KR102576912B1 - Detaching structure and detaching apparatus having the same - Google Patents

Abstract

A detach structure is disclosed, wherein the detach structure is disposed on a surface facing upward from the upper side of the walking table to the upper side of the film of the ring frame so that the package is detached downward from the film of the ring frame seated on the walking table. It includes a detach tool that applies a force to, wherein the detach tool includes: a contact portion at least partially in contact with the film when force is applied to the film; an extension member extending upward from the contact portion; A housing surrounding the extension member; a rotating structure that rotates the extension member; and an action portion capable of applying force to the extension member, wherein the extension member transmits the force applied by the action portion to the contact portion.

Description

Detach structure and detach device including same {DETACHING STRUCTURE AND DETACHING APPARATUS HAVING THE SAME}

The present disclosure relates to a detach structure and a detach device including the same.

In the semiconductor package manufacturing process, individually cut packages need to be picked up and transferred to a plurality of process equipment. For example, a plurality of packages attached to a film need to be removed from the film and transferred to another processing device, such as an inspection device, a brush device, etc.

In this regard, a picker that removes a package attached to a film from the film (detach operation) has been disclosed. However, the disclosed picker removes the package from the film by sucking the package attached to the film upward and picking it up.

Accordingly, since the disclosed picker must pick up a plurality of packages one by one, it takes a long time to remove the package from the film.

The technology behind this application is disclosed in Korean Patent No. 10-2130475.

The purpose of the present application is to solve the problems of the prior art described above, and to provide a detach structure that can efficiently remove a package from a film and a detach device including the same.

However, the technical challenges sought to be achieved by the embodiments of the present application are not limited to those described above, and other technical challenges may exist.

As a technical means for achieving the above-described technical problem, the detach structure according to an embodiment of the present application is installed on the upper side of the walking table so that the package is detached downward from the film of the ring frame seated on the walking table. It includes a detach tool that applies a downward force to the upwardly facing surface of the film of the ring frame, wherein the detach tool includes: a contact portion at least partially in contact with the film when force is applied to the film; an extension member extending upward from the contact portion; A housing surrounding the extension member; a rotating structure that rotates the extension member; and an action portion capable of applying force to the extension member, wherein the extension member is capable of transmitting the force applied by the action portion to the contact portion.

In the detach structure according to an embodiment of the present application, the action portion includes a cylinder and a ball splinter whose amount of protrusion downward from the cylinder is adjusted, even if the amount of protrusion of the ball splinter from the cylinder increases. The force acting on the extension member can be maintained.

In the detach structure according to an embodiment of the present application, the detach tool includes: a bracket provided in the housing; When the position of the bracket changes depending on the force applied to the film by the contact part and the tension of the film, a sensor provided to detect the changed position of the bracket; And it further includes a control unit, wherein the control unit can give an alarm when the sensor detects the bracket.

In the detach structure according to an embodiment of the present application, the contact portion includes: a mounting member connected to the bottom of the extension member; a plurality of contact units; And it may include a connecting member connecting the mounting member and the plurality of contact units.

In the detach structure according to an embodiment of the present application, the connecting member is provided across the mounting member in a horizontal direction to enable seesaw movement with respect to the mounting member, and the plurality of contact units are provided on the mounting member. You can.

In the detach structure according to an embodiment of the present application, the detach tool includes: a bracket provided in the housing; When the position of the bracket changes depending on the force applied to the film by the contact part and the tension of the film, a sensor provided to detect the changed position of the bracket; And it further includes a control unit, wherein the control unit can give an alarm when the sensor detects the bracket.

In the detach structure according to an embodiment of the present application, the contact portion includes: a mounting member connected to the bottom of the extension member; a plurality of contact units; And it may include a connecting member connecting the mounting member and the plurality of contact units.

In the detach structure according to an embodiment of the present application, the connecting member is provided across the mounting member in a horizontal direction to enable seesaw movement with respect to the mounting member, and the plurality of contact units are provided on the mounting member. You can.

In the detach structure according to an embodiment of the present application, the contact unit may have a shape in which the thickness of the contact unit decreases as the edge portion moves diagonally outward.

A detach device according to an embodiment of the present application includes a table structure including a working table in which a hole is formed and a ring frame is seated on an edge portion surrounding the hole with the surface of the film package facing downward; and a detach tool that applies a downward force to the upper side of the film of the ring frame from the upper side of the walking table so that the package is removed downward from the film of the ring frame seated on the walking table. It may contain a tach structure.

In the detach device according to an implementation of the present application, the detach tool is movable in the x-axis, the walking table is movable in the y-axis, and the detach tool moves in the Through a combination of axial movements, the detach tool can apply force to multiple areas of the film.

In the detach device according to an embodiment of the present application, the detach tool includes a contact portion at least partially in contact with the film when force is applied to the film; an extension member extending upward from the contact portion; A housing surrounding the extension member; a rotating structure that rotates the extension member; and an action portion capable of applying force to the extension member, wherein the extension member is capable of transmitting the force applied by the action portion to the contact portion.

In the detach device according to an embodiment of the present application, the action portion includes a cylinder and a ball splinter whose amount of protrusion downward from the cylinder is adjusted, even if the amount of protrusion of the ball splinter from the cylinder increases. The force acting on the extension member can be maintained.

In the detach device according to an embodiment of the present application, the detach tool includes: a bracket provided on the housing; When the position of the bracket changes depending on the force applied to the film by the contact part and the tension of the film, a sensor provided to detect the changed position of the bracket; And it further includes a control unit, wherein the control unit can give an alarm when the sensor detects the bracket.

In the detach device according to an embodiment of the present application, the contact portion includes a mounting member connected to a lower end of the extension member; a plurality of contact units; And it may include a connecting member connecting the mounting member and the plurality of contact units.

In the detach device according to an embodiment of the present application, the connecting member is provided across the mounting member in a horizontal direction to enable seesaw movement with respect to the mounting member, and the plurality of contact units are provided on the mounting member. You can.

In the detach device according to an embodiment of the present application, the contact unit may have a shape in which the thickness of the contact unit decreases as the edge portion moves diagonally outward.

The detach device according to an embodiment of the present application further includes a receiving part provided on the lower side of the walking table to cover the hole to accommodate a package that is removed from the film of the ring frame and falls through the hole of the walking table. It can be included.

The above-described means of solving the problem are merely illustrative and should not be construed as intended to limit the present application. In addition to the exemplary embodiments described above, additional embodiments may be present in the drawings and detailed description of the invention.

According to the above-described means for solving the problem of the present application, the detach tool presses the film from the upper side of the film and applies force downward, so the package attached to the lower side of the film may be detached from the film and fall. Accordingly, packages can be removed from the film more quickly and efficiently than in the past, where multiple packages were picked up one by one and removed from the film.

In addition, according to the means for solving the problem of the present application described above, when a change occurs in the tension of the film in the process of the detach tool pressing the film downward, the bracket changes the ratio of the tension of the film to the external force with which the detach tool presses the film. The position changes according to the change, and the sensor can detect this, so the change in tension of the film can be detected before the film is damaged, or the controller can detect damage to the film and notify the control unit of this.

1 is a schematic perspective view of a detach device according to an embodiment of the present application.
Figure 2 is a schematic perspective view of a detach tool according to an embodiment of the present application.
Figure 3 is a schematic front view of a detach tool according to an embodiment of the present application.
Figure 4 is a schematic perspective view showing the detach tool according to an embodiment of the present application viewed from a different angle than that of Figure 2.
Figure 5 is a schematic side view of a contact portion of a detach tool according to an embodiment of the present application.
Figure 6 is a schematic perspective view of the receiving portion of the detach device according to an embodiment of the present application.

Below, with reference to the attached drawings, embodiments of the present application will be described in detail so that those skilled in the art can easily implement them. However, the present application may be implemented in various different forms and is not limited to the embodiments described herein. In order to clearly explain the present application in the drawings, parts that are not related to the description are omitted, and similar reference numerals are assigned to similar parts throughout the specification.

Throughout this specification, when a part is said to be “connected” to another part, this includes not only the case where it is “directly connected,” but also the case where it is “electrically connected” with another element in between. do.

Throughout this specification, when a member is said to be located “on”, “above”, “at the top”, “below”, “at the bottom”, or “at the bottom” of another member, this means that a member is located on another member. This includes not only cases where they are in contact, but also cases where another member exists between two members.

Throughout the specification of the present application, when a part is said to “include” a certain element, this means that it may further include other elements rather than excluding other elements, unless specifically stated to the contrary.

The present application relates to a package detach structure for removing a package from a film of a ring frame and a package detach device including the same.

Below, for ease of understanding, a detach device (hereinafter referred to as 'this detach device') according to an embodiment of the present application will first be described.

Referring to Figure 1, this detach device includes a table structure (1). The table structure (1) includes a working table (11). A hole is formed in the walking table 11, and a ring frame is placed on the edge surrounding the hole with the side of the film package facing downward. Specifically, a hole penetrating in the z-axis direction may be formed in the walking table 11. Additionally, a ring frame may be seated on the portion surrounding the hole. The ring frame may be a closed shape in which a hole is formed, and a film may be disposed to cover the hole of the ring frame and the film may be attached to the ring frame. Additionally, a film may have a plurality of packages attached to one of its two sides. Accordingly, the ring frame can be placed on the walking table 11 with the side to which the film package is attached facing downward (one side of the z-axis), and a plurality of packages attached to the film can be exposed to the lower side through the hole. there is. For reference, herein, the ring frame to which the film is attached is expressed as a ring frame.

Additionally, referring to FIG. 1, the present detach device includes a detach structure 2. The detach structure 2 includes a detach tool 21. The detach tool 21 applies downward force to the upper side of the ring frame film from the upper side of the walking table 11 to remove the package downward from the film of the ring frame seated on the walking table 11. apply Since the multiple packages attached to the film are exposed to the bottom through the hole, if you push the film from the top to the bottom (if a force is applied from the top to the film from the bottom), the package may be detached from the film and fall to the bottom. . For this purpose, the detach tool 21 can apply an external force downward to the film (can be pushed downward).

Referring to FIG. 1, the detach tool 21 is movable in the x-axis, the working table 11 is movable in the y-axis, and the x-axis movement of the detach tool 21 and the working table 11 By combining y-axis movement, the detach tool 21 can apply force to multiple areas of the film. Specifically, a plurality of packages may be arranged and attached to the lower surface of the film (for example, in a plurality of columns on the The tool 21 should not be limited to one part of the portion where the film package is attached in the horizontal direction and should not be pushed downward, but external force may have to be applied downward to multiple parts (multiple areas). In order to apply an external force to a plurality of areas in a plane direction, the detach tool 21 moves in the x-axis and the working table 11 moves in the y-axis so that the detach tool 21 applies an external force to a plurality of areas. It may be possible.

For example, referring to FIG. 1, the detach structure 2 may include an x-axis moving unit 22 that moves the detach tool 21 along the x-axis. The x-axis moving part 22 is provided to extend along the x-axis and may include a rail on which the detach tool 21 moves in the may include).

Additionally, referring to FIG. 1, the table structure 1 may include a y-axis moving unit 12 that moves the walking table 11 along the y-axis. The Y-axis moving unit 12 extends along the y-axis and may include a rail on which the walking table 11 moves in the y-axis direction and a power supply unit (motor, etc.) that moves the walking table 11 along the rail. ) may include.

Additionally, referring to FIGS. 2 to 5 , the detach tool 21 may include a contact portion 211 at least partially in contact with the film when force is applied to the film.

Referring to FIGS. 2 and 3 , the contact portion 211 may include a mounting member 2111 connected to the lower end of an extension member 212, which will be described later. The mounting member 2111 may be coupled to the lower end of the extension member 212 using a screw or the like.

Additionally, referring to FIGS. 2 and 3 , the contact portion 211 may include a plurality of contact units 2113. At least a portion of the plurality of contact units 2113 may be in contact with the film when the detach tool 21 applies force to the film.

Additionally, referring to FIGS. 2 and 3 , the contact portion 211 may include a connecting member 2112 that connects the mounting member 2111 and the plurality of contact units 2113.

Referring to FIGS. 2 and 3 , the connecting member 2112 may be provided across the mounting member 2111 in a horizontal direction (x-axis direction or y-axis direction) to enable seesaw movement with respect to the mounting member 211. .

For example, referring to FIGS. 2 and 3, the connecting member 2112 extends downward from a first member 21121 hinged to the mounting member 2111 and one end and the other end of the first member 21121, respectively. It may include a second member 21122. The first member 21121 extends perpendicularly to the mounting member 2111 and may be hinged to the mounting member 2111. Additionally, a plurality of contact units 2113 may be provided at the bottom of each of the plurality of second members 21122.

Accordingly, when the contact unit 2113 contacts the film, the seesaw movement of the connecting member 2112 is caused by the resultant force acting on the contact unit 2113 due to the force of the contact unit 2113 on the film, the tension of the film, etc. Due to this linkage, the contact unit 2113 can freely move up and down. Accordingly, the contact unit 2113 can prevent the film from being damaged (tearing) by pressing it strongly.

Additionally, referring to FIG. 5 , the contact unit 2113 may have a shape where the thickness of the contact unit 2113 decreases as the edge portion moves diagonally outward. For example, the contact unit 2113 may have a circular cross-section, and the edge portion, which is the outer end in the radial direction, may have a shape whose thickness decreases as it moves outward in the radial direction.

Additionally, the detach tool 21 may include an extension member 212 extending upward from the contact portion 211. Extended member 212 may be a rod.

Additionally, the detach tool 21 may include a housing 213 surrounding a portion of the extension member 212. The housing 213 may surround the extension member 212 and be coupled to the extension member 212 so that the extension member 212 can rotate in conjunction with the rotation of the housing 213.

Additionally, the detach tool 21 may include a rotation structure 214 that rotates the extension member 212 . The rotating structure 214 may include a motor 2141 that provides driving force and a belt 2142 that is provided at least partially to surround the extension member 212 and rotated by the motor 2141. Accordingly, the housing 213 is rotated by the rotation structure 214 and the extension member 212 can be rotated, and accordingly, the contact portion 211 connected to the extension member 212 can be rotated.

Additionally, the detach tool 21 may include an action portion 215 capable of applying force to the extension member 212. The action portion 215 may include a cylinder 2151 and a ball splinter 2152 whose amount of protrusion downward from the cylinder 2151 is adjusted. Even if the amount of protrusion of the ball splinter 2152 from the cylinder 2151 increases, the action portion 215 is moved downward using air so that the force acting on the extension member 212 can be maintained without increasing. The force is transmitted, and the pressing pressure can be freely adjusted. For example, the operating part 215 uses an electropneumatic regulator (a device that allows the operator to easily adjust the air pressure) and operates by varying the film pressure so that the package can be easily removed even if the size of the package changes. can do. The action portion 215 including the ball splinter 2152 and the cylinder 2151 may have the same or similar configuration as that of a typical air cylinder. Accordingly, detailed description of the relative movement of the ball splinter 2152 with respect to the cylinder 2151 will be omitted. For reference, the lower part of the ball splinter 2152 may be inserted downward into the housing 213, and the ball splinter 2152 may be provided not to be interlocked with the rotation of the housing 213. That is, the action portion 215 may not be rotated.

For example, the upper end of the action portion 215 may be spaced apart from the lower end of the ball splinter 2152 (at this time, the gap allows the ball splinter 2152 to contact and push the action portion 215 downward). may be set), as the ball splinter 2152 moves downward and pushes the extension member 212 downward, the force with which the contact portion 211 pushes the film may increase.

Additionally, the detach structure 1 may include a z-axis driver 219 that moves the detach tool 21 in the z-axis. Referring to FIG. 4, the z-axis driving unit 219 is a mounting panel 2191 provided with a detach output 21, a rail unit part that guides the z-axis movement of the mounting panel 2191, and a mounting panel along the rail unit part. It may include a motor that provides power to move (2191).

That is, according to the present application, the z-axis driving of the detach tool 21 is performed by the z-axis driving unit 219, and the force pressing the film of the contact portion 211 (force acting downward) is applied to the acting portion 215. It can be adjusted by the force pressing the extension member 212.

Additionally, the detach tool 21 may include a bracket 216 provided in the housing 213.

In addition, the detach tool 21 is equipped with a sensor 217 that can detect the changed position of the bracket 216 when the position of the bracket 216 changes depending on the force applied to the film by the contact portion 211 and the tension of the film. may include.

For example, the detach tool 21 may be moved downward by the z-axis driver 219 and may have an initial state in contact with the film. In the initial state, the ball splinter 2152 of the action portion 215 may not be in contact with the extension member 212, or may be in a state in which no downward external force is applied to the extension member 212. At this time, the bracket 216 may be located above the sensor 217.

Thereafter, the ball splinter 2152 may move downward to apply a downward external force to the extension member 212, and accordingly, the contact portion 211 may press the film. At this time, the contact portion 211 may press the film. Since it is supported by , the contact portion 211 may not move downward and may be in a state to press the film.

In this state, if the film is damaged or the tension of the film decreases, making it difficult to support the contact portion 211, the external force applied by the extension member 212 is the same, but the supporting force supporting the contact portion 211 decreases. Therefore, the contact portion 211 and the extension member 212 can be moved downward, and accordingly, the bracket can be moved downward and detected by the sensor 217.

Accordingly, the sensor 217 may be located lower than the position of the bracket in the initial state of the contact portion 212, and may be provided at a position that can detect when the position of the bracket 216 moves downward from the initial position. For example, the bracket 216 may be L-shaped, and the sensor may detect the bracket 216 when the bracket 216 is inserted downward.

Additionally, the detach tool 21 may include a control unit. The control unit can give an alarm when the sensor 217 detects the bracket 216. Accordingly, if the tension of the film changes beyond a preset value or the film is damaged, it can be detected and an alarm can be generated. Additionally, if necessary, the control unit may stop driving the detach tool 21 and cause the detach tool 21 to move upward from its initial position.

In addition, referring to FIG. 6, this detach device is provided on the lower side of the walking table 11 to cover the hole to accommodate a package that is removed from the film of the ring frame and falls through the hole of the walking table 11. It may include a receiving portion (3). The receiving portion may have a cross-section of an inverted triangle shape. Additionally, the upper edge of the receiving portion 3 may be combined with a portion surrounding the hole of the walking table 11. In addition, the receiving part 3 may be coupled to the walking table 11 to enable y-axis movement in conjunction with the movement of the walking table 11. Referring to FIG. 6, if necessary, a separate y-axis movement may be provided. It may include a driving unit (drawing symbol not assigned).

Hereinafter, the detach structure (hereinafter referred to as 'this detach structure') 2 according to an embodiment of the present application will be described. However, the main detach structure 2 is included in the above-described main detach device, and shares the same or corresponding technical features and configuration as the above-described main detach device. Therefore, descriptions that overlap with those described in the present detach device will be simplified or omitted, and the same reference numerals will be used for identical or similar components.

This detach structure (2) includes a detach tool (21). The detach tool 21 applies downward force to the upper side of the ring frame film from the upper side of the walking table 11 to remove the package downward from the film of the ring frame seated on the walking table 11. apply

The detach tool 21 may include a contact portion 211 at least partially in contact with the film when force is applied to the film.

The contact portion 211 may include a mounting member 2111 connected to the lower end of the extension member 212, which will be described later.

The contact unit 211 may include a plurality of contact units 2113.

The contact portion 211 may include a connecting member 2112 that connects the mounting member 2111 and the plurality of contact units 2113.

The connection member 2112 may be provided across the mounting member 2111 in a horizontal direction (x-axis direction or y-axis direction) to enable seesaw movement with respect to the mounting member 211.

The contact unit 2113 may have a shape whose thickness decreases as the edge portion moves diagonally outward.

Additionally, the detach tool 21 may include an extension member 212 extending upward from the contact portion 211.

Additionally, the detach tool 21 may include a housing 213 surrounding a portion of the extension member 212.

Additionally, the detach tool 21 may include a rotation structure 214 that rotates the extension member 212 .

Additionally, the detach tool 21 may include an action portion 215 capable of applying force to the extension member 212. The action portion 215 may include a cylinder 2151 and a ball splinter 2152 whose amount of protrusion downward from the cylinder 2151 is adjusted. Even if the amount of protrusion from the cylinder 2151 of the ball splinter 2152 increases, the force acting on the extension member 212 can be maintained without increasing regardless of the height, so that the action portion 215 uses air. Force is transmitted downward using , and the pressing pressure can be freely adjusted. For example, the operating part 215 uses an electropneumatic regulator (a device that allows the operator to easily adjust the air pressure) and operates by varying the film pressure so that the package can be easily removed even if the size of the package changes. can do.

Additionally, the detach tool 21 may include a bracket 216 provided in the housing 213.

In addition, the detach tool 21 is equipped with a sensor 217 that can detect the changed position of the bracket 216 when the position of the bracket 216 changes depending on the force applied to the film by the contact portion 211 and the tension of the film. may include.

For example, the detach tool 21 may be moved downward by the z-axis driver 219 and may have an initial state in contact with the film. In the initial state, the ball splinter 2152 of the action portion 215 may not be in contact with the extension member 212, or may be in a state in which no downward external force is applied to the extension member 212. At this time, the bracket 216 may be located above the sensor 217.

Thereafter, the ball splinter 2152 may move downward to apply a downward external force to the extension member 212, and accordingly, the contact portion 211 may press the film. At this time, the contact portion 211 may press the film. Since it is supported by , the contact portion 211 may not move downward and may be in a state to press the film.

In this state, if the film is damaged or the tension of the film decreases, making it difficult to support the contact portion 211, the external force applied by the extension member 212 is the same, but the supporting force supporting the contact portion 211 decreases. Therefore, the contact portion 211 and the extension member 212 can be moved downward, and accordingly, the bracket can be moved downward and detected by the sensor 217.

Accordingly, the sensor 217 may be located lower than the position of the bracket in the initial state of the contact portion 212, and may be provided at a position that can detect when the position of the bracket 216 moves downward from the initial position. For example, the bracket 216 may be L-shaped, and the sensor may detect the bracket 216 when the bracket 216 is inserted downward.

Additionally, the detach tool 21 may include a control unit. The control unit can give an alarm when the sensor 217 detects the bracket 216. Accordingly, if the tension of the film changes beyond a preset value or the film is damaged, it can be detected and an alarm can be generated. Additionally, if necessary, the control unit may stop driving the detach tool 21 and cause the detach tool 21 to move upward from its initial position.

The description of the present application described above is for illustrative purposes, and those skilled in the art will understand that the present application can be easily modified into other specific forms without changing its technical idea or essential features. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive. For example, each component described as unitary may be implemented in a distributed manner, and similarly, components described as distributed may also be implemented in a combined form.

The scope of the present application is indicated by the claims described below rather than the detailed description above, and all changes or modified forms derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included in the scope of the present application.

1: Table structure
11: Walking table
12: y-axis moving part
2: Detach structure
21: Detach tool
211: contact part
2111: Mounting member
2112: Connection member
21121: first member
21122: Second member
2113: contact unit
212: Extension member
213: housing
214: rotation structure
215: action part
2151: cylinder
2152: Ball Spliner
216: bracket
217: sensor
219: z-axis driving unit
22: x-axis moving part
3: Receiving part

Claims (15)

As a detach structure for removing the package from the film of the ring frame,
Includes a detach tool that applies downward force to the upper side of the ring frame film from the upper side of the walking table so that the package is detached downward from the film of the ring frame seated on the walking table,
The detach tool is,
a contact portion at least partially in contact with the film when a force is applied to the film;
an extension member extending upward from the contact portion;
A housing surrounding the extension member;
a rotating structure that rotates the extension member; and
It includes an action portion capable of applying force to the extension member,
The extension member transmits the force applied by the action portion to the contact portion,
The detach tool is,
A bracket provided in the housing;
When the position of the bracket changes depending on the force applied to the film by the contact part and the tension of the film, a sensor provided to detect the changed position of the bracket; and
It further includes a control unit,
The control unit is a detach structure that issues an alarm when the sensor detects the bracket. According to paragraph 1,
The action portion includes a cylinder and a ball splinter whose amount of protrusion downward from the cylinder is adjusted,
Even if the amount of protrusion of the ball splinter from the cylinder increases, the force acting on the extension member is maintained. Detach structure. delete According to paragraph 1,
The contact part is,
A mounting member connected to the bottom of the extension member;
a plurality of contact units; and
A detach structure comprising a connecting member connecting the mounting member and the plurality of contact units. According to paragraph 4,
The connecting member is provided across the mounting member in a horizontal direction to enable seesaw movement with respect to the mounting member,
The detach structure, wherein the plurality of contact units are provided on the mounting member. According to clause 5,
The contact unit is a detach structure having a shape in which the thickness of the contact unit decreases as the edge portion moves diagonally outward. A detach device for removing a package from the film of a ring frame,
A table structure including a working table in which a hole is formed and a ring frame is seated on an edge surrounding the hole with the surface of the film package facing downward; and
A detach tool having a detach tool that applies a downward force to the upper side of the film of the ring frame from the upper side of the walking table so that the package is removed downward from the film of the ring frame seated on the walking table. struct,
Including,
The detach tool is,
a contact portion at least partially in contact with the film when a force is applied to the film;
an extension member extending upward from the contact portion;
A housing surrounding the extension member;
a rotating structure that rotates the extension member; and
It includes an action portion capable of applying force to the extension member,
The extension member transmits the force applied by the action portion to the contact portion,
The detach tool is,
A bracket provided in the housing;
When the position of the bracket changes depending on the force applied to the film by the contact part and the tension of the film, a sensor provided to detect the changed position of the bracket; and
It further includes a control unit,
The control unit is a detach device that issues an alarm when the sensor detects the bracket. In clause 7,
The detach tool can move along the x-axis,
The walking table is movable on the y-axis,
Detach device, wherein the detach tool applies force to a plurality of regions of the film by a combination of the x-axis movement of the detach tool and the y-axis movement of the walking table. delete In clause 7,
The action portion includes a cylinder and a ball splinter whose amount of protrusion downward from the cylinder is adjusted,
Even if the amount of protrusion of the ball splinter from the cylinder increases, the force acting on the extension member is maintained. Detach device. delete In clause 7,
The contact part is,
A mounting member connected to the bottom of the extension member;
a plurality of contact units; and
A detach device comprising a connecting member connecting the mounting member and the plurality of contact units. According to clause 12,
The connecting member is provided across the mounting member in a horizontal direction to enable seesaw movement with respect to the mounting member,
Detach device, wherein the plurality of contact units are provided on the mounting member. According to clause 12,
The contact unit is a detach device in which the thickness of the contact unit decreases as the edge portion moves diagonally outward. In clause 7,
The detach device further includes a receiving portion provided on the lower side of the walking table to cover the hole to accommodate a package that is removed from the film of the ring frame and dropped through the hole of the walking table.

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