JP7456993B2 - シールを行うためのマルチノード複数回使用ｏリングおよび方法 - Google Patents

シールを行うためのマルチノード複数回使用ｏリングおよび方法 Download PDF

Info

Publication number
JP7456993B2
JP7456993B2 JP2021502757A JP2021502757A JP7456993B2 JP 7456993 B2 JP7456993 B2 JP 7456993B2 JP 2021502757 A JP2021502757 A JP 2021502757A JP 2021502757 A JP2021502757 A JP 2021502757A JP 7456993 B2 JP7456993 B2 JP 7456993B2
Authority
JP
Japan
Prior art keywords
sealing
nodes
separable
processing chamber
ceiling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021502757A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021531653A (ja
JP2021531653A5 (enExample
Inventor
シャグン パンカジ マヘシュワリ
ヤオ－フン ヤン
キング ファイ リー
アンドリュー ウェン ウェイ ユー
アニルッダ パル
トム ケイ チョ
チェン－ミン リャオ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of JP2021531653A publication Critical patent/JP2021531653A/ja
Publication of JP2021531653A5 publication Critical patent/JP2021531653A5/ja
Application granted granted Critical
Publication of JP7456993B2 publication Critical patent/JP7456993B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
    • F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
    • F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
    • F16J15/024—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity
    • F16J15/025—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity and with at least one flexible lip
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/002—Sealings comprising at least two sealings in succession
    • F16J15/008—Sealings comprising at least two sealings in succession with provision to put out of action at least one sealing; One sealing sealing only on standstill; Emergency or servicing sealings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/062—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/064—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces the packing combining the sealing function with other functions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F16J15/106—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure homogeneous
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/935—Seal made of a particular material
    • Y10S277/944—Elastomer or plastic

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Gasket Seals (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2021502757A 2018-07-19 2019-06-19 シールを行うためのマルチノード複数回使用ｏリングおよび方法 Active JP7456993B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862700461P 2018-07-19 2018-07-19
US62/700,461 2018-07-19
PCT/US2019/038018 WO2020018226A1 (en) 2018-07-19 2019-06-19 Multinode multi-use o-ring and method for making a seal

Publications (3)

Publication Number Publication Date
JP2021531653A JP2021531653A (ja) 2021-11-18
JP2021531653A5 JP2021531653A5 (enExample) 2022-06-28
JP7456993B2 true JP7456993B2 (ja) 2024-03-27

Family

ID=69162374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021502757A Active JP7456993B2 (ja) 2018-07-19 2019-06-19 シールを行うためのマルチノード複数回使用ｏリングおよび方法

Country Status (6)

Country Link
US (1) US11359722B2 (enExample)
JP (1) JP7456993B2 (enExample)
KR (1) KR102810199B1 (enExample)
CN (1) CN112424513B (enExample)
TW (1) TWI834688B (enExample)
WO (1) WO2020018226A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020106470B3 (de) * 2020-03-10 2020-11-26 Carl Freudenberg Kg Dichtungsanordnung und deren Verwendung
DE102020113090B4 (de) * 2020-05-14 2022-02-03 Carl Freudenberg Kg Dichtring und Dichtungsanordnung, die den Dichtring umfasst
WO2022015512A1 (en) * 2020-07-13 2022-01-20 Lam Research Corporation Seal venting in a substrate processing chamber
DE102020123249A1 (de) 2020-09-07 2022-03-10 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Plattenanker-Dämpfungseinrichtung für ein Kippankerventil, Plattenanker sowie Kippankerventil mit einer Plattenanker-Dämpfungseinrichtung
JP7804393B2 (ja) * 2020-12-17 2026-01-22 カヤバ株式会社 緩衝器
USD1027120S1 (en) 2020-12-17 2024-05-14 Applied Materials, Inc. Seal for an assembly in a vapor deposition chamber
WO2022145737A1 (ko) * 2021-01-04 2022-07-07 피에스케이 주식회사 기판 처리 장치
GB2609415A (en) * 2021-07-29 2023-02-08 Airbus Operations Ltd Seal
JP7698542B2 (ja) * 2021-09-24 2025-06-25 日本特殊陶業株式会社 保持装置
JP7425034B2 (ja) * 2021-12-01 2024-01-30 三菱電線工業株式会社 保護リング、それを備えた接着面保護構造、及び接着面保護方法
CN114483956B (zh) * 2022-04-14 2022-06-28 苏州阿特密特密封科技有限公司 一种汽车用橡胶垫片
JP7877489B2 (ja) * 2022-07-25 2026-06-22 アプライド マテリアルズ インコーポレイテッド リップシール付きシーリング部材
US12297691B2 (en) * 2023-05-11 2025-05-13 Applied Materials, Inc. Seal mechanism for load port doors
WO2025256868A1 (en) * 2024-06-14 2025-12-18 Asml Netherlands B.V. Vented sealing systems and methods for a lithography apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002130481A (ja) 2000-10-25 2002-05-09 Nippon Valqua Ind Ltd 封止リング
JP2003172452A (ja) 2001-12-04 2003-06-20 Nippon Valqua Ind Ltd 金属ガスケットによる密封構造および密封方法
US20060220326A1 (en) 2005-03-30 2006-10-05 Andrew Corporation Multilobe gasket and sealing groove
JP2014237786A (ja) 2013-06-10 2014-12-18 アラム株式会社 ゴムまたは合成樹脂製成形品および食品加工プラント

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6058958U (ja) * 1983-09-30 1985-04-24 株式会社日立製作所 真空シ−ル構造
US5579718A (en) 1995-03-31 1996-12-03 Applied Materials, Inc. Slit valve door
EP0806594A1 (en) * 1996-04-30 1997-11-12 Teruaki Masuoka O-ring of a multi-lobular cross section
JPH10318373A (ja) * 1997-05-14 1998-12-04 Morisei Kako:Kk 封止材
JP3349132B2 (ja) * 1999-04-12 2002-11-20 三菱電線工業株式会社 低荷重シール
US6435519B1 (en) * 1999-05-14 2002-08-20 Patrick Michel White Stress-induced gasket
US6776875B2 (en) 2000-02-28 2004-08-17 Applied Materials Inc. Semiconductor substrate support assembly having lobed o-rings therein
CN2613647Y (zh) * 2003-05-09 2004-04-28 西安理工大学 一种防泄漏的真空密封装置
KR100877283B1 (ko) * 2004-09-17 2009-01-07 닛폰 바루카 고교 가부시키가이샤 복합 실링재
JP2007155016A (ja) * 2005-12-06 2007-06-21 Nippon Valqua Ind Ltd あり溝用シール材およびこのシール材が装着された真空用ゲート弁
JP4663538B2 (ja) * 2006-01-31 2011-04-06 日本バルカー工業株式会社 あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁
US20080191474A1 (en) * 2007-02-12 2008-08-14 Kotz George J Tri-Lobed O-Ring Seal
US9314864B2 (en) * 2007-07-09 2016-04-19 International Business Machines Corporation C4NP compliant solder fill head seals
US20110076848A1 (en) * 2009-06-30 2011-03-31 Amitava Datta Semiconductor process chamber and seal
DE102009042142A1 (de) * 2009-09-10 2011-03-24 Hecker Werke Gmbh Ringdichtung für ein Schließglied eines Ventils sowie Dichtungsanordnung mit einer solchen Ringdichtung
JP5551947B2 (ja) * 2010-03-10 2014-07-16 東京エレクトロン株式会社 溝用シール材
JP5773152B2 (ja) * 2011-08-19 2015-09-02 Nok株式会社 密封構造
DE102013205912A1 (de) * 2013-04-04 2014-10-09 Federal-Mogul Burscheid Gmbh Kolbenring mit Verschleißanzeige
DE102019214641A1 (de) * 2019-09-25 2021-03-25 Evoguard Gmbh Dichtungseinstich für eine radiale Dichtung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002130481A (ja) 2000-10-25 2002-05-09 Nippon Valqua Ind Ltd 封止リング
JP2003172452A (ja) 2001-12-04 2003-06-20 Nippon Valqua Ind Ltd 金属ガスケットによる密封構造および密封方法
US20060220326A1 (en) 2005-03-30 2006-10-05 Andrew Corporation Multilobe gasket and sealing groove
JP2014237786A (ja) 2013-06-10 2014-12-18 アラム株式会社 ゴムまたは合成樹脂製成形品および食品加工プラント

Also Published As

Publication number Publication date
CN112424513A (zh) 2021-02-26
US11359722B2 (en) 2022-06-14
KR102810199B1 (ko) 2025-05-19
US20200025292A1 (en) 2020-01-23
KR20210024190A (ko) 2021-03-04
CN112424513B (zh) 2023-05-23
JP2021531653A (ja) 2021-11-18
TWI834688B (zh) 2024-03-11
TW202007885A (zh) 2020-02-16
WO2020018226A1 (en) 2020-01-23

Similar Documents

Publication Publication Date Title
KR102810199B1 (ko) 밀폐부를 만들기 위한 다중 노드 다회 사용 o-링 및 방법
US12368025B2 (en) Edge seal for lower electrode assembly
KR101354281B1 (ko) 유전체 식각 시 파티클 오염 감소를 위한 밀봉 엘라스토머 접합 실리콘 전극등
US9859142B2 (en) Edge seal for lower electrode assembly
TWI688028B (zh) 下電極組裝用邊緣密封
KR102178150B1 (ko) 반도체 장비를 위한 밀봉 홈 방법
KR102282723B1 (ko) 엘라스토머 밴드용 설치 픽스처
TW202022977A (zh) 載置台、邊環之定位方法及基板處理裝置
US9355884B2 (en) Installation fixture for elastomer bands and methods of using the same
TWI622123B (zh) 具有微溝槽不黏表面之安裝夾具及安裝彈性體帶的方法
WO2024220242A1 (en) Isolation valve gasket
KR20070060305A (ko) 기판 지지부재 및 이를 구비하는 반도체 제조 장치
KR20060007838A (ko) 가스켓 및 이를 포함하는 반도체 제조 장치
KR20070033196A (ko) Ｅｓｃ를 구비하는 반도체 소자 제조 장치
KR20060124817A (ko) 반도체 제조설비

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220620

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220620

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230731

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20230731

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20231031

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20240104

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240130

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240213

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240314

R150 Certificate of patent or registration of utility model

Ref document number: 7456993

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150