KR102861297B1 - 고에너지선용 레지스트 조성물, 고에너지선용 레지스트 조성물의 제조 방법, 레지스트 패턴 형성 방법 및 반도체 장치의 제조 방법 - Google Patents

고에너지선용 레지스트 조성물, 고에너지선용 레지스트 조성물의 제조 방법, 레지스트 패턴 형성 방법 및 반도체 장치의 제조 방법

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Publication number
KR102861297B1
KR102861297B1 KR1020237037503A KR20237037503A KR102861297B1 KR 102861297 B1 KR102861297 B1 KR 102861297B1 KR 1020237037503 A KR1020237037503 A KR 1020237037503A KR 20237037503 A KR20237037503 A KR 20237037503A KR 102861297 B1 KR102861297 B1 KR 102861297B1
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KR
South Korea
Prior art keywords
resist composition
group
present disclosure
film
energy rays
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KR1020237037503A
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English (en)
Korean (ko)
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KR20240009394A (ko
Inventor
츠요시 고야
료헤이 마에다
Original Assignee
가부시키가이샤 닛폰 쇼쿠바이
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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0042—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020237037503A 2021-03-31 2022-03-17 고에너지선용 레지스트 조성물, 고에너지선용 레지스트 조성물의 제조 방법, 레지스트 패턴 형성 방법 및 반도체 장치의 제조 방법 Active KR102861297B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021059689 2021-03-31
JPJP-P-2021-059689 2021-03-31
PCT/JP2022/012230 WO2022209950A1 (ja) 2021-03-31 2022-03-17 高エネルギー線用レジスト組成物、高エネルギー線用レジスト組成物の製造方法、レジストパターン形成方法、及び半導体装置の製造方法

Publications (2)

Publication Number Publication Date
KR20240009394A KR20240009394A (ko) 2024-01-22
KR102861297B1 true KR102861297B1 (ko) 2025-09-19

Family

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KR1020237037503A Active KR102861297B1 (ko) 2021-03-31 2022-03-17 고에너지선용 레지스트 조성물, 고에너지선용 레지스트 조성물의 제조 방법, 레지스트 패턴 형성 방법 및 반도체 장치의 제조 방법

Country Status (4)

Country Link
JP (1) JP7634650B2 (https=)
KR (1) KR102861297B1 (https=)
TW (1) TWI877468B (https=)
WO (1) WO2022209950A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7737106B2 (ja) * 2021-07-16 2025-09-10 三星電子株式会社 イオン性塩および感放射線レジスト組成物
US20260050210A1 (en) * 2022-12-08 2026-02-19 Nippon Shokubai Co., Ltd. Resist composition and method for producing same
KR20260012803A (ko) * 2023-05-24 2026-01-27 도오꾜오까고오교 가부시끼가이샤 패턴 형성 방법 및 금속 화합물 함유막용 처리액

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4554665B2 (ja) * 2006-12-25 2010-09-29 富士フイルム株式会社 パターン形成方法、該パターン形成方法に用いられる多重現像用ポジ型レジスト組成物、該パターン形成方法に用いられるネガ現像用現像液及び該パターン形成方法に用いられるネガ現像用リンス液
KR101945055B1 (ko) * 2011-09-26 2019-02-01 제이에스알 가부시끼가이샤 감방사선성 수지 조성물, 레지스트 패턴 형성 방법, 산 발생제 및 화합물
US9310684B2 (en) * 2013-08-22 2016-04-12 Inpria Corporation Organometallic solution based high resolution patterning compositions
KR102696070B1 (ko) * 2014-10-23 2024-08-16 인프리아 코포레이션 유기 금속 용액 기반의 고해상도 패터닝 조성물 및 상응하는 방법
WO2018101463A1 (ja) * 2016-12-02 2018-06-07 三菱瓦斯化学株式会社 化合物、樹脂、組成物、パターン形成方法及び精製方法
JP7101932B2 (ja) * 2017-03-23 2022-07-19 Jsr株式会社 Ｅｕｖリソグラフィー用ケイ素含有膜形成組成物、ｅｕｖリソグラフィー用ケイ素含有膜及びパターン形成方法
JP7236817B2 (ja) * 2017-06-19 2023-03-10 日本化薬株式会社 反応性ポリカルボン酸化合物、それを用いた活性エネルギー線硬化型樹脂組成物、その硬化物及びその用途
JP7147687B2 (ja) * 2019-05-27 2022-10-05 信越化学工業株式会社 分子レジスト組成物及びこれを用いるパターン形成方法

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Publication number Publication date
JP7634650B2 (ja) 2025-02-21
KR20240009394A (ko) 2024-01-22
TW202248202A (zh) 2022-12-16
WO2022209950A1 (ja) 2022-10-06
JPWO2022209950A1 (https=) 2022-10-06
TWI877468B (zh) 2025-03-21

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