface of the fixed pipe member 171 and the screw thread formed on the inner circumferential surface of the one end side of the inlet side of the elevating pipe member 172 are different from each other in the direction of rotation and the rotational direction of the height adjusting member 173 interposed therebetween And moves upward or downward at the same time. At this time, since the fixing pipe member 171 is fixed on the upper surface of the manifold 110, only the height of the steel pipe member 172 is adjusted when the height adjusting member 173 rotates.

The height adjusting member 173 is spirally engaged between the fixing pipe member 171 and the elevating pipe member 172 so as to move the elevating pipe member 172 up and down according to the rotating direction. At this time, spirals having spiral forming directions opposite to each other are formed on the upper and lower ends of the height adjusting member 173.

The nut is fastened to the spiral formed at the upper and lower ends of the height adjusting member 173 and the fixing pipe member 171 is fixed to the fixing pipe member 171 so as to fix the position of the fixing pipe member 171 and the steel pipe member 172, And the bottom surface of the exit side of the above-mentioned elevating pipe member 172.

Therefore, when the height adjusting member 173 is rotated, the fixing pipe member 171 having the helical direction reversely coupled with the rotating direction is moved upward or downward by the lifting pipe member 172 which is not fixed among the lifting pipe member 172, .

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. This is possible.

Therefore, the scope of the present invention should not be limited by the described embodiments, but should be determined by the equivalents of the appended claims, as well as the appended claims.

100: Direct humidifier humidifier
110: manifold
120a: Sprayer connector
120b: compressed air connection pipe
130: nozzle
140: Spray water tank
150: Solenoid valve
160: drain member
170: Overflow prevention pipe

Claims (5)

In a system for humidifying the inside of a clean room,
A manifold in which a spray head and a compressed air header are respectively formed in the longitudinal direction;
A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air;
A solenoid valve for opening / closing the nozzle;
A spray water tank installed on the manifold and connected to the spray water header to supply spray water to the nozzle;
An overflow prevention pipe installed on the manifold to prevent an overflow of spray water through the nozzle when the spray water tank is broken or sealed; And
A drain member installed below the manifold and collecting spray water leaking from the spray water tank or the nozzle;
And wherein the overflow protection tube is one end is connected to the number of spray header and the other end is bent so as to be located in the formed of the drain member is ignorant Direct the humidifier.
delete delete The method according to claim 1,
Wherein the overflow prevention tube is formed such that the overflow level is the same as the maximum level in the nozzle.
The method according to claim 1,
The overflow prevention pipe is a direct humidifying type humidifying device capable of adjusting the height.

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