KR102627984B1 - Light emitting device for exposure - Google Patents

Abstract

The present invention provides a light emitting module (100) including a plurality of light emitting devices (110, LEDs) disposed in one direction in a first direction; It is disposed on one side of the first direction of the light emitting module 100, spaced apart from the light emitting module 100 by a first distance D1, includes one or more lenses 210, and emits the light emitted from the light emitting module 100. A first optical system 200 that reduces the irradiation angle of light; The first optical system 200 is disposed on one side of the first direction of the first optical system 200 and is spaced apart from the first optical system 200 by a second distance D2, and includes one or more lenses 310. a second optical system 300 that condenses the light passing through; and is disposed on one side of the first direction of the second optical system 300, spaced apart from the second optical system 300 by a third distance D3, and includes one or more lenses 410, and the second optical system 300 ) The third optical system 400, which condenses the light passing through and converts it into parallel light, is connected to the lenses 210, 310, 410 of the first optical system 200, the second optical system 300, and the third optical system 400. is arranged along the first direction,
Each of the lenses 210, 310, and 410 faces the plurality of light emitting devices 100 and has a single optical axis extending in a first direction.

Description

Light emitting device for exposure {LIGHT EMITTING DEVICE FOR EXPOSURE}

The present invention relates to a light emitting device for exposure, and more specifically, to a light emitting device for exposure that has a simple structure, is low cost, and has high and uniform illuminance for each position of the light irradiation area (exposure area) and improves direct light.

In the manufacturing process of a PCB substrate, semiconductor wafer, or display panel, exposure work is performed to selectively remove PR coated on the surface of the wafer or substrate. Conventionally, mercury lamps and halogen lamps were used as light sources for exposure, but these lamp light sources have problems with lifespan, high voltage, cost, and environmental problems. Therefore, recently, technology for constructing an exposure device using LED (Light Emitting Diode) has been developed.

The prior art related to this is as follows.

Korean Patent Publication No. 10-2015-0049563 provides an exposure LED light source device and an exposure LED light source device management system that can easily expose exposure objects of various shapes and sizes.

However, the prior art does not provide a method to increase illuminance and improve uniformity and direct light.

KR 10-2015-0049563

The present invention was conceived to solve the above-mentioned problems, and its purpose is to provide a light-emitting device for exposure that has a simple structure, has a low cost, and has high illuminance, uniformity, and improved direct light for each position of the light irradiation area (exposure area). There is.

Additionally, embodiments of the present invention aim to provide a light emitting device for exposure that can be made smaller and lighter while reducing manufacturing and maintenance costs.

Additionally, embodiments of the present invention aim to provide a light emitting device for exposure that can simply and easily change the size of the irradiation area (irradiation area, exposure range) of the light emitting module 100.

In order to solve the above-described problem, the present invention includes a light-emitting module 100 including a plurality of light-emitting devices 110 (LEDs) arranged toward one side of a first direction; It is disposed on one side of the first direction of the light emitting module 100 and is spaced apart from the light emitting module 100 by a first distance D1, includes one or more lenses 210, and emits the light emitted from the light emitting module 100. A first optical system 200 that reduces the irradiation angle of light; It is disposed on one side of the first direction of the first optical system 200 and is spaced apart from the first optical system 200 by a second distance D2, and includes one or more lenses 310, and the first optical system 200 a second optical system 300 that condenses the light passing through; and is disposed on one side of the first direction of the second optical system 300, spaced apart from the second optical system 300 by a third distance D3, and includes one or more lenses 410, and the second optical system 300 ) and a third optical system 400 that condenses the light passing through the light and converts it into parallel light.

The lenses 210, 310, and 410 of the first optical system 200, the second optical system 300, and the third optical system 400 are arranged along the first direction.

Each of the lenses 210, 310, and 410 faces the plurality of light emitting devices 100 and has a single optical axis extending in a first direction.

In one embodiment, the radius of curvature of the lens 310 of the second optical system 300 is smaller than the radius of curvature of the lens 210 of the first optical system 200.

In one embodiment, the radius of curvature of the lens 310 of the second optical system 300 is 75% or more and 90% or less of the radius of curvature of the lens 210 of the first optical system 200.

In one embodiment, the diameter of the lens 310 of the second optical system 300 is smaller than the diameter of the lens 210 of the first optical system 200.

In one embodiment, the diameter of the lens 310 of the second optical system 300 is 75% or more and 95% or less of the diameter of the lens 210 of the first optical system 200.

In one embodiment, the lens 410 of the third optical system 400 includes a first lens 410a, a second lens 410b, and a third lens 410c.

The diameter and radius of curvature of the second lens 410b are respectively smaller than the diameter and radius of curvature of the first lens 410a.

The diameter and radius of curvature of the third lens 410c are respectively smaller than the diameter and radius of curvature of the second lens 410b.

In one embodiment, the diameter of the second lens 410b is 65% or more and 80% or less of the diameter of the first lens 410a, and the radius of curvature of the second lens 410b is equal to or greater than that of the first lens (410a). It is more than 65% and less than 80% of the radius of curvature of 410a).

The diameter of the third lens 410c is 70% or more and 85% or less of the diameter of the second lens 410b, and the radius of curvature of the third lens 410c is the radius of curvature of the second lens 410b. It is more than 70% and less than 85% of.

In one embodiment, the second distance D2 is smaller than the first distance D1 and the third distance D3, and the third distance D3 is smaller than the first distance D1.

In one embodiment, the second distance (D2) is greater than 0 and less than 10% of the first distance (D1), and the third distance (D3) is greater than 50% of the first distance (D1) and is 70%. % or less.

In one embodiment, the light emitting module 100 corresponds to each light emitting device 110 and is disposed adjacent to the corresponding light emitting device 110 and surrounds the corresponding light emitting device 110. Includes a lens 120.

In one embodiment, the height of the individual lens 120 in the first direction is greater than the width of the corresponding light emitting device 110 in the direction perpendicular to the first direction.

In one embodiment, the height of the individual lens 120 in the first direction is 1.3 times or more and 2 times or less the width of the corresponding light emitting device 110 in a direction perpendicular to the first direction.

In one embodiment, the individual lenses 120 are formed by stacking a plurality of lenses with small heights in the first direction.

In one embodiment, the plurality of light emitting devices 110 are arranged side by side at a predetermined interval in a second direction perpendicular to the first direction and a third direction perpendicular to the first and second directions.

The predetermined intervals in the second and third directions are respectively greater than 0 and smaller than 25% of the width of the light emitting device 110 in the second and third directions.

In one embodiment, the plurality of light emitting devices 110 are arranged side by side at a predetermined interval in a second direction perpendicular to the first direction and a third direction perpendicular to the first and second directions.

Among the plurality of light emitting devices 110, the light emitting devices 110 disposed inside and the light emitting devices 110 disposed outside are distinguished from each other and belong to two or more different channels.

The light emitting device for exposure includes a control unit that turns on or off the light emitting elements 110 belonging to the two or more channels for each channel.

The first distance (D1), second distance (D2), and third distance (D3) are adjustable.

According to embodiments of the present invention, a light emitting device for exposure includes a light emitting module 100 including a plurality of light emitting elements 110 (LEDs) arranged toward one side in a first direction; It is disposed on one side of the first direction of the light emitting module 100, spaced apart from the light emitting module 100 by a first distance D1, includes one or more lenses 210, and emits the light emitted from the light emitting module 100. A first optical system 200 that reduces the irradiation angle of light; The first optical system 200 is disposed on one side of the first direction of the first optical system 200 and is spaced apart from the first optical system 200 by a second distance D2, and includes one or more lenses 310. a second optical system 300 that condenses the light passing through; and is disposed on one side of the first direction of the second optical system 300, spaced apart from the second optical system 300 by a third distance D3, and includes one or more lenses 410, and the second optical system 300 ) may include a third optical system 400 that condenses the light passing through and converts it into parallel light. The lenses 210, 310, and 410 of the first optical system 200, the second optical system 300, and the third optical system 400 are arranged along a first direction, and each of the lenses 210, 310, and 410 ) may have a single optical axis facing the plurality of light emitting devices 100 and extending in the first direction.

Accordingly, the illuminance can be high, uniform, and direct light can be improved for each position of the light irradiation area (exposure area) of the exposure light emitting device easily at low cost with a simple configuration. In particular, since a plurality of light emitting devices 110 are used, the illuminance can be increased. In addition, even if a plurality of light emitting elements 110 are used, there is no need to use a conventional fly eye lens and there is no need to use a conventional reflector to increase illuminance, so manufacturing and maintenance costs can be reduced. there is.

According to an embodiment of the present invention, the radius of curvature of the lens 310 of the second optical system 300 may be smaller than the radius of curvature of the lens 210 of the first optical system 200.

Accordingly, the light uniformity and maximum illuminance of the exposure light emitting device 10 may increase. Additionally, since the radius of curvature of the lens 310 of the second optical system 300 is reduced, the light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the radius of curvature of the lens 310 of the second optical system 300 may be 75% or more and 90% or less of the radius of curvature of the lens 210 of the first optical system 200.

Accordingly, the light uniformity and maximum illuminance of the exposure light emitting device 10 may increase. Additionally, since the radius of curvature of the lens 310 of the second optical system 300 is reduced, the light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the diameter of the lens 310 of the second optical system 300 may be smaller than the diameter of the lens 210 of the first optical system 200.

Accordingly, the light uniformity and maximum illuminance of the exposure light emitting device 10 may increase. Additionally, since the second distance D2 and the diameter of the lens 310 of the second optical system 300 are reduced, the light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the diameter of the lens 310 of the second optical system 300 may be 75% or more and 95% or less of the diameter of the lens 210 of the first optical system 200.

Accordingly, the light uniformity and maximum illuminance of the exposure light emitting device 10 may increase. Additionally, since the second distance D2 and the diameter of the lens 310 of the second optical system 300 are reduced, the light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the lens 410 of the third optical system 400 may include a first lens 410a, a second lens 410b, and a third lens 410c. The diameter and radius of curvature of the second lens 410b are respectively smaller than the diameter and radius of curvature of the first lens 410a, and the diameter and radius of curvature of the third lens 410c are respectively smaller than those of the second lens 410b. It may be smaller than the diameter and radius of curvature of.

Accordingly, the light uniformity of the light emitting device 10 for exposure may increase and the degree of direct light may increase (irradiation angle may decrease). In addition, since the third distance D3 and the diameter and curvature radius of the second/third lenses 410b and 410c of the third optical system 400 are reduced, the light emitting device for exposure can be miniaturized and lightweight, and the light emitting device for exposure can be manufactured. Costs can be reduced.

According to an embodiment of the present invention, the diameter of the second lens 410b is 65% or more and 80% or less of the diameter of the first lens 410a, and the radius of curvature of the second lens 410b is equal to or greater than the diameter of the first lens 410a. 1It may be more than 65% and less than 80% of the radius of curvature of the lens 410a. The diameter of the third lens 410c is 70% or more and 85% or less of the diameter of the second lens 410b, and the radius of curvature of the third lens 410c is the radius of curvature of the second lens 410b. It may be more than 70% and less than 85% of .

Accordingly, the light uniformity of the light emitting device 10 for exposure may increase and the degree of direct light may increase (irradiation angle may decrease). In addition, since the third distance D3 and the diameter and curvature radius of the second/third lenses 410b and 410c of the third optical system 400 are reduced, the light emitting device for exposure can be miniaturized and lightweight, and the light emitting device for exposure can be manufactured. Costs can be reduced.

According to an embodiment of the present invention, the second distance D2 may be smaller than the first distance D1 and the third distance D3, and the third distance D3 may be smaller than the first distance D1. there is.

Accordingly, the light uniformity, maximum illuminance, and direct light intensity of the light emitting device 10 for exposure can be increased. The light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the second distance (D2) is greater than 0 and less than 10% of the first distance (D1), and the third distance (D3) is 50% of the first distance (D1). It can be more than 70% and less than 70%.

Accordingly, the light uniformity, maximum illuminance, and direct light intensity of the light emitting device 10 for exposure can be increased. The light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the light emitting module 100 corresponds to each light emitting device 110, is disposed adjacent to the corresponding light emitting device 110, and surrounds the corresponding light emitting device 110. It may include a plurality of individual lenses 120.

Accordingly, the irradiation angle of light of each light-emitting element 110 included in the light-emitting module 100 can be individually reduced. Accordingly, since the illuminance of the light emitting module 100 is improved, there is no need to separately provide a conventional reflector to increase the illuminance of the light emitting device 10 for exposure. Accordingly, since there is no need to manufacture a reflector and there is no need to manufacture a mold to manufacture the reflector, the manufacturing cost of the light emitting device 10 for exposure can be greatly reduced. Additionally, the light emitting device 10 for exposure can be miniaturized and lightweight. Additionally, since the irradiation angle of light from each light emitting device 110 is reduced, light uniformity for each position in the front of the light emitting module 100 can be improved.

According to an embodiment of the present invention, the height of the individual lens 120 in the first direction may be greater than the width of the corresponding light emitting device 110 in a direction perpendicular to the first direction.

Accordingly, the irradiation angle of light of each light-emitting element 110 included in the light-emitting module 100 can be effectively reduced, so that the illuminance of the light-emitting module 100 and the light uniformity for each position in front of the light-emitting module 100 are improved. It can be improved further.

According to an embodiment of the present invention, the height of the plurality of individual lenses 120 in the first direction may be 1.3 times or more and 2 times or less the width of the corresponding light emitting device 110 in a direction perpendicular to the first direction.

Accordingly, the irradiation angle of light of each light-emitting element 110 included in the light-emitting module 100 can be effectively reduced, so that the illuminance of the light-emitting module 100 and the light uniformity for each position in front of the light-emitting module 100 are improved. It can be improved further.

According to an embodiment of the present invention, the individual lens 120 may be a stack of a plurality of lenses with a small height in the first direction.

Accordingly, the height (unit) of the individual lens 120 in the first direction may be greater than a predetermined value or a predetermined number or more refractive surfaces may be formed. Accordingly, the irradiation angle of light of each light-emitting element 110 included in the light-emitting module 100 can be effectively reduced, and thus the illuminance of the light-emitting module 100 can be significantly improved. Additionally, an individual lens 120 with a large height in the first direction can be easily manufactured at low cost.

According to an embodiment of the present invention, the plurality of light emitting devices 110 are arranged side by side at a predetermined interval in a second direction perpendicular to the first direction and a third direction perpendicular to the first and second directions. It can be. The predetermined intervals in the second and third directions may be greater than 0 and less than 25% of the width of the light emitting device 110 in the second and third directions, respectively.

Accordingly, light can be uniformly irradiated to a predetermined area of the exposure object W easily and at low cost with a simple configuration.

According to an embodiment of the present invention, the plurality of light emitting devices 110 are arranged side by side at a predetermined interval in a second direction perpendicular to the first direction and a third direction perpendicular to the first and second directions. It can be. The predetermined intervals in the second and third directions may be greater than 0 and less than 25% of the width of the light emitting device 110 in the second and third directions, respectively.

Accordingly, the illuminance of light emitted from the light emitting module 100 can be more uniform for each location and the spot phenomenon can be further reduced.

According to an embodiment of the present invention, the plurality of light emitting devices 110 are arranged side by side at a predetermined interval in a second direction perpendicular to the first direction and a third direction perpendicular to the first and second directions. It can be. Among the plurality of light emitting devices 110, the light emitting device 110 disposed inside and the light emitting device 110 disposed outside may be distinguished from each other and belong to two or more different channels. The light emitting device for exposure may include a control unit that turns on or off the light emitting elements 110 belonging to the two or more channels for each channel. The first distance (D1), second distance (D2), and third distance (D3) may be adjustable.

Accordingly, the size (irradiation area, exposure range) of the irradiation area of the light emitting module 100 can be changed simply and easily, and the illuminance of the light emitted from the light emitting module 100 can be made uniform for each position of the irradiation area.

In addition to the above-described effects, specific effects of the present invention are described below while explaining specific details for carrying out the invention.

Figure 1 is a side view schematically showing a light-emitting device for exposure and a path of light according to an embodiment of the present invention.
Figure 2 is a front view schematically showing the light emitting module of Figure 1.
Figure 3 is a cross-sectional view showing an individual lens according to an embodiment of the present invention disposed on the light emitting element of the light emitting module of Figures 1 and 2.
FIG. 4 is a side view showing a state in which a plurality of individual lenses of FIG. 3 are disposed on each light-emitting element of the light-emitting module of FIGS. 1 and 2.
Figure 5 is a table showing the illuminance by height (number of units) and irradiation distance of the individual lenses of Figures 3 and 4.
Figure 6 is a cross-sectional view showing the manufacturing process of the individual lenses of Figures 3 and 4.
FIG. 7 is a front view showing a case where the gap between light-emitting elements of the light-emitting module of FIGS. 1 and 2 is large.
FIGS. 8 and 9 show the illuminance by position of the light emitted from the light emitting module of FIG. 7 when the first, second, and third optical systems of FIG. 1 are not and are placed in front of the light emitting module of FIG. 7, respectively. This is the drawing shown.
FIG. 10 is a front view showing a case where the spacing between light-emitting elements of the light-emitting module of FIGS. 1 and 2 is small.
FIGS. 11 and 12 show the illuminance by position of the light emitted from the light emitting module of FIG. 10 when the first, second, and third optical systems of FIG. 1 are not and are placed in front of the light emitting module of FIG. 10, respectively. This is the drawing shown.
FIG. 13 is a diagram showing a rectangle dividing the plurality of light emitting elements of the light emitting module of FIGS. 1 and 2 into inside and outside.
FIGS. 14 to 16 are diagrams showing the illuminance of light emitted from the light emitting modules of FIGS. 1 and 2 at each position as the inner or outer light emitting elements divided by the squares in FIG. 6 are turned on or off.
Figure 17 shows the illuminance and irradiation by position of the light irradiation area (exposure area) in the first condition (Sample A) and the second condition (Sample A) where the distance (first distance) between the light emitting module and the first optical system is different. This is a table showing area, uniformity, and maximum illuminance.
Figure 18 is a table showing illuminance values for each location in Figure 17.
Figure 19 shows the illuminance and irradiation area by position of the light irradiation area (exposure area) in the third condition (Sample C) in which the radius of curvature of the lens 310 of the second optical system 300 is reduced in the second condition (Sample B). , This is a table showing uniformity and maximum illuminance.
Figure 20 is a table showing illuminance values for each location in Figure 19.
Figure 21 shows the distance between the first and second optical systems (second distance) in the third condition (Sample C) and the fourth condition (Sample D) in which the diameter of the lens 310 of the second optical system 300 is reduced. This table shows the illuminance, irradiation area, uniformity, and maximum illuminance for each location of the light irradiation area (exposure area).
Figure 22 is a table showing illuminance values for each location in Figure 21.
23 shows the distance (third distance) between the second optical system and the third optical system and the diameters of the second lens 410b and the third lens 410c of the third optical system 400 in the fourth condition (Sample D). This table shows the illuminance, irradiation area, uniformity, maximum illuminance, and irradiation angle for each position of the light irradiation area (exposure area) in the fifth condition (Sample E) with a reduced radius of curvature.
Figure 24 is a diagram briefly showing seven illuminance measurement points in the light irradiation area (exposure area). FIG. 25 is a table showing the illuminance at seven points in FIG. 24 according to the distance between the light emitting device for exposure and the exposure surface.
FIG. 26 is a table showing the uniformity of illuminance and effective irradiation area (exposure area) of the light irradiation area (exposure area) of FIG. 25 by distance between the light emitting device for exposure and the exposure surface.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention is not limited to the embodiments disclosed below, but may be subject to various changes and may be implemented in various different forms. This example is provided solely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention. Therefore, the present invention is not limited to the embodiments disclosed below, but substitutes or adds to the configuration of one embodiment and the configuration of another embodiment, as well as all changes and equivalents included in the technical spirit and scope of the present invention. It should be understood to include substitutes.

The attached drawings are only for easy understanding of the embodiments disclosed in this specification, and the technical idea disclosed in this specification is not limited by the attached drawings, and all changes, equivalents, and changes included in the spirit and technical scope of the present invention are not limited. It should be understood to include water or substitutes. In the drawings, components may be expressed exaggeratedly large or small in size or thickness for convenience of understanding, etc., but the scope of protection of the present invention should not be construed as limited due to this.

The terms used in this specification are only used to describe specific implementations or examples, and are not intended to limit the invention. And singular expressions include plural expressions, unless the context clearly dictates otherwise. In the specification, terms such as ~include, ~consist of, etc. are intended to indicate the existence of features, numbers, steps, operations, components, parts, or a combination thereof described in the specification. In other words, terms such as ~include, ~consist, etc. in the specification. It should be understood that this does not exclude in advance the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

Terms containing ordinal numbers, such as first, second, etc., may be used to describe various components, but the components are not limited by the terms. The above terms are used only for the purpose of distinguishing one component from another.

When a component is said to be "connected" or "connected" to another component, it is understood that it may be directly connected to or connected to the other component, but that other components may exist in between. It should be. On the other hand, when it is mentioned that a component is “directly connected” or “directly connected” to another component, it should be understood that there are no other components in between.

When a component is referred to as being "on top" or "below" another component, it should be understood that not only is it placed directly on top of the other component, but there may also be other components in between. .

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person of ordinary skill in the technical field to which the present invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related technology, and unless explicitly defined in the present application, should not be interpreted in an ideal or excessively formal sense. No.

The light emitting device for exposure disclosed in the following embodiments will be examined in more detail with reference to each drawing.

Figure 1 is a side view schematically showing a light-emitting device for exposure and a path of light according to an embodiment of the present invention.

Referring to FIG. 1 , the light emitting device 10 for exposure according to an embodiment may include a light emitting module 100, a first optical system 200, a second optical system 300, and a third optical system 400. The light emitting device 10 for exposure may further include a control unit (not shown). Below, we will look at each configuration in detail.

[Light emitting module]

Figure 2 is a front view schematically showing the light emitting module of Figure 1.

Referring further to FIG. 2 , the light emitting module 100 according to one embodiment may include a plurality of light emitting devices 110 (LEDs) arranged toward one side of a first direction (eg, front-to-back direction). Specifically, for example, the plurality of light emitting devices 110 may operate in a second direction perpendicular to the first direction (e.g., up and down direction) and in a third direction perpendicular to the first and second directions (e.g., left and right direction). Each can be arranged side by side at a predetermined interval.

Figure 3 is a cross-sectional view showing an individual lens according to an embodiment of the present invention disposed on the light emitting element of the light emitting module of Figures 1 and 2. FIG. 4 is a side view showing a state in which a plurality of individual lenses of FIG. 3 are disposed on each light-emitting element of the light-emitting module of FIGS. 1 and 2. Figure 5 is a table showing the illuminance by height (number of units) and irradiation distance of the individual lenses of Figures 3 and 4. Figure 6 is a cross-sectional view showing the manufacturing process of the individual lenses of Figures 3 and 4.

Referring to Figures 3 and 4, the light emitting module 100 according to one embodiment corresponds to each light emitting device 110 included in the light emitting module 100 and is disposed adjacent to the corresponding light emitting device 110. and may include a plurality of individual lenses 120 surrounding the corresponding light emitting device 110.

Accordingly, the irradiation angle of light of each light-emitting element 110 included in the light-emitting module 100 can be individually reduced. Accordingly, since the illuminance of the light emitting module 100 is improved, there is no need to separately provide a conventional reflector to increase the illuminance of the light emitting device 10 for exposure. Accordingly, since there is no need to manufacture a reflector and there is no need to manufacture a mold to manufacture the reflector, the manufacturing cost of the light emitting device 10 for exposure can be greatly reduced. Additionally, the light emitting device 10 for exposure can be miniaturized and lightweight. Additionally, since the irradiation angle of light from each light emitting device 110 is reduced, light uniformity for each position in the front of the light emitting module 100 can be improved.

The individual lens 120 may be a stack of a plurality of lenses with a small height in the first direction (FIG. 3). For example, the individual lens 120 may be in the form of three lenses stacked in three stages, each having a height of T1, T2, and T3 in the first direction.

Accordingly, the height (unit) of the individual lens 120 in the first direction may be greater than a predetermined value or a predetermined number or more refractive surfaces may be formed. Accordingly, the irradiation angle of light of each light-emitting element 110 included in the light-emitting module 100 can be effectively reduced, and thus the illuminance of the light-emitting module 100 can be significantly improved. The experimental results of FIG. 5 for this will be described later. Additionally, an individual lens 120 with a large height in the first direction can be easily manufactured at low cost.

Referring to FIG. 5, the individual lenses 120 can be raised to three levels or more by stacking three lenses with small heights in the first direction. Accordingly, the height (number of steps) of the individual lenses 120 in the first direction may be greater than a predetermined value, or the number of refractive surfaces of the individual lenses 120 may be formed more than a predetermined number. Accordingly, the irradiation angle of light from each light-emitting element 110 included in the light-emitting module 100 can be effectively reduced, and thus the illuminance of the light-emitting module 100 can be significantly improved. The height of the individual lens 120 in the first direction is as follows.

The height (T1 + T2 + T3) of the individual lens 120 in the first direction is the direction perpendicular to the first direction of the light emitting element 110 corresponding to the individual lens 120 (for example, the second or third direction ) may be larger than the width (W1).

Accordingly, the irradiation angle of light of each light-emitting element 110 included in the light-emitting module 100 can be effectively reduced, so that the illuminance of the light-emitting module 100 and the light uniformity for each position in front of the light-emitting module 100 are improved. It can be improved further.

For example, the height (T1 + T2 + T3) of the individual lens 120 in the first direction is the direction perpendicular to the first direction of the corresponding light emitting element 110 (e.g., the second or third direction). It may be 1.3 times or more and 2 times or less the width (W1) of .

Specifically, for example, the height (T1 + T2 + T3) of the individual lens 120 in the first direction is the direction perpendicular to the first direction of the corresponding light emitting element 110 (for example, the second direction or the third direction). direction) may be 1.5 times the width (W1).

Referring to FIG. 6, individual lenses 120 may be formed by applying (ejecting) liquid resin (eg, silicone) onto the light emitting device 110 using a dispenser. At this time, in order to form an individual lens 120 with a large height in the first direction, liquid resin may be applied (discharged) on the lens 100 multiple times (three times in the drawing). In other words, if a large amount of liquid resin is applied (discharged) at once using a dispenser, the liquid resin flows down to the side and cannot form the individual lens 120 with a large height in the first direction, so a small amount of liquid resin is used. Form an individual lens 120 with a large height in the first direction by first forming a lens with a small height in the first direction and then applying (discharging) a small amount of liquid resin on top of the lens with a small height in the first direction. can do. Accordingly, the individual lenses 120 may have a stacked form.

Accordingly, the individual lens 120 with a large height in the first direction can be easily formed simply and at low cost.

FIG. 7 is a front view showing a case where the gap between light-emitting elements of the light-emitting module of FIGS. 1 and 2 is large. FIGS. 8 and 9 show the illuminance by position of the light emitted from the light emitting module of FIG. 7 when the first, second, and third optical systems of FIG. 1 are not and are placed in front of the light emitting module of FIG. 7, respectively. This is the drawing shown.

Figure 10 is a front view showing a case where the spacing between light-emitting elements of the light-emitting module of Figures 1 and 2 is small. FIGS. 11 and 12 show the illuminance by position of the light emitted from the light emitting module of FIG. 10 when the first, second, and third optical systems of FIG. 1 are not and are placed in front of the light emitting module of FIG. 10, respectively. This is the drawing shown.

Referring to FIG. 7 , the spacing between the light emitting devices 110 in the second and third directions may be 60% of the width of the light emitting devices 110 in the second and third directions, respectively.

Referring to FIGS. 8 and 9, if the first, second, and third optical systems 200, 300, and 400 are not placed in front of the light emitting module 100, the illuminance of the light emitted from the light emitting module 100 varies depending on the location. It becomes noticeably non-uniform, and a spot phenomenon that distinguishes the light from each light-emitting device 110 may become prominent. If the first, second, and third optical systems (200, 300, and 400) are placed in front of the light emitting module 100, the illuminance of the light emitted from the light emitting module 100 can be uniform for each location and the spot phenomenon can be significantly reduced. there is.

Referring to FIG. 10, the spacing between the light emitting devices 110 in the second and third directions may be greater than 0 and less than 25% of the width of the light emitting devices 110 in the second and third directions, respectively.

Accordingly, the illuminance of light emitted from the light emitting module 100 can be more uniform for each location and the spot phenomenon can be further reduced.

Specifically, for example, the spacing between the light emitting devices 110 in the second and third directions may be 20% of the width of the light emitting devices 110 in the second and third directions, respectively (FIG. 10).

Referring to FIGS. 11 and 12, if the first, second, and third optical systems 200, 300, and 400 are not placed in front of the light emitting module 100, the illuminance of the light emitted from the light emitting module 100 varies depending on the location. It may become uneven, causing the spot phenomenon to become noticeable. At this time, since the distance between the light emitting elements 110 in the second and third directions is reduced (FIG. 10), the illuminance of the light emitted from the light emitting module 100 can be more uniform for each location than in FIG. 8, and the spot phenomenon is reduced. can do. When the first, second, and third optical systems 200, 300, and 400 are placed in front of the light emitting module 100, the illuminance of the light emitted from the light emitting module 100 becomes significantly uniform for each location and the spot phenomenon is significantly reduced. can do. At this time, since the distance between the light emitting elements 110 in the second and third directions is reduced (FIG. 10), the illuminance of the light emitted from the light emitting module 100 can be more uniform for each location than in FIG. 9, and the spot phenomenon is more likely. may decrease.

In order to reduce the gap between the light emitting elements 110 in the second and third directions, die bonding and wire bonding techniques may be used when manufacturing the light emitting module 100.

[Control unit]

The control unit (not shown) can turn on or off the light emitting devices 110 belonging to two or more channels for each channel. In this regard, look at Figures 13 to 16.

FIG. 13 is a diagram showing a rectangle dividing the plurality of light emitting elements of the light emitting module of FIGS. 1 and 2 into inner and outer sides. FIGS. 14 to 16 are diagrams showing the illuminance of light emitted from the light emitting modules of FIGS. 1 and 2 for each position as the inner or outer light emitting elements divided by the squares in FIG. 13 are turned on or off.

Referring to FIG. 13, among the plurality of light emitting devices 110, the light emitting devices 110 arranged inside and outside may be determined based on four squares (R1, R2, R3, and R4).

For example, the light emitting device 110 disposed inside the rectangle R1 is the innermost light emitting device 110 among the plurality of light emitting devices 110. The light emitting device 110 disposed outside the square R1 but inside the square R2 is a light emitting device 110 disposed outside the light emitting device 110 disposed inside the square R1 among the plurality of light emitting devices 110. However, the light emitting element 110 is placed inside the rectangle R2 rather than the light emitting element 110 placed outside. The light emitting device 110 disposed outside the square R2 but inside the square R3 is a light emitting device 110 disposed outside the light emitting device 110 disposed inside the square R2 among the plurality of light emitting devices 110. However, the light emitting element 110 is placed inside the rectangle R3 rather than the light emitting element 110 placed outside. The light emitting device 110 disposed outside the square R3 but inside the square R4 is a light emitting device 110 disposed outside the light emitting device 110 disposed inside the square R3 among the plurality of light emitting devices 110. However, the light emitting element 110 is placed inside rather than the light emitting element 110 placed outside the square R4. The light emitting device 110 disposed outside the rectangle R4 is a light emitting device 110 disposed outside the light emitting device 110 disposed inside the rectangle R4 among the plurality of light emitting devices 110.

Among the plurality of light emitting devices 110, the light emitting device 110 disposed inside and the light emitting device 110 disposed outside may be distinguished from each other and belong to two or more different channels.

For example, in FIG. 13, the light emitting devices 110 disposed inside the rectangle R1 may belong to the first channel. The light emitting elements 110 disposed outside the rectangle R1 but inside the rectangle R2 may belong to the second channel. The light emitting elements 110 disposed outside the rectangle R2 but inside the rectangle R3 may belong to the third channel. The light emitting elements 110 disposed outside the rectangle R3 but inside the rectangle R4 may belong to the fourth channel. The light emitting elements 110 disposed outside the rectangle R4 may belong to the fifth channel.

Referring to Figures 14 to 16, the control unit can turn on only the first channel (Figure 14), turn on the first and second channels (Figure 15), or turn on the first to fourth channels (Figure 16). ). Accordingly, the size (irradiation area, exposure range) of the light irradiation area of the light emitting module 100 may gradually increase.

At this time, the first distance (D1), the second distance (D2), and the third distance (D3) may be adjustable. Accordingly, the illuminance of the light emitted from the light emitting module 100 may be uniform for each location of the irradiation area.

In this way, among the plurality of light emitting devices 110, the light emitting devices 110 disposed inside and the light emitting devices 110 disposed outside are distinguished from each other and belong to two or more different channels, and the control unit belongs to two or more channels. The light emitting device 110 is turned on or off for each channel, and the first distance (D1), second distance (D2), and third distance (D3) may be adjustable.

Accordingly, the size (irradiation area, exposure range) of the irradiation area of the light emitting module 100 can be changed simply and easily, and the illuminance of the light emitted from the light emitting module 100 can be made uniform for each position of the irradiation area.

[1st optical system]

The first optical system 200 may be disposed on one side of the light emitting module 100 in the first direction and spaced apart from the light emitting module 100 by a first distance D1.

The first optical system 200 may include one or more (two in the drawing) lenses 210. Each lens 210 can be installed in close contact within 1 mm. Each lens 210 may be arranged side by side in the first direction. Each lens 210 may have at least one convex surface among one surface and the other surface.

The diameter of the lens 210 of the first optical system 200 may be more than twice the diameter of the light-emitting area formed by the lit light-emitting device 110 among the plurality of light-emitting devices 110 of the light-emitting module 100.

The first optical system 200 can reduce the irradiation angle of the light emitted from the light emitting module 100.

[Second optical system]

The second optical system 300 may be arranged on one side of the first optical system 200 in the first direction and spaced apart from the first optical system 200 by a second distance D2.

The second optical system 300 may include one or more (two in the drawing) lenses 310. Each lens 310 can be installed in close contact within 1 mm. Each lens 310 may be arranged side by side in the first direction. Each lens 310 may have at least one convex surface among one surface and the other surface.

The second optical system 300 can converge light that has passed through the first optical system 200. Accordingly, between the second optical system 300 and the third optical system 400, the cross-sectional area of light passing through the second optical system 300 may gradually decrease in one direction in the first direction (FIG. 1).

[Third Optical System]

The third optical system 400 may be placed on one side of the second optical system 300 in the first direction and may be spaced apart from the second optical system 300 by a third distance D3.

The third optical system 400 may include one or more (three in the drawing) lenses 410. One or more lenses 410 may be installed in close contact with each other (i.e., adjacent to each other) within 1 mm. Each lens 410 may be arranged side by side in the first direction. Each lens 410 may have at least one convex surface among one surface and the other surface. In the plurality of lenses 410 of the third optical system 400, the radius of curvature of each lens 410 is smaller than the radius of curvature of the lens 410 disposed on the other side in the first direction than each lens 410. (Figure 1, Figure 23).

For example, one or more lenses 410 of the third optical system 400 may include a first lens 410a, a second lens 410b, and a third lens 410c.

Among the lenses 410 of the third optical system 400, the diameter of the lens 410 (eg, the third lens) disposed on one side of the first direction may be larger than the diameter of the target irradiation area. For example, the diameter of the lens 410 (eg, the third lens) disposed on one side of the first direction may be 1.1 times the diameter of the target irradiation area.

The diameter of the lens 410 of the third optical system 400 is

The third optical system 400 can condense the light that has passed through the second optical system 300 and change it into parallel light.

[1st/2nd/3rd optical system]

The lenses 210, 310, and 410 of the first optical system 200, the second optical system 300, and the third optical system 400 may be arranged along the first direction. Each lens 210, 310, and 410 may have a single optical axis facing the plurality of light emitting devices 110 and extending in the first direction.

Accordingly, since there is no need to use a conventional fly eye lens, the problem of the plurality of optical axes of the fly eye lens being misaligned with the optical axes of the plurality of light emitting elements 110 does not occur. Accordingly, convenience of use can be improved and manufacturing and maintenance costs can be reduced.

Hereinafter, with reference to FIGS. 17 to 23, the first, second, and third optical systems 200, 300, and 400 will be described.

Figure 17 shows the illuminance and irradiation by position of the light irradiation area (exposure area) in the first condition (Sample A) and the second condition (Sample B) where the distance (first distance) between the light emitting module and the first optical system is different. This is a table showing area, uniformity, and maximum illuminance. Figure 18 is a table showing illuminance values for each location in Figure 17.

Referring to FIG. 17, the first distance D1 of the second condition (Sample B) may be reduced to 25% of the first distance D1 of the first condition (Sample A). The remaining conditions may be the same. For example, in the first condition (Sample A) and the second condition (Sample B), the diameters of each lens 210, 310, and 410 of the first, second, and third optical systems (200, 300, and 400) and The radius of curvature, the second distance (D2), the third distance (D3), etc. may be the same.

As in the second condition (Sample B), if the first distance (D1) decreases, the area of the light irradiation area (exposure area) increases and the maximum illuminance increases, but uniformity may decrease (FIG. 17). However, as described later, the diameter or radius of curvature of the lenses 210, 310, 410 of the first/second/third optical systems 200, 300, 400 may be changed or the second distance D2 or third distance (D2) or third distance (D2) may be changed. By changing D3), both maximum illuminance and uniformity can be improved.

Figure 19 shows the illuminance and irradiation area by position of the light irradiation area (exposure area) in the third condition (Sample C) in which the radius of curvature of the lens 310 of the second optical system 300 is reduced in the second condition (Sample B). , This is a table showing uniformity and maximum illuminance. Figure 20 is a table showing illuminance values for each location in Figure 19.

Referring to FIG. 19, the radius of curvature of the lens 310 of the second optical system 300 in the third condition (Sample C) is the curvature of the lens 310 of the second optical system 300 in the second condition (Sample B). It can be smaller than the radius. Accordingly, the radius of curvature of the lens 310 of the second optical system 300 may be smaller than the radius of curvature of the lens 210 of the first optical system 200. For example, the radius of curvature of the lens 310 of the second optical system 300 may be 75% or more and 90% or less of the radius of curvature of the lens 210 of the first optical system 200.

Specifically, for example, the radius of curvature of the lens 310 of the second optical system 300 in the third condition (Sample C) is the curvature of the lens 310 of the second optical system 300 in the second condition (Sample B). It can be reduced to 84% of the radius. Accordingly, the radius of curvature of the lens 310 of the second optical system 300 may be 84% of the radius of curvature of the lens 210 of the first optical system 200. The remaining conditions may be the same.

When the radius of curvature of the lens 310 of the second optical system 300 is smaller than the radius of curvature of the lens 210 of the first optical system 200, uniformity and maximum illuminance can be increased (FIG. 19). Additionally, since the radius of curvature of the lens 310 of the second optical system 300 is reduced, the light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

Figure 21 shows the distance between the first and second optical systems (second distance) in the third condition (Sample C) and the fourth condition (Sample D) in which the diameter of the lens 310 of the second optical system 300 is reduced. This table shows the illuminance, irradiation area, uniformity, and maximum illuminance for each location of the light irradiation area (exposure area). Figure 22 is a table showing illuminance values for each location in Figure 21.

Referring to FIG. 21, the second distance D2 of the fourth condition (Sample D) may be smaller than the second distance D2 of the third condition (Sample C). In addition, the diameter of the lens 310 of the second optical system 300 in the fourth condition (Sample D) may be smaller than the diameter of the lens 310 of the second optical system 300 in the third condition (Sample C). .

Accordingly, the second distance D2 may be smaller than the first distance D1 and the third distance D3, but larger than 0 and smaller than 10% of the first distance D1. Additionally, the diameter of the lens 310 of the second optical system 300 may be smaller than the diameter of the lens 210 of the first optical system 200. For example, the diameter of the lens 310 of the second optical system 300 may be 75% or more and 95% or less of the diameter of the lens 210 of the first optical system 200.

Specifically, for example, the second distance (D2, A*0.01) of the fourth condition (Sample D) may be 50% of the second distance (D2, A*0.02) of the third condition (Sample C). Accordingly, the second distance (D2, A*0.01) may be 4% of the first distance (D1, A*0.25) determined in the second condition (Sample B). In addition, the diameter of the lens 310 of the second optical system 300 in the fourth condition (Sample D) is reduced to 90% of the diameter of the lens 310 of the second optical system 300 in the third condition (Sample C). can do. Accordingly, the diameter of the lens 310 of the second optical system 300 may be 90% of the diameter of the lens 210 of the first optical system 200. The remaining conditions may be the same.

When the second distance D2 is smaller than 10% of the first distance D1 and the diameter of the lens 310 of the second optical system 300 is smaller than the diameter of the lens 210 of the first optical system 200, the uniformity and maximum illuminance may increase (Figure 21). Additionally, since the second distance D2 and the diameter of the lens 310 of the second optical system 300 are reduced, the light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

23 shows the distance (third distance) between the second optical system and the third optical system and the diameters of the second lens 410b and the third lens 410c of the third optical system 400 in the fourth condition (Sample D). This table shows the illuminance, irradiation area, uniformity, maximum illuminance, and irradiation angle for each position of the light irradiation area (exposure area) in the fifth condition (Sample E) with a reduced radius of curvature.

Here, the irradiation angle may be the angle difference between the light incident on the exposure surface and the normal line of the exposure surface.

Referring to FIG. 23, the third distance D3 of the fifth condition (Sample E) may be smaller than the third distance D3 of the fourth condition (Sample D). In addition, the diameter and radius of curvature of the second lens 410b and the third lens 410c of the third optical system 400 of the fifth condition (Sample E) are the same as those of the third optical system 400 of the fourth condition (Sample D). It may be smaller than the diameter and radius of curvature of the second lens 410b and the third lens 410c.

Accordingly, the third distance D3 may be smaller than the first distance D1. For example, the third distance D3 may be 50% or more and 70% or less of the first distance D1.

Additionally, the diameter and radius of curvature of the second lens 410b may be smaller than the diameter and radius of curvature of the first lens 410a, respectively. For example, the diameter and radius of curvature of the second lens 410b may be 65% or more and 80% or less of the diameter and radius of curvature of the first lens 410a, respectively.

Additionally, the diameter and radius of curvature of the third lens 410c may be smaller than the diameter and radius of curvature of the second lens 410b, respectively. For example, the diameter and radius of curvature of the third lens 410c may be 70% or more and 85% or less of the diameter and radius of curvature of the second lens 410b, respectively.

Specifically, for example, the third distance (D3, A*0.15) of the fifth condition (Sample E) may be 30% of the third distance (D3, A*0.5) of the fourth condition (Sample D). Accordingly, the third distance (D3, A*0.15) may be 60% of the first distance (D1, A*0.25) determined in the second condition (Sample B).

In addition, the diameter and radius of curvature of the second lens 410b of the third optical system 400 of the fifth condition (Sample E) are the same as those of the third optical system 400 of the fourth condition (Sample D) or the fifth condition (Sample E). ) can be reduced to 70% of the diameter and radius of curvature of the first lens 410.

In addition, the diameter and radius of curvature of the third lens 410c of the third optical system 400 of the fifth condition (Sample E) are the same as those of the second lens 410b of the third optical system 400 of the fifth condition (Sample E). It can be reduced to 80% of the diameter and radius of curvature.

The remaining conditions may be the same.

The third distance D3 is smaller than the first distance D1, and the diameter and radius of curvature of the first lens 410a, the second lens 410b, and the third lens 410c of the third optical system 400 are As it becomes smaller sequentially, uniformity can increase and direct light can increase (irradiation angle decreases). However, the maximum illuminance may decrease slightly (Figure 23). In addition, since the third distance D3 and the diameter and curvature radius of the second/third lenses 410b and 410c of the third optical system 400 are reduced, the light emitting device for exposure can be miniaturized and lightweight, and the light emitting device for exposure can be manufactured. Costs can be reduced.

In this way, the light emitting device 10 for exposure includes a light emitting module 100, a first optical system 200, a second optical system 300, and a third optical system 400, and the first optical system 200 and the second optical system The lenses 210, 310, and 410 of (300) and the third optical system 400 are arranged along the first direction, and each lens (210, 310, and 410) faces the plurality of light emitting elements 110 and is disposed in the first direction. It may have a single optical axis extending in either direction.

Accordingly, the illuminance can be high, uniform, and direct light can be improved for each position of the light irradiation area (exposure area) of the exposure light emitting device easily at low cost with a simple configuration. In particular, since a plurality of light emitting devices 110 are used, the illuminance can be increased. In addition, even if a plurality of light emitting elements 110 are used, there is no need to use a conventional fly eye lens and there is no need to use a conventional reflector to increase illuminance, so manufacturing and maintenance costs can be reduced. there is.

Figure 24 is a diagram briefly showing seven illuminance measurement points in the light irradiation area (exposure area). FIG. 25 is a table showing the illuminance at seven points in FIG. 24 according to the distance between the light emitting device for exposure and the exposure surface. FIG. 26 is a table showing the uniformity of illuminance and effective irradiation area (exposure area) of the light irradiation area (exposure area) of FIG. 25 by distance between the light emitting device for exposure and the exposure surface.

Referring to FIGS. 24 to 26, it can be seen that as the distance between the light emitting device for exposure and the exposure surface increases, the illuminance at the seven points of FIG. 24 decreases, but the uniformity and effective irradiation area increase.

As described above, the present invention has been described with reference to the illustrative drawings, but the present invention is not limited to the embodiments and drawings disclosed herein, and various modifications may be made by those skilled in the art within the scope of the technical idea of the present invention. It is obvious that transformation can occur. In addition, although the operational effects according to the configuration of the present invention were not explicitly described and explained while explaining the embodiments of the present invention above, it is natural that the predictable effects due to the configuration should also be recognized.

10: Light emitting device for exposure
100: Light emitting module
110: light emitting device
120: Individual lens
200: 1st optical system
210: lens
300: Second optical system
310: lens
400: Third optical system
410: lens
410a: first lens
410b: second lens
410c: Third lens

Claims (15)

A light-emitting module 100 including a plurality of light-emitting elements 110 (LED) arranged toward one side in a first direction;
It is disposed on one side of the first direction of the light emitting module 100 and is spaced apart from the light emitting module 100 by a first distance D1, includes one or more lenses 210, and emits the light emitted from the light emitting module 100. A first optical system 200 that reduces the irradiation angle of light;
It is disposed on one side of the first direction of the first optical system 200 and is spaced apart from the first optical system 200 by a second distance D2, and includes one or more lenses 310, and the first optical system 200 a second optical system 300 that condenses the light passing through; and
It is disposed on one side of the first direction of the second optical system 300 and is spaced apart from the second optical system 300 by a third distance D3, includes a plurality of lenses 410, and has a second optical system 300. It includes a third optical system 400 that condenses the passing light and converts it into parallel light,
The lenses 210, 310, and 410 of the first optical system 200, the second optical system 300, and the third optical system 400 are arranged along a first direction,
Each of the lenses 210, 310, and 410 has a single optical axis facing the plurality of light emitting elements 110 and extending in a first direction,
Between the second optical system 300 and the third optical system 400, the cross-sectional area of light passing through the second optical system 300 gradually decreases in one direction in the first direction,
The plurality of lenses 410 of the third optical system 400 are arranged side by side in a first direction,
In the plurality of lenses 410 of the third optical system 400, the radius of curvature of each lens 410 is the radius of curvature of the lens 410 disposed on the other side of the first direction than each lens 410. lesser,
Light emitting device for exposure.
In claim 1,
A light emitting device for exposure, wherein the radius of curvature of the lens 310 of the second optical system 300 is smaller than the radius of curvature of the lens 210 of the first optical system 200.
In claim 2,
A light emitting device for exposure, wherein the radius of curvature of the lens 310 of the second optical system 300 is 75% or more and 90% or less of the radius of curvature of the lens 210 of the first optical system 200.
In claim 1,
A light emitting device for exposure, wherein the diameter of the lens 310 of the second optical system 300 is smaller than the diameter of the lens 210 of the first optical system 200.
In claim 4,
The light emitting device for exposure, wherein the diameter of the lens 310 of the second optical system 300 is 75% or more and 95% or less of the diameter of the lens 210 of the first optical system 200.
In claim 1,
The plurality of lenses 410 of the third optical system 400 include a first lens 410a, a second lens 410b, and a third lens 410c,
The diameter and radius of curvature of the second lens 410b are respectively smaller than the diameter and radius of curvature of the first lens 410a,
The light emitting device for exposure, wherein the diameter and radius of curvature of the third lens (410c) are respectively smaller than the diameter and radius of curvature of the second lens (410b).
In claim 6,
The diameter of the second lens 410b is greater than 65% and less than 80% of the diameter of the first lens 410a,
The radius of curvature of the second lens 410b is greater than 65% and less than 80% of the radius of curvature of the first lens 410a,
The diameter of the third lens 410c is greater than 70% and less than 85% of the diameter of the second lens 410b,
The light emitting device for exposure, wherein the radius of curvature of the third lens (410c) is 70% or more and 85% or less of the radius of curvature of the second lens (410b).
In claim 1,
The second distance (D2) is smaller than the first distance (D1) and the third distance (D3),
The third distance (D3) is smaller than the first distance (D1).
In claim 1,
The second distance (D2) is greater than 0 and less than 10% of the first distance (D1),
The third distance (D3) is 50% or more and 70% or less of the first distance (D1).
In claim 1,
The light-emitting module 100 corresponds to each light-emitting element 110, is disposed adjacent to the corresponding light-emitting element 110, and includes a plurality of individual lenses 120 surrounding the corresponding light-emitting element 110. Including, a light emitting device for exposure.
In claim 10,
A light emitting device for exposure, wherein the height of the individual lens (120) in the first direction is greater than the width of the corresponding light emitting element (110) in the direction perpendicular to the first direction.
In claim 11,
A light emitting device for exposure, wherein the height of the individual lens 120 in the first direction is 1.3 times or more and 2 times or less the width of the corresponding light emitting element 110 in the direction perpendicular to the first direction.
In claim 11,
The individual lens 120 is a light emitting device for exposure in which a plurality of lenses with small heights in the first direction are stacked.
In claim 1,
The plurality of light emitting devices 110 are arranged side by side at a predetermined interval in a second direction perpendicular to the first direction and a third direction perpendicular to the first and second directions, respectively,
The light emitting device for exposure, wherein the predetermined intervals in the second and third directions are each greater than 0 and less than 25% of the width of the light emitting element (110) in the second and third directions.
The method according to any one of claims 1 to 14,
The plurality of light emitting devices 110 are arranged side by side at a predetermined distance in a second direction perpendicular to the first direction and a third direction perpendicular to the first and second directions, respectively,
Among the plurality of light-emitting devices 110, the light-emitting devices 110 disposed inside and the light-emitting devices 110 disposed outside are distinguished from each other and belong to two or more different channels,
The light emitting device for exposure is,
It includes a control unit that turns on or off the light emitting elements 110 belonging to the two or more channels for each channel,
The first distance (D1), the second distance (D2), and the third distance (D3) are adjustable,
Light emitting device for exposure.