KR20230026189A - Light emitting device for exposure - Google Patents

Abstract

The present invention relates to a light emitting device for exposure comprising: a light emitting module (100); a first optical system (200); a second optical system (300); and a third optical system (400). The light emitting module (100) includes: a plurality of light emitting diodes (110, LED) arranged toward one side in a first direction. The first optical system (200) is arranged in one direction of the first direction of the light emitting module (100), is separated from the light emitting module (100) by a first distance (D1), includes one or more lenses (210), and reduces an irradiation angle of light emitted from the light emitting module (100). The second optical system (300) is arranged in one side of the first direction of the first optical system (200), is separated from the first optical system (200) by a second distance (D2), includes one or more lenses (310), and collects the light passing through the first optical system (200). The third optical system (400) is arranged in one side of the first direction of the second optical system (300), is separated from the second optical system (300) by a third direction (D3), includes one or more lenses (410), and changes the light passing through the second optical system (300) into parallel light. The lenses (210, 310, and 410) of the first optical system (200), the second optical system (300), and the third optical system (400) are arranged along a first direction. Each of the lenses (210, 310, and 410) has a single optical axis facing a plurality of light emitting diodes (100) and extending to the first direction. The present invention reduces maintenance costs.

Description

Light emitting device for exposure {LIGHT EMITTING DEVICE FOR EXPOSURE}

[0001] The present invention relates to a light emitting device for exposure, and more particularly, to a light emitting device for exposure that has a simple configuration, low cost, and easy, high, uniform illuminance for each position of a light irradiation area (exposure area) and improved direct light.

In a manufacturing process of a PCB substrate, semiconductor wafer or display panel, an exposure operation is performed to selectively remove PR coated on the surface of the wafer or substrate. Conventionally, mercury lamps and halogen lamps have been used as light sources for exposure, but these lamp light sources have problems in life, high voltage, cost, and environment. Therefore, recently, a technique of configuring an exposure apparatus using a light emitting diode (LED) has been developed.

Prior art related to this is as follows.

Korean Patent Publication No. 10-2015-0049563 provides an exposure LED light source device and an exposure LED light source device management system capable of easily exposing objects of various shapes and sizes.

However, the prior art does not provide a method for increasing illuminance and improving uniformity and direct light.

KR 10-2015-0049563

The present invention has been devised to solve the above-mentioned problems, and its object is to provide a light emitting device for exposure that has a high, uniform, and improved direct light intensity for each position of a light irradiation area (exposure area) easily and at a low cost with a simple configuration. there is

In addition, embodiments of the present invention are aimed at providing a light emitting device for exposure that can reduce manufacturing cost and maintenance cost and can be miniaturized and lightweight.

In addition, embodiments of the present invention have an object to provide a light emitting device for exposure capable of simply and easily changing the size of the irradiation area (irradiation area, exposure range) of the light emitting module 100 .

The present invention in order to solve the above problems, the light emitting module 100 including a plurality of light emitting elements (110, LED) disposed toward one side of the first direction; It is disposed on one side of the light emitting module 100 in the first direction, is spaced apart from the light emitting module 100 by a first distance D1, includes one or more lenses 210, and emits light emitted from the light emitting module 100. a first optical system 200 that reduces an irradiation angle of light; Disposed on one side of the first direction of the first optical system 200, spaced apart from the first optical system 200 by a second distance D2, and including one or more lenses 310, the first optical system 200 a second optical system 300 condensing the light passing through; and one or more lenses 410 disposed on one side of the second optical system 300 in the first direction, spaced apart from the second optical system 300 by a third distance D3, and including one or more lenses 410. Provided is a light emitting device for exposure including a third optical system 400 that condenses and converts light passing through ) into parallel light.

The lenses 210 , 310 , and 410 of the first optical system 200 , the second optical system 300 , and the third optical system 400 are disposed along the first direction.

Each of the lenses 210, 310, and 410 faces the plurality of light emitting devices 100 and has a single optical axis extending in a first direction.

In one embodiment, the radius of curvature of the lens 310 of the second optical system 300 is smaller than the radius of curvature of the lens 210 of the first optical system 200 .

In one embodiment, the radius of curvature of the lens 310 of the second optical system 300 is greater than or equal to 75% and less than or equal to 90% of the radius of curvature of the lens 210 of the first optical system 200 .

In one embodiment, the diameter of the lens 310 of the second optical system 300 is smaller than the diameter of the lens 210 of the first optical system 200 .

In one embodiment, the diameter of the lens 310 of the second optical system 300 is greater than or equal to 75% and less than or equal to 95% of the diameter of the lens 210 of the first optical system 200 .

In one embodiment, the lens 410 of the third optical system 400 includes a first lens 410a, a second lens 410b, and a third lens 410c.

The diameter and radius of curvature of the second lens 410b are smaller than those of the first lens 410a, respectively.

The diameter and radius of curvature of the third lens 410c are smaller than those of the second lens 410b, respectively.

In one embodiment, the diameter of the second lens 410b is 65% or more and 80% or less of the diameter of the first lens 410a, and the radius of curvature of the second lens 410b is the first lens ( 410a) is 65% or more and 80% or less of the radius of curvature.

The diameter of the third lens 410c is greater than or equal to 70% and less than or equal to 85% of the diameter of the second lens 410b, and the radius of curvature of the third lens 410c is the radius of curvature of the second lens 410b. 70% or more and 85% or less of

In one embodiment, the second distance D2 is smaller than the first distance D1 and the third distance D3, and the third distance D3 is smaller than the first distance D1.

In one embodiment, the second distance D2 is greater than 0 and less than 10% of the first distance D1, and the third distance D3 is greater than 50% of the first distance D1 and greater than 70%. less than %

In one embodiment, the light emitting module 100 corresponds to each of the light emitting elements 110, is disposed adjacent to the corresponding light emitting element 110, and surrounds the corresponding light emitting element 110. A lens 120 is included.

In one embodiment, the height of the individual lens 120 in the first direction is greater than the width of the corresponding light emitting device 110 in a direction perpendicular to the first direction.

In one embodiment, the height of the individual lens 120 in the first direction is greater than or equal to 1.3 times and less than or equal to 2 times the width of the corresponding light emitting device 110 in the direction perpendicular to the first direction.

In one embodiment, the individual lens 120 has a stacked form of a plurality of lenses having a small height in the first direction.

In one embodiment, the plurality of light emitting elements 110 are arranged side by side at predetermined intervals in a second direction perpendicular to the first direction and in a third direction perpendicular to the first and second directions.

The predetermined distances in the second and third directions are greater than 0 and less than 25% of the widths of the light emitting device 110 in the second and third directions, respectively.

In one embodiment, the plurality of light emitting elements 110 are arranged side by side at predetermined intervals in a second direction perpendicular to the first direction and in a third direction perpendicular to the first and second directions.

Among the plurality of light emitting devices 110, the light emitting devices 110 disposed inside and the light emitting devices 110 disposed outside are distinguished from each other and belong to two or more different channels.

The light emitting device for exposure includes a control unit for turning on or off the light emitting devices 110 belonging to the two or more channels for each channel.

The first distance D1, the second distance D2 and the third distance D3 are adjustable.

According to embodiments of the present invention, a light emitting device for exposure includes a light emitting module 100 including a plurality of light emitting devices 110 (LEDs) disposed toward one side of a first direction; It is disposed on one side of the light emitting module 100 in the first direction, is spaced apart from the light emitting module 100 by a first distance D1, includes one or more lenses 210, and emits light emitted from the light emitting module 100. a first optical system 200 that reduces an irradiation angle of light; Disposed on one side of the first direction of the first optical system 200, spaced apart from the first optical system 200 by a second distance D2, and including one or more lenses 310, the first optical system 200 a second optical system 300 condensing the light passing through; and one or more lenses 410 disposed on one side of the second optical system 300 in the first direction, spaced apart from the second optical system 300 by a third distance D3, and including one or more lenses 410. ) may include a third optical system 400 that condenses light passing through and converts it into parallel light. The lenses 210, 310, and 410 of the first optical system 200, the second optical system 300, and the third optical system 400 are disposed along a first direction, and each of the lenses 210, 310, and 410 ) may have a single optical axis facing the plurality of light emitting devices 100 and extending in the first direction.

Accordingly, the light emitting device for exposure can have a high and uniform illuminance for each position of the light irradiation area (exposure area) of the light emitting device for exposure, and the direct light can be improved easily and at low cost with a simple configuration. In particular, since a plurality of light emitting devices 110 are used, illumination can be increased. In addition, even if a plurality of light emitting elements 110 are used, there is no need to use a conventional fly eye lens, and there is no need to use a conventional reflector to increase illuminance, so manufacturing and maintenance costs can be reduced. there is.

According to an embodiment of the present invention, the radius of curvature of the lens 310 of the second optical system 300 may be smaller than the radius of curvature of the lens 210 of the first optical system 200 .

Accordingly, light uniformity and maximum illuminance of the light emitting device 10 for exposure may be increased. In addition, since the radius of curvature of the lens 310 of the second optical system 300 is reduced, the light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the radius of curvature of the lens 310 of the second optical system 300 may be 75% or more and 90% or less of the radius of curvature of the lens 210 of the first optical system 200.

Accordingly, light uniformity and maximum illuminance of the light emitting device 10 for exposure may be increased. In addition, since the radius of curvature of the lens 310 of the second optical system 300 is reduced, the light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the diameter of the lens 310 of the second optical system 300 may be smaller than the diameter of the lens 210 of the first optical system 200 .

Accordingly, light uniformity and maximum illuminance of the light emitting device 10 for exposure may be increased. In addition, since the second distance D2 and the diameter of the lens 310 of the second optical system 300 are reduced, the light emitting device for exposure can be reduced in size and weight, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the diameter of the lens 310 of the second optical system 300 may be 75% or more and 95% or less of the diameter of the lens 210 of the first optical system 200 .

Accordingly, light uniformity and maximum illuminance of the light emitting device 10 for exposure may be increased. In addition, since the second distance D2 and the diameter of the lens 310 of the second optical system 300 are reduced, the light emitting device for exposure can be reduced in size and weight, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the lens 410 of the third optical system 400 may include a first lens 410a, a second lens 410b, and a third lens 410c. The diameter and radius of curvature of the second lens 410b are smaller than the diameter and radius of curvature of the first lens 410a, respectively, and the diameter and radius of curvature of the third lens 410c are respectively smaller than the diameter and radius of curvature of the second lens 410b. It may be smaller than the diameter and radius of curvature of

Accordingly, the light uniformity of the light emitting device 10 for exposure may be increased and the degree of direct light may be increased (irradiation angle is decreased). In addition, since the third distance D3 and the diameter and radius of curvature of the second/third lenses 410b and 410c of the third optical system 400 are reduced, the light emitting device for exposure can be reduced in size and weight, and the light emitting device for exposure can be manufactured. cost can be reduced.

According to an embodiment of the present invention, the diameter of the second lens 410b is 65% or more and 80% or less of the diameter of the first lens 410a, and the radius of curvature of the second lens 410b is the first lens 410a. It may be greater than or equal to 65% and less than or equal to 80% of the radius of curvature of one lens 410a. The diameter of the third lens 410c is greater than or equal to 70% and less than or equal to 85% of the diameter of the second lens 410b, and the radius of curvature of the third lens 410c is the radius of curvature of the second lens 410b. It may be 70% or more of and 85% or less.

Accordingly, the light uniformity of the light emitting device 10 for exposure may be increased and the degree of direct light may be increased (irradiation angle is decreased). In addition, since the third distance D3 and the diameter and radius of curvature of the second/third lenses 410b and 410c of the third optical system 400 are reduced, the light emitting device for exposure can be reduced in size and weight, and the light emitting device for exposure can be manufactured. cost can be reduced.

According to an embodiment of the present invention, the second distance D2 may be smaller than the first distance D1 and the third distance D3, and the third distance D3 may be smaller than the first distance D1. there is.

Accordingly, light uniformity, maximum illuminance, and direct light intensity of the light emitting device 10 for exposure may be increased. The light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the second distance D2 is greater than 0 and less than 10% of the first distance D1, and the third distance D3 is 50% of the first distance D1. can be greater than or equal to 70%

Accordingly, light uniformity, maximum illuminance, and direct light intensity of the light emitting device 10 for exposure may be increased. The light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

According to an embodiment of the present invention, the light emitting module 100 corresponds to each of the light emitting elements 110 and is disposed adjacent to the corresponding light emitting element 110 and surrounds the corresponding light emitting element 110 A plurality of individual lenses 120 may be included.

Accordingly, the light irradiation angle of each light emitting element 110 included in the light emitting module 100 may be individually reduced. Accordingly, since the illuminance of the light emitting module 100 is improved, there is no need to separately provide a conventional reflector in order to increase the illuminance of the light emitting device 10 for exposure. Therefore, since there is no need to manufacture a reflector and no need to manufacture a mold to manufacture the reflector, the manufacturing cost of the light emitting device 10 for exposure can be greatly reduced. In addition, the light emitting device 10 for exposure can be reduced in size and weight. In addition, since the light irradiation angle of each light emitting element 110 decreases, light uniformity for each position in the front of the light emitting module 100 can be improved.

According to the embodiment of the present invention, the height of the individual lens 120 in the first direction may be greater than the width of the corresponding light emitting element 110 in a direction perpendicular to the first direction.

Accordingly, since the light irradiation angle of each light emitting element 110 included in the light emitting module 100 can be effectively reduced, the illumination intensity of the light emitting module 100 and the light uniformity for each position in the front of the light emitting module 100 are improved. can be further improved.

According to an embodiment of the present invention, the height of the plurality of individual lenses 120 in the first direction may be greater than or equal to 1.3 times and less than or equal to 2 times the width of the corresponding light emitting element 110 in a direction perpendicular to the first direction.

Accordingly, since the light irradiation angle of each light emitting element 110 included in the light emitting module 100 can be effectively reduced, the illumination intensity of the light emitting module 100 and the light uniformity for each position in the front of the light emitting module 100 are improved. can be further improved.

According to an embodiment of the present invention, the individual lens 120 may have a stacked form of a plurality of lenses having a small height in the first direction.

Accordingly, the height (number of steps) of the individual lens 120 in the first direction may be greater than a predetermined value or the refracting surface may be formed with a predetermined number or more. Accordingly, since the light irradiation angle of each light emitting device 110 included in the light emitting module 100 can be effectively reduced, the illuminance of the light emitting module 100 can be remarkably improved. In addition, the individual lenses 120 having a high height in the first direction can be easily manufactured at low cost.

According to an embodiment of the present invention, the plurality of light emitting elements 110 are arranged side by side at predetermined intervals in a second direction perpendicular to the first direction and in a third direction perpendicular to the first and second directions. It can be. The predetermined intervals in the second and third directions may be larger than 0 and smaller than 25% of the widths of the light emitting device 110 in the second and third directions.

Accordingly, light can be uniformly irradiated to a predetermined area of the exposure target W easily and at low cost with a simple configuration.

According to an embodiment of the present invention, the plurality of light emitting elements 110 are arranged side by side at predetermined intervals in a second direction perpendicular to the first direction and in a third direction perpendicular to the first and second directions. It can be. The predetermined intervals in the second and third directions may be larger than 0 and smaller than 25% of the widths of the light emitting device 110 in the second and third directions.

Accordingly, the illuminance of the light emitted from the light emitting module 100 can be more uniform for each position and the spot phenomenon can be further reduced.

According to an embodiment of the present invention, the plurality of light emitting elements 110 are arranged side by side at predetermined intervals in a second direction perpendicular to the first direction and in a third direction perpendicular to the first and second directions. It can be. Among the plurality of light emitting devices 110, the light emitting devices 110 disposed inside and the light emitting devices 110 disposed outside may be distinguished from each other and belong to two or more different channels. The light emitting device for exposure may include a controller for turning on or off the light emitting devices 110 belonging to the two or more channels for each channel. The first distance D1, the second distance D2, and the third distance D3 may be adjustable.

Accordingly, the size (irradiation area, exposure range) of the irradiation area of the light emitting module 100 can be changed simply and easily, and the illuminance of the light emitted from the light emitting module 100 can be uniform for each position of the irradiation area.

In addition to the effects described above, specific effects of the present invention will be described together while explaining specific details for carrying out the present invention.

1 is a side view schematically illustrating a light emitting device for exposure and a path of light according to an exemplary embodiment of the present invention.
2 is a schematic front view of the light emitting module of FIG. 1;
3 is a cross-sectional view showing a state in which individual lenses according to an embodiment of the present invention are disposed in light emitting elements of the light emitting module of FIGS. 1 and 2 .
FIG. 4 is a side view illustrating a state in which a plurality of individual lenses of FIG. 3 are disposed in each light emitting element of the light emitting module of FIGS. 1 and 2 .
FIG. 5 is a table showing illuminance for each height (number of stages) and irradiation distance of individual lenses of FIGS. 3 and 4 .
6 is a cross-sectional view showing a manufacturing process of the individual lenses of FIGS. 3 and 4 .
FIG. 7 is a front view illustrating a case in which a distance between light emitting elements of the light emitting module is large in the light emitting module of FIGS. 1 and 2 .
8 and 9 show the positional illuminance of the light emitted from the light emitting module of FIG. 7 when the first/second/third optical system of FIG. 1 is not disposed in front of the light emitting module of FIG. 7 and when it is disposed, respectively. is the drawing shown.
FIG. 10 is a front view illustrating a case where a distance between light emitting elements of the light emitting module is small in the light emitting module of FIGS. 1 and 2 .
11 and 12 show the positional illuminance of the light emitted from the light emitting module of FIG. 10 when the first/second/third optical systems of FIG. 1 are not disposed in front of the light emitting module of FIG. 10 and when they are disposed, respectively. is the drawing shown.
FIG. 13 is a view showing rectangles dividing a plurality of light emitting devices of the light emitting module of FIGS. 1 and 2 into inner and outer sides.
14 to 16 are diagrams illustrating the intensity of illumination for each position of light emitted from the light emitting module of FIGS. 1 and 2 as the inner or outer light emitting elements divided by the squares of FIG. 6 are turned on or off.
17 shows the illumination intensity and irradiation by position of the light irradiation area (exposure area) under the first condition (Sample A) and the second condition (Sample A) in which the distance (first distance) between the light emitting module and the first optical system is different from each other. This is a table showing area, uniformity and maximum illuminance.
FIG. 18 is a table showing illuminance values for each position of FIG. 17 .
19 shows the illuminance and irradiation area by position of the light irradiation area (exposure area) under the third condition (Sample C) in which the radius of curvature of the lens 310 of the second optical system 300 is reduced under the second condition (Sample B). , is a table showing uniformity and maximum illuminance.
20 is a table showing illuminance values for each location of FIG. 19 .
21 shows the distance (second distance) between the first and second optical systems under the third condition (Sample C) and the fourth condition (Sample D) in which the diameter of the lens 310 of the second optical system 300 is reduced. This is a table showing the illuminance, irradiation area, uniformity, and maximum illuminance for each position of the light irradiation area (exposure area).
FIG. 22 is a table showing illuminance values for each location of FIG. 21 .
23 shows the distance (third distance) between the second optical system and the third optical system under the fourth condition (Sample D) and the diameters of the second lens 410b and the third lens 410c of the third optical system 400 and In the fifth condition (Sample E) with a reduced radius of curvature, this table shows the illuminance, irradiation area, uniformity, maximum illuminance, and irradiation angle for each position of the light irradiation area (exposure area).
24 is a diagram schematically illustrating seven illuminance measuring points in a light irradiation area (exposure area). FIG. 25 is a table showing illuminance at 7 points in FIG. 24 for each distance between the light emitting device for exposure and the exposure surface.
FIG. 26 is a table showing the uniformity of illuminance and the effective irradiation area (exposure area) of the light irradiation area (exposure area) of FIG. 25 for each distance between the light emitting device for exposure and the exposure surface.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention is not limited to the embodiments disclosed below, and various changes may be applied and may be implemented in various different forms. Only this embodiment is provided to complete the disclosure of the present invention and to fully inform those skilled in the art of the scope of the invention. Therefore, the present invention is not limited to the embodiments disclosed below, but all changes and equivalents included in the technical spirit and scope of the present invention as well as substitution or addition of the configuration of one embodiment and the configuration of another embodiment each other to substitutes.

The accompanying drawings are only for easy understanding of the embodiments disclosed in this specification, and the technical idea disclosed in this specification is not limited by the accompanying drawings, and all changes and equivalents included in the spirit and technical scope of the present invention are included. It should be understood to include water or substitutes. In the drawings, components may be exaggeratedly large or small in size or thickness in consideration of convenience of understanding, etc., but due to this, the scope of protection of the present invention should not be construed as being limited.

Terms used in this specification are only used to describe specific implementations or examples, and are not intended to limit the present invention. And expressions in the singular include plural expressions unless the context clearly dictates otherwise. In the specification, terms such as "comprise" and "consist of" are intended to designate that features, numbers, steps, operations, components, parts, or combinations thereof described in the specification exist. That is, in the specification, terms such as ~ include, ~ consist of, etc. It should be understood that it does not preclude the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

Terms including ordinal numbers, such as first and second, may be used to describe various components, but the components are not limited by the terms. These terms are only used for the purpose of distinguishing one component from another.

It is understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, but other elements may exist in the middle. It should be. On the other hand, when an element is referred to as “directly connected” or “directly connected” to another element, it should be understood that no other element exists in the middle.

When an element is referred to as being “on top” or “under” another element, it should be understood that other elements may exist in the middle as well as being directly above the other element. .

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and unless explicitly defined in the present application, they should not be interpreted in an ideal or excessively formal meaning. don't

A light emitting device for exposure disclosed in the following embodiments will be described in more detail with reference to each drawing.

1 is a side view schematically illustrating a light emitting device for exposure and a path of light according to an exemplary embodiment of the present invention.

Referring to FIG. 1 , a light emitting device 10 for exposure according to an exemplary embodiment may include a light emitting module 100, a first optical system 200, a second optical system 300, and a third optical system 400. The light emitting device 10 for exposure may further include a controller (not shown). Hereinafter, each configuration will be described in detail.

[Light emitting module]

2 is a schematic front view of the light emitting module of FIG. 1;

Referring further to FIG. 2 , the light emitting module 100 according to an embodiment may include a plurality of light emitting elements 110 (LEDs) disposed in one direction of a first direction (eg, forward and backward directions). Specifically, for example, the plurality of light emitting elements 110 may include a second direction perpendicular to the first direction (eg, a vertical direction) and a third direction perpendicular to the first and second directions (eg, a left-right direction). Each may be arranged side by side at a predetermined interval.

3 is a cross-sectional view showing a state in which individual lenses according to an embodiment of the present invention are disposed in light emitting elements of the light emitting module of FIGS. 1 and 2 . FIG. 4 is a side view illustrating a state in which a plurality of individual lenses of FIG. 3 are disposed in each light emitting element of the light emitting module of FIGS. 1 and 2 . FIG. 5 is a table showing illuminance for each height (number of stages) and irradiation distance of individual lenses of FIGS. 3 and 4 . 6 is a cross-sectional view showing a manufacturing process of the individual lenses of FIGS. 3 and 4 .

3 and 4, the light emitting module 100 according to an embodiment corresponds to each light emitting element 110 included in the light emitting module 100 and is disposed adjacent to the corresponding light emitting element 110. and may include a plurality of individual lenses 120 surrounding the corresponding light emitting element 110.

Accordingly, the light irradiation angle of each light emitting element 110 included in the light emitting module 100 may be individually reduced. Accordingly, since the illuminance of the light emitting module 100 is improved, there is no need to separately provide a conventional reflector in order to increase the illuminance of the light emitting device 10 for exposure. Therefore, since there is no need to manufacture a reflector and no need to manufacture a mold to manufacture the reflector, the manufacturing cost of the light emitting device 10 for exposure can be greatly reduced. In addition, the light emitting device 10 for exposure can be reduced in size and weight. In addition, since the light irradiation angle of each light emitting element 110 decreases, light uniformity for each position in the front of the light emitting module 100 can be improved.

The individual lens 120 may have a stacked form of a plurality of lenses having a small height in the first direction (FIG. 3). For example, the individual lens 120 may have a form in which three lenses having heights T1, T2, and T3 in the first direction are stacked in three stages.

Accordingly, the height (number of steps) of the individual lens 120 in the first direction may be greater than a predetermined value or the refracting surface may be formed with a predetermined number or more. Accordingly, since the light irradiation angle of each light emitting device 110 included in the light emitting module 100 can be effectively reduced, the illuminance of the light emitting module 100 can be remarkably improved. The experimental results of FIG. 5 for this will be described later. In addition, the individual lenses 120 having a high height in the first direction can be easily manufactured at low cost.

Referring to FIG. 5 , individual lenses 120 may be higher than three stages by stacking three lenses having small heights in the first direction. Accordingly, the height (number of stages) of the individual lens 120 in the first direction may be greater than a predetermined value or the number of refracting surfaces of the individual lens 120 may be greater than or equal to a predetermined number. Therefore, since the light irradiation angle of each light emitting device 110 included in the light emitting module 100 can be effectively reduced, the illuminance of the light emitting module 100 can be remarkably improved. Regarding the height of the individual lens 120 in the first direction, it is as follows.

The height (T1 + T2 + T3) of the individual lens 120 in the first direction is the direction perpendicular to the first direction of the light emitting element 110 corresponding to the individual lens 120 (eg, the second direction or the third direction). ) may be greater than the width W1.

Accordingly, since the light irradiation angle of each light emitting element 110 included in the light emitting module 100 can be effectively reduced, the illumination intensity of the light emitting module 100 and the light uniformity for each position in the front of the light emitting module 100 are improved. can be further improved.

For example, the height (T1 + T2 + T3) of the individual lens 120 in the first direction is a direction perpendicular to the first direction of the corresponding light emitting element 110 (eg, the second direction or the third direction). It may be 1.3 times or more and 2 times or less of the width W1 of .

Specifically, for example, the height (T1 + T2 + T3) of the individual lens 120 in the first direction is the direction perpendicular to the first direction of the corresponding light emitting element 110 (eg, the second direction or the third direction). direction) may be 1.5 times the width W1.

Referring to FIG. 6 , individual lenses 120 may be formed by applying (discharging) a liquid resin (eg, silicon) onto the light emitting device 110 using a dispenser. At this time, in order to form the individual lens 120 having a high height in the first direction, the liquid resin may be applied (ejected) on the lens 100 a plurality of times (three times in the drawing). That is, if a large amount of liquid resin is applied (discharged) at once with a dispenser, the liquid resin flows down to the side, so that individual lenses 120 having a high height in the first direction cannot be formed. Individual lenses 120 having a large height in the first direction are formed by first forming a lens having a small height in the first direction and applying (discharging) a small amount of liquid resin on top of the lens having a small height in the first direction. can do. Accordingly, the individual lenses 120 may have a stacked form.

Accordingly, the individual lenses 120 having a high height in the first direction can be easily formed simply and at low cost.

FIG. 7 is a front view illustrating a case in which a distance between light emitting elements of the light emitting module is large in the light emitting module of FIGS. 1 and 2 . 8 and 9 show the positional illuminance of the light emitted from the light emitting module of FIG. 7 when the first/second/third optical system of FIG. 1 is not disposed in front of the light emitting module of FIG. 7 and when it is disposed, respectively. is the drawing shown.

FIG. 10 is a front view illustrating a case where a distance between light emitting elements of the light emitting module is small in the light emitting module of FIGS. 1 and 2 . 11 and 12 show the positional illuminance of the light emitted from the light emitting module of FIG. 10 when the first/second/third optical systems of FIG. 1 are not disposed in front of the light emitting module of FIG. 10 and when they are disposed, respectively. is the drawing shown.

Referring to FIG. 7 , intervals between the light emitting devices 110 in the second and third directions may be 60% of the widths of the light emitting devices 110 in the second and third directions, respectively.

Referring to FIGS. 8 and 9 , when the first/second/third optical systems 200, 300, and 400 are not disposed in front of the light emitting module 100, the illuminance of the light emitted from the light emitting module 100 varies by position. A spot phenomenon that becomes remarkably non-uniform and distinguishable light from each of the light emitting devices 110 may be conspicuous. When the first/second/third optical systems 200, 300, and 400 are disposed in front of the light emitting module 100, the illuminance of the light emitted from the light emitting module 100 becomes uniform for each position and the spot phenomenon can be remarkably reduced. there is.

Referring to FIG. 10 , intervals between the light emitting devices 110 in the second and third directions may be greater than 0 and less than 25% of the widths of the light emitting devices 110 in the second and third directions.

Accordingly, the illuminance of the light emitted from the light emitting module 100 can be more uniform for each position and the spot phenomenon can be further reduced.

Specifically, for example, the distance between the light emitting devices 110 in the second and third directions may be 20% of the width of the light emitting devices 110 in the second and third directions, respectively (FIG. 10).

11 and 12, when the first/second/third optical systems 200, 300, and 400 are not disposed in front of the light emitting module 100, the illuminance of the light emitted from the light emitting module 100 varies by location. Spotting may be noticeable due to non-uniformity. At this time, since the distance between the light emitting elements 110 in the second and third directions is reduced (FIG. 10), the illuminance of the light emitted from the light emitting module 100 can be more uniform for each position than in FIG. 8, and the spot phenomenon is reduced. can do. When the first/second/third optical systems 200, 300, and 400 are placed in front of the light emitting module 100, the illuminance of the light emitted from the light emitting module 100 becomes significantly uniform for each position and the spot phenomenon is significantly reduced. can do. At this time, since the distance between the light emitting elements 110 in the second and third directions is reduced (FIG. 10), the illuminance of the light emitted from the light emitting module 100 can be more uniform for each position than in FIG. 9, and the spot phenomenon is more can decrease

In order to reduce the distance between the light emitting elements 110 in the second and third directions, die bonding and wire bonding technologies may be used when manufacturing the light emitting module 100 .

[control part]

The controller (not shown) may turn on or off the light emitting devices 110 belonging to two or more channels for each channel. In this regard, look at Figures 13 to 16.

FIG. 13 is a view showing rectangles dividing a plurality of light emitting devices of the light emitting module of FIGS. 1 and 2 into inner and outer sides. 14 to 16 are diagrams illustrating the intensity of illumination for each position of light emitted from the light emitting module of FIGS. 1 and 2 as the inner or outer light emitting elements divided by the squares of FIG. 6 are turned on or off.

Referring to FIG. 13 , among the plurality of light emitting devices 110, the light emitting devices 110 disposed inside and outside may be determined based on four squares R1, R2, R3, and R4.

For example, the light emitting element 110 disposed inside the rectangle R1 is the light emitting element 110 disposed at the innermost part among the plurality of light emitting elements 110 . The light emitting element 110 disposed outside the square R1 but disposed inside the square R2 is a light emitting element 110 disposed outside the light emitting element 110 disposed inside the square R1 among the plurality of light emitting elements 110 However, it is the light emitting element 110 disposed inside than the light emitting element 110 disposed outside the rectangle R2. The light emitting element 110 disposed outside the square R2 but disposed inside the square R3 is a light emitting element 110 disposed outside the light emitting element 110 disposed inside the square R2 among the plurality of light emitting elements 110 However, the light emitting element 110 is disposed inside the light emitting element 110 disposed outside the rectangle R3. The light emitting element 110 disposed outside the square R3 but disposed inside the square R4 is a light emitting element 110 disposed outside the light emitting element 110 disposed inside the square R3 among the plurality of light emitting elements 110 However, the light emitting element 110 is disposed inside the light emitting element 110 disposed outside the rectangle R4. The light emitting device 110 disposed outside the rectangle R4 is a light emitting device 110 disposed outside the light emitting device 110 disposed inside the rectangle R4 among the plurality of light emitting devices 110 .

Among the plurality of light emitting devices 110, the light emitting devices 110 disposed inside and the light emitting devices 110 disposed outside may be distinguished from each other and belong to two or more different channels.

For example, in FIG. 13 , the light emitting devices 110 arranged inside the rectangle R1 may belong to the first channel. The light emitting devices 110 disposed outside the square R1 but inside the square R2 may belong to the second channel. The light emitting elements 110 disposed outside the square R2 but inside the square R3 may belong to the third channel. The light emitting devices 110 disposed outside the square R3 but inside the square R4 may belong to the fourth channel. The light emitting devices 110 disposed outside the rectangle R4 may belong to the fifth channel.

14 to 16, the control unit may turn on only the first channel (FIG. 14), turn on the first and second channels (FIG. 15), or turn on the first to fourth channels (FIG. 16). ). Accordingly, the size of the light irradiation area (irradiation area, exposure range) of the light emitting module 100 may gradually increase.

At this time, the first distance D1, the second distance D2, and the third distance D3 may be adjustable. Accordingly, the illuminance of the light emitted from the light emitting module 100 may be uniform for each location of the irradiation area.

In this way, among the plurality of light emitting elements 110, the light emitting element 110 disposed inside and the light emitting element 110 disposed outside are distinguished from each other and belong to two or more different channels, and the control unit belongs to two or more channels. The light emitting device 110 is turned on or off for each channel, and the first distance D1 , the second distance D2 , and the third distance D3 may be adjustable.

Accordingly, the size (irradiation area, exposure range) of the irradiation area of the light emitting module 100 can be changed simply and easily, and the illuminance of the light emitted from the light emitting module 100 can be uniform for each position of the irradiation area.

[First optical system]

The first optical system 200 may be disposed on one side of the light emitting module 100 in the first direction and spaced apart from the light emitting module 100 by a first distance D1.

The first optical system 200 may include one or more lenses 210 (two in the drawing). Each lens 210 may be installed in close contact with each other within 1 mm. Each lens 210 may be disposed side by side in the first direction. At least one surface of each lens 210 may be convex.

The diameter of the lens 210 of the first optical system 200 may be twice or more than the diameter of the light emitting area formed by the light emitting elements 110 among the plurality of light emitting elements 110 of the light emitting module 100 .

The first optical system 200 may reduce an irradiation angle of light emitted from the light emitting module 100 .

[Second optical system]

The second optical system 300 may be disposed on one side of the first optical system 200 in the first direction and spaced apart from the first optical system 200 by a second distance D2.

The second optical system 300 may include one or more lenses 310 (two in the drawing). Each lens 310 may be installed in close contact with each other within 1 mm. Each lens 310 may be disposed side by side in the first direction. At least one surface of each lens 310 may be convex.

The second optical system 300 may condense the light passing through the first optical system 200 .

[Third optical system]

The third optical system 400 may be disposed on one side of the second optical system 300 in the first direction and spaced apart from the second optical system 300 by a third distance D3.

The third optical system 400 may include one or more lenses 410 (three in the drawing). Each lens 410 may be installed in close contact with each other within 1 mm. Each lens 410 may be disposed side by side in the first direction. At least one surface of each lens 410 may be convex.

Specifically, for example, the lens 410 of the third optical system 400 may include a first lens 410a, a second lens 410b, and a third lens 410c.

Among the lenses 410 of the third optical system 400, the diameter of the lens 410 (for example, the third lens) disposed on the first side in the first direction may be larger than the diameter of the target irradiation area. For example, the diameter of the lens 410 (eg, the third lens) disposed on the first side in the first direction may be 1.1 times the diameter of the target irradiation area.

The diameter of the lens 410 of the third optical system 400 is

The third optical system 400 can condense the light passing through the second optical system 300 and convert it into parallel light.

[1st/2nd/3rd optical system]

The lenses 210 , 310 , and 410 of the first optical system 200 , the second optical system 300 , and the third optical system 400 may be disposed along the first direction. Each of the lenses 210, 310, and 410 may have a single optical axis that faces the plurality of light emitting devices 100 and extends in the first direction.

Accordingly, since there is no need to use a conventional fly eye lens, a problem in which the plurality of optical axes of the fly eye lens are out of sync with the optical axes of the plurality of light emitting elements 100 does not occur. Thus, convenience of use may be improved and manufacturing and maintenance costs may be reduced.

Hereinafter, the first/second/third optical systems 200, 300, and 400 will be described with reference to FIGS. 17 to 23.

17 shows the illumination intensity and irradiation by position of the light irradiation area (exposure area) under the first condition (Sample A) and the second condition (Sample A) in which the distance (first distance) between the light emitting module and the first optical system is different from each other. This is a table showing area, uniformity and maximum illuminance. FIG. 18 is a table showing illuminance values for each position of FIG. 17 .

Referring to FIG. 17 , the first distance D1 of the second condition (Sample A) may be reduced to 25% of the first distance D1 of the first condition (Sample A). The rest of the conditions may be the same. For example, the diameters of the respective lenses 210, 310, and 410 of the first/second/third optical systems 200, 300, and 400 under the first condition (Sample A) and the second condition (Sample A) The radius of curvature, the second distance D2 and the third distance D3 may be the same.

As in the second condition (Sample A), when the first distance D1 decreases, the area of the light irradiation area (exposure area) increases and the maximum illuminance increases, but the uniformity may decrease (FIG. 17). However, as will be described later, the diameter or radius of curvature of the lenses 210, 310, 410 of the first/second/third optical systems 200, 300, 400 is changed or the second distance D2 or the third distance ( By changing D3), maximum illuminance and uniformity can be improved together.

19 shows the illuminance and irradiation area by position of the light irradiation area (exposure area) under the third condition (Sample C) in which the radius of curvature of the lens 310 of the second optical system 300 is reduced under the second condition (Sample B). , uniformity and maximum illuminance. FIG. 20 is a table showing illuminance values for each location of FIG. 19 .

19, the radius of curvature of the lens 310 of the second optical system 300 under the third condition (Sample C) is the curvature of the lens 310 of the second optical system 300 under the second condition (Sample B). may be smaller than the radius. Accordingly, the radius of curvature of the lens 310 of the second optical system 300 may be smaller than the radius of curvature of the lens 210 of the first optical system 200 . For example, the radius of curvature of the lens 310 of the second optical system 300 may be 75% or more and 90% or less of the radius of curvature of the lens 210 of the first optical system 200 .

Specifically, for example, the radius of curvature of the lens 310 of the second optical system 300 under the third condition (Sample C) is the curvature of the lens 310 of the second optical system 300 under the second condition (Sample B). Can be reduced to 84% of the radius. Accordingly, the radius of curvature of the lens 310 of the second optical system 300 may be 84% of the radius of curvature of the lens 210 of the first optical system 200 . The rest of the conditions may be the same.

If the radius of curvature of the lens 310 of the second optical system 300 is smaller than the radius of curvature of the lens 210 of the first optical system 200, uniformity and maximum illumination may increase (FIG. 19). In addition, since the radius of curvature of the lens 310 of the second optical system 300 is reduced, the light emitting device for exposure can be made smaller and lighter, and the manufacturing cost of the light emitting device for exposure can be reduced.

21 shows the distance (second distance) between the first and second optical systems under the third condition (Sample C) and the fourth condition (Sample D) in which the diameter of the lens 310 of the second optical system 300 is reduced. This is a table showing the illuminance, irradiation area, uniformity, and maximum illuminance for each position of the light irradiation area (exposure area). FIG. 22 is a table showing illuminance values for each position of FIG. 21 .

Referring to FIG. 21 , the second distance D2 of the fourth condition (Sample D) may be smaller than the second distance D2 of the third condition (Sample C). In addition, the diameter of the lens 310 of the second optical system 300 under the fourth condition (Sample D) may be smaller than the diameter of the lens 310 of the second optical system 300 under the third condition (Sample C). .

Accordingly, the second distance D2 may be smaller than the first distance D1 and the third distance D3 but larger than 0 and smaller than 10% of the first distance D1. Also, the diameter of the lens 310 of the second optical system 300 may be smaller than the diameter of the lens 210 of the first optical system 200 . For example, the diameter of the lens 310 of the second optical system 300 may be greater than or equal to 75% and less than or equal to 95% of the diameter of the lens 210 of the first optical system 200 .

Specifically, for example, the second distance (D2, A*0.01) of the fourth condition (Sample D) may be 50% of the second distance (D2, A*0.02) of the third condition (Sample C). Accordingly, the second distance (D2, A*0.01) may be 4% of the first distance (D1, A*0.25) determined under the second condition (Sample B). In addition, the diameter of the lens 310 of the second optical system 300 under the fourth condition (Sample D) is reduced to 90% of the diameter of the lens 310 of the second optical system 300 under the third condition (Sample C). can do. Accordingly, the diameter of the lens 310 of the second optical system 300 may be 90% of the diameter of the lens 210 of the first optical system 200 . The rest of the conditions may be the same.

When the second distance D2 is smaller than 10% of the first distance D1 and the diameter of the lens 310 of the second optical system 300 is smaller than the diameter of the lens 210 of the first optical system 200, the degree of uniformity and maximum illuminance may increase (FIG. 21). In addition, since the second distance D2 and the diameter of the lens 310 of the second optical system 300 are reduced, the light emitting device for exposure can be reduced in size and weight, and the manufacturing cost of the light emitting device for exposure can be reduced.

23 shows the distance (third distance) between the second optical system and the third optical system under the fourth condition (Sample D) and the diameters of the second lens 410b and the third lens 410c of the third optical system 400 and In the fifth condition (Sample E) with a reduced radius of curvature, this table shows the illuminance, irradiation area, uniformity, maximum illuminance, and irradiation angle for each position of the light irradiation area (exposure area).

Here, the irradiation angle may be an angle difference between light incident on the exposure surface and a normal line of the exposure surface.

Referring to FIG. 23 , the third distance D3 of the fifth condition (Sample E) may be smaller than the third distance D3 of the fourth condition (Sample D). In addition, the diameters and curvature radii of the second lens 410b and the third lens 410c of the third optical system 400 under the fifth condition (Sample E) are the third optical system 400 under the fourth condition (Sample D). may be smaller than the diameters and curvature radii of the second lens 410b and the third lens 410c.

Accordingly, the third distance D3 may be smaller than the first distance D1. For example, the third distance D3 may be 50% or more and 70% or less of the first distance D1.

Also, the diameter and radius of curvature of the second lens 410b may be smaller than the diameter and radius of curvature of the first lens 410a, respectively. For example, the diameter and radius of curvature of the second lens 410b may be 65% or more and 80% or less of the diameter and radius of curvature of the first lens 410a, respectively.

Also, the diameter and radius of curvature of the third lens 410c may be smaller than the diameter and radius of curvature of the second lens 410b, respectively. For example, the diameter and radius of curvature of the third lens 410c may be 70% or more and 85% or less of the diameter and radius of curvature of the second lens 410b, respectively.

Specifically, for example, the third distance (D3, A*0.15) of the fifth condition (Sample E) may be 30% of the third distance (D3, A*0.5) of the fourth condition (Sample D). Accordingly, the third distance (D3, A*0.15) may be 60% of the first distance (D1, A*0.25) determined under the second condition (Sample B).

In addition, the diameter and radius of curvature of the second lens 410b of the third optical system 400 under the fifth condition (Sample E) are the third optical system 400 under the fourth condition (Sample D) or the fifth condition (Sample E). ) can be reduced to 70% of the diameter and radius of curvature of the first lens 410.

In addition, the diameter and radius of curvature of the third lens 410c of the third optical system 400 under the fifth condition (Sample E) are similar to those of the second lens 410b of the third optical system 400 under the fifth condition (Sample E). can be reduced to 80% of the diameter and radius of curvature of

The rest of the conditions may be the same.

When the third distance D3 is smaller than the first distance D1 and the diameters and radii of curvature of the first lens 410a, the second lens 410b, and the third lens 410c of the third optical system 400 are If it is sequentially smaller, the uniformity may increase and the degree of direct light may increase (irradiation angle decreases). However, the maximum illuminance may decrease by a small amount (FIG. 23). In addition, since the third distance D3 and the diameter and radius of curvature of the second/third lenses 410b and 410c of the third optical system 400 are reduced, the light emitting device for exposure can be reduced in size and weight, and the light emitting device for exposure can be manufactured. cost can be reduced.

As described above, the light emitting device 10 for exposure includes a light emitting module 100, a first optical system 200, a second optical system 300, and a third optical system 400, and includes the first optical system 200 and the second optical system. 300 and the lenses 210, 310, 410 of the third optical system 400 are disposed along the first direction, and each lens 210, 310, 410 faces the plurality of light emitting devices 100, and the first It may have a single optical axis extending in the direction.

Accordingly, the light emitting device for exposure can have a high and uniform illuminance for each position of the light irradiation area (exposure area) of the light emitting device for exposure, and the direct light can be improved easily and at low cost with a simple configuration. In particular, since a plurality of light emitting devices 110 are used, illuminance can be increased. In addition, even if a plurality of light emitting elements 110 are used, there is no need to use a conventional fly eye lens, and there is no need to use a conventional reflector to increase illuminance, so manufacturing and maintenance costs can be reduced. there is.

24 is a diagram schematically illustrating seven illuminance measuring points in a light irradiation area (exposure area). FIG. 25 is a table showing illuminance at 7 points in FIG. 24 for each distance between the light emitting device for exposure and the exposure surface. FIG. 26 is a table showing the uniformity of illuminance and the effective irradiation area (exposure area) of the light irradiation area (exposure area) of FIG. 25 for each distance between the light emitting device for exposure and the exposure surface.

Referring to FIGS. 24 to 26 , as the distance between the light emitting device for exposure and the exposure surface increases, the illuminance at 7 points in FIG. 24 decreases, but uniformity and effective irradiation area increase.

As described above, the present invention has been described with reference to the drawings illustrated, but the present invention is not limited by the embodiments and drawings disclosed herein, and various modifications are made by those skilled in the art within the scope of the technical idea of the present invention. It is obvious that variations can be made. In addition, although the operation and effect according to the configuration of the present invention have not been explicitly described and described while describing the embodiments of the present invention above, it is natural that the effects predictable by the corresponding configuration should also be recognized.

10: light emitting device for exposure
100: light emitting module
110: light emitting element
120: individual lens
200: first optical system
210: lens
300: second optical system
310: lens
400: third optical system
410: lens
410a: first lens
410b: second lens
410c: third lens

Claims (15)

A light emitting module 100 including a plurality of light emitting elements (110, LED) disposed toward one side of the first direction;
It is disposed on one side of the light emitting module 100 in the first direction, is spaced apart from the light emitting module 100 by a first distance D1, includes one or more lenses 210, and emits light emitted from the light emitting module 100. a first optical system 200 that reduces an irradiation angle of light;
Disposed on one side of the first direction of the first optical system 200, spaced apart from the first optical system 200 by a second distance D2, and including one or more lenses 310, the first optical system 200 a second optical system 300 condensing the light passing through; and
Disposed on one side of the first direction of the second optical system 300, spaced apart from the second optical system 300 by a third distance D3, and including one or more lenses 410, the second optical system 300 A third optical system 400 that condenses the light passing through and converts it into parallel light,
The lenses 210, 310, and 410 of the first optical system 200, the second optical system 300, and the third optical system 400 are disposed along a first direction,
Each of the lenses 210, 310, 410 faces the plurality of light emitting devices 100 and has a single optical axis extending in the first direction.
Light-emitting device for exposure.
The method of claim 1,
The light emitting device for exposure, wherein the radius of curvature of the lens 310 of the second optical system 300 is smaller than the radius of curvature of the lens 210 of the first optical system 200.
The method of claim 2,
The light emitting device for exposure, wherein the radius of curvature of the lens 310 of the second optical system 300 is 75% or more and 90% or less of the radius of curvature of the lens 210 of the first optical system 200.
The method of claim 1,
The light emitting device for exposure, wherein the diameter of the lens 310 of the second optical system 300 is smaller than the diameter of the lens 210 of the first optical system 200.
The method of claim 4,
The light emitting device for exposure, wherein the diameter of the lens 310 of the second optical system 300 is 75% or more and 95% or less of the diameter of the lens 210 of the first optical system 200.
The method of claim 1,
The lens 410 of the third optical system 400 includes a first lens 410a, a second lens 410b, and a third lens 410c,
The diameter and radius of curvature of the second lens 410b are smaller than those of the first lens 410a, respectively;
The light emitting device for exposure, wherein the diameter and radius of curvature of the third lens 410c are smaller than those of the second lens 410b, respectively.
The method of claim 6,
The diameter of the second lens 410b is 65% or more and 80% or less of the diameter of the first lens 410a,
The radius of curvature of the second lens 410b is 65% or more and 80% or less of the radius of curvature of the first lens 410a,
The diameter of the third lens 410c is 70% or more and 85% or less of the diameter of the second lens 410b,
The light emitting device for exposure, wherein the radius of curvature of the third lens 410c is greater than or equal to 70% and less than or equal to 85% of the radius of curvature of the second lens 410b.
The method of claim 1,
The second distance D2 is smaller than the first distance D1 and the third distance D3,
The third distance (D3) is smaller than the first distance (D1), the light emitting device for exposure.
The method of claim 1,
The second distance D2 is greater than 0 and less than 10% of the first distance D1,
The third distance (D3) is 50% or more and 70% or less of the first distance (D1).
The method of claim 1,
The light emitting module 100 corresponds to each of the light emitting elements 110, is disposed adjacent to the corresponding light emitting element 110, and includes a plurality of individual lenses 120 surrounding the corresponding light emitting element 110. A light emitting device for exposure comprising:
The method of claim 10,
A height of the individual lens 120 in the first direction is greater than a width of the corresponding light emitting element 110 in a direction perpendicular to the first direction.
The method of claim 11,
The light emitting device for exposure, wherein the height of the individual lens 120 in the first direction is greater than or equal to 1.3 times and less than or equal to 2 times the width of the corresponding light emitting element 110 in a direction perpendicular to the first direction.
The method of claim 11,
The individual lens 120 has a form in which a plurality of lenses having a small height in the first direction are stacked.
The method of claim 1,
The plurality of light emitting elements 110 are arranged side by side at predetermined intervals in a second direction perpendicular to the first direction and in a third direction perpendicular to the first and second directions,
wherein the predetermined distances in the second and third directions are greater than 0 and less than 25% of widths of the light emitting elements 110 in the second and third directions.
According to any one of claims 1 to 14,
The plurality of light emitting elements 110 are arranged side by side at predetermined intervals in a second direction perpendicular to the first direction and in a third direction perpendicular to the first and second directions,
Among the plurality of light emitting elements 110, the light emitting element 110 disposed inside and the light emitting element 110 disposed outside are distinguished from each other and belong to two or more different channels,
The light emitting device for exposure,
A control unit for turning on or off the light emitting devices 110 belonging to the two or more channels for each channel,
The first distance (D1), the second distance (D2) and the third distance (D3) are adjustable,
Light-emitting device for exposure.

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