KR20010015630A - 결함있는 전자 장치 식별 시스템 - Google Patents

결함있는 전자 장치 식별 시스템 Download PDF

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Publication number
KR20010015630A
KR20010015630A KR1020007003253A KR20007003253A KR20010015630A KR 20010015630 A KR20010015630 A KR 20010015630A KR 1020007003253 A KR1020007003253 A KR 1020007003253A KR 20007003253 A KR20007003253 A KR 20007003253A KR 20010015630 A KR20010015630 A KR 20010015630A
Authority
KR
South Korea
Prior art keywords
defective
contacts
information
machine
inspection
Prior art date
Application number
KR1020007003253A
Other languages
English (en)
Korean (ko)
Inventor
바디바즈햄칼레앰버르라자라티남
Original Assignee
칼 하인쯔 호르닝어
지멘스 악티엔게젤샤프트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 칼 하인쯔 호르닝어, 지멘스 악티엔게젤샤프트 filed Critical 칼 하인쯔 호르닝어
Publication of KR20010015630A publication Critical patent/KR20010015630A/ko

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/544Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54473Marks applied to semiconductor devices or parts for use after dicing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Wire Bonding (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1020007003253A 1997-09-30 1997-09-30 결함있는 전자 장치 식별 시스템 KR20010015630A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SG1997/000048 WO1999017354A1 (fr) 1997-09-30 1997-09-30 Systeme d'identification de dispositifs electroniques defectueux

Publications (1)

Publication Number Publication Date
KR20010015630A true KR20010015630A (ko) 2001-02-26

Family

ID=20429570

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020007003253A KR20010015630A (ko) 1997-09-30 1997-09-30 결함있는 전자 장치 식별 시스템

Country Status (5)

Country Link
EP (1) EP1029348A1 (fr)
JP (1) JP2001518631A (fr)
KR (1) KR20010015630A (fr)
AU (1) AU4975397A (fr)
WO (1) WO1999017354A1 (fr)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4255851A (en) * 1978-12-06 1981-03-17 Western Electric Company, Inc. Method and apparatus for indelibly marking articles during a manufacturing process
US4801869A (en) * 1987-04-27 1989-01-31 International Business Machines Corporation Semiconductor defect monitor for diagnosing processing-induced defects
JPH0245734A (ja) * 1988-08-05 1990-02-15 Mitsubishi Heavy Ind Ltd 自動組織解析処理装置
US5504438A (en) * 1991-09-10 1996-04-02 Photon Dynamics, Inc. Testing method for imaging defects in a liquid crystal display substrate
WO1995016923A1 (fr) * 1993-12-16 1995-06-22 Philips Electronics N.V. Controle separe des courants de repos du trajet de signal et du trajet de polarisation dans un circuit integre
JPH07270335A (ja) * 1994-03-29 1995-10-20 Sekisui Chem Co Ltd 撮像式検査方法および装置
JPH08137093A (ja) * 1994-09-16 1996-05-31 Toshiba Corp 欠陥検査装置

Also Published As

Publication number Publication date
JP2001518631A (ja) 2001-10-16
WO1999017354A1 (fr) 1999-04-08
AU4975397A (en) 1999-04-23
EP1029348A1 (fr) 2000-08-23

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Legal Events

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WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid