KR20030071525A - 펌프 장치 - Google Patents

펌프 장치 Download PDF

Info

Publication number
KR20030071525A
KR20030071525A KR10-2003-0011962A KR20030011962A KR20030071525A KR 20030071525 A KR20030071525 A KR 20030071525A KR 20030011962 A KR20030011962 A KR 20030011962A KR 20030071525 A KR20030071525 A KR 20030071525A
Authority
KR
South Korea
Prior art keywords
bearing
rotor
temperature
magnetic bearing
pump
Prior art date
Application number
KR10-2003-0011962A
Other languages
English (en)
Korean (ko)
Inventor
가바사와다카시
노나카마나부
Original Assignee
비오씨 에드워즈 테크놀로지스 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 비오씨 에드워즈 테크놀로지스 리미티드 filed Critical 비오씨 에드워즈 테크놀로지스 리미티드
Publication of KR20030071525A publication Critical patent/KR20030071525A/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
KR10-2003-0011962A 2002-02-28 2003-02-26 펌프 장치 KR20030071525A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2002-00053198 2002-02-28
JP2002053198A JP2003254285A (ja) 2002-02-28 2002-02-28 ポンプ装置

Publications (1)

Publication Number Publication Date
KR20030071525A true KR20030071525A (ko) 2003-09-03

Family

ID=27678550

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2003-0011962A KR20030071525A (ko) 2002-02-28 2003-02-26 펌프 장치

Country Status (4)

Country Link
US (1) US20030161733A1 (de)
EP (1) EP1340918A1 (de)
JP (1) JP2003254285A (de)
KR (1) KR20030071525A (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100725524B1 (ko) * 2006-09-01 2007-06-08 삼성광주전자 주식회사 펌프 유량제어방법 및 펌프 유량제어시스템
KR100872503B1 (ko) * 2006-09-12 2008-12-08 가부시키가이샤 도요다 지도숏키 진공 펌프의 운전 정지 제어 방법 및 운전 정지 제어 장치
US20220235777A1 (en) * 2019-05-30 2022-07-28 Edwards Japan Limited Vacuum pump and protection member provided in vacuum pump

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005320905A (ja) 2004-05-10 2005-11-17 Boc Edwards Kk 真空ポンプ
KR100604894B1 (ko) * 2004-08-21 2006-07-28 삼성전자주식회사 반도체 제조설비의 회전운동장치
DE102007027711A1 (de) * 2007-06-15 2008-12-18 Pfeiffer Vacuum Gmbh Verfahren zum Betreiben einer Anordnung mit Vakuumpumpe und Anordnung mit einer Vakuumpumpe
WO2009002572A1 (en) 2007-06-22 2008-12-31 Bombardier Recreational Products Inc. Snowmobile having electronically controlled lubrication
JP2009103138A (ja) * 2009-02-18 2009-05-14 Shimadzu Corp ターボ分子ポンプ
JP5497765B2 (ja) * 2009-08-04 2014-05-21 キヤノンアネルバ株式会社 加熱処理装置および半導体デバイスの製造方法
JP5782378B2 (ja) * 2009-08-21 2015-09-24 エドワーズ株式会社 真空ポンプ
CN103299083A (zh) * 2011-02-04 2013-09-11 埃地沃兹日本有限公司 真空泵的旋转体、与其相对设置的固定部件以及具备它们的真空泵
CN103857918B (zh) * 2011-10-31 2016-08-24 埃地沃兹日本有限公司 固定部件及真空泵
DE102013207059A1 (de) 2013-04-18 2014-10-23 Agilent Technologies, Inc. - A Delaware Corporation - Turbomolekularpumpe mit Stator- und/oder Rotorelementen mit Metalloxid-Oberfläche mit hohem Strahlungsvermögen
CN104895808B (zh) * 2014-03-04 2017-06-06 上海复谣真空科技有限公司 复合分子泵
JP7119312B2 (ja) * 2017-09-04 2022-08-17 株式会社島津製作所 磁気軸受制御装置および真空ポンプ

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2444099C3 (de) * 1974-09-14 1979-04-12 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Berührungsloses Lagerelement für mindestens teilweise magnetisierbare Körper
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
JP3550465B2 (ja) * 1996-08-30 2004-08-04 株式会社日立製作所 ターボ真空ポンプ及びその運転方法
US6114788A (en) * 1996-12-10 2000-09-05 Seagate Technology L.L.C. Motor/active magnetic bearing combination structure
JP3057486B2 (ja) * 1997-01-22 2000-06-26 セイコー精機株式会社 ターボ分子ポンプ
WO1999004171A1 (fr) * 1997-07-16 1999-01-28 Mitsubishi Heavy Industries, Ltd. Mecanisme d'entrainement pour corps tournant a grande vitesse entraine par un moteur, et procede permettant de discriminer le type de machine utilise dans ce but
US6123522A (en) * 1997-07-22 2000-09-26 Koyo Seiko Co., Ltd. Turbo molecular pump
JP3735749B2 (ja) * 1997-07-22 2006-01-18 光洋精工株式会社 ターボ分子ポンプ
DE69924556D1 (de) * 1998-04-28 2005-05-12 Matsushita Electric Ind Co Ltd Magnetlager
US6095754A (en) * 1998-05-06 2000-08-01 Applied Materials, Inc. Turbo-Molecular pump with metal matrix composite rotor and stator
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
US6351983B1 (en) * 1999-04-12 2002-03-05 The Regents Of The University Of California Portable gas chromatograph mass spectrometer for on-site chemical analyses
JP3916821B2 (ja) * 1999-12-13 2007-05-23 株式会社荏原製作所 磁気浮上制御装置
JP2002048088A (ja) * 2000-07-31 2002-02-15 Seiko Instruments Inc 真空ポンプ
DE10053664A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe
US6700258B2 (en) * 2001-05-23 2004-03-02 Calnetix Magnetic thrust bearing with permanent bias flux

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100725524B1 (ko) * 2006-09-01 2007-06-08 삼성광주전자 주식회사 펌프 유량제어방법 및 펌프 유량제어시스템
KR100872503B1 (ko) * 2006-09-12 2008-12-08 가부시키가이샤 도요다 지도숏키 진공 펌프의 운전 정지 제어 방법 및 운전 정지 제어 장치
US20220235777A1 (en) * 2019-05-30 2022-07-28 Edwards Japan Limited Vacuum pump and protection member provided in vacuum pump

Also Published As

Publication number Publication date
EP1340918A1 (de) 2003-09-03
JP2003254285A (ja) 2003-09-10
US20030161733A1 (en) 2003-08-28

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Legal Events

Date Code Title Description
N231 Notification of change of applicant
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid