KR20010070780A - Delivering apparatus for glass substarte for liquid crystal display - Google Patents

Delivering apparatus for glass substarte for liquid crystal display Download PDF

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Publication number
KR20010070780A
KR20010070780A KR1020010031674A KR20010031674A KR20010070780A KR 20010070780 A KR20010070780 A KR 20010070780A KR 1020010031674 A KR1020010031674 A KR 1020010031674A KR 20010031674 A KR20010031674 A KR 20010031674A KR 20010070780 A KR20010070780 A KR 20010070780A
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South Korea
Prior art keywords
glass substrate
liquid crystal
crystal display
conveying
display device
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KR1020010031674A
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Korean (ko)
Inventor
박용석
한점렬
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박용석
주식회사 디엠에스
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Application filed by 박용석, 주식회사 디엠에스 filed Critical 박용석
Priority to KR1020010031674A priority Critical patent/KR20010070780A/en
Priority to DE10130999A priority patent/DE10130999A1/en
Priority to TW090115854A priority patent/TW592842B/en
Priority to US09/894,625 priority patent/US6564421B2/en
Priority to FR0108709A priority patent/FR2810908B1/en
Priority to JP2001198261A priority patent/JP2002172369A/en
Priority to CNB011232781A priority patent/CN1221331C/en
Publication of KR20010070780A publication Critical patent/KR20010070780A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/145—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by top-side transfer or supporting devices, e.g. lifting or conveying using suction
    • C03B35/147—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by top-side transfer or supporting devices, e.g. lifting or conveying using suction of the non-contact type
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/16—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by roller conveyors
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/22—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands on a fluid support bed, e.g. on molten metal
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: An apparatus for transferring a transparent substrate of a liquid crystal display device is provided to prevent the transparent substrate from being damaged by transferring the transparent substrate in a lifted state. CONSTITUTION: An apparatus for transferring a transparent substrate(20) of a liquid crystal display device comprises upper and lower rollers which are driven by a driving power source. The transparent substrate(20) is placed on a transparent substrate conveying frame. A wire and an injecting plate are provided to transfer the transparent substrate(20). The transparent substrate conveying frame is connected to the upper and lower rollers through the wire. The transparent substrate(20) is lifted by the injecting plate. In this state, the transparent substrate(20) is positioned in the transparent substrate conveying frame so as to be transferred.

Description

액정표시장치용 유리기판 반송장치{Delivering apparatus for glass substarte for liquid crystal display}Glass substrate conveying apparatus for liquid crystal display device {Delivering apparatus for glass substarte for liquid crystal display}

본 발명은 액정표시장치(LCD)용 유리기판 반송장치에 관한 것으로, 특히 반송시 유리기판을 부상상태에서 반송하여 기존 로울러 지지방식에서 발생하는 마찰저항으로 인한 흠발생, 미세 오염입자 및 세정 유체에 의한 처침을 방지한 액정표시장치용 유리기판 반송장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate conveying apparatus for a liquid crystal display (LCD), and in particular, conveys a glass substrate in a floating state during conveyance to scratches, fine contaminants, and cleaning fluids due to frictional resistance generated by a conventional roller support method. The present invention relates to a glass substrate conveying apparatus for a liquid crystal display device, which prevents roughening due to the treatment.

도 1은 일반적인 액정표시장치용 유리기판 반송장치를 나타내는 도면으로서, (가)는 평면도, (나)는 측면도를 나타낸다.BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a glass substrate conveying apparatus for a general liquid crystal display device, wherein (a) is a plan view and (b) is a side view.

도시하는 바와 같이, 일반적인 액정표시장치용 유리기판 반송장치(100)는 구동 로울러(10)와 유리기판(20)의 반송을 위한 반송 로울러(30)로 구성되며, 반송 로울러(30)에는 다수의 부상 롤러(40)가 부착된다. 이와 같이 일반적인 액정표시장치용 유리기판 반송장치(100)는 부상 로울러(40) 위에 유리기판(20)이 위치하게 되며, 부상 로울러(40)의 회전력과 유리기판(20)의 자중에 의하여 로울러와 유리기판면에 접선이 형성되며, 이 접선에서 발생하는 상호마찰력에 의하여 유리기판(20)이 반송된다.As shown in the drawing, the glass substrate conveying apparatus 100 for a general liquid crystal display device includes a driving roller 10 and a conveying roller 30 for conveying the glass substrate 20, and the conveying roller 30 includes a plurality of conveying rollers 30. The floating roller 40 is attached. As described above, the glass substrate conveying apparatus 100 for a liquid crystal display device may have the glass substrate 20 positioned on the floating roller 40, and the roller may be formed by the rotational force of the floating roller 40 and the weight of the glass substrate 20. A tangent is formed on the surface of the glass substrate, and the glass substrate 20 is conveyed by the mutual frictional force generated at the tangent.

이때, 부상 로울러(40)의 설치 간격과 유리기판(20)의 자중에 의하여 유리기판(20)의 처짐이 발생하게 된다. 또한, 유리기판(20)이 분류에 의한 세정구간을 통과하는 경우 세정액의 충돌에너지와 자중에 의하여 부가적으로 외력이 부가된다.At this time, deflection of the glass substrate 20 occurs due to the installation interval of the floating roller 40 and the weight of the glass substrate 20. In addition, when the glass substrate 20 passes through the cleaning section by the classification, an external force is additionally added due to the collision energy and the own weight of the cleaning liquid.

따라서, 유리기판(20)에는 상당한 처짐이 발생하게 되고 부상 로울러(40)와 유리기판(20) 사이에서의 구동마찰력은 더욱 증가하게 되어 유리기판(20)의 표면에 흠이 발생하는 경우가 빈번하였다.Therefore, a considerable deflection occurs in the glass substrate 20, and the driving friction force between the floating roller 40 and the glass substrate 20 is further increased, so that a defect occurs frequently on the surface of the glass substrate 20. It was.

본 발명은 상기한 종래 기술의 문제점을 해결하기 위하여 안출된 것으로서, 본 발명의 목적은 유리기판의 반송방향에 대하여 수직방향으로 분사판을 설치하고 부상유체, 예를 들면 공기 또는 D.I수의 균일압력에 의하여 유리기판을 부상시킴으로써, 유리기판을 부상상태에서 반송하여 기존 로울러 지지방식에서 발생하는 마찰저항에 의한 흠발생, 미세 오염입자 및 세정액에 의한 처짐을 방지한 액정표시장치용 유리기판 반송장치를 제공하는 것이다.The present invention has been made to solve the above problems of the prior art, an object of the present invention is to install a jet plate in a vertical direction with respect to the conveying direction of the glass substrate and to provide a uniform pressure of the floating fluid, for example air or DI water The glass substrate conveying apparatus for the liquid crystal display device which floats a glass substrate by a float, and conveys a glass substrate in a floating state, and prevents the flaw caused by the frictional resistance generated by the existing roller support method, and sag by the microcontamination particle and the cleaning liquid. To provide.

도 1은 일반적인 액정표시장치용 유리기판 반송장치를 나타내는 도면으로서, (가)는 평면도, (나)는 측면도.BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a glass substrate conveying apparatus for a general liquid crystal display device.

도 2는 본 발명에 따른 액정표시장치용 유리기판 반송장치의 분사판의 동작원리를 설명하기 위한 도면.2 is a view for explaining the operation principle of the jet plate of the glass substrate conveying apparatus for a liquid crystal display device according to the present invention.

도 3은 본 발명에 따른 액정표시장치용 유리기판 반송장치의 분사판의 다른 동작원리를 설명하기 위한 도면.3 is a view for explaining another operation principle of the jet plate of the glass substrate conveying apparatus for a liquid crystal display device according to the present invention.

도 4는 본 발명에 따른 액정표시장치용 유리기판 반송장치의 일실시예를 나타내는 도면으로서, (가)는 평면도, (나)는 측면도.Figure 4 is a view showing an embodiment of a glass substrate transfer device for a liquid crystal display device according to the present invention, (a) is a plan view, (b) is a side view.

도 5는 본 발명에 따른 액정표시장치용 유리기판 반송장치의 다른 실시예를 나타내는 도면으로서, (가)는 평면도, (나)는 측면도.5 is a view showing another embodiment of a glass substrate transport apparatus for a liquid crystal display device according to the present invention, (a) is a plan view, (b) is a side view.

<도면의 주용 부분에 대한 부호의 설명><Description of the code for the main part of the drawing>

10 ----- 구동 로울러 20 ----- 유리기판10 ----- Drive Roller 20 ----- Glass Substrate

30 ----- 반송 로울러 40 ----- 부상 로울러30 ----- Bounce Roller 40 ----- Wound Roller

50 ----- 저수조 60 ----- 다공판50 ----- Reservoir 60 ----- Perforated Plate

70 ----- 유리기판 운반틀 80 ----- 반송용 와이어70 ----- Glass substrate transport frame 80 ----- Carrying wire

90 ----- 부상판90 ----- Floating plate

상기한 본 발명의 목적을 달성하기 위하여 본 발명에 따른 액정표시장치용 유리기판 반송장치는 동력원에 의하여 구동되는 구동 로울러, 유리기판 운반틀, 반송용 와이어 그리고 분사판으로 구성된다. 이 때, 유리기판 운반틀과 구동 로울러는 동력전달 와이어에 의하여 서로 연결된다.In order to achieve the above object of the present invention, a glass substrate conveying apparatus for a liquid crystal display device according to the present invention includes a driving roller driven by a power source, a glass substrate conveying frame, a conveying wire, and a spray plate. At this time, the glass substrate transport frame and the driving roller are connected to each other by a power transmission wire.

본 발명의 다른 양태에서 본 발명에 따른 액정표시장치용 유리기판 반송장치는 동력원에 의하여 구동되는 구동 로울러, 그리고 분사판으로 구성된다. 이때, 유리기판이 상하 구동 로울러 사이에 위치하므로 유리기판의 상면과 하면에 접선이 형성되며 이 접선에서의 마찰력에 의하여 유리기판이 반송된다.In another aspect of the present invention, the glass substrate conveying apparatus for a liquid crystal display device according to the present invention comprises a driving roller driven by a power source, and a jet plate. At this time, since the glass substrate is positioned between the upper and lower driving rollers, a tangent is formed on the upper and lower surfaces of the glass substrate, and the glass substrate is conveyed by the frictional force at the tangent.

이하, 본 발명의 바람직한 실시예를 도면을 참조하여 상세하게 설명한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

도 2는 본 발명에 따른 액정표시장치용 유리기판 반송장치의 분사판의 동작원리를 설명하기 위한 도면으로서, 도시하는 바와 같이 액정표시장치용 유리기판 반송장치의 분사판은 유리기판(20)과 평행한 방향으로 부상유체를 분사판의 저수조(50)에 압력 P2, 유량 Q2로 공급한다. 유입된 부상유체는, 일정한 단면을 통과하는 유체의 흐름에 대하여 유량은 유체가 통과하는 단면적과 유체의 속도에 비례한다라는 질량보존법칙에 의해 저수조(50)에 유입된 유량 Q2는 저수조(50) 내의 유량 Q4와 동일하여야 하며, 저수조의 면적이 급격히 확대되므로 저수조(50) 내에서의 부상유체의 속도는 매우 느려지게 된다.2 is a view for explaining the operation principle of the jet plate of the glass substrate conveying apparatus for a liquid crystal display device according to the present invention. As shown in FIG. The floating fluid is supplied to the reservoir 50 of the jetting plate at a pressure P2 and a flow rate Q2 in a parallel direction. The flow rate Q2 introduced into the reservoir 50 according to the mass conservation law that flow rate is proportional to the cross-sectional area through which the fluid passes and the speed of the fluid with respect to the flow of the fluid passing through the constant cross-section is equal to the flow rate Q2 in the reservoir 50. It should be the same as the flow rate Q4, the area of the reservoir is rapidly enlarged, so the speed of the floating fluid in the reservoir 50 is very slow.

또한, 에너지손실을 무시하고 위치에너지가 동일하다고 가정하면 베르누이(Bernoulli) 방정식 즉, 총에너지불변의 법칙에 의하여 세정유체의 속도에너지가 압력에너지로 변환되므로 저수조(50) 내의 압력 P4는 급격히 상승 된다.In addition, assuming that the potential energy is the same, ignoring the energy loss, the velocity energy of the washing fluid is converted into pressure energy according to the Bernoulli equation, that is, the law of total energy invariant, so the pressure P4 in the reservoir 50 is rapidly increased. .

더욱, 다공판(60)의 직경이 매우 작기 때문에 저수조(50) 내에서 부상유체는 균일하게 압축된다.Further, because the diameter of the porous plate 60 is very small, the floating fluid in the reservoir 50 is uniformly compressed.

다공판에 의하여 분사판의 상부와 유리기판(20)의 하부에는 균일한 압력 P6가 형성되고 이 압력에 의하여 유리기판(20)이 정밀 부상하게 된다.A uniform pressure P6 is formed at the upper part of the jetting plate and the lower part of the glass substrate 20 by the porous plate, and the glass substrate 20 is precisely floated by this pressure.

유리기판(20)의 균일분포자중 W와 균일분출압력 P6에 의하여 분사판과 유리기판(20) 하면 사이에 균일간극 h가 생성되며, 유리기판(20)에 부가 외력이 작용되어 이 간극이 dh만큼 수축하면 간극압력은 dh의 3승에 비례하여 증가되기 때문에 유리기판(20)의 하면은 하부 부상판과 접촉하지 않는다.The uniform gap h is generated between the spray plate and the lower surface of the glass substrate 20 by W among the uniform distributors of the glass substrate 20 and the uniform ejection pressure P6. An additional external force is applied to the glass substrate 20 so that the gap is dh. As the gap shrinks, the gap pressure increases in proportion to the square of dh, so that the lower surface of the glass substrate 20 does not contact the lower floating plate.

이와 같이, 다공판(60)을 이용한 분사판에 의하여 유리기판(20)이 부상되면기존의 로울러 지지 방식에 비하여 유리기판(20) 하면에 균일분포압력이 작용되기 때문에 처짐이 발생하지 않는다.As such, when the glass substrate 20 is floated by the spray plate using the porous plate 60, no deflection occurs because the uniform distribution pressure acts on the lower surface of the glass substrate 20 as compared with the conventional roller supporting method.

도면에서 A는 유리기판(20)의 진행방향을 나타낸다.In the drawing, A represents the advancing direction of the glass substrate 20.

도 3은 본 발명에 따른 액정표시장치용 유리기판 반송장치의 분사판의 다른 동작원리를 설명하기 위한 도면으로서, 도시하는 액정표시장치용 유리기판 반송장치의 분사판은 도 2의 분사판이 유리기판(20)을 사이에 두고 대칭으로 제공된 경우를 나타낸다.3 is a view for explaining another operation principle of the jet plate of the glass substrate conveying apparatus for a liquid crystal display device according to the present invention, wherein the jet plate of the glass substrate conveying apparatus for a liquid crystal display device is a glass substrate of FIG. It shows the case provided symmetrically with (20) in between.

보다 구체적으로, 유리기판(20)의 하부에만 분사판을 설치하여 유리기판(20)을 부상시키는 경우 균일분포 압력에 의하여 고정밀 부상이 가능하지만, 유리기판(20)이 다른 세정장치에 의하여 세정되는 경우 세정장치에서 분사되는 세정유체의 압력 및 세정유체의 자중에 의하여 유리기판의 무게중심이 순간적으로 이동되기 때문에 진동발생의 여지가 있다.More specifically, in the case of floating the glass substrate 20 by installing the injection plate only on the lower portion of the glass substrate 20, high precision floating is possible by the uniform distribution pressure, but the glass substrate 20 is cleaned by another cleaning device. In this case, since the center of gravity of the glass substrate is momentarily moved by the pressure of the cleaning fluid and the weight of the cleaning fluid sprayed from the cleaning device, there is room for vibration.

따라서, 도시하는 바와 같이 유리기판(20)의 반송선상에 대하여 수직방향으로 1mm이내에 상부 분사판과 하부 분사판을 설치한다.Therefore, as shown in the drawing, the upper jet plate and the lower jet plate are provided within 1 mm in the vertical direction with respect to the carrier line of the glass substrate 20.

상부 분사판에 의한 압력 P1과 유리기판의 균일분포자중 W가 하부 분사판의 압력 P2와 평형을 유지할 경우, 어느 정도의 부가외력 즉, 이 평형상태를 흐트러뜨리지 못하는 외력 내에서는 진동이 발생되지 않아 정밀 부상에 의한 균일 세정을 달성할 수 있게 된다. 따라서 부상유체를 공급할 경우 하부 분사판의 압력 P2는 상부 분사판의 압력 P1과 유리기판의 자중 W에 의한 압력 이상의 압력으로 공급 되어야 한다.When the pressure P1 by the upper jet plate and the uniform distribution of the glass substrate W are in equilibrium with the pressure P2 of the lower jet plate, there is no vibration in a certain additional external force, that is, an external force that does not disturb this equilibrium state. Uniform cleaning by precision floating can be achieved. Therefore, when supplying the floating fluid, the pressure P2 of the lower injection plate should be supplied at a pressure higher than the pressure P1 of the upper injection plate and the self-weight W of the glass substrate.

도면에서 50a, 50b는 상하부 분사판 각각의 저수조를 나타내고, 60a, 60b는 각각의 다공판을 나타내고, 각각의 작용은 기서술하였으므로 생략한다.In the drawings, 50a and 50b represent the reservoir tanks of the upper and lower injection plates, and 60a and 60b represent the respective porous plates, and the respective operations are described.

도 4는 본 발명에 따른 액정표시장치용 유리기판 반송장치의 일실시예를 나타내는 도면으로서, (가)는 평면도, (나)는 측면도를 나타낸다.Figure 4 is a view showing an embodiment of a glass substrate conveying apparatus for a liquid crystal display device according to the present invention, (a) is a plan view, (b) is a side view.

본 실시예에 따른 액정표시장치용 유리기판 반송장치는 동력원에 의하여 구동되는 구동로울러(10), 유리기판 운반틀(70), 반송용 와이어(80), 그리고 분사판(90)으로 구성된다.The glass substrate conveying apparatus for a liquid crystal display according to the present embodiment includes a driving roller 10 driven by a power source, a glass substrate conveying frame 70, a conveying wire 80, and a spray plate 90.

이 때, 유리기판 운반틀(70)과 구동 로울러(10)는 동력전달 와이어(도시하지 않음)에 의하여 서로 연결된다. 유리기판(20)이 분사판(90)에 의하여 부상되기 때문에 유리기판(20)과 분사유체 사이의 마찰력이 매우 작게 되며, 이 상태에서 접촉면적이 최소가 되도록 유리기판(20)을 유리기판 운반틀(70) 내부에 위치시킨다. 또한 유리기판(20)과 분사유체 사이의 마찰력이 매우 작기 때문에 매우 적은 동력으로도 유리기판(20)과 분사유체의 정지마찰력을 초과할 수 있어 유리기판(20)의 반송이 용이하게 된다.At this time, the glass substrate transport frame 70 and the drive roller 10 are connected to each other by a power transmission wire (not shown). Since the glass substrate 20 is floated by the spray plate 90, the friction force between the glass substrate 20 and the spray fluid is very small, and the glass substrate 20 is transported so that the contact area is minimized in this state. It is located inside the frame (70). In addition, since the frictional force between the glass substrate 20 and the injection fluid is very small, the static frictional force of the glass substrate 20 and the injection fluid may be exceeded even with very little power, thereby facilitating the transport of the glass substrate 20.

다음에 유리기판(20)의 반송과정을 살펴본다.Next, the conveying process of the glass substrate 20 will be described.

먼저, 동력원에 의하여 구동 로울러(10)가 회전하며, 구동 로울러(10)의 회전력에 의하여 동력전달 와이어에 동력이 전달된다. 그후, 와이어에 전달된 동력에 의하여 유리기판 운반틀(70)이 유리기판(20)의 반송위치에 도달하게 되고, 유리기판(20)은 유리기판 운반틀(70) 내부에 안착되어 반송준비가 완료된다. 이때, 분사판(90)에 의하여 유리기판(20)은 부상되어 있으므로 유리기판(20)의 상면과 하면은유리기판 운반틀(70)과 접촉되지 않고 측면에 동력이 전달되어 반송된다. 계속해서, 유리기판(20)이 유리기판 운반틀(70)에 안착되면 다시 동력원에 의하여 구동 로울러(10)가 반대방향으로 회전하면서 동력전달 와이어에 동력을 전달하여 유리기판(20)을 반송한다.First, the driving roller 10 rotates by a power source, and power is transmitted to the power transmission wire by the rotational force of the driving roller 10. Thereafter, the glass substrate conveyance frame 70 reaches the conveyance position of the glass substrate 20 by the power transmitted to the wire, and the glass substrate 20 is seated inside the glass substrate conveyance frame 70 to prepare for conveyance. Is done. At this time, since the glass substrate 20 is floated by the spray plate 90, the upper and lower surfaces of the glass substrate 20 do not come into contact with the glass substrate transport frame 70, and power is transmitted to the side surfaces of the glass substrate 20. Subsequently, when the glass substrate 20 is seated on the glass substrate transport frame 70, the driving roller 10 rotates in the opposite direction by the power source to transfer power to the power transmission wire to convey the glass substrate 20. .

상기 유리기판(20)의 반송방법은 대면적 유리기판에 적합한 반송방법으로 분사판(90)에 의하여 균일 압력으로 유리기판(20)이 부상하기 때문에 유리기판(20)의 자중 혹은 외력에 의한 처짐이 발생하지 않으며, 유리기판 반송틀(70)과 유리기판(20)의 접촉면적이 최소화되기 때문에 접촉에 의한 유리기판(20) 표면의 흠발생이 최소화 된다.The conveying method of the glass substrate 20 is a conveying method suitable for a large-area glass substrate, so that the glass substrate 20 floats at a uniform pressure by the spraying plate 90 and thus sags due to its own weight or external force. This does not occur, and since the contact area between the glass substrate transport frame 70 and the glass substrate 20 is minimized, the occurrence of scratches on the surface of the glass substrate 20 due to contact is minimized.

도 5는 본 발명에 따른 액정표시장치용 유리기판 반송장치의 다른 실시예를 나타내는 도면으로서, (가)는 평면도, (나)는 측면도를 나타낸다.5 is a view showing another embodiment of a glass substrate transport apparatus for a liquid crystal display device according to the present invention, (a) is a plan view, (b) is a side view.

본 실시예에 따른 액정표시장치용 유리기판 반송장치는 동력원에 의하여 구동되는 구동로울러(10), 그리고 분사판(90)으로 구성된다.The glass substrate conveying apparatus for a liquid crystal display according to the present embodiment includes a driving roller 10 driven by a power source, and a jet plate 90.

동력원에 의하여 구동 로울러(10)가 구동되고, 유리기판(20)이 상하 구동 로울러(10) 사이에 위치하므로 유리기판(20)의 상면과 하면에 접선이 형성되며 이 접선에서의 마찰력에 의하여 유리기판(20)이 반송된다. 이때, 분사판(90)에 의하여 유리기판(20)이 부상되기 때문에 적은 동력으로도 유리기판(20)을 반송할 수 있다.The driving roller 10 is driven by a power source, and the glass substrate 20 is positioned between the upper and lower driving rollers 10, so that a tangent is formed on the upper and lower surfaces of the glass substrate 20. The board | substrate 20 is conveyed. At this time, since the glass substrate 20 is floated by the spray plate 90, the glass substrate 20 can be conveyed with little power.

또한, 분사판(90)에 의한 균일압력에 의한 부상으로 유리기판(20)은 부가외력이나 유리기판(20) 자중에 의한 처짐이 발생하지 않으며, 분사유체와 유리기판(20)의 마찰력이 매우 적기 때문에 적은 동력원에 의한 정밀 반송이 이루어지므로 유리기판(20) 표면의 흠발생이 최소화 된다.In addition, the glass substrate 20 does not sag due to additional external force or self-weight of the glass substrate 20 due to the injuries caused by the uniform pressure caused by the spray plate 90, and the friction force between the spray fluid and the glass substrate 20 is very high. Because of the small amount of precision conveying by the power source is made, so that the occurrence of scratches on the surface of the glass substrate 20 is minimized.

본 발명에 따르면 액정표시장치용 유리기판의 반송방향에 대하여 수직방향으로 분사판을 설치하고 공기 또는 D.I수와 같은 부상유체의 균일압력에 의하여 유리기판을 부상시킴으로써, 상기 유리기판을 부상상태에서 반송하여 기존 로울러 지지방식에서 발생하는 마찰저항에 의한 흠발생, 미세 오염입자 및 세정액에 의한 처짐을 방지할 수 있다.According to the present invention, the glass substrate is conveyed in a floating state by installing a spray plate in a vertical direction with respect to the conveying direction of the glass substrate for a liquid crystal display device and floating the glass substrate by a uniform pressure of a floating fluid such as air or DI water. Therefore, it is possible to prevent flaws caused by frictional resistance generated in the existing roller support method, and sag caused by fine contaminated particles and cleaning liquid.

Claims (4)

동력원에 의하여 구동되는 상하 구동 로울러, 유리기판 운반틀, 반송용 와이어, 그리고 분사판으로 구성되어 액정표시장치용 유리기판을 반송하기 위한 반송장치로서, 상기 유리기판 운반틀과 구동 로울러가 동력전달 와이어에 의하여 서로 연결되고, 상기 유리기판이 분사판에 의하여 부상된 상태에서 유리기판을 유리기판 운반틀 내부에 위치시켜 유리기판이 반송되는 것을 특징으로 하는 액정표시장치용 유리기판 반송장치.A conveying apparatus for conveying a glass substrate for a liquid crystal display device, comprising a vertical driving roller, a glass substrate conveying frame, a conveying wire, and a spraying plate driven by a power source, wherein the glass substrate conveying frame and the driving roller are a power transmission wire. And glass substrates being conveyed by placing the glass substrates inside the glass substrate transport frame in a state in which the glass substrates are lifted by the spray plate. 동력원에 의하여 구동되는 상하 구동 로울러와 다수의 분사판으로 구성되어 액정표시장치용 유리기판을 반송하기 위한 반송장치로서, 상기 유리기판이 상기 상하 구동 로울러 사이에 위치하여 유리기판의 상면과 하면에 접선이 형성되고, 이 접선에서의 마찰력에 의하여 유리기판이 반송되는 것을 특징으로 하는 액정표시장치용 유리기판 반송장치.A conveying apparatus for conveying a glass substrate for a liquid crystal display device, comprising a vertical driving roller driven by a power source and a plurality of jet plates, wherein the glass substrate is positioned between the upper and lower driving rollers and tangential to the upper and lower surfaces of the glass substrate. Is formed, and the glass substrate is conveyed by the frictional force at this tangent. 제1항 또는 제2항에 있어서, 상기 분사판이 부상유체가 유입되는 저수조와 상기 저수조 내의 부상유체를 분출하는 다공판으로 이루어지고, 부상유체의 분출에 의해 상기 분사판과 유리기판 사이에 균일 간극이 형성되어 유리기판이 부상되는 것을 특징으로 하는 액정표시장치용 유리기판 반송장치.The jet plate of claim 1 or 2, wherein the jet plate comprises a water tank into which the floating fluid flows and a porous plate for jetting the floating fluid in the reservoir, and a uniform gap is formed between the jet plate and the glass substrate by ejecting the floating fluid. The glass substrate conveying apparatus for a liquid crystal display device, characterized in that the glass substrate is floating. 제3항에 있어서, 상기 분사판이 상기 유리기판을 사이에 두고 대향 설치된 것을 특징으로 하는 액정표시장치용 유리기판 반송장치.4. The glass substrate conveying apparatus for a liquid crystal display device according to claim 3, wherein the jet plate is provided to face each other with the glass substrate therebetween.
KR1020010031674A 2000-06-29 2001-06-07 Delivering apparatus for glass substarte for liquid crystal display KR20010070780A (en)

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KR1020010031674A KR20010070780A (en) 2001-06-07 2001-06-07 Delivering apparatus for glass substarte for liquid crystal display
DE10130999A DE10130999A1 (en) 2000-06-29 2001-06-27 Multifunction cleaning module of a manufacturing device for flat screens and cleaning device using the same
TW090115854A TW592842B (en) 2000-06-29 2001-06-28 Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same
US09/894,625 US6564421B2 (en) 2000-06-29 2001-06-28 Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same
FR0108709A FR2810908B1 (en) 2000-06-29 2001-06-29 MULTIFUNCTION CLEANING MODULE OF FLAT SCREEN MANUFACTURING APPARATUS AND CLEANING APPARATUS USING THE SAME
JP2001198261A JP2002172369A (en) 2000-06-29 2001-06-29 Multi-functional cleaning module for plate display production apparatus and cleaning apparatus using the module
CNB011232781A CN1221331C (en) 2000-06-29 2001-06-29 Multi-functional cleaning module and cleaning apparatus using the module

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KR101024644B1 (en) * 2004-01-30 2011-03-25 엘지디스플레이 주식회사 An apparatus for conveying the glass substrate using fluid
KR20150006529A (en) * 2013-07-08 2015-01-19 삼성디스플레이 주식회사 Apparatus for clamping mask and manufacturing method of mask
CN115009759A (en) * 2021-03-05 2022-09-06 显示器生产服务株式会社 Substrate conveying device
CN115009759B (en) * 2021-03-05 2023-12-01 显示器生产服务株式会社 Substrate transfer apparatus
CN115532659A (en) * 2022-08-08 2022-12-30 苏州普瑞得电子有限公司 Automatic transmission system of surface treatment cleaning roller

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