KR19980025622A - Structure and Manufacturing Method of Chip Scale Package (CSP) - Google Patents
Structure and Manufacturing Method of Chip Scale Package (CSP) Download PDFInfo
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- KR19980025622A KR19980025622A KR1019960043842A KR19960043842A KR19980025622A KR 19980025622 A KR19980025622 A KR 19980025622A KR 1019960043842 A KR1019960043842 A KR 1019960043842A KR 19960043842 A KR19960043842 A KR 19960043842A KR 19980025622 A KR19980025622 A KR 19980025622A
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- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
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- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16245—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/4805—Shape
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- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/481—Disposition
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- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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Abstract
본 발명은 CSP(Chip Scale Package ; 칩 스케일 패키지)의 구조 및 제조방법에 관한 것으로, 반도체 패키지의 크기를 반도체칩의 크기로 형성함으로서, 반도체 패키지의 크기를 축소하여 경박단소화 함은 물론, 고집적화 및 고성능화 할 수 있도록 된 것이다.The present invention relates to a structure and a manufacturing method of a chip scale package (CSP), by forming the size of the semiconductor package to the size of the semiconductor chip, to reduce the size and size of the semiconductor package, as well as high integration And high performance.
Description
본 발명은 CSP(Chip Scale Package ; 칩 스케일 패키지)의 구조 및 제조방법에 관한 것으로, 더욱 상세하게는 반도체 패키지의 크기를 반도체칩의 크기로 형성함으로서, 반도체 패키지의 크기를 축소하여 경박단소화 함은 물론, 고집적화 및 고성능화 할 수 있도록 된 CSP(Chip Scale Package ; 칩 스케일 패키지)의 구조 및 제조방법에 관한 것이다.The present invention relates to a structure and a manufacturing method of a chip scale package (CSP), and more particularly, by forming the size of the semiconductor package to the size of the semiconductor chip, reducing the size of the semiconductor package to reduce the light and short Of course, the present invention relates to a structure and a manufacturing method of a chip scale package (CSP) capable of high integration and high performance.
일반적으로 반도체패키지는 그 종류에 따라 수지밀봉 패키지, TCP(Tape Carrier Package)패키지, 글래스밀봉 패키지, 금속밀봉 패키지 등이 있다. 이와 같은 반도체 패키지는 실장방법에 따라 삽입형과 표면실장(Surface Mount Technology, SMT)형으로 분류하게 되는데, 삽입형으로서 대표적인 것은 DIP(Dual In-line Package), PGA(Pin Grid Array) 등이 있고, 표면실장형으로서 대표적인 것은 QFP(Quad Flat Package), PLCC(Plastic Leaded Chip Carrier), CLCC(Ceramic Leaded Chip Carrier), BGA(Ball Grid Array) 등이 있다.Generally, semiconductor packages include resin sealing packages, tape carrier packages (TCP), glass sealing packages, and metal sealing packages. Such semiconductor packages are classified into insertion type and surface mount technology (SMT) type according to the mounting method. Representative types of insert type include DIP (Dual In-line Package) and PGA (Pin Grid Array). Typical examples of the mounting type include a quad flat package (QFP), a plastic leaded chip carrier (PLC), a ceramic leaded chip carrier (CLCC), and a ball grid array (BGA).
최근에는 전자제품의 소형화에 따라 인쇄회로기판의 부품 장착도를 높이기 위해서 삽입형 반도체패키지 보다는 표면실장형 반도체패키지가 널리 사용되고 있는데, 이러한 종래의 패키지에 대한 구조를 도 1과 도 2를 참조하여 QFP와, BGA패키지에 대하여 설명하면 다음과 같다.Recently, in order to increase the mounting degree of components of a printed circuit board according to the miniaturization of electronic products, surface mount type semiconductor packages are widely used rather than insert type semiconductor packages. The structure of such a conventional package is described with reference to FIGS. 1 and 2. The following describes the BGA package.
도 1은 종래의 일반적인 반도체 패키지의 QFP로서, 그 구조는 전자회로가 집적되어 있는 반도체칩(11)과, 상기 반도체칩(11)이 에폭시(16)에 의해 부착되는 탑재판(15)과, 상기 반도체칩(11)의 신호를 외부로 전달할 수 있는 다수의 리드(12)와, 상기 반도체칩(11)과 리드(12)를 연결시켜 주는 와이어(13)와, 상기 반도체칩(11)과 그 외 주변구성품들을 외부의 산화 및 부식으로부터 보호하기 위하여 그 외부를 감싼 봉지수지(14)로 이루어지는 것이다.1 is a QFP of a conventional general semiconductor package, the structure of which is a semiconductor chip 11 in which an electronic circuit is integrated, a mounting plate 15 to which the semiconductor chip 11 is attached by an epoxy 16, and A plurality of leads 12 capable of transmitting signals of the semiconductor chip 11 to the outside, wires 13 connecting the semiconductor chips 11 and the leads 12, the semiconductor chips 11, In order to protect other peripheral components from external oxidation and corrosion, it is made of a sealing resin 14 wrapped around the outside thereof.
이러한 구성에 의한 종래의 QFP는 반도체칩(11)으로부터 출력된 신호와 와이어(13)를 통해 리드(12)로 전달되며, 상기 리드(12)는 마더보드에 연결되어 있어 리드(12)로 전달된 신호가 마더보드를 주변소자로 전달된다. 주변소자에서 발생된 신호가 반도체칩(11)으로 전달되는 경우에는 위에서 설명한 경로의 역순으로 신호가 전달되는 것이다.The conventional QFP by such a configuration is transmitted to the lead 12 through the signal and the wire 13 output from the semiconductor chip 11, the lead 12 is connected to the motherboard is transferred to the lead 12 Signal is transmitted to the motherboard. When the signal generated from the peripheral device is transferred to the semiconductor chip 11, the signal is transmitted in the reverse order of the path described above.
그러나, 상기의 QFP는 반도체칩이 점차적으로 고성능화되어 가면서 핀의 수가 더욱더 많아지게 되는데 비하여, 핀과 핀 사이의 거리를 일정치 이하로 좁히는 것은 기술적으로 어려움이 있기 때문에 많은 핀을 모두 수용하기 위해서는 패키지가 커지게 되는 단점이 있다. 이것은 반도체패키지의 소형화 추세에 역행하는 결과를 낳는 문제점이 있는 것이다.However, the QFP has a higher number of pins as the semiconductor chip is gradually improved in performance. However, it is technically difficult to narrow the distance between the pins to a predetermined value or less, so that the package can accommodate all the pins. There is a disadvantage that becomes large. This is a problem that results in the contrary to the trend of miniaturization of semiconductor packages.
이와 같이 다핀화에 따른 기술적 요구를 해결하기 위해서 등장한 것이 BGA패키지로서, 이는 입출력 수단으로서 반도체패키지의 일면전체에 융착된 솔더볼을 이용함으로써 QFP 보다 많은 수의 입출력 신호를 수용할 수 있음은 물론, 그 크기도 QFP 보다 작게 형성된 것이다.The BGA package, which appeared to solve the technical demands of the multi-pinning method, can accept a larger number of input / output signals than the QFP by using solder balls fused to the entire surface of the semiconductor package as an input / output means. The size is also smaller than QFP.
이러한 BGA패키지의 구성은 도 2에 도시된 바와 같이 표면에 회로패턴(25a)이 형성되고, 이 회로패턴(25a)을 보호하기 위해 솔더마스크(25b)가 코팅된 회로기판(25)과, 상기 회로기판(25)의 상명 중앙에 부착된 반도체칩(21)과, 상기 반도체칩(21)과 상기 회로기판(25)의 회로패턴(25a)을 전기적으로 연결하여 신호를 전달하는 와이어(23)와, 상기 회로기판(25)의 회로패턴(25a)에 융착되어 외부로 신호를 전달하는 솔더볼(22)과, 상기 반도체칩(21)과 그 외 주변구성품들을 외부의 산화 및 부식으로부터 보호하기 위하여 그 외부를 감싼 봉지수지(24)로 구성되는 것이다.As shown in FIG. 2, the BGA package includes a circuit board 25 having a circuit pattern 25a formed on its surface, and a solder mask 25b coated thereon to protect the circuit pattern 25a. The semiconductor chip 21 attached to the center of the circuit board 25 and the wire 23 for electrically transmitting the signal by electrically connecting the semiconductor chip 21 and the circuit pattern 25a of the circuit board 25. And solder balls 22 fused to the circuit patterns 25a of the circuit board 25 to transmit signals to the outside, and to protect the semiconductor chip 21 and other peripheral components from external oxidation and corrosion. It is composed of a bag resin 24 wrapped around the outside.
이러한 구성의 BGA패키지는 반도체칩(21)으로부터 출력된 신호가 와이어(23)를 통해서 회로패턴(25a)으로 전달되며, 상기 회로패턴(25a)으로 전달된 신호는 여기에 융착되어 있는 솔더볼(22)을 통하여 마더보드로 전달되어 주변소자로 전달된다. 주변소자에서 발생된 신호가 반도체칩(21)으로 전달되는 경우에는 위에서 설명한 경로의 역순으로 신호가 전달되는 것이다.The BGA package having such a configuration transmits a signal output from the semiconductor chip 21 to the circuit pattern 25a through the wire 23, and the signal transmitted to the circuit pattern 25a is fused to the solder ball 22. It is transmitted to the motherboard through) to the peripheral device. When the signal generated from the peripheral device is transferred to the semiconductor chip 21, the signal is transmitted in the reverse order of the path described above.
그러나, 이러한 BGA패키지는 내부에 내장된 반도체칩의 크기에 비해서 패키지의 크기가 몇 배 이상 크기 때문에 전자제품들을 소형화시키기에는 한계가 있었던 것이다. 또한, 상기의 BGA패키지는 회로기판이 고가이므로 제품의 가격이 상승되는 요인이 됨은 물론, 상기 회로기판을 통해서 습기가 침투됨으로써 크랙이 발생하게 되는 문제점이 있다.However, such a BGA package has a limitation in miniaturizing electronic products because the package size is several times larger than the size of a semiconductor chip embedded therein. In addition, the BGA package has a problem that the price of the product is increased because the circuit board is expensive, as well as cracks are generated by the penetration of moisture through the circuit board.
이와 같은 문제점을 해결하기 위하여, BGA 방식이 아니면서도 기판 접속 리드를 패키지의 외부로 돌출시키지 않고 패키지의 하면으로 노출시킴으로써 실장면적을 줄임과 동시에, 반도체 패키지의 크기를 반도체칩의 크기로 형성하여 패키지를 경박단소화 한 BLP(Bottom Leaded Package)형 CSP(Chip Scale Package)가 도 3에 도시되어 있다.In order to solve such a problem, the package area is reduced by exposing the board connection lead to the bottom surface of the package without protruding the outside of the package, and the size of the semiconductor package is formed to the size of the semiconductor chip without exposing the substrate connection lead to the outside of the package. A BLP (Bottom Leaded Package) type Chip Scale Package (CSP) having a light weight and short size is shown in FIG. 3.
이러한 종래의 BLP형 CSP의 구조는 전자회로가 집적되어 있는 반도체칩(31)과, 상기 반도체칩(31)을 지지함과 아울러 반도체칩(31)의 신호를 외부로 전기적 접속 경로를 이루는 리드(32)와, 상기 반도체칩(31)을 전기적으로 연결시키는 와이어(33)와, 상기의 반도체칩(31), 리드(32) 및 와이어(33)를 외부환경으로부터 보호하기 위한 봉지수지(34)를 포함하며, 상기의 리드(32)는 내측으로 봉지수지(34)의 저면에 노출되도록 리드(32)를 절곡 형성하여서 된 것이다.The structure of the conventional BLP type CSP includes a semiconductor chip 31 in which an electronic circuit is integrated, a lead that supports the semiconductor chip 31 and forms an electrical connection path to an external signal of the semiconductor chip 31 ( 32, a wire 33 electrically connecting the semiconductor chip 31, and an encapsulation resin 34 for protecting the semiconductor chip 31, the lead 32, and the wire 33 from an external environment. The lead 32 is formed by bending the lead 32 to be exposed to the bottom surface of the encapsulation resin 34.
그러나, 상기한 BLP형 CSP는 반도체칩(31)을 전기적으로 연결시키는 와이어(33)의 루프(Loop)의 높이 만큼 패키지의 두께가 두껍게 되고, 상기 와이어(33)를 리드(32)에 본딩하기 위한 본딩 에리어(Bonding Area) 만큼의 면적이 필요함으로서 패키지의 크기가 커지게 되는 등의 단점이 있어 CSP로 적합하지 못한 것이다. 또한, 상기의 BLP형 CSP는 반도체칩(31)의 전기적인 신호를 와이어(33)를 통하여 연결시킴으로서 와이어(33) 길이 만큼의 경로가 길게 되어 동작 속도를 저하시키는 것이다.However, the BLP type CSP has a thickness of a package thickened by the height of a loop of the wire 33 that electrically connects the semiconductor chip 31, and bonding the wire 33 to the lead 32. It is not suitable as a CSP because there is a disadvantage that the size of the package is increased by requiring an area as large as a bonding area. In addition, the BLP type CSP connects an electrical signal of the semiconductor chip 31 through the wire 33 to lengthen a path as long as the length of the wire 33 to reduce the operation speed.
도 4는 종래의 CSP로서, 그 구조는 전자회로가 집적되어 있는 반도체칩(41)과, 상기 반도체칩(41)의 신호를 외부로의 전기적 접속 경로를 이루는 리드(42)와, 상기 반도체칩(41)을 전기적으로 연결시키는 범프(43)와, 상기의 반도체칩(41)와, 리드(42) 및 범프(43)를 외부환경으로부터 보호하기 위한 봉지수지(44)를 포함하며, 상기의 리드(42)는 내측으로 봉지수지(44)의 저면으로 노출되도록 리드(42)를 절곡 형성하여서 된 것이다.4 shows a conventional CSP, the structure of which is a semiconductor chip 41 in which electronic circuits are integrated, a lead 42 which forms an electrical connection path to a signal from the semiconductor chip 41 to the outside, and the semiconductor chip. A bump 43 for electrically connecting the 41 and a semiconductor resin 41 and an encapsulation resin 44 for protecting the lid 42 and the bump 43 from an external environment. The lead 42 is formed by bending the lead 42 to be exposed to the bottom surface of the encapsulation resin 44.
그러나, 상기한 CSP는 리드(42)를 절곡 형성한 상태의 패키지이므로 리드(42)의 절곡부 만큼 패키지의 두께 및 면적이 커지게 되어 CSP에 적합하지가 않은 것이다.However, since the CSP is a package in which the lead 42 is bent, the thickness and area of the package are increased by the bent portion of the lead 42, which is not suitable for the CSP.
또한, 리드(42)를 절곡 형성하기 위한 공정상의 어려움이 있는 것이다.In addition, there is a difficulty in the process for bending the lead 42.
본 발명의 목적은 이와 같은 문제점을 해결하기 위하여 발명된 것으로서, 반도체칩의 신호인출패드를 직접 리드에 연결하여 전기적인 신호를 전달하도록 하고, 리드의 절곡부를 없앰으로서 반도체 패키지의 크기를 반도체칩의 크기로 한 CSP의 구조 및 제조방법을 제공함에 있다.An object of the present invention is to solve the above problems, and to connect the signal extraction pad of the semiconductor chip directly to the lead to transfer the electrical signal, eliminating the bent portion of the lead to reduce the size of the semiconductor package To provide a structure and a manufacturing method of the CSP in size.
도 1은 종래의 일반적인 반도체 패키지의 구조를 나타낸 단면도1 is a cross-sectional view showing the structure of a conventional semiconductor package in the related art
도 2는 종래의 BGA패키지의 구조를 나타낸 단면도Figure 2 is a cross-sectional view showing the structure of a conventional BGA package
도 3은 종래의 BLP형 CSP의 구조를 나타낸 단면도Figure 3 is a cross-sectional view showing the structure of a conventional BLP type CSP
도 4는 종래의 CSP의 구조를 나타낸 단면도Figure 4 is a cross-sectional view showing the structure of a conventional CSP
도 5는 본 발명에 따른 CSP의 구성을 나타낸 단면도5 is a cross-sectional view showing the configuration of a CSP according to the present invention;
도 6은 본 발명에 따른 CSP가 마더보드에 실장된 상태를 나타낸 단면도Figure 6 is a cross-sectional view showing a state in which the CSP is mounted on the motherboard according to the present invention
도 7은 본 발명에 따른 CSP의 실시예를 나타낸 단면도7 is a cross-sectional view showing an embodiment of a CSP according to the present invention.
도 8은 이방성전도필름의 구조를 나타낸 단면도8 is a cross-sectional view showing the structure of the anisotropic conductive film
* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings
51 : 반도체칩52 : 리드51 semiconductor chip 52 lead
53 : 범프54 : 봉지수지53: bump 54: bag resin
55 : 이방성전도필름(Anisotropic Conductive Film)55: Anisotropic Conductive Film
이하, 본 발명을 첨부된 도면을 참조하여 상세히 설명하면 다음과 같다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
도 5는 본 발명에 따른 CSP(Chip Scale Package ; 칩 스케일 패키지)의 구조를 나타낸 단면도이고, 도 6은 본 발명에 따른 CSP를 마더보드에 실장한 상태의 단면도로서, 그 구조는 전자회로가 집적되어 있는 반도체칩(51)과, 상기 반도체칩(51)의 신호를 전기적 접속시키는 범프(53)와, 상기 범프(53)에 연결되어 반도체칩(51)의 신호를 외부로 전달하는 리드(52)와, 상기의 반도체칩(51), 범프(53) 및 리드(52)를 외부환경으로부터 보호하기 위하여 감싸진 봉지수지(54)를 포함하며, 상기의 리드(52)는 봉지수지(54)의 측면으로 돌출 됨이 없이 봉지수지(54)의 저면으로 노출되는 것을 특징으로 한다.5 is a cross-sectional view illustrating a structure of a chip scale package (CSP) according to the present invention, and FIG. 6 is a cross-sectional view of a state in which a CSP according to the present invention is mounted on a motherboard. A semiconductor chip 51, a bump 53 for electrically connecting a signal of the semiconductor chip 51, and a lead 52 connected to the bump 53 to transfer a signal of the semiconductor chip 51 to the outside. ), And the encapsulation resin 54 wrapped to protect the semiconductor chip 51, the bumps 53, and the lid 52 from the external environment, wherein the lid 52 is the encapsulation resin 54. It is characterized in that exposed to the bottom surface of the encapsulation resin 54 without protruding to the side.
도 7은 본 발명에 따른 CSP의 실시예를 나타낸 단면도로서, 상기 반도체칩(51)의 상면을 봉지수지(54)의 외부로 노출시킨 것으로, 이는 반도체칩(51)의 회로 동작시 발생되는 열을 효율적으로 외부로 방출시킴으로서 패키지의 성능을 향상 시킬 수 있는 것이다.7 is a cross-sectional view showing an embodiment of the CSP according to the present invention, in which the upper surface of the semiconductor chip 51 is exposed to the outside of the encapsulation resin 54, which is a heat generated during a circuit operation of the semiconductor chip 51. Efficiently discharging to the outside can improve the performance of the package.
상기 범프(53)와 리드(52)의 연결은 솔더볼(Solder Ball)을 이용하여 리플로우(Reflow) 방법에 의해 전기적으로 연결하거나, 또는 이방성전도필름(55 ; Anisotropic Conductive Film)을 사용하여 전기적으로 연결할 수 있는 것이다.The bumps 53 and the lead 52 are electrically connected by a reflow method using a solder ball, or electrically by using an anisotropic conductive film 55. It can be connected.
상기의 이방성전도필름(55)은 도 8에 도시된 바와 같이 대략 50㎛ 두께로 된 접착 필름(55a)의 내부에 대략 5㎛의 직경으로 된 수백개의 금속성알맹이(55b)에 폴리머(Polymer)가 코팅되어 있는 것으로, 이러한 이방성전도필름(55)은 열압착시 압착된 부분은 열로 인하여 금속성알맹이(55b)에 코팅된 폴리머가 녹게 되어 통전상태를 유지하고, 그 외 부분은 절연상태를 유지하는 것이다. 이때, 범프(53)의 사이즈는 30㎛으로 형성되는 것이 가장 이상적이다.As shown in FIG. 8, the anisotropic conductive film 55 has a polymer in hundreds of metallic kernels 55b having a diameter of about 5 μm inside the adhesive film 55 a having a thickness of about 50 μm. The anisotropic conductive film 55, which is coated, is a polymer that is coated on the metallic kernel 55b due to heat when the compressed portion is pressed during thermocompression to maintain an energized state, and other portions to maintain an insulating state. . At this time, it is most ideal that the bump 53 is formed to have a size of 30 μm.
상기와 같이 구성된 본 발명의 CSP는 반도체칩(51)의 크기로 반도체패키지를 형성할 수 있는 것으로, 그 작용은 반도체칩(51)으로부터 출력된 신호가 범프(53)를 통해서 리드(52)로 직접 전달되며, 상기 리드(52)로 전달된 신호는 마더보드(56 ; Mother Board)로 전달되어 주변소자로 전달된다. 주변소자에서 발생된 신호가 반도체칩(51)으로 전달되는 경우에는 위에서 설명한 경로의 역순으로 신호가 전달되는 것이다.The CSP of the present invention configured as described above is capable of forming a semiconductor package with the size of the semiconductor chip 51. The function of the CSP is that the signal output from the semiconductor chip 51 passes through the bumps 53 to the leads 52. Directly transmitted, the signal transmitted to the lead 52 is transmitted to the motherboard (56; Mother Board) is delivered to the peripheral device. When the signal generated from the peripheral device is transferred to the semiconductor chip 51, the signal is transmitted in the reverse order of the path described above.
이와 같은 본 발명의 CSP 제조방법은, 전자회로가 집적되어 있는 반도체칩(51)의 신호를 전기적 접속시키는 범프(53)를 형성하는 단계와, 상기 범프(53)에 연결되어 반도체칩(51)의 신호를 외부로 전달하는 리드(52)에 본딩하는 단계와, 상기의 리드(52)를 저면으로 노출되도록 상기의 반도체칩(51)과 범프(53)를 포함하여 봉지수지(54)로 몰딩하는 단계와, 상기의 봉지수지(54) 측면으로 돌출된 리드(52)를 절단하는 단계로 이루어지는 것을 특징으로 한다.The CSP manufacturing method of the present invention comprises the steps of forming a bump 53 for electrically connecting a signal of a semiconductor chip 51 in which an electronic circuit is integrated, and is connected to the bump 53 to provide a semiconductor chip 51. Bonding the lead 52 to the outside, and molding the encapsulation resin 54 including the semiconductor chip 51 and the bump 53 so as to expose the lead 52 to the bottom surface. And cutting the lead 52 protruding toward the side of the encapsulation resin 54.
상기의 리드(52)에 본딩하는 단계는 상기의 범프(53)를 솔더볼(Solder Ball)로 형성하고, 상기의 솔더볼을 퍼니스(Furnace)에서 리플로우(Reflow) 시키는 단계를 포함하는 것이다.Bonding to the lead 52 includes forming the bumps 53 as solder balls and reflowing the solder balls in a furnace.
또한, 상기의 리드(52)에 본딩하는 단계는 상기의 범프(53)와 리드(52)를 이방성전도필름(55)을 이용하여 열압착에 의해 전기적 연결시키는 단계를 포함하는 것이다.In addition, the bonding to the lead 52 includes electrically connecting the bumps 53 and the lead 52 by thermocompression bonding using the anisotropic conductive film 55.
상기의 제조방법에 의해 형성된 본 발명의 CSP는 반도체칩의 크기로 패키지의 크기를 축소하여 경박단소화 함은 물론, 고집적화 및 고성능화 할 수 있는 패키지이다.The CSP of the present invention formed by the above-described manufacturing method is a package that can reduce the size of the package to the size of the semiconductor chip, reduce the size of the package, as well as achieve high integration and high performance.
이상의 설명에서와 같은 본 발명의 CSP에 의하면, 반도체 패키지의 크기를 반도체칩의 크기로 형성함으로서, 반도체 패키지의 크기를 축소하여 경박단소화 함은 물론, 고집적화 및 고성능화 할 수 있는 효과가 있다.According to the CSP of the present invention as described above, by forming the size of the semiconductor package to the size of the semiconductor chip, it is possible to reduce the size of the semiconductor package to reduce the size and light weight, as well as high integration and high performance.
Claims (7)
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| KR1019960043842A KR100230921B1 (en) | 1996-10-04 | 1996-10-04 | A structure of csp and manufacturing method thereof |
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| KR1019960043842A KR100230921B1 (en) | 1996-10-04 | 1996-10-04 | A structure of csp and manufacturing method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010069358A (en) * | 2001-03-14 | 2001-07-25 | 임종철 | Semiconductor chip bonding by eutectic alloy balls embedded in anisotropic conducting film |
| KR100576889B1 (en) * | 2000-12-29 | 2006-05-03 | 앰코 테크놀로지 코리아 주식회사 | Semiconductor package and its manufacturing method |
| KR100583494B1 (en) * | 2000-03-25 | 2006-05-24 | 앰코 테크놀로지 코리아 주식회사 | Semiconductor package |
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| JPH03157959A (en) * | 1989-11-15 | 1991-07-05 | Seiko Epson Corp | Mounting structure and its manufacture |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR100583494B1 (en) * | 2000-03-25 | 2006-05-24 | 앰코 테크놀로지 코리아 주식회사 | Semiconductor package |
| KR100576889B1 (en) * | 2000-12-29 | 2006-05-03 | 앰코 테크놀로지 코리아 주식회사 | Semiconductor package and its manufacturing method |
| KR20010069358A (en) * | 2001-03-14 | 2001-07-25 | 임종철 | Semiconductor chip bonding by eutectic alloy balls embedded in anisotropic conducting film |
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