KR102707504B1 - 위치 피드포워드 보상을 사용하여 대면적 레이저 처리에서의 정확도를 개선하는 시스템 및 방법 - Google Patents

위치 피드포워드 보상을 사용하여 대면적 레이저 처리에서의 정확도를 개선하는 시스템 및 방법 Download PDF

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KR102707504B1
KR102707504B1 KR1020227025603A KR20227025603A KR102707504B1 KR 102707504 B1 KR102707504 B1 KR 102707504B1 KR 1020227025603 A KR1020227025603 A KR 1020227025603A KR 20227025603 A KR20227025603 A KR 20227025603A KR 102707504 B1 KR102707504 B1 KR 102707504B1
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South Korea
Prior art keywords
positioning system
controller
galvanometer
scanner
laser processing
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Korean (ko)
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KR20220141792A (ko
Inventor
마크 루카스
세타람 시밤
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노반타 코포레이션
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/0344—Observing the speed of the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45165—Laser machining

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Laser Beam Processing (AREA)
  • Numerical Control (AREA)
KR1020227025603A 2020-01-24 2021-01-22 위치 피드포워드 보상을 사용하여 대면적 레이저 처리에서의 정확도를 개선하는 시스템 및 방법 Active KR102707504B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062965491P 2020-01-24 2020-01-24
US62/965,491 2020-01-24
PCT/US2021/014632 WO2021150904A1 (en) 2020-01-24 2021-01-22 Systems and methods for improving accuracy in large area laser processing using position feedforward compensation

Publications (2)

Publication Number Publication Date
KR20220141792A KR20220141792A (ko) 2022-10-20
KR102707504B1 true KR102707504B1 (ko) 2024-09-13

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Application Number Title Priority Date Filing Date
KR1020227025603A Active KR102707504B1 (ko) 2020-01-24 2021-01-22 위치 피드포워드 보상을 사용하여 대면적 레이저 처리에서의 정확도를 개선하는 시스템 및 방법

Country Status (7)

Country Link
US (1) US20210229216A1 (https=)
EP (1) EP4093574A1 (https=)
JP (1) JP7520129B2 (https=)
KR (1) KR102707504B1 (https=)
CN (1) CN115243823A (https=)
IL (1) IL294976A (https=)
WO (1) WO2021150904A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102384586B1 (ko) * 2016-08-28 2022-04-11 에이씨에스 모션 컨트롤 리미티드 비교적 큰 가공물을 가공하는 레이저를 위한 방법 및 시스템
CN113787265A (zh) * 2021-09-18 2021-12-14 苏州德龙激光股份有限公司 基于振镜与平台轨迹的联动切割系统及其控制方法
AT526120B1 (de) * 2022-04-08 2024-07-15 Trotec Laser Gmbh Verfahren zum Betreiben eines Laserplotters zum Schneiden, Gravieren, Markieren und/oder Beschriften eines Werkstückes, sowie einen Laserplotter zum Gravieren, Markieren und/oder Beschriften eines Werkstückes
CN121355685B (zh) * 2025-12-19 2026-03-17 罗根激光科技（武汉）有限公司 一种激光振荡器的智能控制方法及系统

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5751585A (en) * 1995-03-20 1998-05-12 Electro Scientific Industries, Inc. High speed, high accuracy multi-stage tool positioning system
EP1374139B1 (en) * 2001-03-29 2011-05-04 LASX Industries, Inc. Controller for a laser using predictive models ofa laser beam motion system
US8392002B2 (en) * 2010-10-14 2013-03-05 Delta Tau Data Systems, Inc. Hybrid machine control incorporating fast-tool servos
KR101653084B1 (ko) * 2012-03-23 2016-08-31 미쓰비시덴키 가부시키가이샤 레이저 가공 장치
WO2015046926A1 (ko) * 2013-09-30 2015-04-02 주식회사 이오테크닉스 다중 위치 제어를 이용한 연속적 레이저 가공 방법 및 이를 적용하는 시스템
KR102384586B1 (ko) * 2016-08-28 2022-04-11 에이씨에스 모션 컨트롤 리미티드 비교적 큰 가공물을 가공하는 레이저를 위한 방법 및 시스템
CN114967111A (zh) * 2017-03-03 2022-08-30 雅普顿生物系统公司 具有加速跟踪的高速扫描系统
US20180339364A1 (en) 2017-05-29 2018-11-29 ACS Motion Control Ltd. System and method for machining of relatively large work pieces
JP6795565B2 (ja) * 2018-10-11 2020-12-02 ファナック株式会社 レーザ加工システム

Also Published As

Publication number Publication date
IL294976A (en) 2022-09-01
JP7520129B2 (ja) 2024-07-22
JP2023513442A (ja) 2023-03-31
EP4093574A1 (en) 2022-11-30
WO2021150904A1 (en) 2021-07-29
US20210229216A1 (en) 2021-07-29
KR20220141792A (ko) 2022-10-20
CN115243823A (zh) 2022-10-25

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