KR102876398B1 - 프로브 카드용 얼라이먼트 칩, 프로브 카드 및 프로브 카드 보수 방법 - Google Patents

프로브 카드용 얼라이먼트 칩, 프로브 카드 및 프로브 카드 보수 방법

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Publication number
KR102876398B1
KR102876398B1 KR1020237007418A KR20237007418A KR102876398B1 KR 102876398 B1 KR102876398 B1 KR 102876398B1 KR 1020237007418 A KR1020237007418 A KR 1020237007418A KR 20237007418 A KR20237007418 A KR 20237007418A KR 102876398 B1 KR102876398 B1 KR 102876398B1
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KR
South Korea
Prior art keywords
symbol
alignment
probe
substrate
chip
Prior art date
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Active
Application number
KR1020237007418A
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English (en)
Korean (ko)
Other versions
KR20230044303A (ko
Inventor
다카시 요시다
Original Assignee
재팬 일렉트로닉 메트리얼스 코오포레이숀
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 재팬 일렉트로닉 메트리얼스 코오포레이숀 filed Critical 재팬 일렉트로닉 메트리얼스 코오포레이숀
Publication of KR20230044303A publication Critical patent/KR20230044303A/ko
Application granted granted Critical
Publication of KR102876398B1 publication Critical patent/KR102876398B1/ko
Active legal-status Critical Current
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Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0491—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1020237007418A 2021-02-19 2021-02-19 프로브 카드용 얼라이먼트 칩, 프로브 카드 및 프로브 카드 보수 방법 Active KR102876398B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/006256 WO2022176143A1 (ja) 2021-02-19 2021-02-19 プローブカード用アライメントチップ、プローブカード及びプローブカード補修方法

Publications (2)

Publication Number Publication Date
KR20230044303A KR20230044303A (ko) 2023-04-03
KR102876398B1 true KR102876398B1 (ko) 2025-10-24

Family

ID=82930435

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237007418A Active KR102876398B1 (ko) 2021-02-19 2021-02-19 프로브 카드용 얼라이먼트 칩, 프로브 카드 및 프로브 카드 보수 방법

Country Status (5)

Country Link
US (1) US12596147B2 (https=)
JP (1) JP7459368B2 (https=)
KR (1) KR102876398B1 (https=)
CN (1) CN116194784A (https=)
WO (1) WO2022176143A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116547543B (zh) 2021-03-15 2026-01-27 日本电子材料株式会社 探针卡

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001330626A (ja) * 2000-05-22 2001-11-30 Micronics Japan Co Ltd プローブカード及びこれにアライメントマークを形成する方法

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JPH0196944A (ja) * 1987-10-08 1989-04-14 Nec Corp 高周波特性測定装置
JPH1096944A (ja) * 1996-09-25 1998-04-14 Toshiba Electron Eng Corp 電気的接続構造および液晶表示装置
JPH11154694A (ja) * 1997-11-21 1999-06-08 Matsushita Electric Ind Co Ltd ウェハ一括型測定検査用アライメント方法およびプローブカードの製造方法
US6429671B1 (en) * 1998-11-25 2002-08-06 Advanced Micro Devices, Inc. Electrical test probe card having a removable probe head assembly with alignment features and a method for aligning the probe head assembly to the probe card
GB9826596D0 (en) 1998-12-04 1999-01-27 P J O Ind Limited Conductive materials
JP2000346875A (ja) 1999-06-07 2000-12-15 Advantest Corp プローブカードおよびこれを用いたｉｃ試験装置
JP2006078351A (ja) * 2004-09-10 2006-03-23 Matsushita Electric Ind Co Ltd プローブカード
JP4187718B2 (ja) * 2004-12-20 2008-11-26 松下電器産業株式会社 プローブカード
JP2007071699A (ja) * 2005-09-07 2007-03-22 Rika Denshi Co Ltd 垂直型プローブカード
JP2014146829A (ja) * 2005-11-10 2014-08-14 Renesas Electronics Corp 半導体チップおよび半導体装置
JP4971636B2 (ja) * 2006-01-06 2012-07-11 川崎マイクロエレクトロニクス株式会社 プローブカードの取り付け位置ずれの検出方法及びプローバ装置
JP2007200934A (ja) * 2006-01-23 2007-08-09 Fujitsu Ltd プローブカードのプローブ針の針跡評価方法
WO2007092593A2 (en) * 2006-02-08 2007-08-16 Sv Probe Pte Ltd. Probe repair methods
WO2008120575A1 (ja) * 2007-04-03 2008-10-09 Advantest Corporation コンタクタの実装方法
JP5199859B2 (ja) 2008-12-24 2013-05-15 株式会社日本マイクロニクス プローブカード
JP2011075532A (ja) * 2009-10-02 2011-04-14 Japan Electronic Materials Corp プローブカード及びその製造方法
JP2011117761A (ja) * 2009-12-01 2011-06-16 Japan Electronic Materials Corp プローブカードおよびプローブカードの製造方法
JP2011204889A (ja) * 2010-03-25 2011-10-13 Kyocera Corp インターポーザ基板
JP5297491B2 (ja) * 2011-03-23 2013-09-25 ルネサスエレクトロニクス株式会社 半導体装置
JP5847663B2 (ja) * 2012-08-01 2016-01-27 日本電子材料株式会社 プローブカード用ガイド板の製造方法
JP6348626B2 (ja) * 2017-02-23 2018-06-27 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
US10529593B2 (en) * 2018-04-27 2020-01-07 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor package comprising molding compound having extended portion and manufacturing method of semiconductor package
TW202022386A (zh) 2018-12-04 2020-06-16 蔚華科技股份有限公司 測試半導體設備之方法及結構
CN116547543B (zh) * 2021-03-15 2026-01-27 日本电子材料株式会社 探针卡
KR102760918B1 (ko) * 2021-04-23 2025-02-03 재팬 일렉트로닉 메트리얼스 코오포레이숀 프로브 카드 및 프로브 카드 보수 방법

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001330626A (ja) * 2000-05-22 2001-11-30 Micronics Japan Co Ltd プローブカード及びこれにアライメントマークを形成する方法

Also Published As

Publication number Publication date
WO2022176143A1 (ja) 2022-08-25
JP7459368B2 (ja) 2024-04-01
US12596147B2 (en) 2026-04-07
TW202234067A (zh) 2022-09-01
CN116194784A (zh) 2023-05-30
JPWO2022176143A1 (https=) 2022-08-25
US20240103071A1 (en) 2024-03-28
KR20230044303A (ko) 2023-04-03

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