KR101594810B1 - Plenum moisturizing system - Google Patents

Abstract

The present invention relates to a direct spraying type water humidification system. The present invention relates to a system humidifying the inside of a clean room and comprising: a manifold where a spraying water header and a compressed air header are formed in a longitudinal direction, respectively; a plurality of nozzles arranged on the manifold to connect the spraying water header and the compressed air header to spray compressed air and spraying water; a solenoid valve opening and closing the nozzle; a spraying water tank installed on the manifold to be connected to the spraying water header to supply the spraying water to the nozzle; and a drain member installed on a lower side of the manifold in the longitudinal direction to collect the spraying water leaked from the nozzle. According to the present invention, the present invention can prevent water from being leaked to a floor without affecting speed and pressure distributions in accordance with an arrangement position while the drain member is arranged on the lower side of the manifold.

Description

{PLENUM MOISTURIZING SYSTEM}

The present invention relates to a direct atomizing water humidifying device, and more particularly, to a direct atomizing water humidifying device capable of humidifying the inside of a clean room through a direct atomizing method in a clean room by an air nozzle in a clean room operating condition requiring precise temperature and humidity control. And a humidifying device.

A clean room is a space in which suspended particulates in the air are managed under a limited degree of cleanliness and where temperature, humidity, pressure, etc. are also managed in the space.

In particular, the outside air conditioner, which is essential equipment for maintaining the humidity and positive pressure in the clean room, is installed separately from the clean room and introduces the outside air amount which is the sum of the exhaust air amount discharged from the clean room and the air amount required to maintain the positive pressure in the clean room , And the introduced outside air is changed in accordance with processes such as heating, humidification, cooling, and dehumidification by various components such as a heating coil, a cooling coil, a dehumidifier, and a humidifier provided in the outside air conditioner so as to have a required temperature and humidity in a clean room, Room.

The direct atomizing vaporization humidifier in the clean room is a device that simultaneously atomizes the sprayed water particles that are atomized by the nozzle and cools the air and humidifies the air.

Such a technique related to direct atomization type vaporization humidifier has been proposed in patent registration No. 0924960 and patent registration No. 0848933.

Hereinafter, the direct atomization type vaporization humidifier and the direct atomization type vaporization and humidification device in the clean room disclosed in the patent registration No. 0924960 and the patent registration No. 0848933 are described briefly.

1 is a schematic block diagram of a vaporization and humidification system in Patent Registration No. 0924960 (hereinafter referred to as "Prior Art 1"). 1, the vaporization and humidification system of the prior art 1 includes a manifold 40 located in the clean room 30 and equipped with a nozzle 41 for spraying ultrapure water, An ultrapure water supply unit 60 connected to the manifold 40 to supply ultrapure water and a compressed air generating unit 70 extending to the manifold 40. The control valve control unit 50 includes a control valve control unit 50, Each manifold (40) is provided with an ultrapure water storage tank (42) for storing ultrapure water. The ultrapure water storage tank 42 is provided with a hollow ball 42a which moves up and down according to gravity so as to control the supply of ultrapure water to the ultrapure water supply pipe 61a in accordance with the vertical movement of the hollow ball 42a.

However, in the direct spray type vaporization and humidification apparatus according to the prior art 1, when ultrapure water is not sprayed in the nozzle 41, the ultrapure water leaks, and the apparatus is required to solve the problem.

2 is an installation perspective view of a direct atomizing vaporization and humidification device in a clean room in Patent Registration No. 0848933 (hereinafter referred to as "Prior Art 2"). As shown in FIG. 2, the direct spray type vaporization and humidification device in the clean room of the prior art 2 is provided with a plurality of spray nozzles 1 spaced a certain distance on a nozzle fixing tube 2, (2) in which a plurality of the injection nozzles (1) are installed is extruded and cut to a required length to be used in a direct atomizing vaporization humidifying device (A) in a clean room equipped with an ultrapure water storage tank The cross section of the nozzle fixing tube 2 is integrally formed with an ultrapure water supply hole 21 and a compressed air supply hole 22 for supplying compressed air and the nozzle bracket 11 A nozzle bracket fixing groove 23 and a mount fixing groove 24 for fixing the nozzle fixing tube 2 to the mounting bracket 4 are formed. At this time, the ultrapure water storage tank 3 is connected to an ultrapure water supply pipe 31 to which ultrapure water is supplied from the upper part, an ultrapure water extension hole 32 through which the ultrapure water supplied from the ultrapure water supply pipe 31 flows downward, A reservoir tank 30 having a needle valve pedestal 33 with a perforated ultrapure water outlet hole 33a and a reservoir body 34 connected to an ultrapure water discharge pipe 35 and storing ultrapure water, A float body 36a which is installed in the reservoir tank 30 and the reservoir body 34 and contains air and an upper part of the float body 36a, And a float 36 provided with a needle valve 36b which contacts the ultrapure water outflow hole 33a and opens and closes the ultrapure water outflow hole 33a.

However, in the direct spray-type vaporization humidifying device in the clean room according to the prior art 2, ultra pure water leaks when the ultra-pure water is not normally sprayed from the spray nozzle 1, so that it is required to solve the problem.

KR 0924960 B1 KR 0848933 B1

It is an object of the present invention to solve the problems of the prior art as described above, and it is an object of the present invention to provide a method of arranging a drain member on a lower side of a manifold to collect spray water leaking from a nozzle, And to provide a direct atomizing water humidification system which can prevent leakage to the floor without affecting the pressure distribution.

According to an aspect of the present invention, there is provided a system for humidifying an inside of a clean room, comprising: a manifold having a spray head and a compressed air header formed in a longitudinal direction; A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air; A solenoid valve for opening / closing the nozzle; A spray water tank installed on the manifold and connected to the spray water header to supply spray water to the nozzle; And a drain member installed longitudinally below the manifold for collecting spray water leaking from the nozzle, wherein a distance (H) from the upper surface of the drain member to the upper surface of the nozzle is greater than a width (H) of the drain member W) and a value are substituted into? = H / W, the upper limit value and the lower limit value of? Are limited by the following equation.

Equation

Here, U represents the average wind speed in the wind direction, and K ₁ and K ₂ Is a constant.

In the present invention, the average wind speed U in the wind direction may be 2 to 6 m / s.

The constants K ₁ and K ₂ in the present invention can be included in the range of 0.1 to 0.99.

Further, the drain member in the present invention may be formed in a linear or planar shape on the bottom surface.

According to the present invention, in the process of disposing the drain member on the lower side of the manifold so as to collect the sprayed water from the nozzle, it is possible to prevent leakage to the floor without affecting the wind direction, velocity distribution, There is an effect that can be done.

1 is a schematic configuration diagram of a vaporization and humidification system according to Prior Art 1. FIG.
2 is an installation perspective view of a direct atomization type vaporization and humidification device in a clean room according to the prior art 2. FIG.
FIG. 3 is a schematic view showing a state in which a direct atomizing water humidifying system according to the present invention is installed in a wind interval.
4 is a combined perspective view of a direct atomizing water humidification system according to the present invention.
5 is an image showing a stream line state according to whether or not a direct atomizing water humidifying system is installed in a direct atomizing water humidifying system according to the present invention.
6 is an image showing the pressure contours according to the presence or absence of a direct atomizing water humidifying system in a direct atomizing water humidifying system according to the present invention.
FIG. 7 is an image showing the velocity contours (side) according to the presence or absence of the direct atomizing water humidifying system in the direct atomizing water humidifying system according to the present invention.
8 is an image showing the velocity distribution (velocity contours) state (front view) according to the presence or absence of the direct atomization water humidification system in the direct atomization water humidification system according to the present invention.
FIG. 9 is an image showing the velocity distribution (velocity contours) (plane) according to the presence or absence of the direct atomizing water humidifying system in the direct atomizing water humidification system according to the present invention.
10 is an image showing the velocity magnitude of the airflow in the direct atomizing water humidification system according to the present invention.
11 is an image showing a vector having a direction and magnitude of velocity with respect to a velocity magnitude value in a direct atomization type water humidifying system according to the present invention.
FIG. 12 is an enlarged image showing that the most excellent effect is obtained when the airflow speed is 6 m / s in FIG.
13 and 14 are graphs showing the correlation between the airflow velocity and the optimum position of the nozzle in the direct spray water humidification system according to the present invention.

The terms or words used in the present specification and claims are intended to mean that the inventive concept of the present invention is in accordance with the technical idea of the present invention based on the principle that the inventor can appropriately define the concept of the term in order to explain its invention in the best way Should be interpreted as a concept.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the structure of an embodiment of a direct atomization type humidification system according to the present invention will be described in detail with reference to the drawings.

FIG. 3 is a schematic view of a direct spray water humidifying system according to the present invention installed in a wind speed section, and FIG. 4 is a combined perspective view of a direct spray water humidifying system according to the present invention.

According to these drawings, the direct atomization type water humidifying system 100 of the present invention functions to atomize spray water by compressed air and includes a manifold 110, a spray water connection pipe 120a, A nozzle 130, a spray water tank 140, a solenoid valve 150, a drain member 160, and a control unit. At this time, the spray water may be ultra pure water when the direct spray water humidifying system 100 of the present invention is applied to the clean room 10.

The direct atomizing water humidifying system 100 includes a humidifier humidifier 100 for humidifying the humidifier 100 in a humid air section 12 as a passage through which the inside air of the clean room 10 moves from the lower plenum to the upper plenum of the clean room 10 Is installed. Further, a dry cooling coil 20 is installed on the lower side of the direct spray water humidifying system 100 for precise temperature control.

The manifold 110 is extruded or injection-molded in a horizontal direction using a metal material such as an aluminum material, and both ends are covered with an end cover. At this time, the manifold 110 may be plugged with both ends or one end of the spray water header 111 and the compressed air header 112 formed therein.

Furthermore, the manifold 110 has a spray water header 111 and a compressed air header 112 separated from each other in the longitudinal direction so as to separately supply spray water and compressed air.

In this case, the header in the spray headers 111 and the compressed air header 112 refers to a structure in which a plurality of branch pipes are in contact with an enlarged portion in order to divide or collect a plurality of branch pipes.

The manifold 110 has a spray passage header 111 and a compressed air header 112 and a wiring passage 113 in the longitudinal direction.

The wiring line 113 is electrically connected to the power supply lines electrically connected to the solenoid valves 150 for controlling the solenoid valves 150 for controlling the opening and closing of the nozzles 130, And is formed at the lower portion of the fold 110.

The spray water connection pipe 120a is fastened to the upper surface of the manifold 110 perforated per setting interval and is vertically connected to the spray water header 111 so that spray water is supplied to the nozzle 130 from the spray water tank 140. [ ).

The compressed air connection pipe 120b is fixed on the upper surface of the manifold 110 perforated per setting interval and is compressed in the compressed air supply pipe 142 while supporting the nozzle 130 and the solenoid valve 150, Air is connected to the compressed air header 112 to be supplied to the nozzle 130.

Since the spray water connection pipe 120a and the compressed air connection pipe 120b are formed to have a structure in which the spiral holes are drilled on the upper surface of the manifold 110 and are then fastened to the respective spiral holes, It is not necessary to form the nozzle bracket fixing groove on the upper surface or the side surface of the nozzle bracket 110 as in the prior art. This is because the upper surface or the side surface of the manifold 110 is flat, and thus the influence on the airflow can be prevented.

The end cover 114 is provided with a spray water supply pipe 141 connected to the spray water tank 140 so as to communicate with the spray water header 111 and a compressed air generating unit And a compressed air supply pipe 142 connected to the compressed air supply pipe 142 are provided.

Although the spray water supply pipe 141 and the compressed air supply pipe 142 are connected to one end of the manifold 110, they may be installed in the middle of the manifold 110.

The nozzle 130 is installed at the upper end of the compressed air connection pipe 120b to simultaneously spray the spray water and compressed air. In this case, the nozzle 130 is a siphon-type nozzle for supplying an adiabatic body, and atomized water and compressed air are respectively mixed from the outside, and the liquid is sprayed by the force of compressed air to realize fine spraying. Here, the nozzle 130 is rotatably installed to adjust spray angle and degree of spray for each installation position.

At this time, in this embodiment, spray water and compressed air are externally mixed and supplied, but the present invention is not limited thereto, and internal mixing and the like are also possible.

The spray water tank 140 is installed at one end of the manifold 110 to supply the spray water to the nozzle 130 while maintaining the atmospheric pressure state and is connected to the spray water header 111 A water supply pipe 145 is provided. At this time, the spray water tank 140 includes a tank body, a connection cover, a ball, and a sealing member (not shown).

In addition, the spray water tank 140 may be installed at one end of the manifold 110. However, the present invention is not limited thereto. For example, the spray water tank 140 may be installed between the nozzles 130 Any space can be installed in a spare space.

In the tank body, a spray water is stored in an upper opening, and a connection hole is formed in the bottom surface to connect the spray water header 111 of the manifold 110 to drain the spray water.

The connection cover is fastened to the open top of the tank body and is connected to an injection tube (not shown) for injecting spray water on the top surface. Meanwhile, the tank body and the connection cover may be made of a transparent material, so that the storage amount of the spray water stored in the tank body can be recognized.

The breech is rotatably provided at the lower end of the sealing member by a lever, and is raised and lowered while being rotated in accordance with the spray water level inside the tank body.

The sealing member is lowered when the spray water level in the tank body is low and opens the hole connected to the outlet of the spray water injection tube. When the spray water level reaches the set height, The connected holes are blocked to stop the spray water supply.

The solenoid valve 150 is installed at the upper end of the compressed air connection pipe 120b and controls the opening and closing of the compressed air connection pipe 120b using the electromagnet principle when the power is applied, do.

At this time, the solenoid valve 150 is provided for each of the nozzles 130 to individually open and close the nozzles 130, or a plurality of nozzles 130 are connected to each other, and a plurality of the solenoid valves 150 are simultaneously or sequentially opened and closed The solenoid valve 150 may be provided for each of the nozzles 130 to individually open and close the nozzles 130. In this case, .

The solenoid valve 150 includes a coil, a fixed iron core, a spring, a plunger, and a connector, though not shown in the figure.

The solenoid valve 150 is provided with a power supply line branched from a branch line for supplying power to the solenoid valve 150 in each wiring passage 113.

The coil is connected to a power line and electrified by an applied power source, and the fixed iron core is formed of a metal material and fixed inside the coil.

The spring is located in the hole of the plunger whose one end is located inside the hole of the fixed iron core with the end clogged and the other end is clogged.

At this time, the spring causes the plunger, which will be described later, to always provide a restoring force in the direction of the connecting port, so that the flow path of the connecting port is always closed through the restoring force.

The plunger is formed of a metallic material and opens the flow passage of the connection port by electromagnetism when power is applied to the coil while the flow passage of the connection port is closed by the restoring force of the spring.

The connecting port is connected to the fixed core by a spiral, and the inlet and the outlet are opened or closed according to the moving direction of the plunger in a state in which the inlet and the outlet are formed inside.

The compressed air generating unit is connected to the nozzle 130 at an end of the compressed air supply pipe 146 so as to supply compressed air to the nozzle 130, although not shown in the drawing.

The drain member 160 is disposed below the manifold 110 so as to extend more than the length of the manifold 110 and longer than the width of the manifold 110 to collect the spray water leaking from the nozzle 130 , Each of which is connected to a drain pipe (not shown).

At this time, the drain member 160 has a bottom surface formed in a linear shape, a surface shape, or the like. That is, the bottom surface of the drain member 160 has a linear shape, and the bottom surface of the drain member 160 has an inverted trapezoidal shape And the like.

The control unit controls the operation of the solenoid valve 150 by detecting the temperature of a temperature sensor (not shown) installed in a clean room (not shown in the drawing) and detecting the amount of humidification of the humidification amount sensor (not shown) So that it is possible to precisely or partially control the opening and closing of the nozzle 130 of the direct spray type water humidifying system 100 directly.

Therefore, the direct spray water humidifying system 100 according to an embodiment of the present invention operates when humidification or the like in a clean room is required.

That is, when power is applied to the solenoid valve 150 through the control of the controller, the coil becomes an electromagnet, and the plunger, which has closed the flow passage of the connection port, is moved to the fixed iron core side to open the flow passage of the connection port.

Next, when the flow passage of the connection port is opened, spray water and compressed air are supplied through the spray water supply pipe 145 connected to the spray water tank 140 and the compressed air supply pipe 146 connected to the compressed air generation unit, (130).

At this time, when the water level stored in the spray water tank 140 is low, the spray water rises and the sealing member connected thereto is lowered and is continuously supplied from the spray water supply part. When the water level reaches the proper position, And the spraying water supply is stopped by lifting the connected sealing member.

Here, when the spray water leaks due to damage of the nozzle 130 or the like, the leaked spray water falls to the drain member 160, and the collected spray water drains to the outside through the drain pipe.

FIG. 5 shows an image of a stream line state according to whether a direct atomizing water humidifying system is installed or not in the direct atomizing water humidifying system according to the present invention, and FIG. 6 shows an example of a direct atomizing water humidifying system And the pressure contours according to the presence or absence of the direct atomizing water humidifying system are shown in the image. FIG. 7 shows the results of the direct humidifying water humidifying system according to the present invention, FIG. 8 is a graph showing the velocity contours according to the presence or absence of a direct atomizing water humidifying system in the direct atomizing water humidifying system according to the present invention FIG. 9 is a graph showing the velocity of the direct spray water humidifying system according to the present invention, with or without the direct spray water humidifying system Four (Velocity Contours) state (plane) is shown in the image.

According to these drawings, the influence of the air flow is analyzed according to the following analysis conditions in the direct atomization type water humidifying system 100 according to the present invention.

The analysis conditions other than the distance between the drain member and the nozzle are as follows.

- Water spray: 2.5 kg / h

- Spray interval: 400 mm interval array

- Spray particle size: about 10 micrometers

- Spray angle: 80 °

- wind speed average wind speed: 3.3 m / s

- Nozzle position: Dry cooling coil rear section

- Dry cooling coil Input air condition: 22.6 degrees, humidity 50%

First, when the stream line state according to whether or not the direct atomizing water humidifying system is installed is examined, FIG. 5 (a) shows the analysis result when the direct atomizing water humidifying system 100 is not installed And FIG. 5 (b) shows the result of analysis when the direct atomizing water humidifying system 100 is installed.

It can be seen that the stream line state is almost the same in both the case where the direct atomizing water humidifying system 100 to which the drain member 160 is applied and the case where the direct atomizing water humidifying system 100 is installed.

Secondly, when the pressure contours according to the presence or absence of the direct atomizing water humidifying system are examined, FIG. 6 (a) shows the results of the analysis when the direct atomizing water humidifying system 100 is not installed And FIG. 6 (b) shows an analysis result when the direct atomizing water humidifying system 100 is installed.

At this time, it can be seen that the pressure contours are almost the same when the direct spray water humidifying system 100 to which the drain member 160 is applied is not provided and when the direct spray water humidifying system 100 is installed.

Third, the velocity contours according to the presence or absence of the direct atomizing water humidifying system are shown in FIG. 7 (a). FIG. 7 (a) FIG. 7 (b) shows the result of analysis when the direct atomizing water humidifying system 100 is installed.

Fourth, when the velocity contours (front) according to the presence or absence of the direct atomizing water humidifying system are examined, FIG. 8 (a) And FIG. 8 (b) shows the result of analysis when the direct atomizing water humidifying system 100 is installed.

Fifth, when the velocity contours (planes) according to the presence or absence of the direct atomizing water humidifying system are examined, FIG. 9 (a) is a graph showing the velocity contours when the direct atomizing water humidifying system 100 is not installed And FIG. 9 (b) shows the analysis result when the direct atomizing water humidifying system 100 is installed.

At this time, it can be seen that the velocity contours are almost the same in both the case where the direct atomizing water humidifying system 100 to which the drain member 160 is applied and the case where the direct atomizing water humidifying system 100 is not installed.

When the drain member 160 is installed as in the present invention, the differential pressure due to the drain member 160 is insufficient, and the speed difference in the region where the drain member is located in the dry cooling coil cross- And it is interpreted that there is no influence of nozzle spraying and vaporization distance due to the drain member.

FIG. 10 shows the velocity magnitude of the airflow in the direct atomizing water humidifying system according to the present invention, and FIG. 11 shows the direction and size of the velocity with respect to the velocity magnitude value in the direct atomizing water humidifying system according to the present invention. 12 shows an enlarged image showing the best effect when the airflow speed is 6 m / s in FIG. 11, and FIGS. 13 and 14 show the direct atomizing water humidification In the system, the correlation between the airflow velocity and the optimal position of the nozzle is plotted.

10 is an image showing the magnitude of the airflow velocity, which means that the velocity value increases from blue to red. When the range of the center of gravity is white, the range of the speed magnitude is specified, and when the value of "0" or less is displayed in white, Here, "less than 0" means that the velocity value of the airflow flows to the lower part by having a negative value of "-", and when it is sprayed in the area where the minus value is "-", the injected water drops to the lower part, Which is undesirable.

If the size of the wind blowing from the bottom (wind direction) is large, the length of the region having a value of "-" is made longer at the upper part, and it is installed at a higher position when the nozzle is installed. Here, the negative value "-" is a counter current (eddy current) region.

FIG. 11 shows that a reverse flow occurs in the white region due to the direction and magnitude of the velocity with respect to the value of the airflow velocity. As shown in FIG. 12, Able to know.

Fig. 13 and Fig. 14 are results finally obtained through the analysis results. If the wind speed of any wind speed is "U ", the value of " a" The optimum position "H" can be obtained.

The installation position of the drain member 160 and the nozzle 130 with respect to the wind speed average wind speed will now be described. When the distance from the upper surface of the drain member 160 to the upper surface of the nozzle 130 is assumed to be "H" and the width of the drain member 160 is assumed to be "W" Is obtained by substituting the value of the width (W) and the value of alpha of the drain member into alpha = H / W, and the upper limit value and the lower limit value of alpha can be obtained by the following equation (1).

Here, U represents the average wind speed in the wind direction, and K ₁ and K ₂ The average wind speed U in the wind direction is 2 to 6 m / s, and the constants K ₁ and K ₂ are included in the range of 0.1 to 0.99.

In this way, α _up and α _down can be obtained through the mean wind speed (U) in the wind direction and the constants K ₁ and K ₂ .

Meanwhile, the distance H from the upper surface of the drain member to the upper surface of the nozzle is in the range of 250 to 300 mm. However, the present invention is not limited to this, and the distance can be increased or decreased.

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. This is possible.

Therefore, the scope of the present invention should not be limited by the described embodiments, but should be determined by the equivalents of the appended claims, as well as the appended claims.

100: direct humidifier humidification system
110: manifold
120a: Sprayer connector
120b: compressed air connection pipe
130: nozzle
140: Spray water tank
150: Solenoid valve
160: drain member

Claims (4)

In a system for humidifying the inside of a clean room,
A manifold in which a spray head and a compressed air header are respectively formed in the longitudinal direction;
A plurality of nozzles disposed on the manifold to be connected to the spray headers and the compressed air headers to spray spray water and compressed air;
A solenoid valve for opening / closing the nozzle;
A spray water tank installed on the manifold and connected to the spray water header to supply spray water to the nozzle; And
And a drain member installed at a lower side of the manifold in a longitudinal direction to collect spray water leaking from the nozzle,
Wherein a distance (H) from the upper surface of the drain member to the upper surface of the nozzle is calculated by substituting a value (W) and an alpha value of the drain member into alpha = H / W,
Wherein the upper limit value alpha _up and the lower limit value alpha _down of alpha are limited by the following equation.
Equation

Here, U represents the average wind speed in the wind direction, and K ₁ and K ₂ Is a constant.
The method according to claim 1,
Wherein the average wind speed (U) in the wind direction is 2 to 6 m / s.
The method according to claim 1,
Wherein the constants K ₁ and K ₂ are within the range of 0.1 to 0.99.
The method according to claim 1,
Wherein the drain member is formed in a linear or planar shape on the bottom surface.

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