KR20040093712A - 향상된 에피텍시 증착을 위한 탄화규소 기판 처리방법 및그에 의해 수득한 구조물과 장치 - Google Patents

향상된 에피텍시 증착을 위한 탄화규소 기판 처리방법 및그에 의해 수득한 구조물과 장치 Download PDF

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Publication number
KR20040093712A
KR20040093712A KR10-2004-7012250A KR20047012250A KR20040093712A KR 20040093712 A KR20040093712 A KR 20040093712A KR 20047012250 A KR20047012250 A KR 20047012250A KR 20040093712 A KR20040093712 A KR 20040093712A
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KR
South Korea
Prior art keywords
silicon carbide
wafer
dopant
implantation
concentration
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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KR10-2004-7012250A
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English (en)
Korean (ko)
Inventor
데이비스 앤드류 맥클루
알렉산더 스보로프
존 애덤 에드몬드
데이비드 비어즈레이 주니어 슬레이터
Original Assignee
크리 인코포레이티드
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Publication of KR20040093712A publication Critical patent/KR20040093712A/ko
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00—Ion implantation into wafers, substrates or parts of devices
    • H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H10P30/202—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping characterised by the semiconductor materials
    • H10P30/204—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping characterised by the semiconductor materials into Group IV semiconductors
    • H10P30/2042—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping characterised by the semiconductor materials into Group IV semiconductors into crystalline silicon carbide
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00—Ion implantation into wafers, substrates or parts of devices
    • H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H10P30/21—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping of electrically active species
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/013—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials
    • H10H20/0133—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials
    • H10H20/01335—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials the light-emitting regions comprising nitride materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901—Materials
    • H10P14/2902—Materials being Group IVA materials
    • H10P14/2904—Silicon carbide
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/32—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by intermediate layers between substrates and deposited layers
    • H10P14/3202—Materials thereof
    • H10P14/3241—Materials thereof being conductive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/36—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by treatments done before the formation of the materials

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Led Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
KR10-2004-7012250A 2002-02-08 2003-02-07 향상된 에피텍시 증착을 위한 탄화규소 기판 처리방법 및그에 의해 수득한 구조물과 장치 Withdrawn KR20040093712A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US35503402P 2002-02-08 2002-02-08
US60/355,034 2002-02-08
PCT/US2003/003602 WO2003067637A2 (en) 2002-02-08 2003-02-07 Methods of treating a silicon carbide substrate for improved epitaxial deposition

Publications (1)

Publication Number Publication Date
KR20040093712A true KR20040093712A (ko) 2004-11-08

Family

ID=27734454

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2004-7012250A Withdrawn KR20040093712A (ko) 2002-02-08 2003-02-07 향상된 에피텍시 증착을 위한 탄화규소 기판 처리방법 및그에 의해 수득한 구조물과 장치

Country Status (7)

Country Link
EP (1) EP1488450B1 (https=)
JP (2) JP4846981B2 (https=)
KR (1) KR20040093712A (https=)
CN (2) CN1628370B (https=)
AU (1) AU2003210882A1 (https=)
CA (1) CA2474883A1 (https=)
WO (1) WO2003067637A2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013180483A1 (ko) * 2012-05-30 2013-12-05 엘지이노텍 주식회사 탄화규소 에피 웨이퍼 및 이의 제조 방법

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CN101673673B (zh) * 2009-09-22 2013-02-27 上海宏力半导体制造有限公司 外延片形成方法及使用该方法形成的外延片
JP5717674B2 (ja) * 2012-03-02 2015-05-13 株式会社東芝 半導体装置の製造方法
DE102016107557A1 (de) * 2016-04-22 2017-10-26 Nexwafe Gmbh Siliziumwafer für ein elektronisches Bauelement und Verfahren zu dessen Herstellung
CN110006727A (zh) * 2019-04-10 2019-07-12 深圳市锐骏半导体股份有限公司 一种离子注入机稳定性的监控方法
CN112522781B (zh) * 2021-02-18 2021-04-23 中芯集成电路制造(绍兴)有限公司 碳化硅衬底上的缓冲层及其形成方法
EP4324961A1 (en) * 2022-08-17 2024-02-21 SiCrystal GmbH Method for producing a bulk sic single crystal with improved quality using a sic seed crystal with a temporary protective oxide layer, and sic seed crystal with protective oxide layer

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JPS63104324A (ja) * 1986-10-20 1988-05-09 Fujitsu Ltd 半導体結晶の成長方法
JPH02240988A (ja) * 1989-03-15 1990-09-25 Hitachi Ltd 半導体レーザ
JPH07326793A (ja) * 1994-05-31 1995-12-12 Showa Denko Kk 化合物半導体発光ダイオード
US5523589A (en) * 1994-09-20 1996-06-04 Cree Research, Inc. Vertical geometry light emitting diode with group III nitride active layer and extended lifetime
JPH08222812A (ja) * 1995-02-17 1996-08-30 Matsushita Electric Ind Co Ltd 窒化ガリウム系化合物半導体の結晶成長方法
JPH08288500A (ja) * 1995-04-20 1996-11-01 Hitachi Ltd 炭化珪素半導体素子とその製造法及び用途
JPH098353A (ja) * 1995-06-14 1997-01-10 Hitachi Cable Ltd エピタキシャルウェハ及びその製造方法並びに発光ダイオード
US6201262B1 (en) * 1997-10-07 2001-03-13 Cree, Inc. Group III nitride photonic devices on silicon carbide substrates with conductive buffer interlay structure
JP4166885B2 (ja) * 1998-05-18 2008-10-15 富士通株式会社 光半導体装置およびその製造方法
JP3956487B2 (ja) * 1998-06-22 2007-08-08 富士電機デバイステクノロジー株式会社 炭化けい素半導体素子の製造方法
US6459100B1 (en) * 1998-09-16 2002-10-01 Cree, Inc. Vertical geometry ingan LED
US6329088B1 (en) * 1999-06-24 2001-12-11 Advanced Technology Materials, Inc. Silicon carbide epitaxial layers grown on substrates offcut towards <1{overscore (1)}00>
DE19944144C2 (de) * 1999-09-15 2001-07-26 Rossendorf Forschzent Verfahren zur Herstellung von vergrabenen Kontakten und Leitbahnen in kristallinen Siliziumkarbid-Halbleitersubstraten
JP2001237248A (ja) * 2000-02-21 2001-08-31 Mitsubishi Heavy Ind Ltd 半導体装置及びその製造方法
JP3889910B2 (ja) * 2000-03-10 2007-03-07 三菱化学株式会社 半導体発光装置およびその製造方法
JP4403629B2 (ja) * 2000-04-06 2010-01-27 株式会社デンソー 半導体発光装置
JP2001332508A (ja) * 2000-05-23 2001-11-30 Matsushita Electric Ind Co Ltd 半導体素子の製造方法
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JP2002223040A (ja) * 2001-01-29 2002-08-09 Ricoh Co Ltd 半導体発光素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013180483A1 (ko) * 2012-05-30 2013-12-05 엘지이노텍 주식회사 탄화규소 에피 웨이퍼 및 이의 제조 방법

Also Published As

Publication number Publication date
JP2005517296A (ja) 2005-06-09
EP1488450B1 (en) 2015-04-08
JP5528120B2 (ja) 2014-06-25
CN102163664A (zh) 2011-08-24
AU2003210882A8 (en) 2003-09-02
EP1488450A2 (en) 2004-12-22
JP4846981B2 (ja) 2011-12-28
CA2474883A1 (en) 2003-08-14
CN1628370B (zh) 2011-05-18
JP2010118672A (ja) 2010-05-27
CN1628370A (zh) 2005-06-15
CN102163664B (zh) 2014-07-23
WO2003067637A3 (en) 2004-01-15
WO2003067637A2 (en) 2003-08-14
AU2003210882A1 (en) 2003-09-02

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PA0105 International application

Patent event date: 20040806

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid