KR101848072B1 - UV LED light source module unit for exposure photolithography process and exposure photolithography apparatus used the same - Google Patents

Abstract

The present invention discloses a light source module unit for exposure. The light source module unit for exposure according to the present invention comprises a light source panel in which a plurality of ultraviolet light emitting elements are arranged in an array structure and a plurality of unit condenser lenses integrated in an integral array arrangement structure in a light transmitting panel arranged on a light emitting side of the light emitting element, And an optical panel having an array structure in the form of a matrix in a state of being eccentrically positioned toward an arbitrary reference center axis line passing through the center of the ultraviolet light emitting element array with respect to the main optical axis at positions corresponding to the light emitting elements, And a convex surface having a concave surface having a curvature (R) of less than (-) 0.15 and a curvature (R) of less than (+) 0.15, and the light exit surface is formed as a convex lens (The distance C1 between the external light emitting element and the unit condensing lens) is set so as to satisfy a value of C1 / d < 0.5 with respect to the diameter d of the condenser lens It has a configuration. According to this configuration, the diffused light irradiated from each unit ultraviolet light-emitting device can be effectively condensed in the light-receiving area of the exposure apparatus, maximizing the amount of light due to low power consumption. Particularly, high efficiency, high power single- By implementing the light, it is possible to secure the exposure performance capable of miniaturizing the exposure pattern and dramatically improving the resolution, and to provide a practical and economical alternative to the light source of the conventional exposure apparatus.

Description

[0001] The present invention relates to an exposure light source module unit and an exposure apparatus including the light source module unit,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure light source, and more particularly, to a UV light source module unit for exposure, which is used in a photolithography process to form a microcircuit pattern on a semiconductor wafer or an image display panel (UV LED) array structure, which is a light source in particular, and a shape and an array arrangement structure of a condenser lens integrated in a light-transmitting panel are integrated into an optimum combination module, and the optical output power and the illuminance distribution And to improve the exposure efficiency and exposure efficiency through maximization of the light source module and to improve the cost performance ratio by easily replacing the light source module in the form of a cell installed in the existing exposure apparatus An ultraviolet light emitting device (UV LED) light source module unit for exposure and an exposure apparatus having the light source module unit It is.

For example, a semiconductor device, a circuit board (PCB) and an image such as a liquid crystal display (LCD), an organic light emitting diode (OLED), and a plasma display panel (PDP) The display panel is manufactured such that a microcircuit pattern is formed by an optical micromachining technique called photolithography in an exposure process in its manufacturing process.

Generally, an ultra-high-pressure mercury lamp or a halogen lamp is mainly used as an exposure light source used in a conventional exposure process. However, the conventional exposure light source has a low lifetime and a high power consumption, But also environmental problems.

Particularly, there is a demand for ultra-high resolution realization using the technique of miniaturization of exposure pattern in manufacture of TFT (Thin Film Transistor) or CF (Color Filter) in display fields such as liquid crystal display devices (LCD) and organic light emitting diodes It is a reality that it is impossible to realize the miniaturization of the exposure pattern and realization of the ultrahigh resolution which is the core technology of the display industry due to the technical limitations of the process of finishing the exposure pattern using the existing exposure light source (Hg Lamp).

In recent years, there has been a demand for miniaturization and high-definition of exposure patterns due to miniaturization, large capacity, high integration, and high density of semiconductor devices, and therefore the existing exposure light source has a limitation .

Recently, development of new exposure techniques such as liquid immersion exposure and extreme ultraviolet exposure has been actively carried out. For example, ultraviolet light emitting devices (UV LEDs) can be used with low power consumption, long life, selective use of single wavelength and short wavelength And as an environmentally friendly light source for exposure, it is becoming popular as a substitute for existing light sources for exposure.

FIG. 1 is a photograph showing an example of a conventional light source module unit for exposure using an ultraviolet light emitting element as a light source. A light source panel (not shown) provided behind the optical panel 10 has a plurality Unit ultraviolet light-emitting elements are mounted in a matrix-type array structure and mounted on the support panel.

The optical panel 10 includes a lens panel 11 arranged in parallel to the light output side of the light emitting device so as to face the light source panel, and a plurality of unit lenses formed in the lens panel 11, (12) are coupled to each other.

The light source module unit for exposure using the conventional ultraviolet light emitting device as the light source as described above is used for the purpose of enhancing the heat radiating effect of the lens panel 11 on which the condenser lens 12 is installed by using, for example, brass, aluminum or stainless steel Non-transmissive metal panels are mainly used. Accordingly, there is a problem that it is difficult to realize an ultra-high resolution through miniaturization of the exposure pattern because the overall light output power and the illuminance distribution diagram are limited due to the reduction in the light-condensing efficiency due to the light loss occurring in the non-light-

In addition, since the conventional light source module unit for exposure has a limitation on the heat radiation performance of the non-light-transmitting metal panel, as the driving heat accumulates and accumulates on the non-light-transmitting metal panel, the deterioration progresses gradually as the driving time increases, There is a problem that exposure quality is lowered. Accordingly, there is a problem that the productivity of the exposure process is lowered and the cost is increased due to frequent replacement of the optical panel.

In the case of the conventional light source module unit for exposure, there is a problem that the manufacturing cost is lowered and the productivity is lowered due to the assembling process in which the unit condenser lens 12 is installed one by one in the hole formed in the lens panel 11 made of the non- .

Therefore, in the case of an exposure apparatus using an ultraviolet light emitting element (UV LED) as a light source, it is possible to realize an ultra-high resolution by realizing an optical path structure capable of reducing optical loss, improving the light intensity distribution and power of light output, and miniaturizing an exposure pattern, And the development of high efficiency new light sources (UV LED) for high density and the like, as well as the development of optical components, modules, and units.

SUMMARY OF THE INVENTION The present invention has been made in view of the technical background as described above, and it is an object of the present invention to solve the problems of the background art described above, which has been acquired by the applicant for deriving the present invention, It can not be said to be publicly known to the general public prior to the filing of the invention.

Korean Patent Registration No. 10-1440874 Korean Patent Publication No. 10-1401238 Korean Patent Registration No. 10-1532352 Korean Patent Publication No. 10-2012-0095520 Korean Patent Publication No. 10-2013-0092224 Korean Patent Publication No. 10-2014-0055605 Korean Patent Publication No. 10-2015-0109621

SUMMARY OF THE INVENTION It is an object of the present invention to provide a light emitting device having a plurality of units integrated into an array array structure in a light emitting panel, (UV LED) light source module unit capable of maximizing light collection efficiency by minimizing light loss occurring between light collecting lenses, and an exposure apparatus including the unit as a light source.

Another object of the present invention is to provide a light transmitting panel that maximizes condensing efficiency by means of a plurality of unit condenser lenses integrated in an integrated array arrangement structure to improve an illuminance distribution diagram and an optical output power so as to realize ultrahigh- (UV LED) light source module unit and an exposure apparatus having the unit as a light source.

It is still another object of the present invention to eliminate the lens panel for supporting each unit condensing lens in order to integrate each unit condensing lens into a light emitting panel in an integrated array arrangement structure to form an optical panel assembly unit, (UV LED) light source module unit according to an embodiment of the present invention and an exposure apparatus including the unit as a light source.

It is still another object of the present invention to provide an improved ultraviolet light emitting device (UV LED) light source module for improving the cost performance ratio by easily replacing a light source module installed in a conventional exposure apparatus in a cell form And an exposure apparatus having the light source module unit.

According to an aspect of the present invention, there is provided a light source module unit for exposure according to the present invention, comprising: a light source panel having a plurality of unit ultraviolet light emitting devices mounted on a support panel in a matrix array structure on a circuit board; And an optical panel disposed on a light output side of the light emitting device for collecting light to be emitted, wherein the optical panel is disposed on a light output side of the light emitting device so as to face the light source panel And a plurality of unit condenser lenses integrated in an integral array arrangement structure in the light projecting panel and the light projecting panel, wherein the unit condenser lens is arranged in a position corresponding to each of the light emitting elements, The light emitting element array is arranged such that an eccentric It characterized in that arranged in a matrix on the array structure of the state.

In order to achieve the above-mentioned objects, an exposure apparatus according to the present invention includes an exposure table for supporting an exposure substrate coated with a photosensitizer, driving means for driving the exposure table in a movable state on the XY plane, A light source module unit for exposure provided for emitting illumination light to a mask for forming an exposure pattern of the substrate; an optical system provided between the substrate and the light source module unit for exposure; and a driving unit for driving the light source unit for exposure, Wherein the light source module unit for exposure comprises a light source panel in which a plurality of unit ultraviolet light emitting elements are mounted on a support panel by being mounted on a circuit board in an array structure in a matrix form, The light emitting device according to claim 1, Wherein the optical panel includes a light transmitting panel disposed on a light output side of the light emitting device so as to face the light source panel and a plurality of unit condensing lenses integrated in an integrated array arrangement in the light transmitting panel Wherein the unit condenser lenses are arranged in a matrix array in a state eccentric to a reference center axis side passing through the center of the ultraviolet light emitting element array on the light source panel with respect to the main optical axis at positions corresponding to the light emitting elements, Structure.

According to an aspect of the present invention, the unit condenser lens is provided as a convex lens having a light exit surface protruding in a hemispherical shape on a light exit surface of the light transmitting panel so as to be in contact with adjacent unit condenser lenses, The light incident surface is formed in any one shape selected from a plane, a concave surface having a curvature within (-) 0.15 and a convex surface having a curvature within (+) 0.15, and the unit ultraviolet light- It is preferable that the lens separation distance is arranged so as to satisfy a value of C1 / d < 0.5 with respect to the diameter of the unit condensing lens.

According to another aspect of the present invention, the unit condensing lens has a hexagonal light incident surface so as to contact with the unit condensing lenses adjacent to each other to form a honeycomb structure as a whole, and a light emitting surface is formed on the light emitting surface of the light transmitting panel And a common vertical wall formed between a hexagonal light entrance surface and a hemispherical light exit surface so as to be provided with a hemispherical convex lens, wherein the light incident surface of the unit light collecting lens has a flat surface and (-) 0.15 And a convex surface having a curvature R of less than or equal to 0.15 and a convex surface having a curvature R of less than or equal to (+) 0.15, wherein a separation distance between the unit ultraviolet light- And a value of C1 / d < 0.5 with respect to the diameter of the condensing lens is satisfied.

In the present invention, the curvature R of the convex lens is defined as (+), and the curvature R of the concave lens is defined as (-).

The unit condenser lens has a semi-spherical shape or a hexagonal light incident surface, and is formed in a honeycomb structure as a whole. In this case, a void space between unit condensing lenses is minimized or zero (0) So as to maximize the light output efficiency.

According to another aspect of the present invention, the unit condensing lens is formed of a block body having a light incident surface and a light emitting surface in a quadrilateral structure so as to be in contact with adjacent unit condensing lenses, and the light emergence surface is convexly rounded convex lens So that the edge portion of the light transmitting panel is positioned to the edge of the light transmitting panel. According to this structure, the unit condensing lens is formed to be positioned to the edge of the light transmitting panel, and a void space is formed between each unit condensing lens in a zero state. As a result, the light transmission loss generated between the unit condenser lenses located at the edge portions of the light transmitting panel can be effectively prevented and minimized, thereby maximizing the light output efficiency.

According to the present invention, the diameter of the unit condenser lens of the first optical panel or the diameter of the circumscribed circle of the hexagonal light incident surface of the unit condenser lens is smaller than the separation distance of the unit condenser lens of the unit ultraviolet light- It is preferable to satisfy the relationship of 2.8 < d / C1 < 5.8.

According to another aspect of the present invention, there is further provided a configuration including a second optical panel arranged in parallel to the light output side of the first optical panel. In this configuration, in the second optical panel, a plurality of unit condensing lenses each having a light entrance surface and a light exit surface formed as convex lenses are disposed on the light source panel with respect to the main light axis at positions corresponding to the light emitting elements, respectively And is arranged in a matrix-like array structure in a state of eccentricity to an arbitrary reference center axis line side passing through the center of the ultraviolet light-emitting device array.

(C2) between the unit condenser lens of the first optical panel and the unit condenser lens of the second optical panel according to the present invention having the above-described configuration, It is preferable to have a configuration in which a value of C2 / d2 < 0.8 with respect to the diameter of the unit condensing lens of the panel is satisfied.

It is preferable that the diameter of the unit condenser lens of the second optical panel is formed so as to satisfy a relation of 0.7 <d2 / d <1.2 with respect to the diameter of the unit condenser lens of the first optical panel.

According to another aspect of the present invention, the unit condenser lens is gradually spaced from an arbitrary reference center axis line passing through the center of the ultraviolet light-emitting device array on the light source panel, and is closer to the edge, And the diffused light irradiated from each unit ultraviolet light emitting element is condensed in the light receiving region set in the optical system of the exposure apparatus.

The optical distance "a" set in the optical system from the ultraviolet light-emitting element to the light-receiving area is set so that the ultraviolet light emitted from the ultraviolet light- Quot; x "between the central axis of each of the ultraviolet light emitting elements and the central axis of the condenser lens, and the distance " c" The relation of the diameter "t" of the region A is set so that the reference of the eccentric distance "x" of the condensing lens satisfies "x = b * c / a" -t) / 2ab <x <bc (2b + t) / 2ab ".

According to an aspect of the present invention, the ultraviolet light emitting device may be mounted on a unit circuit board as a packaged LED light source. Accordingly, the support panel constituting the light source panel may have a configuration in which a plurality of LED light sources in a package form are mounted on a plurality of unit circuit boards.

According to another aspect of the present invention, the ultraviolet light emitting element may be mounted as a packaged LED light source on a single circuit board.

According to another aspect of the present invention, the ultraviolet light emitting device may be mounted as an LED light source on a single or multiple circuit boards in the form of a single chip or a plurality of chips.

The light source panel and the optical panel may be supported by a housing and may be detachably attached to an exposure apparatus. The light source panel and the optical panel may further include a heat dissipating unit .

According to the light source module unit for exposure according to the present invention having the above-described configuration, the following operational effects can be obtained.

First, since a plurality of unit condensing lenses are integrated into an integral array arrangement structure on a light transmitting panel, light loss occurring among a plurality of unit condensing lenses can be minimized. Accordingly, it is possible to provide a light source module unit of a low power consumption type ultraviolet light emitting device (UV LED) capable of maximizing a light collecting efficiency and an exposure apparatus including the unit as a light source.

Second, by maximizing the light condensing efficiency by a plurality of unit condenser lenses integrated in the integral array arrangement structure in the light projecting panel, it is possible to realize a finer exposure pattern by improving the illuminance distribution diagram and the optical output power. Accordingly, it is possible to provide an ultraviolet light emitting device (UV LED) light source module unit capable of realizing an ultra-high resolution and an exposure apparatus having the unit as a light source.

Third, by excluding the lens panels for supporting the respective unit condenser lenses in order to integrate the unit condenser lenses into the light projecting panel in an integrated array arrangement structure to form the optical panel assembly unit, cumulative accumulation of the drive heat can be prevented, It is possible to improve the assemblability and productivity of the panel and to reduce the manufacturing cost. As a result, it is possible to provide an economical ultraviolet light (UV LED) light source module unit and an exposure apparatus including the unit as a light source, in addition to an improvement in exposure performance.

Fourth, the light source module installed in the existing exposure apparatus can be easily replaced in the form of a cell. As a result, it is possible to selectively use ultraviolet light having a single wavelength and a short wavelength with high efficiency and high output, as needed. Therefore, it is possible to realize a high quality exposure and a practical and economical exposing ultraviolet light emitting device LED) light source module unit and an exposure apparatus provided with the light source module unit.

Fifth, it can be expected to reduce the maintenance cost by using low power consumption, reducing the cost of replacing the light source, improving the operation time of the exposure equipment, and solving environmental problems.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a photograph showing an example of a conventional light source module unit for exposure. FIG.
2 is a schematic exploded perspective view illustrating a light source module unit for exposure according to the present invention.
3 is a schematic perspective view schematically illustrating a unit light source and a condenser lens array structure of the light source module unit for exposure according to the present invention.
FIG. 4 is a schematic plan view schematically showing an array structure of an ultraviolet light-emitting device composed of a unit light source of a light source module unit for exposure according to the present invention. FIG.
5 is a schematic perspective view showing an optical panel of an exposure light source module unit according to the present invention.
FIG. 6 is a schematic cross-sectional view illustrating a part of a unit lens included in an optical panel of the light source module unit for exposure according to the present invention shown in FIG. 5; FIG.
7A is a schematic plan view illustrating an optical panel according to another embodiment of the light source module unit for exposure according to the present invention.
FIG. 7B is a schematic cross-sectional view showing a part of a unit lens included in the optical panel of the light source module unit for exposure according to the present invention shown in FIG. 7A. FIG.
8A is a schematic plan view illustrating an optical panel according to another embodiment of the light source module unit for exposure according to the present invention.
FIG. 8B is a schematic cross-sectional view showing a part of a unit lens included in the optical panel of the light source module unit for exposure according to the present invention shown in FIG. 8A. FIG.
9 and 10 are schematic views for explaining an eccentric array structure of a unit light source and a condenser lens of an exposure light source module unit according to the present invention, respectively.
11 and 12 are schematic cross-sectional views schematically showing the range of the light-incident surface curvature R of the unit condensing lens of the light source module unit for exposure according to the present invention.
13 to 15 are graphs showing illuminance of an optical surface (exposure surface) according to curvature R of the light incident surface of the unit condenser lens of the light source module unit for exposure according to the present invention.
16 is a schematic exploded perspective view showing a light source module unit for exposure according to another embodiment of the present invention.
17 is a schematic perspective view schematically illustrating a unit light source and a condenser lens array structure of the light source module unit for exposure according to another embodiment of the present invention shown in FIG.
18 is a schematic cross-sectional view schematically showing the relationship between the optical structure and the arrangement state of the unit condensing lens of the light source module unit for exposure according to another embodiment of the present invention shown in Figs. 16 and 17 .
19 and 20 are sectional views of a light source module unit for exposure according to another embodiment of the present invention shown in Figs. 16 and 17, respectively, according to the relationship between the optical structure and the arrangement state of the unit condenser lens ) As a graph.
21 is an external perspective view schematically showing a state in which a light source module unit for exposure according to the present invention is incorporated in a housing.
FIG. 22 is a view showing a result of measuring the CD value according to the mask line width by photographing the main part of the circuit pattern formed on the wafer by the light source module unit for exposure according to the present invention and the mercury lamp (Hg Lamp) View drawings.
23 is a graph showing a comparison result of CD value measurement results according to a mask line width of a circuit pattern formed on a wafer by the light source module unit for exposure according to the present invention and the mercury lamp Hg Lamp as a light source for exposure.
FIG. 24 is a schematic view schematically showing an essential part of an exposure apparatus to which an exposure light source module unit according to the present invention is applied. FIG.

Hereinafter, a light source module unit for exposure according to the present invention will be described in detail with reference to the accompanying drawings. The following description and the accompanying drawings are merely illustrative of the preferred embodiments of the present invention and are not intended to limit the light source module unit for exposure according to the present invention.

FIG. 2 is a schematic exploded perspective view illustrating a light source module unit for exposure according to the present invention. FIG. 3 is a schematic view illustrating a unit light source and a condenser lens array structure of the light source module unit for exposure according to the present invention. FIG.

2 and 3, the light source module unit 100 for exposure according to the present invention includes a plurality of unit ultraviolet light emitting devices (UV LEDs) 111 mounted on a circuit board 112 in a matrix- And an optical panel 120 disposed on a light output side of the light emitting device 111 for condensing light emitted from the light emitting device 111. The light emitting device 111 includes a light source panel 110 mounted on a supporting panel 113, The optical panel 120 includes a light transmitting panel 121 disposed on the light emitting side of the light emitting device 111 so as to face the light source panel 110 and a light transmitting panel 121 having an integral array arrangement structure And a plurality of unit condenser lenses 122 integrated therein.

A plurality of unit condenser lenses 122 integrated in the integral array arrangement in the light transmitting panel 121 are arranged at a position of the interval p corresponding to the interval p of the array of ultraviolet light emitting elements 111, (E1, e2) eccentric to an arbitrary reference center axis side passing through the center O (see Fig. 3) of the array of ultraviolet light emitting devices 111 on the light source panel 110 with respect to the optical axis Respectively.

The light source module unit 100 for exposure according to the present invention having the above-described structure is constructed by integrally forming a light guide plate 121 integrally formed on a light-transmitting panel 121 constituting an optical panel 120 with respect to a unit ultraviolet light- An array module in which a plurality of unit condensing lenses 122 are integrated in a matrix array structure and an arrangement structure of the light incident surface and the emission surface of each unit condensing lens 122 are combined in an optimum state , The light output power and the illumination distribution through the maximization of the illuminance distribution are effectively improved, thereby enabling miniaturization of the exposure pattern and realization of high resolution.

Accordingly, the optical arrangement structure of the unit condenser lens integrated in the unit ultraviolet light emitting device (UV LED) and the corresponding arrangement structure, which is the light source of the light source module unit 100 for exposure according to the present invention, The specific configuration of the range of the curvature R will be described in detail.

According to the present invention, the ultraviolet light emitting device 111 emits ultraviolet light in a range of 100 nm wavelength band to 410 nm wavelength band in a row or more on a strip-shaped unit circuit board 112 as exemplarily shown in FIG. 2 Chip, package, or a combination of a chip and a package.

Accordingly, the light source panel 110 includes a plurality of strip-shaped unit circuit boards 112 mounted on the support panel 113 in a side-by-side manner, and each of the unit circuit boards 112 includes a plurality of ultraviolet light- (111) form an array module in the form of a matrix on the xy coordinates.

On the other hand, the ultraviolet light emitting device 111 may be a chip, a package or a chip that emits ultraviolet light ranging from a 100 nm wavelength band to a 410 nm wavelength band so as to form an array structure in a matrix on a single circuit substrate 112 having a larger area The package can be mounted as a mixed LED light source.

4 is a schematic plan view schematically showing an array structure of an ultraviolet light emitting device provided as a unit light source of a light source module unit for exposure 100 according to the present invention.

4, the light source module unit 100 for exposure according to the present invention includes a plurality of ultraviolet light emitting devices 111 on an xy rectangular coordinate system having a center O of an array of ultraviolet light emitting devices 111 on the light source panel 110, And the ultraviolet light emitting elements 111 are configured to form an array structure of a matrix type with spaced apart intervals p.

Although the support panel 113 is illustrated as a rectangular panel, the shape of the support panel 113 is shown as an embodiment. The limitation of the light source module unit 100 for exposure according to the present invention no.

Therefore, the light source module unit 100 for exposure according to the present invention can be applied to various embodiments, for example, a disk-shaped panel or the like.

That is, the shape of the support panel 113 on which the ultraviolet light-emitting elements 111 are arrayed depends on the specifications and the configuration of the exposure apparatus to which the light source module unit 100 for exposure according to the present invention is mounted as a light source, It can be modified into various forms so as to be adopted in an optimal state.

4, the ultraviolet light emitting devices 111 are arranged on the support panel 113 in an odd number (9) of rows and columns, The unit ultraviolet light emitting device 111 may be disposed at the center O of the ultraviolet light emitting device array.

On the other hand, in the structure in which the ultraviolet light emitting elements 111 are arrayed on the support panel 113 in an even number of rows and columns, the unit ultraviolet light emitting elements 111 are arranged at the center O of the ultraviolet light emitting element array of the light source panel 110 And has an array structure in which the arrangement of the elements 111 is excluded.

In other words, the center O of the ultraviolet light-emitting device array on the light source panel 110 is a light-receiving area in which diffused light emitted from each unit ultraviolet light-emitting device is condensed by the condenser lens 121 (Refer to FIG. 2 and FIG. 4, e1, e2, and en) of each unit condensing lens 121. The eccentricity of each unit condensing lens 121 is determined by the following equation.

The light receiving area (see reference numeral "A" in Figs. 9 and 10) is an aperture for forming a condensing target through which the condensed light passes through a reflector provided in an optical system of an unillustrated exposure apparatus. .

Therefore, in the light source module unit 100 for exposure according to the present invention, the diffused light emitted from each unit ultraviolet light emitting device 111 is converged by the condenser lens 121 and is formed as a condensing target of the light receiving area And is condensed to pass through an aperture.

That is, in the light source module unit 100 for exposure according to the present invention, the center O of the array of the ultraviolet light emitting devices 111 on the light source panel 110 and the center of the lens panel 120 are disposed coaxially, The converging lens 122, which is gradually spaced apart from the center of the reference center axis O and is disposed close to the edge, has an eccentricity with respect to the main optical axis of the ultraviolet light emitting element 111, Is gradually increased.

In other words, the light source module unit 100 for exposure according to the present invention performs the role and function of a strabismus lens in that the condenser lens 122 is disposed eccentrically with respect to the main optical axis of the ultraviolet light emitting device 111 . Accordingly, the condensing efficiency of the diffused light emitted from each unit ultraviolet light emitting device 111 is maximized.

5 is a schematic perspective view showing an optical panel of the light source module unit for exposure according to the present invention. FIG. 6 is a cross-sectional view of a unit lens of the optical panel unit for exposure according to the present invention shown in FIG. Fig. 2 is a schematic cross-sectional view showing an enlarged view.

5 and 6, the optical panel 120 includes a light transmitting panel 121 and a light transmitting panel 121 disposed on the light emitting side of the light emitting device 111 so as to face the light source panel 110, And a plurality of unit condensing lenses 122 integrated into an integral array arrangement structure.

In the present invention, the optical panel 120 is formed by using a known optical lens material such as glass, quartz, quartz, synthetic resin or the like, together with a flat-type light transmitting panel 121, And a unit condenser lens 122 having a planar, convex or concave surface on the emission surface and / or the light incidence surface are integrally formed and arrayed.

According to an aspect of the present invention, the unit condenser lens 122 may be configured to protrude in a hemispherical shape on a light exit surface of the light transmitting panel 121 so as to be in contact with adjacent unit condenser lenses. The shape of the unit condenser lens 122 minimizes the void space formed between the unit condenser lenses 122 to minimize the light transmission loss, thereby maximizing the light output efficiency.

FIG. 7A is a schematic plan view showing an optical panel according to another embodiment of the light source module unit for exposure according to the present invention, FIG. 7B is a schematic plan view showing the optical panel unit for exposure light source module unit according to the present invention shown in FIG. Fig. 3 is a schematic cross-sectional view showing a part of the unit lens of Fig.

7A and 7B, in the modified embodiment of the present invention, the unit condenser lens 122 has a hexagonal light incident surface so as to contact with the unit condenser lenses adjacent to each other, thereby forming a honeycomb structure as a whole . And the light output surface is provided as a convex lens protruding in a hemispherical shape on the light output surface of the light transmitting panel 121. [ Accordingly, the unit condenser lens 122 has a three-dimensional structure in which a common vertical wall is formed between the hexagonal light incident surface and the hemispherical light exit surface. According to the shape of the unit condenser lens 122, since a common vertical wall is interposed between the unit condenser lenses 122, the space space becomes zero (0) . Accordingly, the light transmission loss generated between the unit condenser lenses 122 of the conventional light source module unit is effectively prevented and minimized, thereby maximizing the light output efficiency.

FIG. 8A is a schematic plan view showing an optical panel according to another embodiment of the light source module unit for exposure according to the present invention, FIG. 8B is a schematic plan view showing an optical panel of the light source module unit for exposure according to the present invention shown in FIG. Fig. 3 is a schematic cross-sectional view showing a part of a unit lens provided and extracted.

8A and 8B, in another modification of the present invention, the unit condensing lens 122 is a block member having a light incident surface and a light emitting surface in a quadrilateral structure so as to be in contact with adjacent unit condensing lenses And the light exit surface is provided with a convex lens convexly rounded. Accordingly, the unit condenser lens 122 is positioned to the edge of the light-transmitting panel 121, so that the void space is zero. Accordingly, the light transmission loss generated between the unit condenser lens 122 located at the edge of the light transmitting panel 121 is effectively prevented and minimized, thereby maximizing the light output efficiency.

That is, the light source module unit 100 for exposure according to the present invention includes a plurality of unit condenser lenses 122 integrally formed in a light transmitting panel 121 disposed on the light output side of the light emitting device 111 so as to face the light source panel 110, The unit condenser lenses 122 are integrated so as to minimize the space of voids between the unit condenser lenses 122. Accordingly, the light transmission loss generated between the unit condenser lenses 122 is minimized, Thereby maximizing the output efficiency.

That is, according to the light source module unit 100 for exposure according to the present invention having the above-described structure, in order to maximize the condensing efficiency of diffused light emitted from each unit ultraviolet light emitting device 111, The lens 122 is arranged so as to be eccentric with respect to the main optical axis of the ultraviolet light emitting element 111. Hereinafter, the detailed structure and the operation thereof will be described in detail.

9 and 10 are schematic views for explaining an array structure in which the condenser lens 122 of the light source module unit for exposure 100 according to the present invention is eccentric to the main optical axis of the ultraviolet light emitting device 111. FIG.

9 and 10, "a" represents an optical distance from an ultraviolet light emitting element 111 to an aperture set as a light receiving area A, which is a light collecting target.

"B" represents the separation distance of the ultraviolet light emitting device 111 disposed so as to be spaced apart from the reference center axis side passing through the center O of the ultraviolet light emitting device array of the light source panel 110.

"X" represents an eccentric distance between the center axis of the ultraviolet light emitting device 111 and the center axis of the condenser lens 122, "c" represents a distance between the face of the ultraviolet light emitting device 111 and the condenser lens 122, , And "t" represents the diameter of the light receiving region (A).

9 and 10, the light source module unit 100 for exposure according to the present invention includes an ultraviolet light-emitting device 111, a light source unit 110, It is preferable that the relationship between "b" and "c", "x", and "t" is defined by the following equation with respect to the distance "a"

That is, the reference of the eccentric distance "x" of the condenser lens 122 is set to satisfy x = b * c / a, bc (2b + t) / 2ab ".

Hereinafter, the range of the light incidence surface and the curvature R of the exit surface of the unit condenser lens 121 for maximizing the optical output power and the illuminance distribution of the light source module unit for exposure 100 according to the present invention, The action and effect will be described in detail.

FIGS. 11 and 12 are schematic cross-sectional views schematically showing the range of the light-incident surface curvature R of the unit condensing lens of the light source module unit for exposure according to the present invention.

11 and 12, the light source module unit 100 for exposure according to the present invention includes a light source unit 110 for irradiating ultraviolet light to the unit condenser lens 122, The incident surface is formed in any one shape selected from a plane, a concave surface having a curvature R within (-) 0.15 and a convex surface having a curvature (R) within (+) 0.15, Lens.

The distance C1 between the unit ultraviolet light emitting device 111 and the unit condenser lens 122 is arranged to satisfy a value of C1 / d <0.5 with respect to the diameter d of the unit condenser lens 122 Configuration.

Here, the curvature of the convex lens is defined as (+), and the curvature of the concave lens is defined as (-).

The range of the light incidence curvature R of the unit condensing lens 121 as described above is preferably set such that the distance C1 between the unit condensing lens 121 and the unit condensing lens 121 with respect to the unit ultraviolet light- In the configuration in which the relationship of the diameter d of the unit condensing lens 121 is set so as to satisfy the value of C1 / d &lt; 0.5, the value of the actual "C1 / d" (Illuminated) surface of the ultraviolet light emitting device 111 to maximize effective condensing efficiency of the diffused light emitted from the ultraviolet light emitting device 111. [

13 to 15 are graphs showing illuminance of an optical surface (exposure surface) according to curvature R of the light incident surface of the unit condenser lens of the light source module unit for exposure according to the present invention.

13, when the light incident surface of the unit condensing lens 121 is formed in a plane, the light source module unit 100 for exposure according to the present invention has a maximum (1) It is confirmed that the light is output to form the roughness.

On the other hand, in the case where the light incident surface of the unit condensing lens 121 is formed into a concave surface having a curvature R of (-) 0.15 and a convex surface having a curvature R of (+) 0.15 , And it is confirmed that the illuminance of the light irradiation surface (the exposure surface) forms an illuminance of about 90% of the maximum value (1).

Accordingly, the light source module unit 100 for exposure according to the present invention is designed such that the light incident surface curvature R of the unit condenser lens 121 is (-) 0.15 &lt; R &lt; (+) 0.15.

Referring to FIG. 14, when the diameter d of the unit condensing lens 121 is formed to have a predetermined size, the setting relationship C1 of the distance C1 to the unit ultraviolet light- / d) value is output so as to form the maximum intensity (1) on the optical surface (exposure surface) at around 0.3.

If the illuminance of the optical surface (exposure surface) is less than about 80% of the maximum value (1) at a setting relationship (C1 / d) of the distance C1 between the unit ultraviolet light- It can be confirmed that the light is output so as to form the front and rear illuminance.

Therefore, the light source module unit 100 for exposure according to the present invention is arranged such that the distance C1 between the unit condenser lens 121 and the diameter d of the unit condenser lens 121 with respect to the unit ultraviolet light- And the relationship value is arranged so as to satisfy the range of C1 / d &lt; 0.5.

15, when the unit distance C1 of the unit condensing lens 121 to the unit ultraviolet light emitting device 111 is set to a predetermined value, the distance C1 between the unit condensing lenses 121 (D / C1) value of the unit condenser lens 121 with respect to the diameter d of the unit condenser lens 121 is about 4.0 to 6.0 so that the illuminance of the maximum value 1 is formed on the light- Can be confirmed.

 When the value (d / C1) of the distance (C1) between the unit condenser lens 121 and the diameter d of the unit condenser lens 121 is about 2.8, It can be confirmed that the roughness is output so as to form roughness of about 80% of the maximum value (1).

Therefore, the light source module unit 100 for exposure according to the present invention is provided to maximize the light-condensing efficiency of the diffused light emitted from the ultraviolet light-emitting device 111 and to separate the unit condenser lens 121 (D / C1) value between the distance C1 and the diameter d of the unit condensing lens 121 satisfies a value of 2.8 &lt; d / C1 &lt; 6.0.

FIG. 16 is a schematic exploded perspective view illustrating the light source module unit for exposure according to another embodiment of the present invention, and FIG. 17 is a sectional view of the unit light source of the light source module unit for exposure according to another embodiment of the present invention, Is a schematic perspective view schematically shown for explaining an array structure.

16 and 17, the light source module unit 100 for exposure according to another embodiment of the present invention includes a second optical panel 120 arranged to be arranged in parallel to the light output side of the first optical panel 120, (130). &Lt; / RTI &gt;

A plurality of unit condensing lenses 131 each having a light entrance surface and a light exit surface each formed of a convex lens are disposed in the second optical panel 130 at positions corresponding to the light emitting elements 111, And an array structure in the form of a matrix in a state of eccentricity to an arbitrary reference center axis line passing through the center of the ultraviolet light emitting element array on the panel 110. [

That is, the unit condenser lens 131 of the second optical panel 130 is arranged to be eccentric with respect to the main optical axis of the unit ultraviolet light emitting device 111 of the light source panel 110, And serves to maximize the light-condensing efficiency of the diffused light emitted from each unit ultraviolet light-emitting device 111 by performing the role and function of the lens. The configuration in which the unit condenser lens 131 of the second optical panel 130 has an eccentric array configuration is the same as the unit of the first optical panel 120 described with reference to Figs. The condenser lens 121 is substantially the same as the eccentric array structure, and a detailed description of its structure and operation will be omitted.

18 is a schematic cross-sectional view schematically showing the relationship between the optical structure and the arrangement state of the unit condensing lens of the light source module unit for exposure according to another embodiment of the present invention shown in Figs. 16 and 17 to be.

18, the light source module unit 100 for exposure according to another embodiment of the present invention includes a unit of the unit condenser lens 121 of the first optical panel 120 and a unit of the second optical panel 130 The separation distance C2 of the condenser lens 131 has an array structure in which C2 / d2 <0.8 is satisfied with respect to the diameter d2 of the unit condenser lens 131 of the second optical panel 130 .

The diameter d2 of the unit condenser lens 131 of the second optical panel 130 is set such that 0.7 <d2 (d2) is satisfied with respect to the diameter d1 of the unit condenser lens 121 of the first optical panel 120 / d &lt; / = 1.2.

The distance C2 and the diameter d2 of the unit condensing lens 131 of the second optical panel 130 as described above satisfy the values of C2 / d2 <0.8 and 0.7 <d2 / d <1.2 In the configuration in which the arrangement is arranged, the illuminance of the light irradiation surface (the exposure surface) is measured with the actual value of "d2 / d" set at a constant interval to maximize the light collection efficiency of the diffused light irradiated from the ultraviolet light emitting element 111 Is set as a condition to obtain the best possible illumination that is valid and effective.

FIGS. 19 and 20 are diagrams for explaining the illuminance of the optical surface according to the light incident surface shape and arrangement of the unit condenser lens of the light source module unit for exposure according to another embodiment of the present invention shown in FIGS. 16 and 17 Fig.

19, when the diameter d2 of the unit condenser lens 131 of the second optical panel 130 is formed to be a constant value, the unit condenser lens 121 of the first optical panel 120 (C2) between the distance (C2) between the unit condenser lens (131) of the second optical panel (130) and the diameter (d2) of the unit condenser lens (131) of the second optical panel / d2), the roughness is gradually reduced to around 90% of the maximum value (1) at around 0.8, while forming the maximum value (1) at the optical surface (target) (exposure surface) at 0.1.

Accordingly, the light source module unit 100 for exposure according to another embodiment of the present invention may guide the ultraviolet light to the ultraviolet light-emitting device 111 by maximizing the condensing efficiency of the diffused light emitted from the ultraviolet light- The separation distance C2 and the diameter d2 of the unit condensing lens 131 of the panel 130 satisfy a value of C2 / d2 &lt; 0.8.

20 shows the relationship between the diameter d of the unit condenser lens 121 of the first optical panel 120 and the diameter d2 of the unit condenser lens 131 of the second optical panel 130, The relation value (d2 / d) shows that the illuminance of the maximum value (1) is formed on the light-irradiating surface (target surface) before and after 1.2 and gradually decreased in the vicinity of about 90% of the maximum value (1) have.

Therefore, the light source module unit 100 for exposure according to another embodiment of the present invention may guide the ultraviolet light to the ultraviolet light emitting device 111 by maximizing the condensing efficiency of the diffused light emitted from the ultraviolet light emitting device 111, The relationship value d2 / d between the diameter d of the unit condensing lens 121 of the panel 120 and the diameter d2 of the unit condensing lens 131 of the second optical panel 130 is 0.7 <d2 / d &lt; / RTI &gt;

21, the light source panel 110 and the optical panel 120 are supported by the housing 140, as illustrated in FIG. 21, by the light source module unit 100 for exposure according to the present invention having the above- And may have a built-in unitized configuration.

Accordingly, the light source module unit 100 for exposure, which is unitized to be mounted on the housing 140, can be used in a detachable state by a light source of an exposure apparatus (not shown). Accordingly, it is possible to provide a practical and economical exposure apparatus having a high cost performance ratio, since it is mainly compatible with partial replacement by removal of mercury or a halogen lamp mounted as a light source of a conventional exposure apparatus Do.

The light source module unit 100 for exposure according to the present invention may be configured such that the light source panel 110 and the optical panels 120 and 130 are coupled to each other to form a bracket or a flange As shown in FIG.

The light source module unit 100 for exposure according to the present invention may further include a heat dissipating unit provided in the housing 140 so as to be provided around the light source panel 110 and the optical panel 120.

The heat dissipating means may include a water-cooling heat dissipating means connected to a chiller such that the cooling water is circulated through the cooling water inlet 141 and the outlet 142 as illustrated in FIG.

The heat dissipating unit may include a heat sink built in the housing 140 to mount the light source panel 110 and the optical panel 120 thereon.

In addition, the heat dissipating means may be provided with an air cooling type heat dissipating means using a fan or a blower for circulating air, or may be installed in a state where the air cooling type heat dissipating means and the water cooling type heat dissipating means are combined.

According to another aspect of the present invention, the light source module unit 100 for exposure according to the present invention may be configured such that the ultraviolet light emitting device 111 and the condenser lenses 122 and 132 are circularly arrayed, And the like. In the case of such a circular array structure, there is an advantage that the light loss generated from the ultraviolet light emitting device 111 arranged at the corner portion farthest from the center O in the square array structure can be excluded.

22 is a photograph showing the results of a comparison between the exposure performance of the light source module unit 100 for exposure and the mercury lamp Hg Lamp as a light source for exposure according to the present invention, FIG.

The test results shown in Fig. 22 were obtained by applying a 1.5-m thick photoresist (PR name: DTFR-JC800) to a 3.5-inch wafer and setting the mask line width at 0.2 And developed with 2.38 wt% of tetramethylammonium hydroxide (TMAH) developer to produce a critical dimension (CD) of a microcircuit pattern formed through photolithography used in a typical LCD manufacturing process, Was measured by photographing.

Referring to FIG. 22, the limit of the critical dimension (CD) of a microcircuit pattern that can be implemented using a conventional mercury lamp as a light source for exposure is about 2.0 μm, while the light source module unit for exposure according to the present invention is used It can be seen that the critical dimension (CD) of the microcircuit patterns that can be implemented is possible up to about 1.4 μm.

FIG. 23 is a graph showing the critical dimension line dimension (CD) measured by photographing in FIG. 22 in comparison with an ideal critical dimension line dimension (CD).

Referring to FIG. 23, the critical dimension line dimension (CD) of a microcircuit pattern that can be implemented using the light source module unit for exposure 100 according to the present invention may be a microcircuit capable of being implemented using a conventional mercury lamp It can be seen that the pattern is formed in a pattern closer to the ideal critical dimension fine dimension (CD) as compared with the critical dimension of the pattern (CD).

Therefore, the line width of the fine circuit pattern formed by using the light source module unit 100 for exposure according to the present invention is formed finer and more precisely than the line width of the circuit pattern formed using the mercury lamp Hg Lamp, Can be confirmed. Accordingly, the light source module unit for exposure according to the present invention can realize a remarkable high resolution in the exposure process.

FIG. 24 is a schematic configuration diagram schematically showing an essential part of an exposure apparatus to which an exposure light source module unit according to the present invention is applied. FIG. Here, the same reference numerals as those in the preceding drawings denote the same components.

24, an exposure apparatus 200 according to the present invention includes an exposure table 250 for supporting an exposure glass substrate 10 coated with a photosensitizer, an exposure table 250 for moving the exposure table 250 on XY plane coordinates (Not shown) for driving the glass substrate 10 in a possible state, an exposure light source module unit 100 provided for emitting illumination light for exposure to the glass substrate 10, Optical units 210 to 230 provided between the unit 100 and control means (not shown) for controlling the drive means and the light source unit 100 for exposure in conjunction with each other. Reference numeral 240 denotes an exposure mask on which an exposure pattern is formed.

The glass substrate 10 is coated with a photosensitizer on a surface to which illumination light from the light source module unit for exposure 100 is incident and a mask 240 having the same pattern as the photosensitive pattern formed on the light- And is supported by the exposure table 250. The illumination light emitted from the light source module unit for exposure 100 is condensed through the optical systems 210 to 230 and passes through the mask 240 to be irradiated on the photosensitive surface of the glass substrate 10, The exposure process in which the exposure pattern is transferred to the photosensitive surface of the glass substrate 10 is performed.

The exposure table 250 is moved in the XY plane coordinates by the driving means according to the relative sizes of the glass substrate 10 and the mask 240 while the positions of the glass substrate 10 and the mask 240 are aligned Thereby performing an exposure process.

In the meantime, in the exposure apparatus 200 according to the present invention, the glass substrate 10 and the mask 240 are provided to be spaced apart from each other, but such a structure does not limit the present invention.

On the other hand, the mask 240 may be provided closely to the photosensitive surface of the glass substrate 10. In the case of this configuration, the photosensitive surface of the glass substrate 10 is closely exposed, and the pattern of the mask 240 is transferred to the photosensitive surface.

A pattern formed on the mask 240 is formed by a configuration in which a gap between the glass substrate 10 and the mask 240 is widened and a reduction projection lens is interposed between the glass substrate 10 and the mask 240 It is possible to perform reduction projection exposure on the photosensitive surface of the glass substrate 10. [

The optical systems 210 to 230 are provided to efficiently collect the illumination light on the mask 240. The optical systems 210 to 230 are arranged in a manner such that the illumination light emitted from the light source module unit for exposure 100 is an aperture, And a reflector 230 for refracting the illumination light passing through the aperture A to the mask 240. The reflector 230 reflects the illumination light passing through the aperture A to the mask 240, And includes a fly eye lens 221, a condenser lens 222 and a plate lens 223 and 224. The configuration of the optical systems 210 to 230 does not limit the exposure apparatus 200 according to the present invention, and various modified configurations may be applied depending on the exposure subject and the mask specification.

The light source module unit for exposure 100 is a component that characterizes the exposure apparatus 200 according to the present invention and includes a plurality of unit ultraviolet light emitting elements (UV LEDs) 111 A light source panel 110 mounted on the circuit board 112 in the form of a matrix array and mounted on a support panel 113 and a light source panel 110 mounted on the support panel 113 to face the light source panel 110, A plurality of unit condensing lenses 122 are formed in an integral array arrangement structure in a light transmitting panel 121 disposed on the light emitting side so that the distance p between the unit light collecting lenses 122 and the ultraviolet light emitting devices 111 (E1, e2) eccentric to an arbitrary reference center axis side passing through the center O (see Fig. 3) of the array of ultraviolet light emitting elements 111 on the light source panel 110 with respect to the main optical axis at a position Shaped array structure Luer Jean comprises an optical panel (120).

In the light source module unit for exposure 100 having the above-described configuration, the unit condenser lens 122 is a concave surface having a plane of light incidence, a curvature R of within (-) 0.15, +) Of 0.15 or less and a convex surface having a curvature R within 0.15, and the light exit surface is formed of a convex lens, and the unit ultraviolet light emitting device 111 and the unit condensing lens 122 The separation distance C1 is arranged so as to satisfy a value of C1 / d &lt; 0.5 with respect to the diameter d of the unit condensing lens 121. [

According to the exposure apparatus 200 of the present invention, as shown in FIGS. 2 and 16, the ultraviolet light-emitting devices 111 are formed in a strip-shaped unit circuit substrate 112, It is preferable that the light emitting device is mounted on a chip, a package that emits ultraviolet light in a wavelength range of up to 410 nm, or an LED light source in a mixed form of a chip and a package.

The light source module unit 100 having the above-described structure is configured such that condensing lenses are integrated in an array array structure in a light-transmitting panel so as to maximize the light-condensing efficiency with respect to the light source panel, which is a plurality of ultraviolet light- And is described in detail with reference to Figs. 2 to 23 and has the configuration as described in claims 1 to 14 of the claims, and a detailed description thereof will be omitted.

In other words, the exposure apparatus 200 according to the present invention has a configuration in which the above-described exposure light source module unit 100 is replaced with an existing conventional exposure apparatus, so that the use of low power consumption, It is possible to expect a remarkable reduction in maintenance cost by improving the operation time of the apparatus and solving environmental problems. In addition, since it is possible to realize high output and high efficiency with a single wavelength and short wavelength of ultraviolet rays, It is possible to miniaturize the exposure pattern and realize a breakthrough high resolution.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It is to be understood that various modifications may be made, and such modifications are intended to fall within the scope of the appended claims.

100: Light source module unit for exposure
110: Light source panel
111: ultraviolet light emitting element
112: circuit board
113: Support panel
120: Optical panel
121:
122: condenser lens
200: Exposure device
210: reflector
240: mask
A: light receiving area / aperture
T: an optical surface (target)

Claims (27)

A light source panel 110 in which a plurality of unit ultraviolet light emitting devices 111 are mounted on a circuit board 112 in the form of a matrix array and mounted on a support panel 113; 1. An exposure light source module unit comprising an optical panel (120) disposed on a light output side of the light emitting device (111) for condensing light,
The optical panel 120 includes a light transmitting panel 121 disposed on the light emitting side of the light emitting device 111 to face the light source panel 110 and a plurality of integrated And a unit condenser lens 122,
The unit condenser lens 122 is disposed at a position corresponding to each of the light emitting devices 111 in a state of being eccentric to a reference center axis side passing through the center of the ultraviolet light emitting device array on the light source panel 110 with respect to the main optical axis Arranged in an array form in the form of a matrix,
The optical panel 120 includes a plurality of unit converging lenses 122 formed integrally with the light transmitting panel 121,
The second optical panel 130 further includes a second optical panel 130 arranged in parallel with the light exit surface of the optical panel 120 so as to be spaced apart from the light exit surface of the optical panel 120 by a predetermined distance. A plurality of unit condensing lenses 131 each formed of a convex lens are disposed at a position corresponding to each of the light emitting elements 111 and at a position corresponding to the arbitrary position of the center of the ultraviolet light emitting element array on the light source panel 110 And is arranged in an array structure eccentric to the reference center axis side,
The distance C2 between the unit condenser lens 121 of the optical panel 120 and the unit condenser lens 131 of the second optical panel 130 is smaller than the distance C2 between the unit condenser lens 121 of the second optical panel 130 D2 &lt; 0.8 with respect to the diameter (d2) of the light source module (131). The method according to claim 1,
The unit condenser lens 122 is provided as a convex lens having a light exit surface projected in a hemispherical shape on a light exit surface of the light transmitting panel 121 so as to be in contact with adjacent unit condenser lenses,
The light incidence surface of the unit condensing lens 121 is formed so that the light incident surface of the unit condensing lens 121 is a plane having a concave surface having a curvature R within 0.15 and a convex surface having a curvature R within 0.15 Lt; / RTI &gt;
The distance C1 between the unit ultraviolet light emitting element 111 and the unit condensing lens 121 is arranged to satisfy a value of C1 / d <0.5 with respect to the diameter d of the unit condensing lens 121 And a light source module unit for exposure. 3. The method of claim 2,
The diameter d of the light incident surface of the unit condensing lens 121 is set to a value of 2.8 <d / C1 <5.8 with respect to the separation distance C1 between the unit ultraviolet light emitting device 111 and the unit condensing lens 121 And the light source module unit for exposure is formed to satisfy the following expression. The method according to claim 1,
The unit condenser lens 122 has a hexagonal light incident surface so as to contact the unit condenser lenses adjacent to each other to form a honeycomb structure as a whole, and a light output surface is formed in a hemispherical shape on the light output surface of the light projection panel 121 And a common vertical wall formed between the hexagonal light incident surface and the hemispherical light exit surface so as to be provided with the projected convex lens,
The light incidence surface of the unit condensing lens 121 is formed so that the light incident surface of the unit condensing lens 121 is a plane having a concave surface having a curvature R within 0.15 and a convex surface having a curvature R within 0.15 Lt; / RTI &gt;
The distance C1 between the unit ultraviolet light emitting element 111 and the unit condensing lens 121 is arranged to satisfy a value of C1 / d <0.5 with respect to the diameter d of the unit condensing lens 121 And a light source module unit for exposure. 5. The method of claim 4,
The diameter d of the hexagonal light incident surface of the unit condensing lens 121 is 2.8 <d / C1 <5.8 Of the light source module unit. The method according to claim 1,
The unit condensing lens 122 is formed of a block body having a light incident surface and a light emitting surface in a quadrangular structure so as to be in contact with adjacent unit condensing lenses, and the light emitting surface is formed of a convex lens that is rounded convexly, 121, respectively,
The light incidence surface of the unit condensing lens 121 is formed so that the light incident surface of the unit condensing lens 121 is a plane having a concave surface having a curvature R within 0.15 and a convex surface having a curvature R within 0.15 Lt; / RTI &gt;
The distance C1 between the unit ultraviolet light emitting element 111 and the unit condensing lens 121 is arranged to satisfy a value of C1 / d <0.5 with respect to the diameter d of the unit condensing lens 121 And a light source module unit for exposure. The method according to claim 6,
The diameter d of the circumscribed circle of the rectangular light incident surface of the unit condensing lens 121 is 2.8 &lt; d / C1 &lt; 5.8 Of the light source module unit. The method according to claim 1,
And a second optical panel (130) arranged in parallel with the light exit surface of the optical panel (120) so as to be spaced apart from each other by a predetermined distance,
A plurality of unit condensing lenses 131 each having a light entrance surface and a light exit surface each formed of a convex lens are disposed in the second optical panel 130 at positions corresponding to the light emitting elements 111, Wherein the light source module unit is provided in a matrix-like array structure in a state of eccentricity to an arbitrary reference center axis line side passing through the center of the ultraviolet light-emitting device array on the panel (110). 9. The method of claim 8,
The distance C2 between the unit condenser lens 121 of the optical panel 120 and the unit condenser lens 131 of the second optical panel 130 is smaller than the distance C2 between the unit condenser lens 121 of the second optical panel 130 D2 &lt; 0.8 with respect to the diameter (d2) of the light source module (131). 10. The method according to claim 8 or 9,
The diameter d2 of the unit condensing lens 131 of the second optical panel 130 is set to 0.7 <d2 / d (d) with respect to the diameter d of the unit condensing lens 121 of the first optical panel 120 &Lt; 1.2. &Lt; / RTI &gt; 10. The method according to claim 8 or 9,
The unit condenser lenses 121 and 131 are gradually spaced apart from an arbitrary reference center axis line passing through the center of the ultraviolet light emitter array on the light source panel and closer to the edge, And the diffused light emitted from each of the unit ultraviolet light emitting elements is condensed in the light receiving area set in the optical system of the exposure apparatus. 10. The method according to any one of claims 1 to 9,
A distance between the ultraviolet light-emitting device and the light-receiving area (A) from the ultraviolet light-emitting device to the light-receiving area (A) quot; c "between the ultraviolet light-emitting element and the condenser lens of the optical panel and the eccentric distance" x " between the central axis of each of the ultraviolet light- Quot; and the diameter "t" of the light receiving region A is set such that the reference of the eccentric distance "x" of the condensing lens of the first optical panel satisfies "x = b * c / the range of "x" is set to satisfy "bc (2b-t) / 2ab <x <bc (2b + t) / 2ab". 10. The method according to any one of claims 1 to 9,
Wherein the ultraviolet light-emitting device is mounted on the unit circuit board in the form of an LED light source in the form of a chip or a package or a mixture of both. 10. The method according to any one of claims 1 to 9,
Wherein the light source panel and the optical panel are supported so as to be unitized in a detachable state in an exposure apparatus. 10. The method according to any one of claims 1 to 9,
Wherein the light source panel and the optical panel are further provided with a heat dissipating means around the light source panel and the optical panel. An exposure table for supporting an exposure substrate coated with a photosensitive agent;
Driving means for driving the exposure table in a movable state on an XY plane coordinate;
10. An exposure light source module unit according to any one of claims 1 to 9, which emits illumination light to a mask for forming an exposure pattern of the substrate. And
An optical system provided between the substrate and the light source module unit for exposure, and control means for controlling the driving means and the light source unit for exposure in association with each other. delete delete delete delete delete delete delete delete delete delete delete

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