KR102488587B1 - 광학 측정 장치 및 광학 측정 방법 - Google Patents

광학 측정 장치 및 광학 측정 방법 Download PDF

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KR102488587B1
KR102488587B1 KR1020180071280A KR20180071280A KR102488587B1 KR 102488587 B1 KR102488587 B1 KR 102488587B1 KR 1020180071280 A KR1020180071280 A KR 1020180071280A KR 20180071280 A KR20180071280 A KR 20180071280A KR 102488587 B1 KR102488587 B1 KR 102488587B1
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measurement
sample
base
optical
target position
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KR20190005112A (ko
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유스케 이즈타니
이쿠오 와카야마
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오츠카 일렉트로닉스 가부시키가이샤
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/51—Scattering, i.e. diffuse reflection within a body or fluid inside a container, e.g. in an ampoule
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/02—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a plurality of sample containers moved by a conveyor system past one or more treatment or analysis stations
    • G01N35/025—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a plurality of sample containers moved by a conveyor system past one or more treatment or analysis stations having a carousel or turntable for reaction cells or cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/03—Electro-optical investigation of a plurality of particles, the analyser being characterised by the optical arrangement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1493—Particle size
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/015—Apparatus with interchangeable optical heads or interchangeable block of optics and detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/024—Modular construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/024—Modular construction
    • G01N2201/0245—Modular construction with insertable-removable part

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  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR1020180071280A 2017-07-05 2018-06-21 광학 측정 장치 및 광학 측정 방법 Active KR102488587B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2017-132206 2017-07-05
JP2017132206A JP6961406B2 (ja) 2017-07-05 2017-07-05 光学測定装置および光学測定方法

Publications (2)

Publication Number Publication Date
KR20190005112A KR20190005112A (ko) 2019-01-15
KR102488587B1 true KR102488587B1 (ko) 2023-01-13

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KR1020180071280A Active KR102488587B1 (ko) 2017-07-05 2018-06-21 광학 측정 장치 및 광학 측정 방법

Country Status (6)

Country Link
US (1) US10788412B2 (enExample)
EP (1) EP3425370B1 (enExample)
JP (1) JP6961406B2 (enExample)
KR (1) KR102488587B1 (enExample)
CN (1) CN109211741B (enExample)
TW (1) TWI798232B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116096852A (zh) * 2020-07-31 2023-05-09 京瓷株式会社 试样观察装置
JP2025184455A (ja) * 2024-06-07 2025-12-18 大塚電子株式会社 光学測定システムおよびプログラム
CN119198626A (zh) * 2024-09-12 2024-12-27 无锡迅杰光远科技有限公司 光谱采集系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020176801A1 (en) 1999-03-23 2002-11-28 Giebeler Robert H. Fluid delivery and analysis systems
US20160077015A1 (en) 2011-09-25 2016-03-17 Theranos, Inc. Systems and methods for multi-analysis

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
CH542716A (de) 1972-01-29 1973-10-15 Krauss Maffei Ag Vorrichtung zum Pressen von länglichen Gegenständen, insbesondere von Skiern
JPH0233158Y2 (enExample) * 1985-01-30 1990-09-06
US4657390A (en) * 1985-02-21 1987-04-14 Laser Precision Corporation Universal spectrometer system having modular sampling chamber
JPH0678978B2 (ja) 1990-05-25 1994-10-05 スズキ株式会社 凝集パターン検出装置
JP3533502B2 (ja) 1994-10-14 2004-05-31 株式会社日立製作所 自動化学分析装置
JP3744650B2 (ja) * 1997-05-28 2006-02-15 石川島播磨重工業株式会社 カラーフィルタ検査装置の基板保持機構
EP1035408A1 (en) * 1997-11-19 2000-09-13 Otsuka Electronics Co., Ltd. Apparatus for measuring characteristics of optical angle
US6232608B1 (en) * 1998-08-18 2001-05-15 Molecular Devices Corporation Optimization systems in a scanning fluorometer
JP3689278B2 (ja) 1999-05-19 2005-08-31 株式会社堀場製作所 粒子径分布測定装置および粒子径分布測定方法
JP2004206760A (ja) * 2002-12-24 2004-07-22 Sankyo Seiki Mfg Co Ltd 光ヘッド装置
US8119066B2 (en) * 2006-02-08 2012-02-21 Molecular Devices, Llc Multimode reader
JP2007315976A (ja) * 2006-05-26 2007-12-06 Japan Aerospace Exploration Agency 微小液滴・気泡・粒子の位置・粒径・速度測定の方法と装置
JP5182913B2 (ja) * 2006-09-13 2013-04-17 大日本スクリーン製造株式会社 パターン描画装置およびパターン描画方法
US20080151204A1 (en) * 2006-12-21 2008-06-26 Asml Netherlands B.V. Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
JP2009293987A (ja) 2008-06-03 2009-12-17 Arkray Inc 分析装置
DE102008064665B4 (de) * 2008-09-15 2016-06-09 Fritsch Gmbh Partikelgrößenmessgerät
CN102159934A (zh) * 2008-09-26 2011-08-17 株式会社堀场制作所 颗粒物性测量装置
JP5947709B2 (ja) * 2012-12-27 2016-07-06 株式会社堀場製作所 分光分析方法及び分光分析装置
JP2016038360A (ja) * 2014-08-11 2016-03-22 シャープ株式会社 微小粒子検出装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020176801A1 (en) 1999-03-23 2002-11-28 Giebeler Robert H. Fluid delivery and analysis systems
US20160077015A1 (en) 2011-09-25 2016-03-17 Theranos, Inc. Systems and methods for multi-analysis

Also Published As

Publication number Publication date
TWI798232B (zh) 2023-04-11
US20190011351A1 (en) 2019-01-10
CN109211741A (zh) 2019-01-15
KR20190005112A (ko) 2019-01-15
EP3425370A1 (en) 2019-01-09
JP6961406B2 (ja) 2021-11-05
TW201907147A (zh) 2019-02-16
US10788412B2 (en) 2020-09-29
EP3425370B1 (en) 2022-10-05
JP2019015576A (ja) 2019-01-31
CN109211741B (zh) 2022-06-17

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