JP2021531653A5 - - Google Patents

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Publication number
JP2021531653A5
JP2021531653A5 JP2021502757A JP2021502757A JP2021531653A5 JP 2021531653 A5 JP2021531653 A5 JP 2021531653A5 JP 2021502757 A JP2021502757 A JP 2021502757A JP 2021502757 A JP2021502757 A JP 2021502757A JP 2021531653 A5 JP2021531653 A5 JP 2021531653A5
Authority
JP
Japan
Prior art keywords
sealing
separable
processing chamber
nodes
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021502757A
Other languages
English (en)
Japanese (ja)
Other versions
JP7456993B2 (ja
JP2021531653A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2019/038018 external-priority patent/WO2020018226A1/en
Publication of JP2021531653A publication Critical patent/JP2021531653A/ja
Publication of JP2021531653A5 publication Critical patent/JP2021531653A5/ja
Application granted granted Critical
Publication of JP7456993B2 publication Critical patent/JP7456993B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2021502757A 2018-07-19 2019-06-19 シールを行うためのマルチノード複数回使用ｏリングおよび方法 Active JP7456993B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862700461P 2018-07-19 2018-07-19
US62/700,461 2018-07-19
PCT/US2019/038018 WO2020018226A1 (en) 2018-07-19 2019-06-19 Multinode multi-use o-ring and method for making a seal

Publications (3)

Publication Number Publication Date
JP2021531653A JP2021531653A (ja) 2021-11-18
JP2021531653A5 true JP2021531653A5 (enExample) 2022-06-28
JP7456993B2 JP7456993B2 (ja) 2024-03-27

Family

ID=69162374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021502757A Active JP7456993B2 (ja) 2018-07-19 2019-06-19 シールを行うためのマルチノード複数回使用ｏリングおよび方法

Country Status (6)

Country Link
US (1) US11359722B2 (enExample)
JP (1) JP7456993B2 (enExample)
KR (1) KR102810199B1 (enExample)
CN (1) CN112424513B (enExample)
TW (1) TWI834688B (enExample)
WO (1) WO2020018226A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020106470B3 (de) * 2020-03-10 2020-11-26 Carl Freudenberg Kg Dichtungsanordnung und deren Verwendung
DE102020113090B4 (de) * 2020-05-14 2022-02-03 Carl Freudenberg Kg Dichtring und Dichtungsanordnung, die den Dichtring umfasst
WO2022015512A1 (en) * 2020-07-13 2022-01-20 Lam Research Corporation Seal venting in a substrate processing chamber
DE102020123249A1 (de) 2020-09-07 2022-03-10 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Plattenanker-Dämpfungseinrichtung für ein Kippankerventil, Plattenanker sowie Kippankerventil mit einer Plattenanker-Dämpfungseinrichtung
JP7804393B2 (ja) * 2020-12-17 2026-01-22 カヤバ株式会社 緩衝器
USD1027120S1 (en) 2020-12-17 2024-05-14 Applied Materials, Inc. Seal for an assembly in a vapor deposition chamber
WO2022145737A1 (ko) * 2021-01-04 2022-07-07 피에스케이 주식회사 기판 처리 장치
GB2609415A (en) * 2021-07-29 2023-02-08 Airbus Operations Ltd Seal
JP7698542B2 (ja) * 2021-09-24 2025-06-25 日本特殊陶業株式会社 保持装置
JP7425034B2 (ja) * 2021-12-01 2024-01-30 三菱電線工業株式会社 保護リング、それを備えた接着面保護構造、及び接着面保護方法
CN114483956B (zh) * 2022-04-14 2022-06-28 苏州阿特密特密封科技有限公司 一种汽车用橡胶垫片
JP7877489B2 (ja) * 2022-07-25 2026-06-22 アプライド マテリアルズ インコーポレイテッド リップシール付きシーリング部材
US12297691B2 (en) * 2023-05-11 2025-05-13 Applied Materials, Inc. Seal mechanism for load port doors
WO2025256868A1 (en) * 2024-06-14 2025-12-18 Asml Netherlands B.V. Vented sealing systems and methods for a lithography apparatus

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6058958U (ja) * 1983-09-30 1985-04-24 株式会社日立製作所 真空シ−ル構造
US5579718A (en) 1995-03-31 1996-12-03 Applied Materials, Inc. Slit valve door
EP0806594A1 (en) * 1996-04-30 1997-11-12 Teruaki Masuoka O-ring of a multi-lobular cross section
JPH10318373A (ja) * 1997-05-14 1998-12-04 Morisei Kako:Kk 封止材
JP3349132B2 (ja) * 1999-04-12 2002-11-20 三菱電線工業株式会社 低荷重シール
US6435519B1 (en) * 1999-05-14 2002-08-20 Patrick Michel White Stress-induced gasket
US6776875B2 (en) 2000-02-28 2004-08-17 Applied Materials Inc. Semiconductor substrate support assembly having lobed o-rings therein
JP2002130481A (ja) * 2000-10-25 2002-05-09 Nippon Valqua Ind Ltd 封止リング
JP3986301B2 (ja) 2001-12-04 2007-10-03 日本バルカー工業株式会社 金属ガスケットによる密封構造および密封方法
CN2613647Y (zh) * 2003-05-09 2004-04-28 西安理工大学 一种防泄漏的真空密封装置
KR100877283B1 (ko) * 2004-09-17 2009-01-07 닛폰 바루카 고교 가부시키가이샤 복합 실링재
US20060220326A1 (en) * 2005-03-30 2006-10-05 Andrew Corporation Multilobe gasket and sealing groove
JP2007155016A (ja) * 2005-12-06 2007-06-21 Nippon Valqua Ind Ltd あり溝用シール材およびこのシール材が装着された真空用ゲート弁
JP4663538B2 (ja) * 2006-01-31 2011-04-06 日本バルカー工業株式会社 あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁
US20080191474A1 (en) * 2007-02-12 2008-08-14 Kotz George J Tri-Lobed O-Ring Seal
US9314864B2 (en) * 2007-07-09 2016-04-19 International Business Machines Corporation C4NP compliant solder fill head seals
US20110076848A1 (en) * 2009-06-30 2011-03-31 Amitava Datta Semiconductor process chamber and seal
DE102009042142A1 (de) * 2009-09-10 2011-03-24 Hecker Werke Gmbh Ringdichtung für ein Schließglied eines Ventils sowie Dichtungsanordnung mit einer solchen Ringdichtung
JP5551947B2 (ja) * 2010-03-10 2014-07-16 東京エレクトロン株式会社 溝用シール材
JP5773152B2 (ja) * 2011-08-19 2015-09-02 Nok株式会社 密封構造
DE102013205912A1 (de) * 2013-04-04 2014-10-09 Federal-Mogul Burscheid Gmbh Kolbenring mit Verschleißanzeige
JP6054255B2 (ja) * 2013-06-10 2016-12-27 アラム株式会社 ゴムまたは合成樹脂製成形品および食品加工プラント
DE102019214641A1 (de) * 2019-09-25 2021-03-25 Evoguard Gmbh Dichtungseinstich für eine radiale Dichtung

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