CN115243823A - 用于使用位置前馈补偿来提高大面积激光加工中的精度的系统和方法 - Google Patents

用于使用位置前馈补偿来提高大面积激光加工中的精度的系统和方法 Download PDF

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Publication number
CN115243823A
CN115243823A CN202180010606.1A CN202180010606A CN115243823A CN 115243823 A CN115243823 A CN 115243823A CN 202180010606 A CN202180010606 A CN 202180010606A CN 115243823 A CN115243823 A CN 115243823A
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CN
China
Prior art keywords
positioning system
workpiece
scanner
controller
laser machining
Prior art date
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Pending
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CN202180010606.1A
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English (en)
Chinese (zh)
Inventor
M·卢卡斯
S·奚望
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Individual
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Individual
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Publication date
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Publication of CN115243823A publication Critical patent/CN115243823A/zh
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/0344Observing the speed of the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/083Devices involving movement of the workpiece in at least one axial direction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/083Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853Devices involving movement of the workpiece in at least two axial directions, e.g. in a plane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Program-control systems
    • G05B19/02Program-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/402Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/45Nc applications
    • G05B2219/45165Laser machining

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Laser Beam Processing (AREA)
  • Numerical Control (AREA)
CN202180010606.1A 2020-01-24 2021-01-22 用于使用位置前馈补偿来提高大面积激光加工中的精度的系统和方法 Pending CN115243823A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062965491P 2020-01-24 2020-01-24
US62/965,491 2020-01-24
PCT/US2021/014632 WO2021150904A1 (en) 2020-01-24 2021-01-22 Systems and methods for improving accuracy in large area laser processing using position feedforward compensation

Publications (1)

Publication Number Publication Date
CN115243823A true CN115243823A (zh) 2022-10-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180010606.1A Pending CN115243823A (zh) 2020-01-24 2021-01-22 用于使用位置前馈补偿来提高大面积激光加工中的精度的系统和方法

Country Status (7)

Country Link
US (1) US20210229216A1 (https=)
EP (1) EP4093574A1 (https=)
JP (1) JP7520129B2 (https=)
KR (1) KR102707504B1 (https=)
CN (1) CN115243823A (https=)
IL (1) IL294976A (https=)
WO (1) WO2021150904A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121355685A (zh) * 2025-12-19 2026-01-16 罗根激光科技(武汉)有限公司 一种激光振荡器的智能控制方法及系统

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102384586B1 (ko) * 2016-08-28 2022-04-11 에이씨에스 모션 컨트롤 리미티드 비교적 큰 가공물을 가공하는 레이저를 위한 방법 및 시스템
CN113787265A (zh) * 2021-09-18 2021-12-14 苏州德龙激光股份有限公司 基于振镜与平台轨迹的联动切割系统及其控制方法
AT526120B1 (de) * 2022-04-08 2024-07-15 Trotec Laser Gmbh Verfahren zum Betreiben eines Laserplotters zum Schneiden, Gravieren, Markieren und/oder Beschriften eines Werkstückes, sowie einen Laserplotter zum Gravieren, Markieren und/oder Beschriften eines Werkstückes

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5751585A (en) * 1995-03-20 1998-05-12 Electro Scientific Industries, Inc. High speed, high accuracy multi-stage tool positioning system
US20120095599A1 (en) * 2010-10-14 2012-04-19 Delta Tau Data Systems, Inc. Hybrid machine control incorporating fast-tool servos
WO2013140993A1 (ja) * 2012-03-23 2013-09-26 三菱電機株式会社 レーザ加工装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1374139B1 (en) * 2001-03-29 2011-05-04 LASX Industries, Inc. Controller for a laser using predictive models ofa laser beam motion system
WO2015046926A1 (ko) * 2013-09-30 2015-04-02 주식회사 이오테크닉스 다중 위치 제어를 이용한 연속적 레이저 가공 방법 및 이를 적용하는 시스템
KR102384586B1 (ko) * 2016-08-28 2022-04-11 에이씨에스 모션 컨트롤 리미티드 비교적 큰 가공물을 가공하는 레이저를 위한 방법 및 시스템
CN114967111A (zh) * 2017-03-03 2022-08-30 雅普顿生物系统公司 具有加速跟踪的高速扫描系统
US20180339364A1 (en) 2017-05-29 2018-11-29 ACS Motion Control Ltd. System and method for machining of relatively large work pieces
JP6795565B2 (ja) * 2018-10-11 2020-12-02 ファナック株式会社 レーザ加工システム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5751585A (en) * 1995-03-20 1998-05-12 Electro Scientific Industries, Inc. High speed, high accuracy multi-stage tool positioning system
US20120095599A1 (en) * 2010-10-14 2012-04-19 Delta Tau Data Systems, Inc. Hybrid machine control incorporating fast-tool servos
WO2013140993A1 (ja) * 2012-03-23 2013-09-26 三菱電機株式会社 レーザ加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121355685A (zh) * 2025-12-19 2026-01-16 罗根激光科技(武汉)有限公司 一种激光振荡器的智能控制方法及系统

Also Published As

Publication number Publication date
IL294976A (en) 2022-09-01
JP7520129B2 (ja) 2024-07-22
JP2023513442A (ja) 2023-03-31
EP4093574A1 (en) 2022-11-30
WO2021150904A1 (en) 2021-07-29
US20210229216A1 (en) 2021-07-29
KR20220141792A (ko) 2022-10-20
KR102707504B1 (ko) 2024-09-13

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