KR102604545B1 - 슬릿 노즐 및 기판 처리 장치 - Google Patents

슬릿 노즐 및 기판 처리 장치 Download PDF

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Publication number
KR102604545B1
KR102604545B1 KR1020210030621A KR20210030621A KR102604545B1 KR 102604545 B1 KR102604545 B1 KR 102604545B1 KR 1020210030621 A KR1020210030621 A KR 1020210030621A KR 20210030621 A KR20210030621 A KR 20210030621A KR 102604545 B1 KR102604545 B1 KR 102604545B1
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KR
South Korea
Prior art keywords
screw
substrate
discharge port
adjustment
slit nozzle
Prior art date
Application number
KR1020210030621A
Other languages
English (en)
Korean (ko)
Other versions
KR20210114350A (ko
Inventor
유지 아베
유키히로 다카무라
Original Assignee
가부시키가이샤 스크린 홀딩스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 스크린 홀딩스 filed Critical 가부시키가이샤 스크린 홀딩스
Publication of KR20210114350A publication Critical patent/KR20210114350A/ko
Application granted granted Critical
Publication of KR102604545B1 publication Critical patent/KR102604545B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B05C5/0258—Coating heads with slot-shaped outlet flow controlled, e.g. by a valve
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
KR1020210030621A 2020-03-10 2021-03-09 슬릿 노즐 및 기판 처리 장치 KR102604545B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020040497A JP7311446B2 (ja) 2020-03-10 2020-03-10 スリットノズルおよび基板処理装置
JPJP-P-2020-040497 2020-03-10

Publications (2)

Publication Number Publication Date
KR20210114350A KR20210114350A (ko) 2021-09-23
KR102604545B1 true KR102604545B1 (ko) 2023-11-22

Family

ID=77765538

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020210030621A KR102604545B1 (ko) 2020-03-10 2021-03-09 슬릿 노즐 및 기판 처리 장치

Country Status (3)

Country Link
JP (1) JP7311446B2 (ja)
KR (1) KR102604545B1 (ja)
CN (1) CN214917627U (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000508048A (ja) 1997-11-21 2000-06-27 レイセオン・カンパニー 取付けボルトロックアセンブリ
JP2005137974A (ja) 2003-11-04 2005-06-02 Toyo Knife Co Ltd 塗布ヘッド及び塗布装置
JP2007515596A (ja) 2003-02-05 2007-06-14 コンチネンタル・テベス・アーゲー・ウント・コンパニー・オーハーゲー 電磁弁
JP2008188553A (ja) 2007-02-07 2008-08-21 Toyo Knife Co Ltd 塗布ヘッド

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1096267A (ja) * 1996-07-30 1998-04-14 Nippon Light Metal Co Ltd ボールジョイント式トラス構造体の球状ノードとトラス弦材間の結合構造

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000508048A (ja) 1997-11-21 2000-06-27 レイセオン・カンパニー 取付けボルトロックアセンブリ
JP2007515596A (ja) 2003-02-05 2007-06-14 コンチネンタル・テベス・アーゲー・ウント・コンパニー・オーハーゲー 電磁弁
JP2005137974A (ja) 2003-11-04 2005-06-02 Toyo Knife Co Ltd 塗布ヘッド及び塗布装置
JP2008188553A (ja) 2007-02-07 2008-08-21 Toyo Knife Co Ltd 塗布ヘッド

Also Published As

Publication number Publication date
CN214917627U (zh) 2021-11-30
JP2021142448A (ja) 2021-09-24
KR20210114350A (ko) 2021-09-23
TW202135216A (zh) 2021-09-16
JP7311446B2 (ja) 2023-07-19

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