KR100548944B1 - Conveyor for plate-shaped members - Google Patents

Conveyor for plate-shaped members Download PDF

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Publication number
KR100548944B1
KR100548944B1 KR1020030023250A KR20030023250A KR100548944B1 KR 100548944 B1 KR100548944 B1 KR 100548944B1 KR 1020030023250 A KR1020030023250 A KR 1020030023250A KR 20030023250 A KR20030023250 A KR 20030023250A KR 100548944 B1 KR100548944 B1 KR 100548944B1
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South Korea
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plate
plate member
pressure fluid
conveying
conveying apparatus
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KR1020030023250A
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Korean (ko)
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KR20040088851A (en
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이동헌
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이동헌
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Priority to KR1020030023250A priority Critical patent/KR100548944B1/en
Priority to PCT/KR2004/000736 priority patent/WO2004089792A1/en
Publication of KR20040088851A publication Critical patent/KR20040088851A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Abstract

본 발명은 판상부재에 먼지나 상처를 발생시키지 않고, LCD, PDP, 유기 EL 등의 얇고 큰 판상부재를 반송하는 반송장치를 제공하고자 하는 것으로서, 본 출원인이 2000년 9월 9일 출원한 특허출원 제2000-0053776 '판상부재 반송장치'의 성능을 개선하고 사용용도를 확대시키고자 하는 것이다. 압력유체를 송입하는 본체의 상부에 평면부를 가지는 다공재를 취부하고, 취부된 다수개의 다공질재간의 공간을 수평판재로 밀폐시켜 다공질체를 통하여 분출되는 압력유체 층과, 밀폐된 수평판재와 판상부재와의 사이에도 압력유체층을 형성하여, 판상부재의 무게를 넓은 면적에서 균일하게 받게 하여, 부상된 상태에서 판장부재를 양면 또는 중앙면, 또는 양면 및 중앙면을 구동하는 롤러를 설치하여 극히 적은 양의 압력 유체만으로도 효율적으로 판상부재를 반송할 수 있도록 하였다.The present invention is to provide a conveying apparatus for conveying thin and large plate-like members such as LCD, PDP, organic EL, etc. without generating dust or scratches on the plate-like member, the patent application filed on September 9, 2000 2000-0053776 To improve the performance of the 'plate member conveying device' and to expand the use. A porous material having a flat portion is mounted on the upper part of the main body for supplying the pressure fluid, and the pressure fluid layer ejected through the porous body by sealing the space between the plurality of porous materials mounted with a horizontal plate, and the closed horizontal plate and plate A pressure fluid layer is also formed between the members, so that the weight of the plate-like member is uniformly distributed over a large area, and a roller is installed to drive both sides or the center surface, or both sides and the center surface of the plate member in an injured state. The plate member can be efficiently transported even with a small amount of pressure fluid.

Description

판상부재의 반송장치{CONVEYOR FOR PLATE-SHAPED MEMBERS}Plate conveying device {CONVEYOR FOR PLATE-SHAPED MEMBERS}

도 1은 본 발명의 판상부재의 반송장치의 실시례 1을 나타내는 평면도이다.BRIEF DESCRIPTION OF THE DRAWINGS It is a top view which shows Example 1 of the conveying apparatus of the plate-shaped member of this invention.

도 2는 본 발명의 판상부재의 반송장치의 실시례 1을 나타내는 정면도이다.It is a front view which shows Example 1 of the conveying apparatus of the plate-shaped member of this invention.

도 3은 본 발명의 판상부재의 반송장치의 실시례 2를 나타내는 평면도이다.It is a top view which shows Example 2 of the conveying apparatus of the plate-shaped member of this invention.

도 4는 본 발명의 판상부재의 반송장치의 실시례 2를 나타내는 정면도이다.It is a front view which shows Example 2 of the conveying apparatus of the plate-shaped member of this invention.

도 5는 본 발명의 판상부재의 반송장치의 실시례 3을 나타내는 평면도이다.5 is a plan view showing a third embodiment of a conveying apparatus for the plate member of the present invention.

도 6은 본 발명의 판상부재의 반송장치의 실시례 3을 나타내는 정면도이다.It is a front view which shows Example 3 of the conveying apparatus of the plate-shaped member of this invention.

도 7은 본 발명의 판상부재의 반송장치의 실시례 4를 나타내는 평면도이다.It is a top view which shows Example 4 of the conveying apparatus of the plate-shaped member of this invention.

도 8은 본 발명의 판상부재의 반송장치의 실시례 4를 나타내는 정면도이다.It is a front view which shows Example 4 of the conveying apparatus of the plate-shaped member of this invention.

(도면의 주요 부분에 대한 부호의 설명)(Explanation of symbols for the main parts of the drawing)

1 : 판상부재 2,3 : 컨베이어(Conveyor)1: Plate member 2, 3: Conveyor

4,5 : 반송 롤러(Roller) 6 : 판상부재의 양측 가장자리부4,5 conveying roller 6: both edges of plate member

7 : 부상장치 8 : 개체 유닛(Unit)7: floating device 8: individual unit

9 : 본체 10 : 다공재9: body 10: porous material

11 : 압력유체 공급 파이프(Pipe) 12 : 압력유체층11: pressure fluid supply pipe 12: pressure fluid layer

14 : 밀폐용 수평판재 15, 16 : 컨베이어(CONVEYOR)14: horizontal plate for sealing 15, 16: conveyor (CONVEYOR)

삭제delete

17 : 셔틀(SHUTTLE)식 반송장치 18 : 푸셔(PUSHER)17: shuttle transfer device 18: pusher (PUSHER)

삭제delete

19, 20 : 반송롤러(ROLLER)19, 20: conveying roller (ROLLER)

본 발명은 예를 들어 반도체 웨이퍼(wafer)나 LCD, PDP, 유기EL 등의 유리 패널(Glass Panel)의 판상부재의 반송장치에 관한 것이다.TECHNICAL FIELD This invention relates to the conveying apparatus of the plate-shaped member of glass panels, such as a semiconductor wafer, LCD, PDP, organic EL, for example.

종래의 반도체 웨이퍼나 액정표시장치의 유리 패널 등의 제조공정에 있어서 사용되는 판상부재의 반송장치는 예를들면 일본 특허출원공개 평성 10년 제158866호 공보에 기재된 바와 같이 유리 패널을 반송장치에서 지지하면서 세정수를 뿌려주어 세정하도록 하고 있다.The conveying apparatus for a plate member used in a manufacturing process such as a conventional semiconductor wafer or a glass panel of a liquid crystal display device is supported by a conveying apparatus, for example, as described in Japanese Patent Application Laid-Open No. 10,158,866. While spraying the washing water to clean.

반도체 웨이퍼나 액정표시장치의 유리 패널 등의 판상부재는 아주 작은 먼지가 부착되더라도 중대한 불량이 되는 바, 상기와 같은 종래의 판상부재의 반송장치는 유리 패널을 롤러 컨베이어(Roller Conveyor)로 반송하고 있기 때문에 롤러 컨베이어의 표면에 먼지가 부착되어 있으면 그 먼지가 유리 패널의 표면에 부착할 가능성이 있다.Plate members such as semiconductor wafers and glass panels of liquid crystal display devices are a serious defect even if very small dust is attached. The conventional conveying apparatus of plate members is conveying glass panels to a roller conveyor. Therefore, if dust adheres to the surface of the roller conveyor, the dust may adhere to the surface of the glass panel.

또한 롤러 컨베이어에 의해 유리 패널 등이 반송될 경우 유리 패널 등의 끝부분이 하나의 롤러로부터 다음의 롤러에 이동할 때에 충격을 받게 된다. 따라서 유리 패널 등의 반송속도를 어느 정도 이상으로 하는 것이 불가능하다. 이로 인해 생산성을 어느 수준 이상 올리는 것이 곤란하게 된다.In addition, when a glass panel etc. are conveyed by a roller conveyor, when an end part, such as a glass panel, moves from one roller to the next roller, it will be impacted. Therefore, it is impossible to make conveyance speeds, such as glass panels, to some extent or more. This makes it difficult to raise the productivity above a certain level.

특히 액정표시장치는 정세도가 매년 향상되고 있고 정세도를 올리기 위해서는 유리 패널을 얇게 하지 않으면 안 된다. 그러나 유리 패널을 얇게 하게 되면 충격에 대해 약하게 되어 반송 중에 파손 등이 많이 발생하여 점점 더 생산성을 올릴 수가 없게 된다.In particular, the liquid crystal display device has been improved every year, and the glass panel must be thinned to increase the fineness. However, when the glass panel is thinned, it becomes weak against the impact, so that many breakages and the like occur during transportation, and thus the productivity cannot be increased more and more.

최근의 액정표시장치의 유리 패널의 두께는 0.4㎜~0.7㎜이고 길이 2200㎜, 폭 1850㎜인 것도 사용 될 예정이다.In recent years, the glass panel of the liquid crystal display device has a thickness of 0.4 mm to 0.7 mm, a length of 2200 mm and a width of 1850 mm.

본 발명은 상기와 같은 문제점을 해소하는 것으로서, 판상부재에 먼지나 손상을 발생시키지 않고 생산성이 높은 판상부재의 반송장치를 제공하려는 것이다.The present invention is to solve the above problems, to provide a conveying apparatus for a plate-like member having high productivity without generating dust or damage to the plate-like member.

상기 과제를 해결하기 위해 본 발명의 판상부재의 반송장치는 한 쌍의 컨베이어 프레임(2,3)과; 상기 한 쌍의 컨베이어 프레임(2,3)에 수평축으로 회전 가능하게 지지되어 판상부재(1)를 그 양측 가장자리 하면을 지지한 상태로 반송하는 다수개의 반송롤러(4,5)와; 상기 한 쌍의 컨베이어 프레임(2,3) 사이에 다수개의 개체 유닛(8)과, 다수개의 개체 유닛(8) 사이의 공간을 밀폐시키는 밀폐용 수평판재(14)가 부상장치(7)로서 배치되어 압력유체를 상기 판상부재(1)의 하면을 향하여 상향 분출하여 상기 판상부재(1)의 양측 가장자리를 제외한 나머지 부분을 부상시키는 부상장치(7)를 포함하여 구성된다.In order to solve the above problems, the conveying apparatus of the plate member of the present invention comprises a pair of conveyor frames (2, 3); A plurality of conveying rollers (4,5) rotatably supported on the pair of conveyor frames (2,3) to convey the plate member (1) in a state in which both sides of the edges thereof are supported; A plurality of individual units 8 and a sealing horizontal plate 14 for sealing the space between the plurality of individual units 8 are arranged as the floating device 7 between the pair of conveyor frames 2, 3. And a flotation device 7 which ejects the pressure fluid upwardly toward the lower surface of the plate member 1 to float the remaining portions except the edges on both sides of the plate member 1.

본 발명의 청구항 1에 기재한 발명은 적어도 하나의 평면부를 가지는 다공질체를 설치하고, 압력유체를 송입하는 본체의 상부에 다공재를 평면부가 위를 향하도록 취부하고, 다공재들의 상부 평면보다 약간 높은 위치에 밀폐용 수평판재를 취부하고, 다공재를 통하여 압력유체가 분출되도록 함과 동시에 반송되는 판상부재의 양측을 구동하는 롤러를 설치한 것으로서, 본 출원인이 출원한 제2000-0053776 '판상부재 반송장치'의 압력유체 소요량의 10분의1 이하의 압력유체 양으로도 판상부재를 부상시키면서 롤러로 반송시키는 작용을 가진다. 또한 본 발명에서 판상부재를 반송시키는 데는 롤러 컨베이어를 사용하고 있으나, 반송수단으로서 에어실린더, 전기모터 등을 이용한 판상부재 이송용의 푸셔(PUSHER)의 상승, 수평전진, 하강, 수평후진을 반복하여 판상부재를 이송하는 셔틀(SHUTTLE)장치를 이용할 수 있다.The invention described in claim 1 of the present invention provides a porous body having at least one flat portion, and mounts the porous material on the upper portion of the main body for feeding the pressure fluid so that the flat portion faces upwards, and is higher than the upper plane of the porous materials. The horizontal plate member for sealing is installed at a slightly higher position, and the rollers for driving both sides of the plate member being conveyed while the pressure fluid is ejected through the porous material are installed. The member conveying device 'also has an action of conveying the plate-like member with a roller while lifting the plate-like member with an amount of pressure fluid equal to or less than one tenth of the required amount of the pressure fluid. In addition, although the roller conveyor is used to convey the plate member in the present invention, as the conveying means, the riser, the horizontal forward, the lower, the horizontal reversal of the pusher for conveying the plate member using an air cylinder, an electric motor, and the like are repeated. Shuttle device for transporting the plate member can be used.

이하, 본 발명의 판상부재의 반송장치의 실시례에 대해 도면에 따라 상세하게 설명한다.EMBODIMENT OF THE INVENTION Hereinafter, the Example of the conveying apparatus of the plate member of this invention is demonstrated in detail according to drawing.

도 1은 본 발명의 판상부재의 반송장치의 평면도이다. 도 1에 있어서 1은 피반송물인 판상부재이다. 2,3은 한 쌍의 컨베이어 프레임이며, 이 컨베이어 프레임(2,3)에는 다수의 반송롤러(4,5)가 설치되어 있다. 그리고 반송롤러(4,5)는 판상부재(1)의 양측 가장자리부(6)에만 접하도록 설치되어 있다.1 is a plan view of a conveying apparatus for a plate member of the present invention. In FIG. 1, 1 is a plate-shaped member which is a conveyed object. 2 and 3 are a pair of conveyor frames, and many convey rollers 4 and 5 are provided in the conveyor frames 2 and 3. And the conveying rollers 4 and 5 are provided so that only the edge part 6 of the plate-shaped member 1 may contact | connect.

7은 개체유닛(8)과 밀폐용 수평판재(14)로 구성된 부상장치로서, 상기 한 쌍의 컨베이어 프레임(2,3)의 사이에 물떼새모양으로 다수 배치된 개체유닛(8)과 다수개의 개체유닛(8)들 간의 공간을 밀폐시켜주는 밀폐용 수평판재(14)가 개체유닛(8)들의 상면보다 약간 높은 위치에 수평으로 취부된다. 각 개체유닛(8)은 컵모양의 본체(9)와, 상기 본체(9) 내부로 압력유체를 공급하는 압력유체 공급 파이프(11)와, 상기 본체(9)의 상단 개구부에 설치되어 상기 압력유체 공급 파이프(11)에 의해 본체(9)로 공급된 압력유체가 분출되는 다공재(10)로 이루어진다. 다공재(10)는 평판상으로 그 상면이 수평으로 되도록 취부된다.7 is a floating device composed of the individual unit 8 and the sealing horizontal plate 14, and the individual unit 8 and the plurality of individual units disposed in the shape of a houndstooth between the pair of conveyor frames 2,3. A sealing horizontal plate 14 which seals the space between the units 8 is mounted horizontally at a position slightly higher than the upper surface of the individual units 8. Each individual unit 8 is provided in a cup-shaped body 9, a pressure fluid supply pipe 11 for supplying a pressure fluid into the body 9, and an upper end opening of the body 9 to provide the pressure. It consists of the porous material 10 which the pressure fluid supplied to the main body 9 by the fluid supply pipe 11 blows off. The porous material 10 is mounted on a flat plate such that its upper surface is horizontal.

또, 밀폐용 수평판재(14)는 판상부재의 주재료인 유리보다 경도가 낮은 플라스틱이나 아크릴판 등을 사용하여, 유리와 접촉하는 일이 발생하더라도 유리에 손상을 주지 않도록 되어있다.In addition, the sealing horizontal plate member 14 is made of a plastic, an acrylic plate, or the like having a lower hardness than glass, which is the main material of the plate member, so as not to damage the glass even when it comes into contact with the glass.

상기 압력유체로는 공기, 물, 특수세정액 등이 사용될 수 있으며, 펌프(도시되지 않음)에 의해 압력유체 공급파이프(11)로 압송된다.As the pressure fluid, air, water, a special cleaning liquid, or the like may be used, and is pumped into the pressure fluid supply pipe 11 by a pump (not shown).

도 3은 본 발명의 응용방법으로서 초대형 판상부재를 반송하는 반송장치의 평면도이다.3 is a plan view of a conveying apparatus for conveying an extra large plate-like member as an application method of the present invention.

도 1의 반송장치에 있어 한 쌍의 컨에이어(2,3) 사이에, 2개의 부상장치(7)와 2개의 부상장치(7)사이에 판상부재의 하부와 접촉하면서 판상부재를 반송시키는 한 열 이상의 롤러 컨베이어(15,16)가 수평으로 설치되어 있다.In the conveying apparatus of FIG. 1, a plate member is conveyed while contacting a lower portion of the plate member between two floating devices 7 and two floating devices 7 between a pair of cones 2 and 3. One or more rows of roller conveyors 15 and 16 are horizontally installed.

도 5는 본 발명의 또 다른 응용방법으로서, 크기가 다른 여러 종류의 판상부재를 같은 반송장치에서 반송할 수 있도록 한 반송장치의 평면도이다.Fig. 5 is a plan view of a conveying apparatus in which another kind of plate-like member having a different size can be conveyed by the same conveying apparatus as another application method of the present invention.

도 3의 반송장치에 있어 한 쌍의 컨베이어(2,3)를 없애고, 중앙의 롤러 컨베이어(15,16)가 2열 이상 수평으로 설치되어 있다.In the conveying apparatus of FIG. 3, the pair of conveyors 2 and 3 are removed, and the central roller conveyors 15 and 16 are provided horizontally in two or more rows.

도 7은 상기 도 1, 2, 3, 4에서 반송수단으로 롤러 컨베이어(2, 3, 15, 16)를 사용하고 있으나, 반송수단으로 판상부재를 반송방향으로 이송시킬 수 있는 셔틀식 반송장치(17)가 2열 이상 수평으로 판상부재(1)의 상부 또는 하부에 설치되어 있다.7, roller conveyors 2, 3, 15, and 16 are used as the conveying means in FIGS. 1, 2, 3, and 4, but a shuttle type conveying apparatus capable of conveying the plate member in the conveying direction by the conveying means ( 17) are provided in the upper part or the lower part of the plate-shaped member 1 horizontally more than 2 rows.

본 발명의 판상부재의 반송장치는 이상과 같이 구성되며, 이하 그 작동에 대해 설명한다.The conveying apparatus of the plate-shaped member of this invention is comprised as mentioned above, and the operation | movement is demonstrated below.

우선, 압력유체 공급 파이프(11)로부터 압력유체를 공급하면, 본체(9) 내부에 압력유체가 가득 차게 되고, 이어서 다공재(10)를 압력유체가 통과하여 다공재(10)의 상면으로부터 판상부재(1)의 하면을 향해 상향 분출된다.First, when the pressure fluid is supplied from the pressure fluid supply pipe 11, the pressure fluid is filled inside the main body 9, and then the pressure fluid passes through the porous material 10 to form a plate from the upper surface of the porous material 10. It is ejected upward toward the lower surface of the member 1.

이때에 다공재(10)의 위에 판상부재(1)가 위치되어 있으면 다공재(10) 및 밀폐용 수평판재(14)와 판상부재(1)와의 사이에 압력유체층(12)이 형성된다. 즉, 판상부재(1)의 하면 전체 면적에 걸쳐서 압력유체층(12)이 형성되므로 판상부재(1)의 하면 전체가 압력유체층(12)의 위에 떠있는 상태가 된다.At this time, if the plate member 1 is positioned on the porous material 10, the pressure fluid layer 12 is formed between the porous material 10 and the sealing horizontal plate member 14 and the plate member (1). That is, since the pressure fluid layer 12 is formed over the entire area of the lower surface of the plate member 1, the entire lower surface of the plate member 1 is in a floating state on the pressure fluid layer 12.

따라서 판상부재(1)는 무접촉 상태로 다공성 세라믹재인 다공재(10) 및 밀폐용 수평판재(14)의 위에 부유하여 극히 마찰이 적은 상태로 된다. 또한 이 상태에서 판상부재(1)의 양측 가장자리부(6)에 반송롤러(4,5)가 접촉하도록 하면 반송롤러(4,5)의 회전구동력으로 판상부재(1)는 수평으로 이동한다. 반송롤러(4,5)의 회전을 정지하면 판상부재의 이동도 정지한다.Therefore, the plate-like member 1 floats on the porous ceramic material 10 and the sealing horizontal plate material 14 which are in contactless state, and is in a state of extremely low friction. In addition, when the conveying rollers 4 and 5 are brought into contact with both edges 6 of the plate member 1 in this state, the plate member 1 moves horizontally by the rotational driving force of the conveying rollers 4 and 5. When the rotation of the conveying rollers 4 and 5 is stopped, the movement of the plate member also stops.

이 판상부재(1)는 부상 상태에서는 마찰이 극히 적기 때문에 판상부재(1)는 롤러(4,5)에 가볍게 접촉하는 상태만으로 도 충분한 반송력을 얻을 수가 있다. 그리고 판상부재(1)가 반송롤러(4,5)에 가볍게 접촉하는 상태이기 때문에, 부상장치 없이 일반적으로 사용하는 롤러 컨베이어에 비해, 접촉마모에 의한 먼지가 발생하는 일이 극히 적어진다.Since the plate-like member 1 has extremely low friction in the floating state, the plate-like member 1 can obtain a sufficient conveyance force only by a light contact with the rollers 4 and 5. And since the plate-shaped member 1 is in light contact with the conveying rollers 4 and 5, the dust by contact abrasion becomes extremely small compared with the roller conveyor generally used without a floating apparatus.

본 발명의 판상부재의 반송장치는 상기와 같이 구성된 것으로서, 무접촉 상태에서 판상부재를 들어올려 적은 힘으로 반송하는 것이 가능하고, 먼지나 상처를 발생시키지 않고, 생산성이 높은 판상부재의 반송장치를 제공할 수 있도록 한 것이다. The conveying apparatus of the plate member of the present invention is configured as described above, and it is possible to lift the plate member in a non-contact state and convey it with a small force, so that the conveying apparatus of the plate member having high productivity without generating dust or scratches is provided. It is to be provided.

또한 본 발명의 판상부재의 반송장치는 초대형 판상부재의 반송 및 동일 반송수단으로 크기가 다른 판상부재를 효과적으로 반송하는 것이 가능하다.Moreover, the conveying apparatus of the plate-shaped member of this invention can convey the plate-shaped member of a different size effectively by the conveyance of the super large plate-shaped member, and the same conveying means.

Claims (4)

한 쌍의 컨베이어 프레임(2,3)과;A pair of conveyor frames 2 and 3; 상기 한 쌍의 컨베이어 프레임(2,3)에 수평축으로 회전 가능하게 지지되어 판상부재(1)를 그 양측 가장자리 하면을 지지한 상태로 반송하는 다수개의 반송롤러(4,5)와;A plurality of conveying rollers (4,5) rotatably supported on the pair of conveyor frames (2,3) to convey the plate member (1) in a state in which both sides of the edges thereof are supported; 상기 한 쌍의 컨베이어 프레임(2,3) 사이에 설치되어 판상부재(1)의 하면을 향하여 압력유체를 상향 분출하는 다수개의 개체 유닛(8)과, 다수개의 개체 유닛(8) 사이의 공간을 밀폐시켜 개체 유닛(8)에서 분출된 압력유체가 그 상면에서 압력유체층을 형성하게 하는 밀폐용 수평판재(14)로 구성되는 부상장치(7)를 포함하는 판상부재의 반송장치.The space between the plurality of individual units 8 and the plurality of individual units 8, which are installed between the pair of conveyor frames 2 and 3, eject the pressure fluid upward toward the lower surface of the plate member 1, A conveying apparatus for a plate member including a floating device (7) composed of a sealing horizontal plate member (14) which seals and causes the pressure fluid ejected from the individual unit (8) to form a pressure fluid layer on its upper surface. 제 1항에 있어서 한 쌍의 컨베이어(2,3) 사이에, 2개의 부상장치(7)와 2개의 부상장치(7)사이에 판상부재의 하부와 접촉하면서 판상부재를 반송시키는 한 열 이상의 롤러 컨베이어(15,16)가 수평으로 설치되어 구성됨을 특징으로 하는 판상부재의 반송장치.At least one row of rollers for conveying the plate-like member while contacting the lower portion of the plate-like member between the two floating devices 7 and the two floating devices 7 between the pair of conveyors 2,3. Conveyor (15,16) is a conveying device of the plate member, characterized in that configured to be installed horizontally. 제 2항에 있어서 한 쌍의 컨베이어(2,3)를 없애고, 중앙의 롤러 컨베이어(15,16)가 2열 이상 수평으로 설치되어 구성됨을 특징으로 하는 판상부재의 반송장치.3. A conveying apparatus for a plate member according to claim 2, wherein a pair of conveyors (2, 3) are removed, and a roller conveyor (15, 16) in the center is installed horizontally in two or more rows. 제 2항에 있어서 셔틀식 반송장치(17)가 2열 이상 수평으로 판상부재(1)의 상부 또는 하부에 설치되어 구성됨을 특징으로 하는 판상부재의 반송장치.3. A conveying apparatus for a plate member according to claim 2, characterized in that the shuttle conveying apparatus (17) is installed on the upper or lower portion of the plate member (1) horizontally in two or more rows.
KR1020030023250A 2003-04-12 2003-04-12 Conveyor for plate-shaped members KR100548944B1 (en)

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CN102883978A (en) * 2010-05-03 2013-01-16 爱诺华李赛克技术中心有限公司 Device for conveying plate-shaped elements

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WO2007016688A1 (en) 2005-08-02 2007-02-08 New Way Machine Components, Inc. A method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped groves and sealing lands in a non-contact manner
JP2010173829A (en) * 2009-01-30 2010-08-12 Ihi Corp Floating conveyance device and floating unit
US8260028B2 (en) 2009-10-28 2012-09-04 Corning Incorporated Off-axis sheet-handling apparatus and technique for transmission-mode measurements

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KR100260562B1 (en) * 1997-12-31 2000-07-01 최명숙 Air conveyor
JP2001085496A (en) * 1999-09-10 2001-03-30 Daiichi Shisetsu Kogyo Kk Carrying device of plate-like member

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CN102883978A (en) * 2010-05-03 2013-01-16 爱诺华李赛克技术中心有限公司 Device for conveying plate-shaped elements
US9004262B2 (en) 2010-05-03 2015-04-14 Lisec Austria Gmbh Device for conveying plate-shaped elements
CN102883978B (en) * 2010-05-03 2015-05-06 爱诺华李赛克技术中心有限公司 Device for conveying plate-shaped elements

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