TWI834688B - 處理腔室及製作密封的方法 - Google Patents

處理腔室及製作密封的方法 Download PDF

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Publication number
TWI834688B
TWI834688B TW108124618A TW108124618A TWI834688B TW I834688 B TWI834688 B TW I834688B TW 108124618 A TW108124618 A TW 108124618A TW 108124618 A TW108124618 A TW 108124618A TW I834688 B TWI834688 B TW I834688B
Authority
TW
Taiwan
Prior art keywords
sealing
nodes
node
processing chamber
ring
Prior art date
Application number
TW108124618A
Other languages
English (en)
Chinese (zh)
Other versions
TW202007885A (zh
Inventor
夏鞏盼卡 馬赫許瓦里
燿宏 楊
敬輝 李
安德魯文維 余
阿尼魯德哈 包爾
湯姆Ｋ 邱
廖健閔
Original Assignee
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TW202007885A publication Critical patent/TW202007885A/zh
Application granted granted Critical
Publication of TWI834688B publication Critical patent/TWI834688B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
    • F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
    • F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
    • F16J15/024—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity
    • F16J15/025—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity and with at least one flexible lip
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/002—Sealings comprising at least two sealings in succession
    • F16J15/008—Sealings comprising at least two sealings in succession with provision to put out of action at least one sealing; One sealing sealing only on standstill; Emergency or servicing sealings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/062—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/064—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces the packing combining the sealing function with other functions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F16J15/106—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure homogeneous
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/935—Seal made of a particular material
    • Y10S277/944—Elastomer or plastic

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Gasket Seals (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW108124618A 2018-07-19 2019-07-12 處理腔室及製作密封的方法 TWI834688B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862700461P 2018-07-19 2018-07-19
US62/700,461 2018-07-19

Publications (2)

Publication Number Publication Date
TW202007885A TW202007885A (zh) 2020-02-16
TWI834688B true TWI834688B (zh) 2024-03-11

Family

ID=69162374

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108124618A TWI834688B (zh) 2018-07-19 2019-07-12 處理腔室及製作密封的方法

Country Status (6)

Country Link
US (1) US11359722B2 (enExample)
JP (1) JP7456993B2 (enExample)
KR (1) KR102810199B1 (enExample)
CN (1) CN112424513B (enExample)
TW (1) TWI834688B (enExample)
WO (1) WO2020018226A1 (enExample)

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DE102020106470B3 (de) * 2020-03-10 2020-11-26 Carl Freudenberg Kg Dichtungsanordnung und deren Verwendung
DE102020113090B4 (de) * 2020-05-14 2022-02-03 Carl Freudenberg Kg Dichtring und Dichtungsanordnung, die den Dichtring umfasst
WO2022015512A1 (en) * 2020-07-13 2022-01-20 Lam Research Corporation Seal venting in a substrate processing chamber
DE102020123249A1 (de) 2020-09-07 2022-03-10 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Plattenanker-Dämpfungseinrichtung für ein Kippankerventil, Plattenanker sowie Kippankerventil mit einer Plattenanker-Dämpfungseinrichtung
JP7804393B2 (ja) * 2020-12-17 2026-01-22 カヤバ株式会社 緩衝器
USD1027120S1 (en) 2020-12-17 2024-05-14 Applied Materials, Inc. Seal for an assembly in a vapor deposition chamber
WO2022145737A1 (ko) * 2021-01-04 2022-07-07 피에스케이 주식회사 기판 처리 장치
GB2609415A (en) * 2021-07-29 2023-02-08 Airbus Operations Ltd Seal
JP7698542B2 (ja) * 2021-09-24 2025-06-25 日本特殊陶業株式会社 保持装置
JP7425034B2 (ja) * 2021-12-01 2024-01-30 三菱電線工業株式会社 保護リング、それを備えた接着面保護構造、及び接着面保護方法
CN114483956B (zh) * 2022-04-14 2022-06-28 苏州阿特密特密封科技有限公司 一种汽车用橡胶垫片
JP7877489B2 (ja) * 2022-07-25 2026-06-22 アプライド マテリアルズ インコーポレイテッド リップシール付きシーリング部材
US12297691B2 (en) * 2023-05-11 2025-05-13 Applied Materials, Inc. Seal mechanism for load port doors
WO2025256868A1 (en) * 2024-06-14 2025-12-18 Asml Netherlands B.V. Vented sealing systems and methods for a lithography apparatus

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JP2002130481A (ja) * 2000-10-25 2002-05-09 Nippon Valqua Ind Ltd 封止リング
DE102009042142A1 (de) * 2009-09-10 2011-03-24 Hecker Werke Gmbh Ringdichtung für ein Schließglied eines Ventils sowie Dichtungsanordnung mit einer solchen Ringdichtung
US20110076848A1 (en) * 2009-06-30 2011-03-31 Amitava Datta Semiconductor process chamber and seal
TW201207275A (en) * 2010-03-10 2012-02-16 Tokyo Electron Ltd Sealing material for groove
EP2981744B1 (de) * 2013-04-04 2017-11-01 Federal-Mogul Burscheid GmbH Kolbenring mit verschleissanzeige

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US5579718A (en) 1995-03-31 1996-12-03 Applied Materials, Inc. Slit valve door
EP0806594A1 (en) * 1996-04-30 1997-11-12 Teruaki Masuoka O-ring of a multi-lobular cross section
JPH10318373A (ja) * 1997-05-14 1998-12-04 Morisei Kako:Kk 封止材
JP3349132B2 (ja) * 1999-04-12 2002-11-20 三菱電線工業株式会社 低荷重シール
US6435519B1 (en) * 1999-05-14 2002-08-20 Patrick Michel White Stress-induced gasket
US6776875B2 (en) 2000-02-28 2004-08-17 Applied Materials Inc. Semiconductor substrate support assembly having lobed o-rings therein
JP3986301B2 (ja) 2001-12-04 2007-10-03 日本バルカー工業株式会社 金属ガスケットによる密封構造および密封方法
CN2613647Y (zh) * 2003-05-09 2004-04-28 西安理工大学 一种防泄漏的真空密封装置
KR100877283B1 (ko) * 2004-09-17 2009-01-07 닛폰 바루카 고교 가부시키가이샤 복합 실링재
US20060220326A1 (en) * 2005-03-30 2006-10-05 Andrew Corporation Multilobe gasket and sealing groove
JP2007155016A (ja) * 2005-12-06 2007-06-21 Nippon Valqua Ind Ltd あり溝用シール材およびこのシール材が装着された真空用ゲート弁
JP4663538B2 (ja) * 2006-01-31 2011-04-06 日本バルカー工業株式会社 あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁
US20080191474A1 (en) * 2007-02-12 2008-08-14 Kotz George J Tri-Lobed O-Ring Seal
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JP5773152B2 (ja) * 2011-08-19 2015-09-02 Nok株式会社 密封構造
JP6054255B2 (ja) * 2013-06-10 2016-12-27 アラム株式会社 ゴムまたは合成樹脂製成形品および食品加工プラント
DE102019214641A1 (de) * 2019-09-25 2021-03-25 Evoguard Gmbh Dichtungseinstich für eine radiale Dichtung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002130481A (ja) * 2000-10-25 2002-05-09 Nippon Valqua Ind Ltd 封止リング
US20110076848A1 (en) * 2009-06-30 2011-03-31 Amitava Datta Semiconductor process chamber and seal
DE102009042142A1 (de) * 2009-09-10 2011-03-24 Hecker Werke Gmbh Ringdichtung für ein Schließglied eines Ventils sowie Dichtungsanordnung mit einer solchen Ringdichtung
TW201207275A (en) * 2010-03-10 2012-02-16 Tokyo Electron Ltd Sealing material for groove
EP2981744B1 (de) * 2013-04-04 2017-11-01 Federal-Mogul Burscheid GmbH Kolbenring mit verschleissanzeige

Also Published As

Publication number Publication date
CN112424513A (zh) 2021-02-26
US11359722B2 (en) 2022-06-14
KR102810199B1 (ko) 2025-05-19
US20200025292A1 (en) 2020-01-23
KR20210024190A (ko) 2021-03-04
JP7456993B2 (ja) 2024-03-27
CN112424513B (zh) 2023-05-23
JP2021531653A (ja) 2021-11-18
TW202007885A (zh) 2020-02-16
WO2020018226A1 (en) 2020-01-23

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