KR102810199B1 - 밀폐부를 만들기 위한 다중 노드 다회 사용 o-링 및 방법 - Google Patents

밀폐부를 만들기 위한 다중 노드 다회 사용 o-링 및 방법 Download PDF

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Publication number
KR102810199B1
KR102810199B1 KR1020217004592A KR20217004592A KR102810199B1 KR 102810199 B1 KR102810199 B1 KR 102810199B1 KR 1020217004592 A KR1020217004592 A KR 1020217004592A KR 20217004592 A KR20217004592 A KR 20217004592A KR 102810199 B1 KR102810199 B1 KR 102810199B1
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KR
South Korea
Prior art keywords
sealing
sealed
component
separable
processing chamber
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KR1020217004592A
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English (en)
Korean (ko)
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KR20210024190A (ko
Inventor
샤군 판카즈 마헤슈와리
야오-훙 양
킹 파이 리
앤드류 웬 웨이 유
아니루다 팔
톰 케이. 초
치엔-민 리아오
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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Publication of KR20210024190A publication Critical patent/KR20210024190A/ko
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Publication of KR102810199B1 publication Critical patent/KR102810199B1/ko
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/002—Sealings comprising at least two sealings in succession
    • F16J15/008—Sealings comprising at least two sealings in succession with provision to put out of action at least one sealing; One sealing sealing only on standstill; Emergency or servicing sealings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
    • F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
    • F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
    • F16J15/024—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity
    • F16J15/025—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity and with at least one flexible lip
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/062—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/064—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces the packing combining the sealing function with other functions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F16J15/106—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure homogeneous
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/935—Seal made of a particular material
    • Y10S277/944—Elastomer or plastic

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Gasket Seals (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020217004592A 2018-07-19 2019-06-19 밀폐부를 만들기 위한 다중 노드 다회 사용 o-링 및 방법 Active KR102810199B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862700461P 2018-07-19 2018-07-19
US62/700,461 2018-07-19
PCT/US2019/038018 WO2020018226A1 (en) 2018-07-19 2019-06-19 Multinode multi-use o-ring and method for making a seal

Publications (2)

Publication Number Publication Date
KR20210024190A KR20210024190A (ko) 2021-03-04
KR102810199B1 true KR102810199B1 (ko) 2025-05-19

Family

ID=69162374

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217004592A Active KR102810199B1 (ko) 2018-07-19 2019-06-19 밀폐부를 만들기 위한 다중 노드 다회 사용 o-링 및 방법

Country Status (6)

Country Link
US (1) US11359722B2 (enExample)
JP (1) JP7456993B2 (enExample)
KR (1) KR102810199B1 (enExample)
CN (1) CN112424513B (enExample)
TW (1) TWI834688B (enExample)
WO (1) WO2020018226A1 (enExample)

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DE102020106470B3 (de) * 2020-03-10 2020-11-26 Carl Freudenberg Kg Dichtungsanordnung und deren Verwendung
DE102020113090B4 (de) * 2020-05-14 2022-02-03 Carl Freudenberg Kg Dichtring und Dichtungsanordnung, die den Dichtring umfasst
WO2022015512A1 (en) * 2020-07-13 2022-01-20 Lam Research Corporation Seal venting in a substrate processing chamber
DE102020123249A1 (de) 2020-09-07 2022-03-10 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Plattenanker-Dämpfungseinrichtung für ein Kippankerventil, Plattenanker sowie Kippankerventil mit einer Plattenanker-Dämpfungseinrichtung
JP7804393B2 (ja) * 2020-12-17 2026-01-22 カヤバ株式会社 緩衝器
USD1027120S1 (en) 2020-12-17 2024-05-14 Applied Materials, Inc. Seal for an assembly in a vapor deposition chamber
WO2022145737A1 (ko) * 2021-01-04 2022-07-07 피에스케이 주식회사 기판 처리 장치
GB2609415A (en) * 2021-07-29 2023-02-08 Airbus Operations Ltd Seal
JP7698542B2 (ja) * 2021-09-24 2025-06-25 日本特殊陶業株式会社 保持装置
JP7425034B2 (ja) * 2021-12-01 2024-01-30 三菱電線工業株式会社 保護リング、それを備えた接着面保護構造、及び接着面保護方法
CN114483956B (zh) * 2022-04-14 2022-06-28 苏州阿特密特密封科技有限公司 一种汽车用橡胶垫片
JP7877489B2 (ja) * 2022-07-25 2026-06-22 アプライド マテリアルズ インコーポレイテッド リップシール付きシーリング部材
US12297691B2 (en) * 2023-05-11 2025-05-13 Applied Materials, Inc. Seal mechanism for load port doors
WO2025256868A1 (en) * 2024-06-14 2025-12-18 Asml Netherlands B.V. Vented sealing systems and methods for a lithography apparatus

Citations (5)

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JP2002130481A (ja) * 2000-10-25 2002-05-09 Nippon Valqua Ind Ltd 封止リング
US20060220326A1 (en) * 2005-03-30 2006-10-05 Andrew Corporation Multilobe gasket and sealing groove
US20110076848A1 (en) 2009-06-30 2011-03-31 Amitava Datta Semiconductor process chamber and seal
WO2014161677A1 (de) 2013-04-04 2014-10-09 Federal-Mogul Burscheid Gmbh KOLBENRING MIT VERSCHLEIßANZEIGE
JP2014237786A (ja) * 2013-06-10 2014-12-18 アラム株式会社 ゴムまたは合成樹脂製成形品および食品加工プラント

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JPS6058958U (ja) * 1983-09-30 1985-04-24 株式会社日立製作所 真空シ−ル構造
US5579718A (en) 1995-03-31 1996-12-03 Applied Materials, Inc. Slit valve door
EP0806594A1 (en) * 1996-04-30 1997-11-12 Teruaki Masuoka O-ring of a multi-lobular cross section
JPH10318373A (ja) * 1997-05-14 1998-12-04 Morisei Kako:Kk 封止材
JP3349132B2 (ja) * 1999-04-12 2002-11-20 三菱電線工業株式会社 低荷重シール
US6435519B1 (en) * 1999-05-14 2002-08-20 Patrick Michel White Stress-induced gasket
US6776875B2 (en) 2000-02-28 2004-08-17 Applied Materials Inc. Semiconductor substrate support assembly having lobed o-rings therein
JP3986301B2 (ja) 2001-12-04 2007-10-03 日本バルカー工業株式会社 金属ガスケットによる密封構造および密封方法
CN2613647Y (zh) * 2003-05-09 2004-04-28 西安理工大学 一种防泄漏的真空密封装置
KR100877283B1 (ko) * 2004-09-17 2009-01-07 닛폰 바루카 고교 가부시키가이샤 복합 실링재
JP2007155016A (ja) * 2005-12-06 2007-06-21 Nippon Valqua Ind Ltd あり溝用シール材およびこのシール材が装着された真空用ゲート弁
JP4663538B2 (ja) * 2006-01-31 2011-04-06 日本バルカー工業株式会社 あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁
US20080191474A1 (en) * 2007-02-12 2008-08-14 Kotz George J Tri-Lobed O-Ring Seal
US9314864B2 (en) * 2007-07-09 2016-04-19 International Business Machines Corporation C4NP compliant solder fill head seals
DE102009042142A1 (de) * 2009-09-10 2011-03-24 Hecker Werke Gmbh Ringdichtung für ein Schließglied eines Ventils sowie Dichtungsanordnung mit einer solchen Ringdichtung
JP5551947B2 (ja) * 2010-03-10 2014-07-16 東京エレクトロン株式会社 溝用シール材
JP5773152B2 (ja) * 2011-08-19 2015-09-02 Nok株式会社 密封構造
DE102019214641A1 (de) * 2019-09-25 2021-03-25 Evoguard Gmbh Dichtungseinstich für eine radiale Dichtung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002130481A (ja) * 2000-10-25 2002-05-09 Nippon Valqua Ind Ltd 封止リング
US20060220326A1 (en) * 2005-03-30 2006-10-05 Andrew Corporation Multilobe gasket and sealing groove
US20110076848A1 (en) 2009-06-30 2011-03-31 Amitava Datta Semiconductor process chamber and seal
WO2014161677A1 (de) 2013-04-04 2014-10-09 Federal-Mogul Burscheid Gmbh KOLBENRING MIT VERSCHLEIßANZEIGE
JP2014237786A (ja) * 2013-06-10 2014-12-18 アラム株式会社 ゴムまたは合成樹脂製成形品および食品加工プラント

Also Published As

Publication number Publication date
CN112424513A (zh) 2021-02-26
US11359722B2 (en) 2022-06-14
US20200025292A1 (en) 2020-01-23
KR20210024190A (ko) 2021-03-04
JP7456993B2 (ja) 2024-03-27
CN112424513B (zh) 2023-05-23
JP2021531653A (ja) 2021-11-18
TWI834688B (zh) 2024-03-11
TW202007885A (zh) 2020-02-16
WO2020018226A1 (en) 2020-01-23

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