KR102446564B1 - Picker apparatus - Google Patents

Abstract

A picker apparatus is disclosed. The picker apparatus comprises: a plurality of picker structures placed adjacent to each other in one direction. The picker structures include: a shaft extended in a vertical direction; and a picker unit placed on a lower side of the shaft and fixing or releasing a semiconductor package. The picker unit includes: an adsorption unit; and a main body having a moving passage formed and extended in a vertical direction. The shaft has a supply passage formed and extended in a vertical direction. The adsorption unit has an upper side inserted upwards into the moving passage to be relatively movable upwards and downwards towards the main body, and the shaft is coupled to the main body so that the supply passage can communicate with the moving passage. The present invention is able to reduce power consumption.

Description

Picker device {PICKER APPARATUS}

The present application relates to a picker device.

A package manufacturing system includes a cutting process of cutting a strip in which a plurality of packages are formed into individual packages, a washing process of washing the packages cut in the cutting process, a drying process of drying the packages washed in the washing process, and defective packages A semiconductor package may be manufactured by sequentially performing a package inspection process for inspecting whether or not and an offload process for classifying packages that have passed the defect inspection and packages that have not passed the defect inspection according to the inspection results.

In this semiconductor package manufacturing process, a picker device for moving the package (picking, transporting, placing, etc.) is used, but the conventional picker device drives a plurality of picker structures individually, so it is inefficient in moving the semiconductor package. .

The technology that is the background of the present application is disclosed in Korean Patent Publication No. 10-0604098.

An object of the present application is to provide a picker device capable of efficiently moving a semiconductor package in order to solve the problems of the prior art.

However, the technical problems to be achieved by the embodiment of the present application are not limited to the technical problems as described above, and other technical problems may exist.

As a technical means for achieving the above technical problem, a picker device according to an embodiment of the present application includes: a plurality of picker structures disposed adjacent to each other in one direction; a rotation driving unit rotating the picker structure; and an elevating driving unit for elevating and lowering the picker structure, wherein the picker structure includes: a shaft extending in a vertical direction; a picker unit provided under the shaft to fix or release the semiconductor package; a bush surrounding at least a portion of the shaft; and a rotation block surrounding at least a portion of the bush, wherein the rotation driving unit includes: a rotation driving motor; and a belt that surrounds the rotation block of the picker structure and the rotation block of a neighboring picker structure adjacent to the picker structure and rotates by the rotation driving motor, wherein the elevating driving unit includes: an elevating motor; and an elevating/lowering driving unit for elevating and lowering the picker unit of the picker structure by using the power received from the elevating motor.

In the picker device according to an embodiment of the present application, the shaft is coupled to the bush so that it is possible to raise and lower the bush and not rotate with respect to the bush, and the bush is impossible to raise and lower with respect to the rotating block. And it can be coupled with the rotation block to be non-rotatable with respect to the rotation block.

In the picker device according to the exemplary embodiment of the present application, the picker structure may be rotated in association with the neighboring picker structure by the belt.

In the picker device according to an embodiment of the present application, the picker unit includes: an adsorption unit; and a main body having a moving passage extending up and down and an insertion portion opening upwardly formed on an upper side of the moving passage, wherein the shaft has a supply passage extending in a vertical direction, and the adsorption portion is relative to the main body. The upper part is inserted upwardly into the moving passage to be movable up and down, and the shaft may be inserted and fastened to the insertion part so that the supply passage communicates with the moving passage.

In the picker device according to the exemplary embodiment of the present application, the picker unit may further include a coupler coupling the shaft and the main body.

In the picker device according to an embodiment of the present application, an O-ring is interposed between the insertion portion and the portion inserted into the insertion portion of the shaft, and the O-ring is not interposed between the shaft and the main body. can increase

A picker device according to an exemplary embodiment of the present application includes a plurality of picker structures disposed adjacent to each other in one direction, wherein the picker structures include: a shaft extending in a vertical direction; and a picker unit provided under the shaft to fix or release the semiconductor package, wherein the picker unit includes an adsorption unit; and a main body having a moving passage extending up and down, wherein the shaft has a supply passage extending in an up and down direction, and the adsorption unit has an upper portion in the moving passage so as to be movable up and down relative to the main body. Inserted upward, the shaft may be coupled to the main body such that the supply passage communicates with the moving passage.

In the picker device according to an embodiment of the present application, further comprising a gas supply unit communicating with the supply passage and supplying a gas to the moving passage through the supply passage, wherein the gas supply unit operates on an object of the picker unit Gas may be supplied to the moving passage so that the magnitude of the thrust force is controlled.

In the picker device according to an exemplary embodiment of the present application, the main body may include an insertion portion opening upwardly above the moving passage, and the shaft may be inserted and fastened to the insertion portion.

In the picker device according to an embodiment of the present application, an O-ring is interposed between the insertion portion and the portion inserted into the insertion portion of the shaft, and the O-ring is not interposed between the shaft and the main body. can increase

In the picker device according to the exemplary embodiment of the present application, the picker unit may further include a coupler coupling the shaft and the main body.

A picker device according to an exemplary embodiment of the present application includes: a rotation driving unit for rotating the picker structure; and an elevating drive unit for elevating and lowering the picker structure, wherein the picker structure further comprises a rotating block surrounding a portion of the shaft, wherein the shaft is capable of elevating and lowering with respect to the rotating block and is not rotated coupled to the rotation block, the rotation driving unit, the rotation driving motor; and a belt that surrounds the rotation block of the picker structure and the rotation block of a neighboring picker structure adjacent to the picker structure and rotates by the rotation driving motor, wherein the elevating driving unit includes: an elevating motor; and an elevating/lowering driving unit for elevating and lowering the picker unit of the picker structure by using the power received from the elevating motor.

In the picker device according to the exemplary embodiment of the present application, the picker structure may be rotated in association with the neighboring picker structure by the belt.

The above-described problem solving means are merely exemplary, and should not be construed as limiting the present application. In addition to the exemplary embodiments described above, additional embodiments may exist in the drawings and detailed description.

According to the above-described problem solving means of the present application, since the rotating block of the picker structure can be rotated in conjunction with the rotating block of the neighboring picker structure by the belt, the semiconductor package transfer of the two picker structures can be performed simultaneously, so that the efficient semiconductor package Transfer may be made, and rotation of the two picker structures may be implemented by one rotation driving motor, so that power consumption may be reduced.

In addition, according to the above-described problem solving means of the present application, a picker whose thrust is adjusted by adjusting the gas pressure supplied by the gas supply unit to the moving passage may be implemented. Accordingly, an external force action may be applied to the package according to each of the detach operation and the attach operation.

In addition, according to the above-described problem solving means of the present application, since the gas supply unit can supply the gas from the upper side to the supply passage of the shaft and supply it to the movement passage, the arrangement position of the gas supply unit compared to the prior art in which the gas supply is made from the side of the movement passage freedom can be secured.

1 is a schematic perspective view of a picker device according to an embodiment of the present application.
2 is a schematic cross-sectional view of a picker structure and a neighboring picker structure of a picker device according to an embodiment of the present disclosure.
3 is a schematic side view of a picker device according to an embodiment of the present application.
4 is an enlarged view of A of FIG. 2 .
5 is a schematic conceptual side view illustrating each of an attach operation and a detach operation of a picker structure of a picker device according to an embodiment of the present application.

Hereinafter, embodiments of the present application will be described in detail with reference to the accompanying drawings so that those of ordinary skill in the art to which the present application pertains can easily implement them. However, the present application may be implemented in several different forms and is not limited to the embodiments described herein. And in order to clearly explain the present application in the drawings, parts irrelevant to the description are omitted, and similar reference numerals are attached to similar parts throughout the specification.

Throughout this specification, when a part is said to be "connected" with another part, it includes not only the case where it is "directly connected" but also the case where it is "electrically connected" with another element interposed therebetween. do.

Throughout this specification, when it is said that a member is positioned "on", "on", "on", "under", "under", or "under" another member, this means that a member is located on the other member. It includes not only the case where they are in contact, but also the case where another member exists between two members.

Throughout this specification, when a part "includes" a certain component, it means that other components may be further included, rather than excluding other components, unless otherwise stated.

In addition, terms (upper side, upper side, lower side, lower side, etc.) related to the direction or position in the description of the embodiment of the present application are set based on the arrangement state of each component shown in the drawings. For example, when looking at FIGS. 1 to 5, the 12 o'clock direction is generally the upper side, the overall 12 o'clock direction is the upper side, the 6 o'clock direction is the lower side, and the overall 6 o'clock direction is the lower side, etc. this can be

The present application relates to a picker device.

First, a picker device (hereinafter referred to as 'this first picker device') according to a first embodiment of the present application will be described. The first picker device may pick up and place an object. In this case, the object may be a concept including various types of objects that require movement, such as a chip of an electronic device such as a semiconductor chip, a manufacturing process of an electronic device package, or after a manufacturing process. The object picked up and placed by the picker in the present first picker device is not limited to the above-mentioned bar, and may be used in various ways.

Referring to FIG. 1 , the first picker device includes a plurality of picker structures 1 . The plurality of picker structures 1 are disposed adjacent to each other in one direction. Each of the plurality of picker structures 1 may adsorb or desorb the object.

1 and 2 , the picker structure 1 includes a shaft 11 extending in the vertical direction.

Also, referring to FIGS. 1 and 2 , the picker structure 1 includes a picker unit 12 provided under the shaft 11 to fix or release the semiconductor package. The picker unit 12 will be described later.

In addition, referring to FIG. 2 , the picker structure 1 includes a bush 13 surrounding at least a portion of the shaft 11 . The shaft 11 may be coupled to the bush 13 so that it is possible to elevate and descend with respect to the bush 13 , and cannot rotate with respect to the bush 13 . For example, this coupling may be made by a ball bearing or the like. Since this is obvious to those skilled in the art, a detailed description thereof will be omitted. Accordingly, the shaft 11 is possible to elevate with respect to the bush (11). Also, the shaft 11 may be rotated in association with the rotation of the bush 11 when the bush 11 is rotated.

In addition, referring to FIGS. 1 and 2 , the picker structure 1 includes a rotation block 14 surrounding at least a portion of the bush 13 . The bush 13 may be coupled with the rotation block 14 so that it is impossible to elevate with respect to the rotation block 14 and cannot rotate with respect to the rotation block 14 . Accordingly, when the rotation block 14 is rotated, the bush 13 may be rotated in association with the rotation of the rotation block 14 .

Also, referring to FIGS. 1 and 3 , the first picker device includes a rotation driving unit 2 that rotates the picker structure 1 . The rotation driving unit 2 includes a rotation driving motor 21 . In addition, the rotation driving unit 2 wraps around the rotation block 14 of the picker structure 1 and the rotation block 14 of the neighboring picker structure 1a (picker structure adjacent to the picker structure 1), and a motor for driving rotation It includes a belt (22) rotated by (21).

Accordingly, as the belt 22 is rotated by the rotation driving motor 21 , the rotation block 14 of the picker structure 1 and the rotation block 14 of the neighboring picker structure 1a can be rotated. . Accordingly, the picker structure 1 can be rotated in conjunction with the neighboring picker structure 1a by the belt 22 .

Accordingly, according to the first picker device, the two picker structures 1 can be rotated by one rotation driving unit 2 . Accordingly, when the present first picker device includes 2n picker structures 1 , n number of rotation driving units 2 may be included.

For reference, the friction force between the belt 22 and the rotation block 14 is large so that the rotation block 14 is easily rotated by the external force applied by the rotation of the belt 22 during rotation of the belt 22. Preferably, for this, a plurality of projections may be formed on the outer surface of the rotating block 14 . For example, the outer surface of the rotation block 14 may be serrated.

Also, referring to FIGS. 1 and 3 together, the first picker device includes an elevating driving unit 3 for elevating and lowering the picker structure 1 . The elevating driving unit 3 includes a elevating motor 31 . In addition, the elevating driving unit 3 includes an elevating driving unit 32 for elevating and lowering the picker unit 12 with power received from the elevating motor 31 . The picker part 12 and the shaft 11 coupled to the picker part 12 may be raised and lowered by the elevation by the elevation driving unit 32 .

For example, referring to FIG. 3 , the elevating driving unit 32 may include a cam part 321 that converts the power supplied from the elevating motor 31 into vertical linear motion. In addition, it may include an elevating member 322 for elevating and lowering on the cam portion 321 . In addition, the elevating member 322 may include a guide rail portion 323 for guiding the elevating. In addition, the elevating driving unit 3 may include a housing 33 that allows rotation of the picker unit 12 and is coupled to the picker unit 12 . Accordingly, the elevating member 322 is raised and lowered along the guide rail part 323 by the elevating motor 31 and the cam part 321 , and the housing 33 is raised and lowered, and the picker part 12 Elevation may occur. However, since the housing 33 permits rotation of the picker unit 12 , rotation may not be interlocked when the picker unit 12 rotates.

In addition, the cam part 321 of the picker structure 1 and the cam part 321 of the neighboring picker structure 1a are connected to one elevating motor 31 and can be raised and lowered by one elevating motor 31. have. Accordingly, when the present first picker device includes 2n picker structures 1 , n elevating motors 31 may be included. Accordingly, the picker structure 1 may be raised and lowered in association with the neighboring picker structure 1a. However, if not limited thereto, the picker structure 1 may be raised and lowered independently of the neighboring picker structures 1a by various types of elevating and lowering driving units 32 .

For reference, as used herein, the neighboring picker structure 1a may mean a picker structure 1 sharing a belt 22 for rotating the rotation block 14 of the picker structure 1 . That is, a pair of picker structures 1 in which rotation is interlocked by one belt 22 may serve as neighboring picker structures 1a adjacent to each other.

Also, referring to FIG. 2 , the picker unit 12 includes an adsorption unit 121 . The adsorption unit 121 is connected to the vacuum forming unit 5 to make the inside in a vacuum state to adsorb an object (which may be an object of various types such as a semiconductor package), or to make the vacuum release state to adsorb the object can be turned off Since such a picker unit 12 is obvious to a person skilled in the art, a detailed description thereof will be omitted.

In addition, referring to FIG. 2 , the picker unit 12 includes a moving passage 1222 extending vertically and a main body 122 in which an insertion portion 1221 that is opened upwardly on the upper side of the moving passage 1222 is formed. can do. The adsorption unit 121 may be upwardly inserted into the upper portion of the adsorption unit 121 to move up and down relative to the main body 122 .

Also, referring to FIG. 2 , the shaft 11 may be provided with a supply passage 111 extending in the vertical direction.

Also, referring to FIG. 2 , the shaft 11 may be coupled to and connected to the picker unit 12 . Specifically, the shaft 11 may be inserted and fastened to the insertion portion 1221 such that the supply passage 111 communicates with the movement passage 1222 . In addition, the picker unit 12 may include a coupler 124 for coupling the shaft 11 and the main body 122 . That is, the shaft 11 is inserted into the insertion portion 1221 and may be coupled to the body body 122 , and in addition, may be coupled to the body body 122 by the coupler 124 .

Also, referring to FIG. 4 , an O-ring 123 may be interposed between a portion inserted into the insertion portion 1221 of the shaft 11 and the insertion portion 1221 . Since the O-ring 123 is interposed, the binding force between the shaft 11 and the main body 122 may be increased compared to the case in which the O-ring 123 is not interposed. This may be because at least a portion of the gap between the outer surface of the shaft 11 and the inner surface of the insertion portion 1221 of the main body 122 is filled by the O-ring 123 . In addition, if the O-ring 123 is not interposed, the length of the picker structure 1 to which the shaft 11 and the picker unit 12 are connected is long, so that when the picker structure 1 rotates, the rotation amount of the shaft 11 and the relative As a result, there is a difference in the amount of rotation of the picker unit 12 positioned below, and interoperability may be reduced. On the other hand, according to the present application, since the O-ring 123 is positioned, the shaft 11 and the picker unit 12 can rotate while maintaining the concentricity of the shaft 11 and the picker unit 12 when the picker structure 1 rotates, thereby increasing rotational interlocking properties.

Also, the picker structure 1 may pick up an object, place it on another object, and attach (attach) it. In addition, the object attached to the second object may be picked up (detachted) by peeling it from another object. For example, the other object may be a film.

In addition, the first picker device may include a gas supply unit 6 communicating with the supply passage 111 and supplying gas to the moving passage 1222 through the supply passage 111 . The gas supply unit 6 may supply the gas to the moving passage 1222 so that the magnitude of the thrust when the picker unit 12 operates on the object is controlled.

Here, the action of the picker unit 12 on the object may mean an attach operation and a detach operation. When the picker unit 12 performs an attach operation to the object, the picker unit 12 (picker structure 1) may apply a force to the object, and when the picker unit 12 performs an attach operation to the object The picker unit 12 may apply a force or form a relationship with the object. The attach operation and the detach operation will be described later in detail.

The magnitude of the external force applied to the object by the picker unit 12 may be determined according to the thrust of the picker unit 12 . Accordingly, the gas supply unit 5 may supply the gas to the moving passage 1222 such that the magnitude of the thrust of the picker unit 12 is controlled to control the magnitude of the external force acting on the object or generated in relation to the object. In other words, the size of the thrust of the picker unit 12 is determined according to the gas pressure of the gas supplied to the movement passage 1222 by the gas supply unit 5, so that the magnitude of the external force acting on the object or generated in relation to the object is determined. can be controlled.

Specifically, when the adsorption unit 121 attaches or detaches to the object, the gas pressure generated by the gas supply unit 5 by the action of the gas supplied by the gas supply unit 5 and the amount of gas supplied accordingly Accordingly, the gas may be supplied to the moving passage 1222 so that the force that the adsorption unit 121 presses against the object is controlled. According to an embodiment of the present application, when the picker structure 1 performs an attach operation, the adsorption unit 121 moves downward relative to the main body 122 so that the object can be stably attached to another object. Thus, in a state in which the adsorption unit 121 presses the object, the gas supply unit 5 may supply the gas to the moving passage 1222 so that the force for the adsorption unit 121 to press the object is generated and adjusted. At this time, as the gas pressure supplied by the gas supply unit 5 increases and the amount of gas increases (as the gas pressure increases), the force (external force) that the adsorption unit 121 presses against the object increases, so that the adsorption unit 121 stably holds the object. can be pressed At this time, there may be a slight change in the amount of movement in the vertical direction of the adsorption unit 121 due to the deformation of the adsorption unit 1 according to the process and the degree of the adsorption unit 121 pressing the object.

Also, referring to FIG. 5A , the picker unit 12 may perform an attach operation of attaching an object adsorbed by the suction unit 121 to another object. For example, the picker unit 12 may pick up (adsorb) an object from a place where the object is loaded and attach it to another object. For reference, the object may be a chip such as a semiconductor chip. Also, the other object may be a film. More specifically, the other object may be a film coupled to the ring frame. Accordingly, the attach operation means that the main body 122 is lowered in a state in which the adsorption unit 121 is in contact with the upper surface of the object so that the object is attached to another object in a state in which the adsorption unit 121 adsorbs the object. It may mean applying a force to move to and press the object toward the other object.

Also, referring to FIG. 5B , the picker unit 12 may perform a detach operation of separating the object adsorbed by the adsorption unit 121 from another object. For example, the object may be in a state of being disposed on another object, for example, in a state in which it is attached to another object (adhesive state). The picker unit 12 may detach the object from the other object by performing a detach operation by adsorbing (picking up) the object in a state in which the adsorption unit 121 is attached to the other object. Accordingly, the detach operation includes at least one of a process in which the adsorption unit 121 adsorbs an object, a process in which the main body 122 moves upward so that the object is adsorbed and the object is separated from another object. could mean

In addition, when performing the attach operation of the picker unit 12, the gas supply unit 5 passes through the moving passage 1222 to the adsorption unit ( 121) can be supplied and the gas pressure can be adjusted. In other words, when performing the attach operation of the picker unit 12 , the gas supply unit 5 supplies the gas to the moving passage 1222 and adjusts the gas pressure so that the external force to the other object is applied to the object, thereby adjusting the gas pressure to the adsorption unit 121 . ) by controlling the force pressing the object, the object can be easily attached to another object according to the size of the object during the attach operation.

For example, during the attach operation of the picker unit 12 , the adsorption unit 121 of the picker moves downward in a state in which the object is adsorbed so that the object may come into contact with another object. By increasing the value, the force that the adsorption unit 121 presses against the object can be increased, so that the object can be stably attached to another object. That is, the pressing force is increased by the gas pressure action of the gas supply unit 5 or the relative upward movement of the adsorption unit 121 with respect to the main body 122 is restricted by the counteraction of the pressing force, so that the object is stably attached to another object. can stick

Also, the gas supply unit 5 may supply gas to the moving passage 1222 during the detach operation of the picker unit 12 . In this case, the adsorption unit 121 may move relatively downward with respect to the main body 122 to contact and adsorb the object during the detach operation. The picker unit 12 moves downward to adsorb the object during the detach operation to contact and adsorb the object, and vacuum suction to remove the object from another object to move upward. An upward external force can act by means of the unit 7 . With respect to this upward external force, the adsorption unit 121 may move relatively upward with respect to the main body 122 . At this time, the gas supply unit 5 controls the gas pressure so that the adsorption unit 121 of the picker absorbs the external force in the upward direction by the external force action unit 7 and enables a buffer action, so that the gas pressure below a preset size or Gas can be supplied with minimum gas pressure. Accordingly, during the detach operation, damage to the object by the external force acting unit 7 may be minimized.

In addition, the gas pressure supplied to the moving passage 1222 during the attach operation of the picker unit 12 of the gas supply unit 5 is the gas pressure supplied to the moving passage 1222 during the attach operation of the picker unit 12 . may be smaller than For example, referring to FIG. 5B , an external force acting unit 7 that applies an upward external force to the other object may be provided under the other object during the detach operation of the picker unit 12 and , when the picker unit 12 comes into contact with the object, the external force acting unit 7 may push up the portion of the other object provided with the object upward. Considering this driving of the external force acting unit 7 , that is, in response to another object or object being pushed upward by the external force acting unit 7 , the picker portion 12 of the gas supply unit 5 is The gas pressure (gas amount) supplied to the moving passage 1222 during the attach operation may be smaller than the gas pressure (gas amount) supplied to the moving passage 1222 during the attach operation of the picker unit 12 . When the external force action unit 7 separates the object from the other object while pushing up the other object and the object, the pad of the adsorption unit 121 is in contact with the upper surface of the object, and if, at this time, the gas supply unit 5 If the picker presses the object due to the increase in the gas supply amount according to the increase in the gas pressure of the gas supplied, the bottom surface of the object may be damaged by the tip of the external force acting unit 7 . Therefore, in order to prevent this, the gas supply unit 5 reduces the gas pressure during the detach operation compared to the attach operation, and sets the gas pressure to a preset size so that the adsorption unit 121 can hold the object with a minimum force. You can supply less or less.

In the picker unit 12 , the thrust of the picker may be changed according to the gas pressure of the moving passage 1222 . Accordingly, during the attach operation, the gas pressure in the movement passage 1222 is formed to be higher than the gas pressure in the movement passage 1222 during the detach operation, and an external force is applied to the object to apply an external force to the other object. can be stably attached. In this case, the gas pressure in the moving passage 1222 may be adjusted and set to have a suitable gas pressure according to the standard of the object.

In addition, during the detach operation, the external force action unit 7 pushes up. At this time, the adsorption unit 121 may be in contact with the upper surface of the object or may be in a state of being slightly floating in close proximity to the upper surface of the object. During the detach operation, gas is limitedly supplied to the movement passage 1222 , and according to the limited gas pressure in the movement passage 1222 , it may serve as a cushion for the upward operation of the external force action unit 7 . In other words, during the detach operation, in preparation for the external force in the upward direction of the external force action unit 7 and for the relief, the adsorption unit 121 contacts the object with less external force (with the minimum force) compared to the attach operation, and Therefore, the gas pressure of the gas in the moving passage 1222 during the detach operation of the picker unit 12 may be smaller than the gas pressure of the gas in the moving passage 1222 during the attach operation of the picker unit 12. Accordingly, the amount of gas supplied to the moving passage 1222 during the detach operation of the picker unit 12 of the supply unit 5 is the gas supplied to the moving passage 1222 during the attach operation of the picker unit 12 . may be smaller than the amount.

In addition, according to the above, the air pressure in the moving passage 1222 can be adjusted, which can be performed by a pneumatic regulator. The pneumatic regulator may adjust the air pressure in the moving passage 1222 by adjusting the gas pressure supplied into the moving passage 1222 by a program. The gas supply unit 5 may include a device capable of changing the pressure by a program with a pneumatic regulator as a device for regulating the air pressure. Since the electro-pneumatic regulator is obvious to those skilled in the art, a detailed description thereof will be omitted.

In addition, the upper portion of the adsorption unit 121 is formed under the upwardly extending portion 1211 and the upwardly extending portion 1211 so as to form a lower step protruding to the outside of the upwardly extending portion 1211, the upwardly extending portion ( 1211) may include a lower stepped forming portion 1212 having a larger cross-sectional area.

Also, the upwardly extending part 121 may have an upper surface parallel to the horizontal direction. In other words, the upper surface of the upwardly extending part 121 may be flat. Accordingly, the external force applied by the gas supplied to the moving passage 1222 may act on the upper surface and the lower step to push the adsorption unit 121 downward.

In addition, the moving passage 1222 may be formed with a protrusion protruding from the inner surface of the moving passage 1222 in the radial direction of the moving passage 1222 so that an upper stepped 1223 opposite to at least a portion of the lower stepped is formed. have.

Also, referring to FIG. 2 , the picker unit 12 may include an elastic member 125 . At least a portion of the elastic member 125 may surround the upwardly extending portion 1211 of the adsorption unit 121 and may be interposed (disposed) between the upper step 1223 and the lower step. The elastic member 125 may be a spring. In addition, a lower portion of the elastic member 5 may surround the upwardly extending part 121 , and may grip the upwardly extending part 121 .

Accordingly, the elastic member 125 may be elongated (length extended) and elastically deformed when the adsorption unit 121 moves downward relative to the main body 122 . In addition, after the relative downward movement of the adsorption unit 121 with respect to the main body 122, the adsorption unit 121 may be elastically restored so that at least a part of the position can be restored. Accordingly, the adsorption unit 121 is moved upward by the elastic restoration of the elastic member 125 after the relative downward movement with respect to the main body 122 (return) and the position can be restored.

In addition, the gas supply unit 6 may supply gas to the moving passage 1222 through the supply passage 111 of the shaft 11 , and the supply passage 111 may extend vertically. Accordingly, gas injection by the gas supply unit 6 may be performed from the upper side to the lower side of the shaft 11 . Preferably, the gas supply unit 6 may be located above the shaft 11 .

In addition, referring to FIGS. 1 and 2 , the upper portion of the shaft 11 has a passage communicating with the supply passage 111 and can be coupled with the connecting portion 16 connecting the shaft 11 and the gas supply unit 6 . have. Accordingly, the gas supply unit 6 may supply the gas to the supply passage 111 through the passage of the connection unit 16 .

Also, referring to FIGS. 1 and 2 , an elastic member 17 surrounding the shaft 11 may be disposed between the connection part 16 and the bush 13 . When the shaft 11 is lowered, the connecting portion 16 coupled to the shaft 11 may also be lowered, and accordingly, when the shaft 11 is lowered, the gap between the shaft 11 and the bush 13 is reduced and elastic. The member 17 may be compressed. Accordingly, when the shaft 11 is lifted, the elastic restoring force of the elastic member 17 may be applied upward, so that the shaft 11 can be quickly moved up and down.

As described above, according to the first picker device, the adsorption unit 11 may be raised and lowered by the elevating driving unit 3 and may be rotated by the rotation driving unit 2 . Also, the adsorption unit 11 may adsorb or desorb the target object. The picker structure 1 may pick up, transfer, or place an object by the suction unit 11 .

In addition, according to the above description, the picker structure 1 may be rotated in association with the neighboring picker structure 1a by the belt 22 . Accordingly, according to the first picker device, the two picker structures 1 can be rotated by one rotation driving unit 2 . Accordingly, when the present first picker device includes 2n picker structures 1 , n number of rotation driving units 2 may be included.

In addition, according to the above-mentioned bar, the picker structure 1 in which thrust is adjusted by adjusting the gas pressure supplied to the moving passage 1222 by the gas supply unit 6 may be implemented. Accordingly, an external force may be applied to the object according to each of the detach operation and the attach operation.

Hereinafter, a picker device (hereinafter referred to as 'this second picker device') according to a second embodiment of the present application will be described. However, the second picker device shares the same or corresponding technical features and configuration with the first picker device described above. Accordingly, descriptions that overlap with those described in the first picker device will be simplified or omitted, and the same reference numerals will be used for the same or similar components.

Referring to FIG. 1 , the second picker device includes a plurality of picker structures 1 . The plurality of picker structures 1 are disposed adjacent to each other in one direction.

1 and 2 , the picker structure 1 includes a shaft 11 extending in the vertical direction.

Also, referring to FIGS. 1 and 2 , the picker structure 1 includes a picker unit 12 provided under the shaft 11 to fix or release the semiconductor package.

Referring to FIG. 2 , the picker unit 12 includes an adsorption unit 121 . The adsorption unit 121 is connected to the vacuum forming unit 5 to make the inside in a vacuum state to adsorb an object (which may be an object of various types such as a semiconductor package), or to make the vacuum release state to adsorb the object can be turned off Since such a picker unit 12 is obvious to a person skilled in the art, a detailed description thereof will be omitted.

Also, referring to FIG. 2 , the picker unit 12 may include a main body 122 in which a moving passage 1222 extending vertically is formed. The adsorption unit 121 may be upwardly inserted into the upper portion of the adsorption unit 121 to move up and down relative to the main body 122 .

Also, referring to FIG. 2 , the shaft 11 may be provided with a supply passage 111 extending in the vertical direction.

In addition, referring to FIG. 2 , the shaft 11 is coupled to the body body 122 such that the supply passage 111 communicates with the movement passage 1222 .

For example, the main body 122 may be formed with an insertion portion 1221 that is opened upwardly on the upper side of the moving passage 1222 . In addition, the shaft 11 may be inserted and fastened to the lower portion of the insertion portion 1221 . In addition, the picker unit 12 may include a coupler 124 for coupling the shaft 11 and the main body 122 . That is, the shaft 11 is inserted into the insertion portion 1221 and may be coupled to the body body 122 , and in addition, may be coupled to the body body 122 by the coupler 124 .

Also, referring to FIG. 4 , an O-ring 123 may be interposed between a portion inserted into the insertion portion 1221 of the shaft 11 and the insertion portion 1221 . Since the O-ring 123 is interposed, the binding force between the shaft 11 and the main body 122 may be increased compared to the case in which the O-ring 123 is not interposed. This may be because at least a portion of the gap between the outer surface of the shaft 11 and the inner surface of the insertion portion 1221 of the main body 122 is filled by the O-ring 123 .

Also, the picker structure 1 may pick up an object, place it on another object, and attach (attach) it. In addition, the object attached to the second object may be picked up (detachted) by peeling it from another object. For example, the other object may be a film.

In addition, the second picker device may include a gas supply unit 6 communicating with the supply passage 111 and supplying gas to the moving passage 1222 through the supply passage 111 . The gas supply unit 6 may supply the gas to the moving passage 1222 so that the magnitude of the thrust when the picker unit 12 operates on the object is controlled.

In addition, referring to FIGS. 1 and 2 , the picker structure 1 includes a rotation block 14 surrounding at least a portion of the bush 13 . The bush 13 may be coupled with the rotation block 14 so that it is impossible to elevate with respect to the rotation block 14 and cannot rotate with respect to the rotation block 14 . Accordingly, when the rotation block 14 is rotated, the bush 13 may be rotated in association with the rotation of the rotation block 14 .

In addition, referring to FIGS. 1 and 3 , the second picker device includes a rotation driving unit 2 that rotates the picker structure 1 . The rotation driving unit 2 includes a rotation driving motor 21 . In addition, the rotation driving unit 2 wraps around the rotation block 14 of the picker structure 1 and the rotation block 14 of the neighboring picker structure 1a (picker structure adjacent to the picker structure 1), and a motor for driving rotation It includes a belt (22) rotated by (21).

Accordingly, as the belt 22 is rotated by the rotation driving motor 21 , the rotation block 14 of the picker structure 1 and the rotation block 14 of the neighboring picker structure 1a can be rotated. . Accordingly, the picker structure 1 can be rotated in conjunction with the neighboring picker structure 1a by the belt 22 .

Also, referring to FIGS. 1 and 3 together, the first picker device includes an elevating driving unit 3 for elevating and lowering the picker structure 1 . The elevating driving unit 3 includes a elevating motor 31 . In addition, the elevating driving unit 3 includes an elevating driving unit 32 for elevating and lowering the picker unit 12 with power received from the elevating motor 31 . The picker part 12 and the shaft 11 coupled to the picker part 12 may be raised and lowered by the elevation by the elevation driving unit 32 .

Accordingly, the picker structure 1 may be raised and lowered in association with the neighboring picker structure 1a. However, if not limited thereto, the picker structure 1 may be raised and lowered independently of the neighboring picker structures 1a by various types of elevating and lowering driving units 32 .

The foregoing description of the present application is for illustration, and those of ordinary skill in the art to which the present application pertains will understand that it can be easily modified into other specific forms without changing the technical spirit or essential features of the present application. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a dispersed form, and likewise components described as distributed may be implemented in a combined form.

The scope of the present application is indicated by the following claims rather than the above detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included in the scope of the present application.

1: Picker structure
11: Shaft
12: picker unit
121: adsorption unit
1211: upward extension
1212: lower step forming part
122: body body
1221: insertion part
1222: moving passage
1223: upper step
123: O-ring
124: coupler
125: elastic member
13: Bush
14: rotation block
16: connection
17: elastic member
2: Rotary drive
21: motor for rotation drive
22: belt
3: Elevating drive unit
31: motor for elevating and lowering driving
32: elevating drive unit
321: cambu
322: elevating member
323: guide rail unit
33: housing
5: vacuum forming part
6: gas supply

Claims (5)

A picker device comprising:
A plurality of picker structures disposed adjacent to each other in one direction,
The picker structure is
a shaft extending in the vertical direction; and
and a picker unit provided under the shaft to fix or release the semiconductor package,
The picker part
adsorption unit; and
It includes a main body in which a moving passage extending vertically is formed,
The shaft is formed with a supply passage extending in the vertical direction,
The adsorption portion is inserted upwardly into the moving passage so as to be movable up and down relative to the main body,
The picker device further includes a gas supply unit communicating with the supply passage and supplying gas to the moving passage through the supply passage,
The picker unit performs an attach operation of attaching the first object adsorbed by the adsorption unit to a second object or a detach operation of separating the first object adsorbed by the adsorption unit from a second object,
The gas supply unit may supply gas to the moving passage so that a force pressing the first object is controlled by controlling a magnitude of a thrust of the picker structure during the attach operation and the detach operation of the picker unit. Device. According to claim 1,
The main body is formed with an insertion portion that opens upwardly on the upper side of the moving passage,
The shaft is inserted and fastened to the insertion unit, the picker device. 3. The method of claim 2,
An O-ring is interposed between a portion inserted into the insertion portion of the shaft and the insertion portion,
The O-ring will increase the binding force between the shaft and the main body compared to the case where it is not interposed, the picker device. 4. The method of claim 3,
The picker unit,
The picker device, further comprising a coupler for fastening the shaft and the main body. According to claim 1,
a rotation driving unit rotating the picker structure; and
Further comprising an elevating driving unit for elevating and lowering the picker structure,
The picker structure is
Further comprising a rotation block surrounding a part of the shaft,
The shaft is coupled with the rotation block so that it is possible to elevate and lower with respect to the rotation block and the rotation is impossible,
The rotary drive unit,
a motor for driving rotation; and
and a belt that surrounds the rotation block of the picker structure and the rotation block of a neighboring picker structure adjacent to the picker structure and is rotated by the rotation driving motor,
The elevating driving unit,
elevating motor; and
and an elevating driving unit for elevating and lowering the picker unit of the picker structure with power received from the elevating motor.

Images