KR102627988B1 - Pheripheral exposure apparatus and method - Google Patents

Abstract

The present invention relates to a peripheral exposure device disposed on one side of an exposure object (W) in a first direction and irradiating light to the exposure object (W), each of which extends in the first direction and has one end in the first direction blocked and the other end. a plurality of light guide holes 100 that are open and formed in parallel while being spaced apart or in contact with each other at a predetermined distance in a second direction crossing the first direction; a plurality of light emitting units 200 disposed on one side of the light guide hole 100 in the first direction and facing the other side of the first direction; and are disposed in different light guide holes 100, but are disposed on the other side of the first direction than the light emitting portion 200 disposed on one side of the first direction of each light guiding hole 100 and emit from the light emitting portion 200. A peripheral exposure apparatus including a plurality of lens units 300 that refract exposed light is provided.
The other end 130 of the light guide hole 100 in the first direction has a polygonal shape (P) in cross-section in a direction perpendicular to the first direction, and accordingly, each of the light emitting units 200 has the polygonal shape ( It has a light irradiation area (R) of a shape corresponding to P).
When the light guide hole 100 is spaced apart from the exposure object W by a predetermined distance D1 in the first direction, the light emitting unit 200 disposed on one side of each light guide hole 100 in the first direction ) of the light irradiation area (R), the portion forming one side of the polygonal shape (P) in the second direction is a light emitting unit disposed on one side of the first direction of the light guide hole 100 adjacent to one side in the second direction. Among the light irradiation areas (R) of (200), it is in contact with a portion forming the other side of the polygon shape (P) in the second direction.
Accordingly, light can be uniformly irradiated to a predetermined area AR (FIG. 5) of the exposure object W easily and at low cost with a simple configuration. Additionally, since there is no need to use a reflector, etc., the peripheral exposure device 10 can be miniaturized.

Description

Peripheral exposure apparatus and method {PHERIPHERAL EXPOSURE APPARATUS AND METHOD}

The present invention relates to a peripheral exposure apparatus, and more specifically, to a peripheral exposure apparatus that uniformly irradiates light to a predetermined area of an exposure object W easily and at low cost with a simple structure and can be miniaturized.

Conventionally, peripheral exposure devices for exposing predetermined positions around exposure objects such as liquid crystal glass substrates, semiconductor wafers, and photosensitive films have been provided and put into practical use.

When forming a wiring pattern on a substrate such as a liquid crystal display panel or a semiconductor wafer, a resist is first applied to the entire substrate and patterned into the desired shape by photolithography to produce the wiring pattern, which is usually done on the periphery of the substrate. The exposure position of the mask pattern is determined so that a strip-shaped blank space with a width of several millimeters is created.

For this reason, when a positive resist is used in a photolithography process, unexposed resist remains in a strip shape around the substrate after development. This remaining resist is not only unnecessary, but also becomes dust in the subsequent manufacturing process, becoming a major problem as one of the factors causing reduction in throughput. Therefore, it is necessary to remove unnecessary resist areas around the substrate by exposing and developing them.

The prior art related to the peripheral exposure device is as follows.

Korean Patent Publication No. 10-2001-0040008 is a peripheral exposure device that can perform peripheral exposure of a photoresist film with a biased circumferential thickness distribution at the peripheral portion of the workpiece by suppressing the occurrence of exposure unevenness without increasing the tact time. It is about the optical system of

However, in the prior art, the peripheral exposure device includes a mirror and a plurality of prisms, so the peripheral exposure device has a complex structure, is expensive, and is large in size.

KR 10-2001-0040008

The present invention was devised to solve the above-mentioned problems. Embodiments of the present invention provide a peripheral exposure device that irradiates light uniformly to a predetermined area of the exposure object W and can be miniaturized with a simple configuration and low cost. The purpose is to provide methods and methods.

Additionally, embodiments of the present invention aim to provide a peripheral exposure device that can be easily manufactured and maintained/managed with a simple configuration at low cost.

In order to solve the above-described problem, the present invention provides a peripheral exposure device disposed on one side of the exposure object W in a first direction and irradiating light to the exposure object W, each extending in the first direction and a plurality of light guide holes 100 that are closed at one end in one direction and open at the other end, and are formed in parallel while being spaced apart or in contact with each other at a predetermined distance in a second direction intersecting the first direction; a plurality of light emitting units 200 disposed on one side of the light guide hole 100 in the first direction and facing the other side of the first direction; and are disposed in different light guide holes 100, but are disposed on the other side of the first direction than the light emitting portion 200 disposed on one side of the first direction of each light guiding hole 100 and emit from the light emitting portion 200. A peripheral exposure apparatus including a plurality of lens units 300 that refract exposed light is provided.

The other end 130 of the light guide hole 100 in the first direction has a polygonal shape (P) in cross-section in a direction perpendicular to the first direction, and accordingly, each of the light emitting units 200 has the polygonal shape ( It has a light irradiation area (R) of a shape corresponding to P).

When the light guide hole 100 is spaced apart from the exposure object W by a predetermined distance D1 in the first direction, the light emitting unit 200 disposed on one side of each light guide hole 100 in the first direction ) of the light irradiation area (R), the portion forming one side of the polygonal shape (P) in the second direction is a light emitting unit disposed on one side of the first direction of the light guide hole 100 adjacent to one side in the second direction. Among the light irradiation areas (R) of (200), it is in contact with a portion forming the other side of the polygon shape (P) in the second direction.

In one embodiment, each of the light guide holes 100 includes a lens hole portion 110 where the lens portion 300 is disposed, the other end 130 of the light guide hole 100 in the first direction, and the lens hole portion. It includes an extension hole portion 120 formed between 110 and extending long in the first direction.

In one embodiment, the peripheral exposure apparatus further includes a single housing (H), and the plurality of light guide holes 100 are formed inside the housing (H).

In one embodiment, the lens unit 300 includes a first lens 310 and a second lens 320 with a larger diameter than the first lens 310, and the first lens 310 is a second lens 320. It is disposed on one side of the lens 320 in the first direction.

In one embodiment, the other surface of the first lens 310 and the second lens 320 in the first direction protrudes convexly toward the other first direction.

In one embodiment, the curvature of the first lens 310 is greater than the curvature of the second lens 320.

In one embodiment, the peripheral exposure apparatus further includes a single housing H in which the plurality of light guide holes 100 are formed.

Each of the light guide holes 100 includes a first lens hole portion 112 in which the first lens 310 is disposed and a second lens hole portion 114 in which the second lens 320 is disposed.

The cross-sectional area of the first lens hole portion 112 in a plane perpendicular to the first direction is smaller than the cross-sectional area of the second lens hole portion 114 in a plane perpendicular to the first direction.

The housing (H) has a single first housing body portion (H12) in which a plurality of first lens hole portions 112 are formed and a plurality of second lens hole portions 114 are formed in the interior, and the first lens hole portion 112 is formed therein. It includes a single second housing body portion (H14) coupled to the housing body portion (H12).

In one embodiment, the lens unit 300 has an optical axis (X) parallel to the first direction and is perpendicular to the optical axis (X) of the other end 130 of the light guide hole 100 in the first direction. The cross-sectional area in a plane is smaller than the maximum cross-sectional area in a plane perpendicular to the optical axis (X) of the lens unit 300.

In one embodiment, the peripheral exposure apparatus further includes a single housing H in which the plurality of light guide holes 100 are formed.

The housing (H) includes a single housing body portion (H1) in which the remaining portion, excluding the other end 130 of the plurality of light guiding holes 100 in the first direction, is formed inside and the plurality of light guiding holes 100. ) of the other end 130 in the first direction is formed inside and includes a single housing end H2 coupled to the housing body H1.

In one embodiment, among the refracted light, the light passing through the other end 130 of the light guide hole 100 in the first direction is irradiated in a direction parallel to the first direction or is emitted at a predetermined angle (A) from the first direction. ) is investigated at an angle below.

The predetermined distance (D1) is calculated based on the distance (D2) between the predetermined angle (A) and the other end 130 in the first direction of the light guide hole 100 that is adjacent to each other in the second direction. do.

In one embodiment, the plurality of light guide holes 100 are formed side by side with a predetermined distance apart or in contact with the second direction and a third direction intersecting the first and second directions.

When the light guide hole 100 is spaced apart from the exposure object W by a predetermined distance D1 in the first direction, the light emitting unit 200 disposed on one side of each light guide hole 100 in the first direction ) of the light irradiation area (R), the portion forming one side of the polygonal shape (P) in the third direction is a light emitting unit disposed on one side of the first direction of the light guide hole 100 adjacent to one side in the third direction. Among the light irradiation areas (R) of (200), it is in contact with a portion forming the other side of the polygonal shape (P) in the third direction.

In one embodiment, the output (radiant power) of the light emitting unit 200 disposed on one side of the light guide hole 100 formed on the inside of the plurality of light guide holes 100 in the first direction is transmitted to the light guide hole 100 formed on the outside of the plurality of light guide holes 100. ) is smaller than the output of the light emitting unit 200 disposed on one side of the first direction.

In one embodiment, the light emitting unit 200 disposed on one side of the light guide hole 100 formed on the inside of the plurality of light guide holes 100 in the first direction and the light guide hole formed on the outside of the plurality of light guide holes 100 The light emitting units 200 disposed on one side of the first direction of 100 are separated from each other and belong to two or more different channels.

The peripheral exposure apparatus includes a control unit that adjusts the output of the light emitting unit 200 belonging to the two or more channels for each channel.

In addition, in order to solve the above-described problem, the present invention includes the steps of positioning the light guide hole 100 at a point at a predetermined distance D1 in one direction from the exposure object W; and an exposure step of lighting the plurality of light emitting units 200.

In one embodiment, in the exposure step, the output (radiant power) of the light emitting unit 200 disposed on one side of the light guide hole 100 formed inside the plurality of light guide holes 100 in the first direction is transmitted to the outside. The output is set to be smaller than the output of the light emitting unit 200 disposed on one side of the formed light guide hole 100 in the first direction.

According to embodiments of the present invention, in the peripheral exposure device disposed on one side of the exposure object W in the first direction and irradiating light to the exposure object W, the peripheral exposure devices each extend in the first direction, a plurality of light guide holes 100 that are closed at one end in a first direction and open at the other end, and are formed in parallel while being spaced apart or in contact with each other at a predetermined distance in a second direction intersecting the first direction; a plurality of light emitting units 200 disposed on one side of the light guide hole 100 in the first direction and facing the other side of the first direction; and are disposed in different light guide holes 100, but are disposed on the other side of the first direction than the light emitting portion 200 disposed on one side of the first direction of each light guiding hole 100 and emit from the light emitting portion 200. It may include a plurality of lens units 300 that refract the light. The other end 130 of the light guide hole 100 in the first direction has a polygonal shape (P) in cross-section in a direction perpendicular to the first direction, and accordingly, each of the light emitting units 200 has the polygonal shape ( It may have a light irradiation area (R) of a shape corresponding to P). When the light guide hole 100 is spaced apart from the exposure object W by a predetermined distance D1 in the first direction, the light emitting unit 200 disposed on one side of each light guide hole 100 in the first direction ) of the light irradiation area (R), the portion forming one side of the polygonal shape (P) in the second direction is a light emitting unit disposed on one side of the first direction of the light guide hole 100 adjacent to one side in the second direction. Among the light irradiation area (R) of (200), it may be in contact with a portion forming the other side of the polygon shape (P) in the second direction.

Accordingly, light can be uniformly irradiated to a predetermined area of the exposure object W easily and at low cost with a simple configuration. Additionally, since there is no need to use a reflector, etc., the peripheral exposure device 10 can be miniaturized.

According to an embodiment of the present invention, each light guide hole 100 includes a lens hole part 110 where the lens part 300 is disposed, the other end 130 in the first direction of the light guide hole 100, and a lens hole part ( 110) and may include an extension hole portion 120 extending long in the first direction.

Accordingly, the light of the light emitting unit 200 disposed in each light guide hole 100 must pass through the extension hole unit 120 after being refracted by the lens unit 300 to exit the light guide hole 100, so that each Most of the light from the light emitting unit 200 disposed in the light guiding hole 100 may be irradiated only to a predetermined light irradiation area R facing each light guiding hole 100 in the first direction. Accordingly, the uniformity of light irradiated to the exposure object W may be improved.

According to an embodiment of the present invention, the peripheral exposure device may further include a single housing (H). A plurality of light guide holes 100 may be formed inside the housing (H).

Accordingly, the peripheral exposure device 10 can be easily manufactured and maintained at low cost with a simple configuration.

According to an embodiment of the present invention, the lens unit 300 includes a first lens 310 and a second lens 320 with a larger diameter than the first lens 310, and the first lens 310 is a second lens 320. It can be placed on one side of the lens 320 in the first direction.

Accordingly, the light emitted from the light emitting unit 200 may be converted into light substantially parallel to the first direction, for example. Therefore, since the light of the light emitting unit 200 disposed in each light guiding hole 100 is refracted by the lens unit 300 and then exits the light guiding hole 100, the light emitting unit disposed in each light guiding hole 100 Most of the light 200 may be irradiated only to a predetermined light irradiation area R facing each light guide hole 100 in the first direction. Accordingly, the uniformity of light irradiated to the exposure object W may be improved. In particular, the first lens 310 is close to the light emitting unit 200, so even though it is smaller than the second lens 320, which is far from the light emitting unit 200, it can refract a large amount or most of the light emitted from the light emitting unit 200. there is. Accordingly, by reducing the diameter of the first lens 310, the peripheral exposure device can be miniaturized without significant light loss.

According to an embodiment of the present invention, the other surface of the first lens 310 and the second lens 320 in the first direction may protrude convexly toward the other first direction.

Accordingly, the light emitted from the light emitting unit 200 may be condensed and converted into light substantially parallel to the first direction, for example. Accordingly, the uniformity of light irradiated to the exposure object W may be improved.

According to an embodiment of the present invention, the curvature of the first lens 310 may be greater than the curvature of the second lens 320.

Accordingly, since the first lens 310, which is close to the light emitting unit 200, can change the angle of the light emitted from the light emitting unit 200 to a large extent, even if the size of the second lens 320 is small, the first lens 320 Most of the light refracted at 310 may be incident on the second lens 320. Accordingly, the peripheral exposure device can be miniaturized without significant light loss.

According to an embodiment of the present invention, the peripheral exposure apparatus may further include a single housing H in which a plurality of light guide holes 100 are formed. Each light guide hole 100 may include a first lens hole portion 112 in which the first lens 310 is disposed and a second lens hole portion 114 in which the second lens 320 is disposed. The cross-sectional area of the first lens hole unit 112 in a plane perpendicular to the first direction may be smaller than the cross-sectional area of the second lens hole unit 114 in a plane perpendicular to the first direction. The housing (H) has a single first housing body portion (H12) in which a plurality of first lens hole portions 112 are formed and a plurality of second lens hole portions 114 are formed in the interior, and a first housing body portion ( It may include a single second housing body portion (H14) coupled to H12).

Accordingly, the peripheral exposure device 10 can be easily manufactured and maintained at low cost with a simple configuration. In particular, even if the cross-sectional area of the first lens hole unit 112 in a plane perpendicular to the first direction is smaller than the cross-sectional area of the second lens hole unit 114 in a plane perpendicular to the first direction, the peripheral exposure device 10 The simple configuration makes it easy to manufacture and maintain/manage at low cost.

According to an embodiment of the present invention, the lens unit 300 has an optical axis (X) parallel to the first direction and is perpendicular to the optical axis (X) of the other end 130 of the light guide hole 100 in the first direction. The cross-sectional area in the plane may be smaller than the maximum cross-sectional area in the plane perpendicular to the optical axis (X) of the lens unit 300.

Accordingly, among the light refracted by the lens unit 300, only a portion of the light passing through the other end 130 in the first direction of the light guide hole 100 can be irradiated to the exposure object W, and therefore the angle of the irradiated light and The position range can be easily adjusted. For example, among the light refracted by the lens unit 300, only the light in a direction substantially parallel to the first direction may pass through the other end 130 of the light guide hole 100 in the first direction and be irradiated to the exposure object W. there is. Accordingly, most of the light from the light emitting unit 200 disposed in each light guide hole 100 may be irradiated only to a predetermined light irradiation area R facing each light guide hole 100 in the first direction. Accordingly, the uniformity of light irradiated to the exposure object W may be improved.

According to an embodiment of the present invention, the peripheral exposure apparatus further includes a single housing (H) in which a plurality of light guide holes (100) are formed, and the housing (H) has the plurality of light guide holes (100). A single housing body portion (H1) in which the remaining portion except for the other end 130 in the first direction is formed inside, and the other end 130 in the first direction of the plurality of light guide holes 100 are formed inside, It may include a single housing end portion (H2) coupled to the housing body portion (H1).

Accordingly, the peripheral exposure device 10 can be easily manufactured and maintained at low cost with a simple configuration. In particular, even if the cross-sectional area of the first lens hole unit 112 in a plane perpendicular to the first direction is smaller than the cross-sectional area of the second lens hole unit 114 in a plane perpendicular to the first direction, the peripheral exposure device 10 With its simple configuration, it can be easily manufactured and maintained/managed at low cost.

According to an embodiment of the present invention, among the refracted light, the light passing through the other end 130 of the light guide hole 100 in the first direction is irradiated in a direction parallel to the first direction or is emitted at a predetermined angle from the first direction ( A) It can be investigated by tilting it downwards. The predetermined distance D1 can be calculated based on the predetermined angle A and the distance D2 between the other ends 130 in the first direction of the light guide holes 100 adjacent to each other in the second direction. there is.

Accordingly, the peripheral exposure device 10 can be easily installed at the correct location and used effectively.

The plurality of light guide holes 100 may be formed side by side while being spaced apart or in contact with the second direction and a third direction intersecting the first and second directions. When the light guide holes 100 are spaced apart from the exposure object W by a predetermined distance D1 in the first direction, light is irradiated from the light emitting unit 200 disposed on one side of each light guide hole 100 in the first direction. Among the regions R, a portion forming one side of the polygonal shape P in the third direction is of the light emitting unit 200 disposed on one side of the first direction of the light guide hole 100 adjacent to one side in the third direction. Among the light irradiation area (R), it may be in contact with a portion forming the other side of the polygonal shape (P) in the third direction.

Accordingly, light can be uniformly irradiated to a predetermined area of the exposure object W easily and at low cost with a simple configuration. Additionally, since there is no need to use a reflector, etc., the peripheral exposure device 10 can be miniaturized.

Among the plurality of light guide holes 100, the output (radiant power) of the light emitting unit 200 disposed on one side of the light guide hole 100 formed on the inside in the first direction is radiant power in the first direction of the light guide hole 100 formed on the outside. It may be smaller than the output of the light emitting unit 200 disposed on one side.

Accordingly, among the predetermined areas of the exposure object W, the light guide formed outside the peripheral exposure device 10 is in the area facing the light emitting portion 200 of the light guide hole 100 formed inside the peripheral exposure device 10. Even if the light from the light emitting unit 200 of the hole 100 is scattered for reasons such as scattering, the uniformity of the light irradiated to the entire predetermined area of the exposure object W can be improved.

According to an embodiment of the present invention, a light emitting unit 200 disposed on one side of the light guide hole 100 formed on the inside of the plurality of light guide holes 100 in the first direction and a light emitting unit 200 formed on the outside of the plurality of light guide holes 100 The light emitting units 200 disposed on one side of the light guide hole 100 in the first direction may be separated from each other and belong to two or more different channels. The peripheral exposure device can adjust the output of the light emitting unit 200 belonging to the two or more channels for each channel.

Accordingly, the uniformity of light irradiated to the entire predetermined area of the exposure object W can be easily adjusted.

According to an embodiment of the present invention, the peripheral exposure method includes the steps of positioning the light guide hole 100 at a point at a predetermined distance (D1) in one direction from the exposure object (W) in a first direction; and an exposure step of lighting the plurality of light emitting units 200.

Accordingly, light can be uniformly irradiated to a predetermined area of the exposure object W easily and at low cost with a simple configuration.

According to an embodiment of the present invention, in the exposure step, the output (radiant power) of the light emitting unit 200 disposed on one side of the light guide hole 100 formed inside the plurality of light guide holes 100 in the first direction is transmitted to the outside. The output of the light emitting unit 200 disposed on one side in the first direction of the light guide hole 100 formed on the side can be made smaller than that of the light emitting unit 200.

Accordingly, among the predetermined areas of the exposure object W, the light guide formed outside the peripheral exposure device 10 is in the area facing the light emitting portion 200 of the light guide hole 100 formed inside the peripheral exposure device 10. Even if the light from the light emitting unit 200 of the hole 100 is scattered for reasons such as scattering, the uniformity of the light irradiated to the entire predetermined area of the exposure object W can be improved.

In addition to the above-described effects, specific effects of the present invention are described below while explaining specific details for carrying out the invention.

1 is a perspective view of a peripheral exposure apparatus according to an embodiment of the present invention.
FIG. 2 is a diagram schematically showing the path of light and the light irradiation area in the peripheral exposure apparatus of FIG. 1.
FIG. 3 is a diagram schematically showing the shapes of the light emitting unit and the lens unit in the peripheral exposure apparatus of FIGS. 1 and 2 and the position and direction in which the light emitting unit and the lens unit are disposed in the light guide hole.
FIG. 4 is a view looking at the other end of the peripheral exposure apparatus of FIGS. 1 and 2 in the first direction.
FIG. 5 is a diagram showing a state in which light emitted from the peripheral exposure apparatus of FIGS. 1 and 2 is irradiated to an exposure object.
FIG. 6 is a diagram illustrating a light emitting unit in the drawing of FIG. 4 and a rectangle dividing the light guide hole into an inside and an outside section.
7 to 9 show the amount of light irradiated to the exposure object according to the output of the light emitting unit disposed in the inner and outer light guide holes divided by the squares in FIG. 6 in the peripheral exposure apparatus of FIGS. 1 and 2 by position. This is the drawing shown.
FIGS. 10 and 11 are diagrams showing in detail the amount of light irradiated to the exposure object by position when the output of the light emitting units disposed in the inner and outer light guide holes in the peripheral exposure apparatus of FIGS. 1 and 2 is adjusted; and It's a table.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention is not limited to the embodiments disclosed below, but may be subject to various changes and may be implemented in various different forms. This example is provided solely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention. Therefore, the present invention is not limited to the embodiments disclosed below, but substitutes or adds to the configuration of one embodiment and the configuration of another embodiment, as well as all changes and equivalents included in the technical spirit and scope of the present invention. It should be understood to include substitutes.

The attached drawings are only for easy understanding of the embodiments disclosed in this specification, and the technical idea disclosed in this specification is not limited by the attached drawings, and all changes, equivalents, and changes included in the spirit and technical scope of the present invention are not limited. It should be understood to include water or substitutes. In the drawings, components may be expressed exaggeratedly large or small in size or thickness for convenience of understanding, etc., but the scope of protection of the present invention should not be construed as limited due to this.

The terms used in this specification are only used to describe specific implementations or examples, and are not intended to limit the invention. And singular expressions include plural expressions, unless the context clearly dictates otherwise. In the specification, terms such as ~include, ~consist of, etc. are intended to indicate the existence of features, numbers, steps, operations, components, parts, or a combination thereof described in the specification. In other words, terms such as ~include, ~consist, etc. in the specification. It should be understood that this does not exclude in advance the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

Terms containing ordinal numbers, such as first, second, etc., may be used to describe various components, but the components are not limited by the terms. The above terms are used only for the purpose of distinguishing one component from another.

When a component is said to be "connected" or "connected" to another component, it is understood that it may be directly connected to or connected to the other component, but that other components may exist in between. It should be. On the other hand, when it is mentioned that a component is “directly connected” or “directly connected” to another component, it should be understood that there are no other components in between.

When a component is referred to as being "on top" or "below" another component, it should be understood that not only is it placed directly on top of the other component, but there may also be other components in between. .

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person of ordinary skill in the technical field to which the present invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related technology, and unless explicitly defined in the present application, should not be interpreted in an ideal or excessively formal sense. No.

The peripheral exposure apparatus disclosed in the following embodiments will be examined in more detail with reference to each drawing.

FIG. 1 is a perspective view of a peripheral exposure apparatus according to an embodiment of the present invention, and FIG. 2 is a diagram schematically showing the path of light and the light irradiation area in the peripheral exposure apparatus of FIG. 1. FIG. 3 is a diagram schematically showing the shapes of the light emitting unit and the lens unit in the peripheral exposure apparatus of FIGS. 1 and 2 and the position and direction in which the light emitting unit and the lens unit are disposed in the light guide hole. FIG. 4 is a view looking at the other end of the peripheral exposure apparatus of FIGS. 1 and 2 in the first direction. FIG. 5 is a diagram showing a state in which light emitted from the peripheral exposure apparatus of FIGS. 1 and 2 is irradiated to an exposure object. FIG. 6 is a diagram illustrating a light emitting unit in the drawing of FIG. 4 and a rectangle dividing the light guide hole into an inside and an outside section. 7 to 9 show the amount of light irradiated to the exposure object according to the output of the light emitting unit disposed in the inner and outer light guide holes divided by the squares in FIG. 6 in the peripheral exposure apparatus of FIGS. 1 and 2 by position. This is the drawing shown. FIGS. 10 and 11 are diagrams showing in detail the amount of light irradiated to the exposure object by position when the output of the light emitting units disposed in the inner and outer light guide holes in the peripheral exposure apparatus of FIGS. 1 and 2 is adjusted; and It's a table.

Referring to FIGS. 1 and 2 , the peripheral exposure apparatus 10 according to an embodiment may include a plurality of light guide holes 100, a plurality of light emitting units 200, and a plurality of lens units 300. The peripheral exposure device 10 may further include a single housing (H). The peripheral exposure device 10 may further include a control unit.

The peripheral exposure device 10 may be disposed on one side (e.g., above) of the exposure object W in a first direction (e.g., up and down), and may irradiate light to the exposure object W (FIG. 2 ).

[Dogwang Hall]

A plurality of light guide holes 100 may be formed. Each light guide hole 100 extends in a first direction, and one end in the first direction may be closed while the other end may be open. The light guide holes 100 may be formed in parallel while being spaced apart or in contact with a predetermined distance in a second direction (eg, left and right direction) that intersects (eg, is perpendicular to) the first direction.

The light guide hole 100 may provide a path for light emitted from the light emitting unit 200.

For example, the light guide hole 100 may include a lens hole 110, an extension hole 120, and the other end 130 (eg, a lower end) in the first direction.

The lens unit 300 may be disposed in the lens hole unit 110. For example, the lens unit 300 may be coupled to the inner peripheral surface of the lens hole unit 110.

For example, the lens hole portion 110 may include a first lens hole portion 112 in which the first lens 310 is disposed and a second lens hole portion 114 in which the second lens 320 is disposed.

The cross-sectional area of the first lens hole unit 112 in a plane perpendicular to the first direction may be smaller than the cross-sectional area of the second lens hole unit 114 in a plane perpendicular to the first direction.

The extension hole portion 120 may be formed between the other end 130 of the light guide hole 100 in the first direction and the lens hole portion 110. The extension hole portion 120 may extend long in the first direction.

Accordingly, the light of the light emitting unit 200 disposed in each light guide hole 100 must pass through the extension hole unit 120 after being refracted by the lens unit 300 to exit the light guide hole 100, so that each Most of the light from the light emitting unit 200 disposed in the light guiding hole 100 may be irradiated only to a predetermined light irradiation area R facing each light guiding hole 100 in the first direction. Accordingly, the uniformity of light irradiated to the exposure object W may be improved.

The cross-sectional area of the extension hole portion 120 in a plane perpendicular to the first direction may be the same as the cross-sectional area of the second lens hole portion 114 in a plane perpendicular to the first direction.

At the other end 130 of the light guide hole 100 in the first direction, a cross-section in a direction perpendicular to the first direction may have a polygonal shape (P, for example, a square). Accordingly, each light emitting unit 200 may have a polygonal shape (P) and a light irradiation area (R) of a corresponding shape. In this regard, it will be described later.

The cross-sectional area of the other end 130 of the light guide hole 100 in the first direction in a plane perpendicular to the optical axis (X) of the lens unit 300 is a plane perpendicular to the optical axis (X) of the lens unit 300. may be smaller than the maximum cross-sectional area in . Here, the optical axis (X) of the lens unit 300 may be parallel to the first direction. Additionally, the center of the other end 130 of the light guide hole 100 in the first direction may be located on the optical axis (X) of the lens unit 300.

For example, the cross-sectional area of the other end 130 of the light guide hole 100 in the first direction in a plane perpendicular to the optical axis (X) of the second lens 320 is the optical axis (X) of the second lens 320. It may be smaller than the cross-sectional area in the plane perpendicular to X).

Accordingly, among the total light refracted by the lens unit 300, only a portion of the light passing through the other end 130 in the first direction of the light guide hole 100 can be irradiated to the exposure object W, so that the exposure object W ) You can easily adjust the angle and positional range of the light irradiated. For example, among the light refracted by the lens unit 300, only the light in a direction substantially parallel to the first direction may pass through the other end 130 of the light guide hole 100 in the first direction and be irradiated to the exposure object W. there is. On the other hand, among the light refracted in the lens unit 300, light having a large angle difference from the first direction may not pass through the other end 300 and therefore cannot be irradiated to the exposure object W. Accordingly, most of the light from the light emitting unit 200 disposed in each light guide hole 100 may be irradiated only to a predetermined light irradiation area R facing each light guide hole 100 in the first direction. Accordingly, the uniformity of light irradiated to the exposure object W may be improved.

Meanwhile, the plurality of light guide holes 100 are formed side by side while being spaced apart or in contact with a predetermined distance in the second direction and a third direction (e.g., front-to-back direction) that intersects (e.g., is perpendicular to) the first and second directions. It can be (Figure 1).

[housing]

A single housing H may be included in the peripheral exposure device 10 . The plurality of light guide holes 100 described above may be formed inside the housing H.

Accordingly, the peripheral exposure device 10 can be easily manufactured and maintained at low cost with a simple configuration.

Specifically, for example, the housing (H) may include a housing body portion (H1) and a housing end portion (H2).

The remaining portions (eg, lens hole portion and extension hole portion) excluding the other end portion 130 of the plurality of light guide holes 100 in the first direction may be formed inside the housing body portion H1. For example, the housing body H1 may include a first housing body H12 and a second housing body H14.

The first housing body portion H12 may have a plurality of first lens hole portions 112 formed therein.

The second housing body portion H14 may have a plurality of second lens hole portions 114 formed therein. The second housing body portion (H14) may be combined with the first housing body portion (H12).

Accordingly, the peripheral exposure device 10 can be easily manufactured and maintained at low cost with a simple configuration. In particular, even if the cross-sectional area of the first lens hole unit 112 in a plane perpendicular to the first direction is smaller than the cross-sectional area of the second lens hole unit 114 in a plane perpendicular to the first direction, the peripheral exposure device 10 The simple configuration makes it easy to manufacture and maintain/manage at low cost.

Additionally, an extension hole 120 may be formed inside the second housing body H14.

The other end 130 of the plurality of light guide holes 100 in the first direction may be formed inside the housing end H2. The housing end (H2) may be coupled to the housing body (H1).

Accordingly, the peripheral exposure device 10 can be easily manufactured and maintained at low cost with a simple configuration. In particular, the cross-sectional area of the other end 130 of the light guide hole 100 in the first direction in a plane perpendicular to the optical axis (X) of the lens unit 300 is perpendicular to the optical axis (X) of the lens unit 300. Even if it is smaller than the maximum cross-sectional area in one plane, the peripheral exposure device 10 can be easily manufactured and maintained at low cost with a simple configuration.

[Emitting part]

A plurality of light emitting units 200 may be included in the peripheral exposure apparatus 10 .

The plurality of light emitting units 200 may be disposed on one side of the different light guide holes 100 in the first direction, respectively, toward the other side in the first direction. Specifically, for example, the light emitting unit 200 may be disposed at one end of the light guiding hole 100 in the first direction or may be disposed on one side of the light guiding hole 100 in the first direction.

The light emitting unit 200 may include, for example, a light emitting element.

The light emitting unit 200 may have a light irradiation area (R) having a shape corresponding to the polygonal shape (P) of the other end 130 in the first direction of the light guide hole 100. In this regard, it will be described later.

The center of the light emitting unit 200 may be located on the optical axis (X) of the lens unit 300 (FIG. 3).

[Lens part]

A plurality of lens units 200 may be included in the peripheral exposure apparatus 10 . The plurality of lens units 200 may be disposed in different light guide holes 100 and may be disposed on the other side of the first direction than the light emitting unit 200 disposed on one side of each light guide hole 100 in the first direction. .

The lens unit 200 may refract the light emitted from the light emitting unit 200. For example, the lens unit 200 may convert light emitted from the light emitting unit 200 in various directions into a direction substantially parallel to the first direction.

An anti-reflective coating layer may be formed on the lens unit 200. Accordingly, optical loss can be reduced.

Referring further to FIG. 3 , the lens unit 300 may include a first lens 310 and a second lens 320 that has a larger diameter than the first lens 310. The first lens 310 may be disposed on one side of the second lens 320 in the first direction.

Accordingly, the light emitted from the light emitting unit 200 may be converted into light that is, for example, substantially parallel to the first direction. Therefore, since the light of the light emitting unit 200 disposed in each light guiding hole 100 is refracted by the lens unit 300 and then exits the light guiding hole 100, the light emitting unit disposed in each light guiding hole 100 Most of the light 200 may be irradiated only to a predetermined light irradiation area R facing each light guide hole 100 in the first direction. Accordingly, the uniformity of light irradiated to the exposure object W may be improved. In particular, the first lens 310 is close to the light emitting unit 200 and refracts a large amount or most of the light emitted from the light emitting unit 200 even though it is smaller than the second lens 320, which is far from the light emitting unit 200. You can do it. Accordingly, by reducing the diameter of the first lens 310, the peripheral exposure device 10 can be miniaturized without significant light loss.

The other side of the first lens 310 and the second lens 320 in the first direction may protrude convexly toward the other side of the first lens 310 and the second lens 320.

Accordingly, the light emitted from the light emitting unit 200 may be condensed and converted into light substantially parallel to the first direction, for example. Accordingly, the uniformity of light irradiated to the exposure object W may be improved.

One side of the first lens 310 and the second lens 320 in the first direction may be flat.

The first lens 310 and the second lens 320 may be disposed on the same optical axis (X).

The curvature of the first lens 310 may be greater than the curvature of the second lens 320.

Accordingly, the first lens 310, which is close to the light emitting unit 200, can change the angle of the light emitted from the light emitting unit 200 to a large extent, so even if the size of the second lens 320 is small, the first lens 320 Most of the light refracted at 310 may be incident on the second lens 320. Accordingly, the peripheral exposure device 10 can be miniaturized without significant light loss.

[Light irradiation area]

Referring to FIG. 4 , the other end 130 of the light guide hole 100 in the first direction may have a polygonal shape P in a cross-section in a direction perpendicular to the first direction. Here, the polygonal shape P may be square as shown in the drawing. However, it is not limited to this. For example, unlike the drawings, the other end 130 of the light guide hole 100 in the first direction may have a regular hexagonal cross-section in the direction perpendicular to the first direction.

Referring further to FIG. 5 , each light emitting unit 200 may have a polygonal shape (P) and a light irradiation area (R) corresponding to the shape.

When the light guide holes 100 are spaced apart from the exposure object W by a predetermined distance (D1, Figure 2) in the first direction, the light emitting unit 200 disposed on one side of each light guide hole 100 in the first direction Of the light irradiation area R of For example, among the light irradiation area (R) of the light emitting unit 200 disposed on one side in the first direction of the light guide hole 100 adjacent to the right (right side), the other side in the second direction with a shape corresponding to the polygonal shape (P) (For example, the left side) may be in contact with the part forming the side (Figure 5). That is, the light emitted from the plurality of light emitting units 200 of the peripheral exposure device 10 does not overlap the predetermined area AR (FIG. 5) of the exposure object W facing the peripheral exposure device 10. It can be thoroughly investigated.

In this way, the peripheral exposure device 10 includes a plurality of light guide holes 100, a plurality of light emitting units 200, and a plurality of lens units 300, and the other end of the light guide hole 100 in the first direction ( 130) has a polygonal shape (P) in cross-section in the direction perpendicular to the first direction, and when the light guide hole 100 is spaced apart from the exposure object (W) by a predetermined distance (D1) in the first direction, neighboring light is emitted. Light irradiation areas of the polygonal shape P of the unit 200 may contact each other.

Accordingly, light can be uniformly irradiated to a predetermined area AR (FIG. 5) of the exposure object W easily and at low cost with a simple configuration. Additionally, since there is no need to use a reflector, etc., the peripheral exposure device 10 can be miniaturized.

At this time, among the light refracted in the lens unit 300, the light passing through the other end 130 of the light guide hole 100 in the first direction is irradiated in a direction parallel to the first direction or is irradiated at a predetermined angle from the first direction. (A) Can be irradiated by tilting downward (Figure 2).

The predetermined distance (D1) is calculated based on the distance (D2) between the predetermined angle (A) and the other end 130 in the first direction of the light guide hole 100 that is adjacent to each other in the second direction. It can be. For example, the predetermined distance D1 can be calculated using the following equation (FIGS. 2 and 5).

[Equation]

In the above equation, since the distance D2 between the predetermined angle A and the other end 130 in the first direction of the light guide hole 100 adjacent to each other in the second direction is determined in advance, the light guide hole 100 A predetermined distance D1 separated from the exposure object W in the first direction can be easily calculated.

Accordingly, the peripheral exposure device 10 can be easily installed at the correct location and used effectively.

On the other hand, in the case where a plurality of light guide holes 100 are formed in parallel and spaced apart at a predetermined distance or in contact with the second direction and a third direction (e.g., front-to-back direction) intersecting the first and second directions, it is as follows. . When the light guide holes 100 are spaced apart from the exposure object W by a predetermined distance D1 in the first direction, light is irradiated from the light emitting unit 200 disposed on one side of each light guide hole 100 in the first direction. In the region R, a portion forming one side (e.g., rear) side in the third direction of a shape corresponding to the polygonal shape (P, for example, square shape) is adjacent to one side (e.g., rear) in the third direction. A portion of the light irradiation area (R) of the light emitting unit (200) disposed on one side of the first direction of (100) forming the other side (e.g., front side) in the third direction of a shape corresponding to the polygonal shape (P). (Figures 2 and 5).

Accordingly, light can be uniformly irradiated to a predetermined area AR (FIG. 5) of the exposure object W easily and at low cost with a simple configuration. Additionally, since there is no need to use a reflector, etc., the peripheral exposure device 10 can be miniaturized.

[Control unit]

The control unit (not shown) can turn on or off the plurality of light emitting units 200.

Additionally, the control unit may adjust the output (radiant power) of the plurality of light emitting units 200. Here, output may mean radiant flux (radiant power). Radiation flux can refer to energy radiated or received in all directions through an area per unit time.

Meanwhile, referring to FIG. 6, among the plurality of light guide holes 100, the light guide hole 100 formed on the outside and the light guide hole 100 formed on the inside can be determined based on three squares (R1, R2, and R3). there is.

For example, the light guiding hole 100 formed inside the square R1 is the innermost light guiding hole 100 among the plurality of light guiding holes 100. The light guiding hole 100 formed outside of the square R1 but inside the square R2 is a light guiding hole 100 formed outside of the plurality of light guiding holes 100 than the light guiding hole 100 formed inside the square R1, but is formed inside the square R2. The light guiding hole 100 is formed inside rather than the light guiding hole 100 formed on the outside. The light guide hole 100 formed outside the square R2 but inside the square R3 is a light guide hole 100 formed outside the light guide hole 100 formed inside the square R2 among the plurality of light guide holes 100, but is formed outside the square R3. The light guiding hole 100 is formed inside rather than the light guiding hole 100 formed on the outside. The light guiding hole 100 formed outside the square R3 is a light guiding hole 100 formed outside the light guiding hole 100 formed inside the square R3 among the plurality of light guiding holes 100.

The control unit controls the output of the light emitting unit 200 disposed on one side of the light guiding hole 100 formed on the inner side of the plurality of light guiding holes 100 in the first direction to one side of the light guiding hole 100 formed on the outer side in the first direction. It can be set to be smaller than the output of the arranged light emitting unit 200. In this regard, it will be described later.

Meanwhile, the light emitting unit 200 disposed on one side of the light guide hole 100 formed on the inside of the plurality of light guide holes 100 in the first direction and the light guide hole 100 formed on the outside of the plurality of light guide holes 100 The light emitting units 200 disposed on one side in the first direction may be distinguished from each other and belong to two or more different channels.

For example, in FIG. 6, the light emitting unit 200 disposed on one side of the light guide hole 100 formed inside the rectangle R1 in the first direction may belong to the first channel. The light emitting units 200 disposed on one side of the light guide holes 100 formed outside the rectangle R1 but inside the rectangle R2 in the first direction may belong to the second channel. The light emitting units 200 disposed on one side of the light guide holes 100 formed outside the rectangle R2 but inside the rectangle R3 in the first direction may belong to the third channel. The light emitting units 200 disposed on one side of the light guide holes 100 formed outside the rectangle R3 in the first direction may belong to the fourth channel.

The control unit can control the output of the light emitting unit 200 belonging to two or more channels for each channel. In this regard, it will be described later.

[Output control of inner and outer light emitting parts]

Referring to FIG. 7, when the outputs of the light emitting units 200 belonging to the above-described first, second, third, and fourth channels are all equal, the exposure object W facing the peripheral exposure device 10 The uniformity of the amount of light irradiated to a predetermined area (AR, Figure 5) for each position is as low as 82.4%. Specifically, the amount of light inside a predetermined area of the exposure object W facing the peripheral exposure apparatus 10 may be large.

This phenomenon may occur even if the light from each light emitting unit 200 belonging to the first/second/third/fourth channel is individually irradiated uniformly. For example, among the predetermined areas (AR, FIG. 5) of the exposure object W, the areas (inner areas) facing the light emitting unit 200 belonging to the first channel belong to the second/third/fourth channels. This may be because the light irradiated from the light emitting unit 200 is scattered and irradiated.

Referring to FIG. 8, the outputs of the light emitting units 200 belonging to the first, second, and third channels are all set to 70%, and the outputs of the light emitting units 200 belonging to the fourth channel are all set to 85%. When set, the uniformity of the amount of light irradiated to a predetermined area (AR, FIG. 5) of the exposure object W facing the peripheral exposure apparatus 10 for each position can be increased to 89.2%.

Referring to FIG. 9, the outputs of the light emitting units 200 belonging to the first and second channels are all set to 55%, and the outputs of the light emitting units 200 belonging to the third channel are all set to 70%. When the output of the light emitting unit 200 belonging to the fourth channel is set to 85%, the light irradiated to a predetermined area (AR, FIG. 5) of the exposure object W facing the peripheral exposure device 10 The uniformity of light quantity by location can be further increased to 96.1%.

In this way, the light emitting unit 200, for example, the first/second/third channel or the first/second channel, is disposed on one side of the light guide hole 100 formed inside among the plurality of light guide holes 100 in the first direction. The output of the light emitting unit (belonging to) is higher than the output of the light emitting unit (200, for example, belonging to the fourth channel or the third/fourth channel) disposed on one side of the light guide hole 100 formed on the outside in the first direction. It can be small.

Accordingly, among the predetermined areas AR (FIG. 5) of the exposure object W, the peripheral exposure device 10 is located in an area facing the light emitting portion 200 of the light guide hole 100 formed inside the peripheral exposure device 10. ), the uniformity of light irradiated to the entire predetermined area (AR, FIG. 5) of the exposure object (W) can be improved even if the light from the light emitting unit 200 of the light guide hole 100 formed outside the light guide hole 100 is scattered for reasons such as scattering. You can.

At this time, as described above, the light emitting part 200 of the light guiding hole 100 formed on the inner side of the plurality of light guiding holes 100 and the light emitting part (200) of the light guiding hole 100 formed on the outer side of the plurality of light guiding holes 100 ( 200) may be distinguished from each other and belong to two or more different channels, and the output of the light emitting unit 200 belonging to two or more channels may be adjusted for each channel by the control unit.

Accordingly, the uniformity of light irradiated to the entire predetermined area AR (FIG. 5) of the exposure object W can be easily adjusted.

Referring to FIGS. 10 and 11 , when the output of the light emitting unit 200 disposed in the inner and outer light guide holes 100 in the peripheral exposure apparatus 10 is adjusted, the light irradiated to the exposure object W The amount of light can be uniform for each location. In FIGS. 10 and 11 , the uniformity of the amount of light irradiated to a predetermined area (AR, FIG. 5 ) of the exposure object W facing the peripheral exposure apparatus 10 for each position may be 95.9%.

[Peripheral exposure method]

The peripheral exposure method may include a placement step and an exposure step.

In the arrangement step, the light guide hole 100 may be positioned at a point at a predetermined distance D1 from the exposure object W in one direction in the first direction.

In the exposure step, a plurality of light emitting units 200 may be turned on.

At this time, among the plurality of light guide holes 100, the output (radiant power) of the light emitting unit 200 disposed on one side of the light guide hole 100 formed on the inside in the first direction is transmitted to the first direction of the light guide hole 100 formed on the outside. The output can be made smaller than the output of the light emitting unit 200 disposed on one side in one direction.

As described above, the present invention has been described with reference to the illustrative drawings, but the present invention is not limited to the embodiments and drawings disclosed herein, and various modifications may be made by those skilled in the art within the scope of the technical idea of the present invention. It is obvious that transformation can occur. In addition, although the operational effects according to the configuration of the present invention were not explicitly described and explained while explaining the embodiments of the present invention above, it is natural that the predictable effects due to the configuration should also be recognized.

10: Peripheral exposure device
100: light guide hole 110: lens hole part
112: first lens hole part 114: second lens hole part
120: Extension hole part 130: Other end part
200: light emitting unit
300: Lens unit 310: First lens
320: Second lens

Claims (15)

In the peripheral exposure device disposed on one side of the exposure object (W) in the first direction and irradiating light to the exposure object (W),
a plurality of light guide holes 100 each extending in a first direction, one end in the first direction closed and the other end open, and formed in parallel while being spaced apart or in contact with a predetermined distance in a second direction intersecting the first direction;
a plurality of light emitting units 200 disposed on one side of the light guide hole 100 in the first direction and facing the other side of the first direction; and
They are disposed in different light guide holes 100, but are disposed on the other side of the first direction than the light emitting portion 200 disposed on one side of the first direction of each light guiding hole 100 and emitted from the light emitting portion 200. It includes a plurality of lens units 300 that refract light,
The other end 130 of the light guide hole 100 in the first direction has a polygonal shape (P) in cross-section in a direction perpendicular to the first direction, and accordingly, each of the light emitting units 200 has the polygonal shape ( It has a light irradiation area (R) of a shape corresponding to P),
When the light guide hole 100 is spaced apart from the exposure object W by a predetermined distance D1 in the first direction, the light emitting unit 200 disposed on one side of each light guide hole 100 in the first direction ) of the light irradiation area (R), a portion forming one side of the polygonal shape (P) in the second direction is on one side of the first direction of the light guide hole 100 adjacent to one side of the second direction. Among the light irradiation areas (R) of the arranged light emitting units 200, the portion forming the other side of the second direction of the shape corresponding to the polygonal shape P is in contact with the portion forming the other side of the second direction, and thus the plurality of light emitting units 200 are irradiated with light. The areas R are connected without overlapping each other in the second direction, and the light emitted from the plurality of light emitting units 200 is irradiated tightly to the predetermined area AR of the exposure object W.
Peripheral exposure device.
In claim 1,
Each of the light guide holes 100 includes a lens hole part 110 where the lens part 300 is disposed, and a space between the other end 130 of the light guide hole 100 in the first direction and the lens hole part 110. A peripheral exposure apparatus including an extension hole portion 120 formed in and extending long in a first direction.
In claim 1,
The peripheral exposure device,
Further comprising a single housing (H),
The plurality of light guide holes 100 are formed inside the housing (H),
Peripheral exposure device.
In claim 1,
The lens unit 300 includes a first lens 310 and a second lens 320 with a larger diameter than the first lens 310,
A peripheral exposure device in which the first lens 310 is disposed on one side of the second lens 320 in a first direction.
In claim 4,
The first lens 310 and the second lens 320 are peripheral exposure devices in which the other surface in the first direction protrudes convexly toward the first direction.
In claim 5,
A peripheral exposure apparatus in which the curvature of the first lens 310 is greater than the curvature of the second lens 320.
In claim 4,
The peripheral exposure device,
It further includes a single housing (H) in which the plurality of light guide holes (100) are formed,
Each of the light guide holes 100 includes a first lens hole portion 112 in which the first lens 310 is disposed and a second lens hole portion 114 in which the second lens 320 is disposed,
The cross-sectional area of the first lens hole portion 112 in a plane perpendicular to the first direction is smaller than the cross-sectional area of the second lens hole portion 114 in a plane perpendicular to the first direction,
The housing (H) has a single first housing body portion (H12) in which a plurality of first lens hole portions 112 are formed and a plurality of second lens hole portions 114 are formed in the interior, and the first lens hole portion 112 is formed therein. A peripheral exposure apparatus comprising a single second housing body portion (H14) coupled to a housing body portion (H12).
In claim 1,
The lens unit 300 has an optical axis (X) parallel to the first direction,
The cross-sectional area of the other end 130 of the light guide hole 100 in the first direction in a plane perpendicular to the optical axis (X) is the maximum cross-sectional area of the lens unit 300 in a plane perpendicular to the optical axis (X) Smaller, peripheral exposure device.
In claim 8,
The peripheral exposure device,
It further includes a single housing (H) in which the plurality of light guide holes (100) are formed,
The housing (H) includes a single housing body portion (H1) in which the remaining portion, excluding the other end 130 of the plurality of light guiding holes 100 in the first direction, is formed inside and the plurality of light guiding holes 100. ) of the other end 130 in the first direction is formed therein and includes a single housing end portion (H2) coupled to the housing body portion (H1).
In claim 1,
Among the refracted lights, the light passing through the other end 130 of the light guide hole 100 in the first direction is irradiated in a direction parallel to the first direction or is inclined at a predetermined angle A or less from the first direction. investigated,
The predetermined distance (D1) is calculated based on the distance (D2) between the predetermined angle (A) and the other end 130 in the first direction of the light guide hole 100 that is adjacent to each other in the second direction. peripheral exposure device.
In claim 1,
The plurality of light guide holes 100 are formed side by side, spaced apart or in contact with a predetermined distance in a second direction and a third direction intersecting the first and second directions,
When the light guide hole 100 is spaced apart from the exposure object W by a predetermined distance D1 in the first direction, the light emitting unit 200 disposed on one side of each light guide hole 100 in the first direction ) of the light irradiation area (R), a portion forming one side of the polygonal shape (P) in the third direction is on one side of the first direction of the light guide hole 100 adjacent to one side of the third direction. A peripheral exposure device that is in contact with a portion of the light irradiation area (R) of the arranged light emitting unit (200) forming the other side of the third direction and having a shape corresponding to the polygonal shape (P).
In claim 1 or claim 11,
Among the plurality of light guide holes 100, the output (radiant power) of the light emitting unit 200 disposed on one side of the first direction of the light guide hole 100 formed on the inside is in the first direction of the light guide hole 100 formed on the outside. A peripheral exposure device that is smaller than the output of the light emitting unit 200 disposed on one side of.
In claim 1 or claim 11,
The light emitting unit 200 disposed on one side of the light guiding hole 100 formed on the inner side of the plurality of light guiding holes 100 in the first direction and the light guiding hole 100 formed on the outer side of the plurality of light guiding holes 100 The light emitting units 200 arranged on one side in one direction are separated from each other and belong to two or more different channels,
The peripheral exposure device,
Comprising a control unit that adjusts the output of the light emitting unit 200 belonging to the two or more channels for each channel,
Peripheral exposure device.
A peripheral exposure method using the peripheral exposure device of any one of claims 1 to 11, comprising:
A positioning step of positioning the light guide hole 100 at a point at a predetermined distance D1 in one direction from the exposure object W; and
Including an exposure step of lighting the plurality of light emitting units 200,
Peripheral exposure method.
In claim 14,
In the exposure step, the output (radiant power) of the light emitting unit 200 disposed on one side of the light guide hole 100 formed on the inside of the plurality of light guide holes 100 in the first direction is transmitted to the light guide hole 100 formed on the outside. ) A peripheral exposure method that makes the output smaller than the output of the light emitting unit 200 disposed on one side of the first direction.