KR20020093897A - 마이크로 열 교환기를 장착한 파워 전자 장치의 부품냉각을 위한 냉각장치 - Google Patents

마이크로 열 교환기를 장착한 파워 전자 장치의 부품냉각을 위한 냉각장치 Download PDF

Info

Publication number
KR20020093897A
KR20020093897A KR1020027013507A KR20027013507A KR20020093897A KR 20020093897 A KR20020093897 A KR 20020093897A KR 1020027013507 A KR1020027013507 A KR 1020027013507A KR 20027013507 A KR20027013507 A KR 20027013507A KR 20020093897 A KR20020093897 A KR 20020093897A
Authority
KR
South Korea
Prior art keywords
heat exchanger
micro heat
component
cooling
refrigerant
Prior art date
Application number
KR1020027013507A
Other languages
English (en)
Korean (ko)
Inventor
브로이어노어버트
로이트너슈테판
홀라이너
자츠거페터
Original Assignee
로베르트 보쉬 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 로베르트 보쉬 게엠베하 filed Critical 로베르트 보쉬 게엠베하
Publication of KR20020093897A publication Critical patent/KR20020093897A/ko

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427Cooling by change of state, e.g. use of heat pipes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Thermal Sciences (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
KR1020027013507A 2000-04-11 2001-02-09 마이크로 열 교환기를 장착한 파워 전자 장치의 부품냉각을 위한 냉각장치 KR20020093897A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10017971A DE10017971A1 (de) 2000-04-11 2000-04-11 Kühlvorrichtung zur Kühlung von Bauelementen der Leistungselektronik mit einem Mikrowärmeübertrager
DE10017971.1 2000-04-11
PCT/DE2001/000498 WO2001078478A1 (de) 2000-04-11 2001-02-09 Kühlvorrichtung zur kühlung von bauelementen der leistungselektronik mit einem mikrowärmeübertrager

Publications (1)

Publication Number Publication Date
KR20020093897A true KR20020093897A (ko) 2002-12-16

Family

ID=7638356

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020027013507A KR20020093897A (ko) 2000-04-11 2001-02-09 마이크로 열 교환기를 장착한 파워 전자 장치의 부품냉각을 위한 냉각장치

Country Status (6)

Country Link
US (1) US20030178178A1 (de)
EP (1) EP1275278A1 (de)
JP (1) JP2004509450A (de)
KR (1) KR20020093897A (de)
DE (1) DE10017971A1 (de)
WO (1) WO2001078478A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7246940B2 (en) * 2003-06-24 2007-07-24 Halliburton Energy Services, Inc. Method and apparatus for managing the temperature of thermal components
DE502004007852D1 (de) 2003-07-08 2008-09-25 Infineon Technologies Ag Integrierte kühl-schaltungsanordnung, betriebsverfahren und herstellungsverfahren
DE10333877A1 (de) * 2003-07-25 2005-02-24 Sdk-Technik Gmbh Kühlvorrichtung, insbesondere zur Kühlung von Bauelementen der Leistungselektronik mittels eines Wärmeübertragungskreislaufes
US20050141195A1 (en) * 2003-12-31 2005-06-30 Himanshu Pokharna Folded fin microchannel heat exchanger
US20060102353A1 (en) * 2004-11-12 2006-05-18 Halliburton Energy Services, Inc. Thermal component temperature management system and method
US8024936B2 (en) * 2004-11-16 2011-09-27 Halliburton Energy Services, Inc. Cooling apparatus, systems, and methods
WO2006060673A1 (en) * 2004-12-03 2006-06-08 Halliburton Energy Services, Inc. Rechargeable energy storage device in a downhole operation
US20060191682A1 (en) 2004-12-03 2006-08-31 Storm Bruce H Heating and cooling electrical components in a downhole operation
WO2006060708A1 (en) * 2004-12-03 2006-06-08 Halliburton Energy Services, Inc. Switchable power allocation in a downhole operation
DE102005008271A1 (de) 2005-02-22 2006-08-24 Behr Gmbh & Co. Kg Mikrowärmeübertrager
US20070119572A1 (en) * 2005-11-30 2007-05-31 Raytheon Company System and Method for Boiling Heat Transfer Using Self-Induced Coolant Transport and Impingements
DE102007056783A1 (de) 2007-11-23 2009-05-28 Micryon Technik Gmbh Verfahren zum Kühlen thermisch hochbelasteter Bauelemente und Vorrichtung zur Durchführung des Verfahrens
DE202007016535U1 (de) 2007-11-23 2008-10-16 Hellwig, Udo, Prof. Dr.-Ing. Einrichtung zum Kühlen thermisch hochbelasteter Bauelemente
EP2063696B1 (de) 2007-11-23 2012-08-22 MiCryon Technik GmbH Verfahren zum Kühlen thermisch hochbelasteter Bauelemente und Vorrichtung zur Durchführung des Verfahrens
TWI513069B (zh) * 2013-05-21 2015-12-11 Subtron Technology Co Ltd 散熱板
JPWO2016075838A1 (ja) * 2014-11-14 2017-10-19 株式会社ExaScaler 電子機器の冷却システム、及び冷却方法

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2204589A1 (de) * 1972-02-01 1973-08-16 Siemens Ag Kuehlanordnung fuer flache halbleiterbauelemente
US4047198A (en) * 1976-04-19 1977-09-06 Hughes Aircraft Company Transistor cooling by heat pipes having a wick of dielectric powder
JPS5936827B2 (ja) * 1979-01-12 1984-09-06 日本電信電話株式会社 集積回路素子の冷却装置
US4392362A (en) * 1979-03-23 1983-07-12 The Board Of Trustees Of The Leland Stanford Junior University Micro miniature refrigerators
US4322737A (en) * 1979-11-20 1982-03-30 Intel Corporation Integrated circuit micropackaging
US4573067A (en) * 1981-03-02 1986-02-25 The Board Of Trustees Of The Leland Stanford Junior University Method and means for improved heat removal in compact semiconductor integrated circuits
US4386505A (en) * 1981-05-01 1983-06-07 The Board Of Trustees Of The Leland Stanford Junior University Refrigerators
DE3206059C2 (de) * 1982-02-19 1984-11-29 Siemens AG, 1000 Berlin und 8000 München Kühleinrichtung für elektrische Bauelemente
US4503483A (en) * 1982-05-03 1985-03-05 Hughes Aircraft Company Heat pipe cooling module for high power circuit boards
US4491010A (en) * 1983-06-20 1985-01-01 General Motors Corporation Dynamic combustion characteristic sensor for internal combustion engine
DE3402003A1 (de) * 1984-01-21 1985-07-25 Brown, Boveri & Cie Ag, 6800 Mannheim Leistungshalbleitermodul
DE3504992A1 (de) * 1985-02-14 1986-08-14 Brown, Boveri & Cie Ag, 6800 Mannheim Leistungshalbleitermodul mit integriertem waermerohr
EP0484320B1 (de) * 1985-11-19 1999-04-28 Fujitsu Limited Kühlmodule für Vorrichtungen mit elektronischem Schaltkreis
US4758926A (en) * 1986-03-31 1988-07-19 Microelectronics And Computer Technology Corporation Fluid-cooled integrated circuit package
US4894709A (en) * 1988-03-09 1990-01-16 Massachusetts Institute Of Technology Forced-convection, liquid-cooled, microchannel heat sinks
US5179043A (en) * 1989-07-14 1993-01-12 The Texas A&M University System Vapor deposited micro heat pipes
JP2859927B2 (ja) * 1990-05-16 1999-02-24 株式会社東芝 冷却装置および温度制御装置
US5199487A (en) * 1991-05-31 1993-04-06 Hughes Aircraft Company Electroformed high efficiency heat exchanger and method for making
US5355942A (en) * 1991-08-26 1994-10-18 Sun Microsystems, Inc. Cooling multi-chip modules using embedded heat pipes
US5218515A (en) * 1992-03-13 1993-06-08 The United States Of America As Represented By The United States Department Of Energy Microchannel cooling of face down bonded chips
DE59302279D1 (de) * 1992-05-25 1996-05-23 Fichtel & Sachs Ag Elektrische maschine mit halbleiterventilen
US5283715A (en) * 1992-09-29 1994-02-01 International Business Machines, Inc. Integrated heat pipe and circuit board structure
US5316077A (en) * 1992-12-09 1994-05-31 Eaton Corporation Heat sink for electrical circuit components
DE4311839A1 (de) * 1993-04-15 1994-10-20 Siemens Ag Mikrokühleinrichtung für eine Elektronik-Komponente
US5441102A (en) * 1994-01-26 1995-08-15 Sun Microsystems, Inc. Heat exchanger for electronic equipment
US5611214A (en) * 1994-07-29 1997-03-18 Battelle Memorial Institute Microcomponent sheet architecture
US5598632A (en) * 1994-10-06 1997-02-04 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method for producing micro heat panels
DE19514548C1 (de) * 1995-04-20 1996-10-02 Daimler Benz Ag Verfahren zur Herstellung einer Mikrokühleinrichtung
US5548605A (en) * 1995-05-15 1996-08-20 The Regents Of The University Of California Monolithic microchannel heatsink
DE19608824A1 (de) * 1996-03-07 1997-09-18 Inst Mikrotechnik Mainz Gmbh Verfahren zur Herstellung von Mikrowärmetauschern
DE19626227C2 (de) * 1996-06-29 1998-07-02 Bosch Gmbh Robert Anordnung zur Wärmeableitung bei Chipmodulen auf Mehrschicht-Keramikträgern, insbesondere für Multichipmodule, und Verfahren zu ihrer Herstellung
US5801442A (en) * 1996-07-22 1998-09-01 Northrop Grumman Corporation Microchannel cooling of high power semiconductor devices
US5841244A (en) * 1997-06-18 1998-11-24 Northrop Grumman Corporation RF coil/heat pipe for solid state light driver
US5901037A (en) * 1997-06-18 1999-05-04 Northrop Grumman Corporation Closed loop liquid cooling for semiconductor RF amplifier modules
US6907921B2 (en) * 1998-06-18 2005-06-21 3M Innovative Properties Company Microchanneled active fluid heat exchanger
US6290685B1 (en) * 1998-06-18 2001-09-18 3M Innovative Properties Company Microchanneled active fluid transport devices
KR100294317B1 (ko) * 1999-06-04 2001-06-15 이정현 초소형 냉각 장치
US6457515B1 (en) * 1999-08-06 2002-10-01 The Ohio State University Two-layered micro channel heat sink, devices and systems incorporating same
US6415860B1 (en) * 2000-02-09 2002-07-09 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Crossflow micro heat exchanger
EP1321015B1 (de) * 2000-09-29 2004-05-19 Nanostream, Inc. Mikrofluidische vorrichtung zur wärmeübertragung
US6437981B1 (en) * 2000-11-30 2002-08-20 Harris Corporation Thermally enhanced microcircuit package and method of forming same

Also Published As

Publication number Publication date
JP2004509450A (ja) 2004-03-25
US20030178178A1 (en) 2003-09-25
WO2001078478A1 (de) 2001-10-18
DE10017971A1 (de) 2001-10-25
EP1275278A1 (de) 2003-01-15

Similar Documents

Publication Publication Date Title
US11035621B2 (en) Electronics cooling with multi-phase heat exchange and heat spreader
US8223494B2 (en) Conduction cooled circuit board assembly
KR20020093897A (ko) 마이크로 열 교환기를 장착한 파워 전자 장치의 부품냉각을 위한 냉각장치
CA2643932C (en) Conduction cooled circuit board assembly
US5283715A (en) Integrated heat pipe and circuit board structure
US8934245B2 (en) Heat conveying structure for electronic device
JP6015675B2 (ja) 冷却装置及びそれを用いた電子機器
JPH04233259A (ja) 熱除去装置
US20030116302A1 (en) Tunnel-phase change heat exchanger
JP5589666B2 (ja) 半導体装置
JP2010522996A (ja) 沸騰を用いた薄型熱拡散液体チャンバ
TWI701991B (zh) 電路板結構
JP2008227150A (ja) 電子機器
KR20220114006A (ko) 다공성 스프레더 보조 제트 및 스프레이 충돌 냉각 시스템
JP2010079401A (ja) 冷却システム及びそれを用いた電子機器
US20090178436A1 (en) Microelectronic refrigeration system and method
KR20110103387A (ko) 히트파이프 및 전자기기
US20180270993A1 (en) Cooling using a wick with varied thickness
US20050135061A1 (en) Heat sink, assembly, and method of making
CN210014476U (zh) 一种散热器、空调室外机和空调器
CN210014478U (zh) 一种散热器、空调室外机和空调器
JP2010080507A (ja) 電子装置
WO2019204339A1 (en) Phase separator and liquid re-saturator for two-phase cooling
KR101172679B1 (ko) 공기조화기의 실외기
CN112243311B (zh) 电路板结构

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application